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Processing And Electrical Characterization Of Barium Strontium Titanate Thin Films For Ulsi Dram Application
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Book Synopsis Processing and electrical characterization of barium strontium titanate thin films for ULSI DRAM application by : Shylaja Katakam
Download or read book Processing and electrical characterization of barium strontium titanate thin films for ULSI DRAM application written by Shylaja Katakam and published by . This book was released on 1998 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Processing optimization and electrical characterization of niobium-doped strontium titanate thin films for ULSI DRAM application by : Chun-hui Wong
Download or read book Processing optimization and electrical characterization of niobium-doped strontium titanate thin films for ULSI DRAM application written by Chun-hui Wong and published by . This book was released on 1999 with total page 134 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microstructure and Electrical Property Characterization of Barium Strontium Titanate Thin Films Prepared by a Sol-gel Technique for Dram Capacitor Applications by : Danielle Marie Tahan
Download or read book Microstructure and Electrical Property Characterization of Barium Strontium Titanate Thin Films Prepared by a Sol-gel Technique for Dram Capacitor Applications written by Danielle Marie Tahan and published by . This book was released on 1997 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Process optimization and electrical characterization of lanthanum doped strontium titanate thin films for high density DRAM applications by : Swarnal Borthakur
Download or read book Process optimization and electrical characterization of lanthanum doped strontium titanate thin films for high density DRAM applications written by Swarnal Borthakur and published by . This book was released on 2001 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Growth and Characterization of Barium Strontium Titanate Thin Films with Enhanced Electrical Properties Using Pulsed Laser Deposition by : Anuranjan Srivastava
Download or read book Growth and Characterization of Barium Strontium Titanate Thin Films with Enhanced Electrical Properties Using Pulsed Laser Deposition written by Anuranjan Srivastava and published by . This book was released on 1999 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Synthesis, Characterization and Applications of Barium Strontium Titanate Thin Film Structures by : Supriya Ashok Ketkar
Download or read book Synthesis, Characterization and Applications of Barium Strontium Titanate Thin Film Structures written by Supriya Ashok Ketkar and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Barium Strontium Titanate (BST) based ferroelectric thin film devices have been popular over the last decade due to their versatile applications in tunable microwave devices such as delay lines, resonators, phase shifters, and varactors. BST thin films are promising candidates due to their high dielectric constant, tunability and low dielectric loss. Dielectric-tunable properties of BST films deposited by different deposition techniques have been reported which study the effects of factors, such as oxygen vacancies, film thickness, grain size, Ba/Sr ratio, etc. Researchers have also studied doping concentrations, high temperature annealing and multilayer structures to attain higher tunability and lower loss. The aim of this investigation was to study material properties of Barium Strontium Titanate from a comprehensive point of view to establish relations between various growth techniques and the film physical and electrical properties. The primary goal of this investigation was to synthesize and characterize RF magnetron sputtered Barium Strontium Titanate (Ba1-xSrxTiO3), thin film structures and compare their properties with BST thin films deposited by sol-gel method with the aim of determining relationships between the oxide deposition parameters, the film structure, and the electric field dependence. In order to achieve higher thickness and ease of fabrication, and faster turn around time, a [grave]stacked' deposition process was adopted, wherein a thin film (around 200nm) of BST was first deposited by RF magnetron sputtering process followed by a sol-gel deposition process to achieve higher thickness. The investigation intends to bridge the knowledge gap associated with the dependence of thickness variation with respect to the tunability of the films. The film structures obtained using the three different deposition methods were also compared with respect to their analytical and electrical properties.
Book Synopsis Microstructural and Electrical Characterization of Barium Strontium Titanate-Based Solid Solution Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition by : Costas G. Fountzoulas
Download or read book Microstructural and Electrical Characterization of Barium Strontium Titanate-Based Solid Solution Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition written by Costas G. Fountzoulas and published by . This book was released on 2003 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectrics are multicomponent materials with a wealth of interesting and useful properties, such as piezoelectricity. The dielectric constant of the BSTO ferroelectrics can be changed by applying an electric field. Variable dielectric constant results in a change in phase velocity in the device allowing it to be tuned in real time for a particular application. The microstructure of the film influences the electronic properties which in turn influences the performance of the film. Ba(0.6)Sr(0.4)Ti(1-y)(A(3+), B(5+))(y)O3 thin films, of nominal thickness of 0.65 micrometer, were synthesized initially at substrate temperatures of 400 deg C, and subsequently annealed to 750 deg C, on LaAlO3 (100) substrates, previously coated with LaSrCoO conductive buffer layer, using the pulsed laser deposition technique. The microstructural and physical characteristics of the post-annealed thin films have been studied using x-ray diffraction, scanning electron microscopy, and nano indentation and are reported. Results of capacitance measurements are used to obtain dielectric constant and tunability in the paraelectric (T>Tc) regime.
