Author : James K. Olthoff
Publisher : DIANE Publishing
ISBN 13 : 078812708X
Total Pages : 181 pages
Book Rating : 4.7/5 (881 download)
Book Synopsis Gaseous Electronics Conference Radio-Frequency Reference Cell by : James K. Olthoff
Download or read book Gaseous Electronics Conference Radio-Frequency Reference Cell written by James K. Olthoff and published by DIANE Publishing. This book was released on 1996 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt: The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, and theoretical modeling. This report contains 12 articles that review nearly all of the experiments and theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a "users' guide" to the operation and performance of the GEC cell.