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Rapid Thermal And Integrated Processing Iv Volume 470
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Book Synopsis Rapid Thermal and Integrated Processing IV: Volume 470 by : Jeffrey C. Gelpey
Download or read book Rapid Thermal and Integrated Processing IV: Volume 470 written by Jeffrey C. Gelpey and published by Materials Research Society. This book was released on 1998-01-09 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS proceedings series on rapid thermal processing (RTP) has become the predominant international forum for research in this exciting and fast-growing field. In particular, this book in the series clearly indicates that the science of RTP is increasingly better understood and that equipment simulation and engineering have matured. With the so-called 'second generation' equipment vendors are providing useful and production-worthy solutions to the most pertinent problems within RTP - temperature measurement and reproducability. For that reason, the issues of temperature calibration and metrology, along with the International Temperature Scale, are featured. The evaluation and modelling of furnace, mini-bath and single-wafer RTP furnaces as the thermal method of choice are also addressed. Interesting developments are reported in the processing of dielectrics. Applications outside the field of silicon semiconductors are also presented. Topics include: measurement; RTCVD; modelling and manufacturing; integrated processing; silicides; annealing and defects; dielectrics; and RTP of III-V materials and other novel applications.
Book Synopsis Rapid Thermal and Integrated Processing by :
Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1998 with total page 914 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Advances in Rapid Thermal Processing by : Fred Roozeboom
Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Rapid Thermal and Integrated Processing VII by : Materials Research Society
Download or read book Rapid Thermal and Integrated Processing VII written by Materials Research Society and published by . This book was released on 1998 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Rapid Thermal and Integrated Processing V: Volume 429 by : J. C. Gelpey
Download or read book Rapid Thermal and Integrated Processing V: Volume 429 written by J. C. Gelpey and published by . This book was released on 1996-10-14 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.
Book Synopsis Rapid Thermal and Integrated Processing IV: Volume 387 by : Steven R. J. Brueck
Download or read book Rapid Thermal and Integrated Processing IV: Volume 387 written by Steven R. J. Brueck and published by Materials Research Society. This book was released on 1995-10-27 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fourth in a continuing series on rapid thermal processing (RTP), this volume addresses work in traditional RTP processes such as dielectric growth, annealing and silicides, as well as developments in integrated processes. The primary focus, however, is the manufacturing aspects of RTP and the successful integration of RTP into production semiconductor fabs. Emphasis is placed on process and equipment modelling and the critical aspects of RTP, such as temperature measurement, uniformity and control. Topics include: modelling, sensors and control; integrated processing and manufacturing; dielectrics; epitaxy, polysilicon and devices; and junctions, metallization and contacts.
Book Synopsis Rapid Thermal and Other Short-time Processing Technologies by : Fred Roozeboom
Download or read book Rapid Thermal and Other Short-time Processing Technologies written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2000 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.
Book Synopsis Specimen Preparation for Transmission Electron Microscopy of Materials IV by : Ron M. Anderson
Download or read book Specimen Preparation for Transmission Electron Microscopy of Materials IV written by Ron M. Anderson and published by . This book was released on 1997 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt: Successful transmission electron microscopy (TEM) experimentation depends on many things, one being specimen preparation. Whereas TEM samples of bulk metallic or ceramic materials can be prepared in a straightforward manner, the need to examine nonbulk and/or other classes of materials creates a need for more specialized preparation methods. This book from MRS, the fourth in a successful series, pioneers novel methods or ways of characterizing the specimen preparation process. Contributions to the book are tutorial in nature, and therefore somewhat longer than usual. Papers cover both general and materials-specific specimen preparation methods. Metallic, polymer, plastic, semiconducting, ceramic and magnetic materials as found in bulk, thin-film, dispersed and powdered forms are discussed.
Author :Electrochemical Society. Energy Technology Division Publisher :The Electrochemical Society ISBN 13 :9781566772334 Total Pages :318 pages Book Rating :4.7/5 (723 download)
Book Synopsis Photovoltaics for the 21st Century by : Electrochemical Society. Energy Technology Division
Download or read book Photovoltaics for the 21st Century written by Electrochemical Society. Energy Technology Division and published by The Electrochemical Society. This book was released on 1999 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Rapid Thermal and Integrated Processing II: Volume 303 by : Jeffrey C. Gelpey
Download or read book Rapid Thermal and Integrated Processing II: Volume 303 written by Jeffrey C. Gelpey and published by Mrs Proceedings. This book was released on 1993-07-28 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Electrical, Optical and Magnetic Properties of Organic Solid-State Materials IV: Volume 488 by : John R. Reynolds
Download or read book Electrical, Optical and Magnetic Properties of Organic Solid-State Materials IV: Volume 488 written by John R. Reynolds and published by . This book was released on 1998-05-06 with total page 992 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book shows that research involving electrical, optical and magnetic properties of organic solid-state materials continues to grow both in scope and technological importance. Early studies of charge transport in conducting polymers have evolved from the elucidation of fundamental structure/function relationships to applications such as batteries, simple electrical devices such as diodes, chemical sensors, antistatic coatings, microwave and millimeter wave-absorbing materials, and photochromic devices. A particularly exciting evolution has been the discovery and development of organic light-emitting diodes (OLEDs) which appear to be nearing commercialization in an amazingly short period of time. This application is of particular interest because both electrical and optical properties must be considered.. Topics include: organic light-emitting materials and devices; photonic materials and devices; conducting and electroactive polymers and materials; molecular and supramolecular engineering; organic metals and magnetic materials and poster presentations.
Book Synopsis Science and Technology of Magnetic Oxides: Volume 494 by : Michael F. Hundley
Download or read book Science and Technology of Magnetic Oxides: Volume 494 written by Michael F. Hundley and published by . This book was released on 1998-03-26 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Rapid Thermal and Integrated Processing by :
Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1992 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Power Semiconductor Materials and Devices: Volume 483 by : S. J. Pearton
Download or read book Power Semiconductor Materials and Devices: Volume 483 written by S. J. Pearton and published by Mrs Proceedings. This book was released on 1997 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Chemical Aspects of Electronic Ceramics Processing: Volume 495 by : Prashant N. Kumta
Download or read book Chemical Aspects of Electronic Ceramics Processing: Volume 495 written by Prashant N. Kumta and published by Mrs Proceedings. This book was released on 1998-08-03 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing 65 papers from the symposium titled Chemical Aspects of Electronic Ceramics Processing held in November- December 1997 in Boston, the contents of this volume are divided into five sections: chemical vapor deposition of oxide ceramics; chemical vapor deposition of nonoxide ceramics; solution routes to ceramic materials; characterization and application of ceramic materials; and process characterization as a form of novel processing of ceramic materials. Annotation copyrighted by Book News, Inc., Portland, OR
Book Synopsis Semiconductor Process and Device Performance Modelling: Volume 490 by : Scott T. Dunham
Download or read book Semiconductor Process and Device Performance Modelling: Volume 490 written by Scott T. Dunham and published by . This book was released on 1998-10-02 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: Highlights recent advances in technology computer-aided design (TCAD) and identifies critical areas for future emphasis. The 39 contributions from the December 1997 symposium cover four main topics--bulk process modeling, equipment modeling, topography modeling, and characterization and device modeling. Paper topics include arsenic deactivation in silicon; defect reactions induced by reactive ion etching; optimization of AMT barrel reactors for silicon epitaxy; grain structure evolution and the reliability of Al(Cu) thin film interconnects; and improved quantitative mobility spectrum analysis. Annotation copyrighted by Book News, Inc., Portland, OR
Book Synopsis Rapid Thermal and Integrated Processing III: Volume 342 by : Jimmie J. Wortman
Download or read book Rapid Thermal and Integrated Processing III: Volume 342 written by Jimmie J. Wortman and published by . This book was released on 1994-08-02 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