Book Synopsis Processing Science of Barium Titanate by :
Download or read book Processing Science of Barium Titanate written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Barium titanate and barium strontium titanate thin films were deposited on base metal foils via chemical solution deposition and radio frequency magnetron sputtering. The films were processed at elevated temperatures for densification and crystallization. Two unifying research goals underpin all experiments: 1) To improve our fundamental understanding of complex oxide processing science, and 2) to translate those improvements into materials with superior structural and electrical properties. The relationships linking dielectric response, grain size, and thermal budget for sputtered barium strontium titanate were illustrated. (Ba0.6Sr0.4)TiO3 films were sputtered on nickel foils at temperatures ranging between 100-400 Ã'°C. After the top electrode deposition, the films were co-fired at 900 Ã'°C for densification and crystallization. The dielectric properties were observed to improve with increasing sputter temperature reaching a permittivity of 1800, a tunability of 10:1, and a loss tangent of less than 0.015 for the sample sputtered at 400 Ã'°C. The data can be understood using a brick wall model incorporating a high permittivity grain interior with low permittivity grain boundary. However, this high permittivity value was achieved at a grain size of 80 nm, which is typically associated with strong suppression of the dielectric response. These results clearly show that conventional models that parameterize permittivity with crystal diameter or film thickness alone are insufficiently sophisticated. Better models are needed that incorporate the influence of microstructure and crystal structure. This thesis next explores the ability to tune microstructure and properties of chemically solution deposited BaTiO3 thin films by modulation of heat treatment thermal profiles and firing atmosphere composition. Barium titanate films were deposited on copper foils using hybrid-chelate chemistries. An in-situ gas analysis process was developed to probe the organic removal and.
Book Synopsis Handbook of Thin Films, Five-Volume Set by : Hari Singh Nalwa
Download or read book Handbook of Thin Films, Five-Volume Set written by Hari Singh Nalwa and published by Elsevier. This book was released on 2001-11-17 with total page 3451 pages. Available in PDF, EPUB and Kindle. Book excerpt: This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.
Book Synopsis Microstructure and Nonstoichiometry of Barium Strontium Titanate Thin Films for Dram Applications by :
Download or read book Microstructure and Nonstoichiometry of Barium Strontium Titanate Thin Films for Dram Applications written by and published by . This book was released on 1999 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this paper we investigate the microstructural accommodation of nonstoichiometry in (Ba(subscript x)Sr{sub 1-x}Ti{sub 1+y}O{sub 3+z}) thin films grown by chemical vapor deposition. Films with three different (Ba+Sr)/Ti ratios of 49/51 (y=0.04 in the notation of the formula above), of 48/52 (y=0.08) and of 46.5/53.5 (y=O.15), were studied. High-resolution electron microscopy is used to study the microstructure of the BST films. High-spatial resolution electron energy-loss spectroscopy (EELS) is used to reveal changes in chemistry and local atomic environment both at grain boundaries and within grains as a function of titanium excess. We find an amorphous phase at the grain boundaries and grain boundary segregation of excess titanium in the samples with y=0.15. In addition, EELS is also used to show that excess titanium is being partially accommodated in the grain interior. Implications for the film electrical and dielectric properties are outlined.
Book Synopsis Electrical Characterization of Doped Strontium Titanate Thin Films for Semiconductor Memories by : Jeong Hee Han
Download or read book Electrical Characterization of Doped Strontium Titanate Thin Films for Semiconductor Memories written by Jeong Hee Han and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Growth and Characterization of Barium Strontium Titanate (BST) Thin Films by : Gregory Shuster
Download or read book Growth and Characterization of Barium Strontium Titanate (BST) Thin Films written by Gregory Shuster and published by . This book was released on 2008 with total page 55 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electrical and Optical Properties of Barium Strontium Titanate Thin Films Prepared by Metalorganic Chemical Vapor Deposition by : Stephen R. Gilbert
Download or read book Electrical and Optical Properties of Barium Strontium Titanate Thin Films Prepared by Metalorganic Chemical Vapor Deposition written by Stephen R. Gilbert and published by . This book was released on 1996 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Investigation of Resistive Switching in Barium Strontium Titanate Thin Films for Memory Applications by : Wan Shen
Download or read book Investigation of Resistive Switching in Barium Strontium Titanate Thin Films for Memory Applications written by Wan Shen and published by Forschungszentrum Jülich. This book was released on 2010 with total page 129 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electrical Characteristics of Barium Strontium Titanate-oxide Composite Films by :
Download or read book Electrical Characteristics of Barium Strontium Titanate-oxide Composite Films written by and published by . This book was released on 1994 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Growth and Characterization of Barium Strontium Titanate Thin Films by Metal Organic Decomposition by : Pradeep Jana
Download or read book Growth and Characterization of Barium Strontium Titanate Thin Films by Metal Organic Decomposition written by Pradeep Jana and published by . This book was released on 1998 with total page 188 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Handbook of Thin Film Materials: Ferroelectric and dielectric thin films by : Hari Singh Nalwa
Download or read book Handbook of Thin Film Materials: Ferroelectric and dielectric thin films written by Hari Singh Nalwa and published by . This book was released on 2002 with total page 678 pages. Available in PDF, EPUB and Kindle. Book excerpt:
