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Potential Applications Of A New Microwave Ecr Electron Cyclotron Resonance Multicusp Plasma Ion Source
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Book Synopsis Potential Applications of a New Microwave ECR (electron Cyclotron Resonance) Multicusp Plasma Ion Source by :
Download or read book Potential Applications of a New Microwave ECR (electron Cyclotron Resonance) Multicusp Plasma Ion Source written by and published by . This book was released on 1990 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new microwave electron cyclotron resonance (ECR) multicusp plasma ion source using two ECR plasma production regions and multicusp plasma confinement has been developed at Oak Ridge National Laboratory. This source has been operated to produce uniform and dense plasmas over large areas of 300 to 400 cm2. The plasma source has been operated with continuous argon gas feed and pulsed microwave power. The discharge initiation phenomena and plasma properties have been investigated and studied as functions of discharge parameters. Together with the discharge characteristics observed, a hypothetical discharge mechanism for this plasma source is reported and discussed. Potential applications, including plasma and ion-beam processing for manufacturing advanced microelectronics and for space electric propulsion, are discussed. 7 refs., 6 figs.
Book Synopsis Characteristics and Potential Applications of an ORNL Microwave ECR Multicusp Plasma Ion Source by :
Download or read book Characteristics and Potential Applications of an ORNL Microwave ECR Multicusp Plasma Ion Source written by and published by . This book was released on 1990 with total page 22 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new microwave electron cyclotron resonance (ECR) multicusp plasma ion source that has two ECR plasma production regions and uses multicusp plasma confinement has been developed at Oak Ridge National Laboratory. This source has been operated to produce uniform and dense plasma over large areas of 300 to 400 cm2 and could be scaled up to produce uniform plasma over 700 cm2 or larger. The plasma source has been operated with continuous argon gas feed and pulsed microwave power. The working gases used were argon, helium, hydrogen, and oxygen. The discharge initiation phenomena and plasma properties have been investigated and studied as functions of the discharge parameters. The discharge characteristics and a hypothetical discharge mechanism for this plasma source are described and discussed. Potential applications, including plasma and ion-beam sources for manufacturing advanced microelectronics, for space electric propulsion, and for fusion research, are discussed. 10 refs., 10 figs.
Book Synopsis Electron Cyclotron Resonance Ion Sources and ECR Plasmas by : R Geller
Download or read book Electron Cyclotron Resonance Ion Sources and ECR Plasmas written by R Geller and published by Routledge. This book was released on 2018-12-13 with total page 449 pages. Available in PDF, EPUB and Kindle. Book excerpt: Acknowledged as the "founding father" of and world renowned expert on electron cyclotron resonance sources Richard Geller has produced a unique book devoted to the physics and technicalities of electron cyclotron resonance sources. Electron Cyclotron Resonance Ion Sources and ECR Plasmas provides a primer on electron cyclotron phenomena in ion sour
Book Synopsis Proceedings of the 10th International Workshop on ECR Ion Sources by :
Download or read book Proceedings of the 10th International Workshop on ECR Ion Sources written by and published by . This book was released on 1991 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report contains papers on the following topics: Recent Developments and Future Projects on ECR Ion Sources; Operation of the New KVI ECR Ion Source at 10 GHz; Operational Experience and Status of the INS SF-ECR Ion Source; Results of the New ECR4'' 14.5 GHz ECRIS; Preliminary Performance of the AECR; Experimental Study of the Parallel and Perpendicular Particle Losses from an ECRIS Plasma; Plasma Instability in Electron Cyclotron Resonance Heated Ion Sources; The Hyperbolic Energy Analyzer; Status of ECR Source Development; The New 10 GHz CAPRICE Source; First Operation of the Texas A M ECR Ion Source; Recent Developments of the RIKEN ECR Ion Sources; The 14 GHz CAPRICE Source; Characteristics and Potential Applications of an ORNL Microwave ECR Multicusp Plasma Ion Source; ECRIPAC: The Production and Acceleration of Multiply Charged Ions Using an ECR Plasma; ECR Source for the HHIRF Tandem Accelerator; Feasibility Studies for an ECR-Generated Plasma Stripper; Production of Ion Beams by using the ECR Plasmas Cathode; A Single Stage ECR Source for Efficient Production of Radioactive Ion Beams; The Single Staged ECR Source at the TRIUMF Isotope Separator TISOL; The Continuous Wave, Optically Pumped H− Source; The H ECR Source for the LAMPF Optically Pumped Polarized Ion Source; Present Status of the Warsaw CUSP ECR Ion Source; An ECR Source for Negative Ion Production; GYRAC-D: A Device for a 200 keV ECR Plasma Production and Accumulation; Status Report of the 14.4 GHZ ECR in Legnaro; Status of JYFL-ECRIS; Report on the Uppsala ECRIS Facility and Its Planned Use for Atomic Physics; A 10 GHz ECR Ion Source for Ion-Electron and Ion-Atom Collision Studies; and Status of the ORNL ECR Source Facility for Multicharged Ion Collision Research.
Book Synopsis Potential Applications of an Electron Cyclotron Resonance Multicusp Plasma Source by :
Download or read book Potential Applications of an Electron Cyclotron Resonance Multicusp Plasma Source written by and published by . This book was released on 1990 with total page 15 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Compact Plasma and Focused Ion Beams by : Sudeep Bhattacharjee
Download or read book Compact Plasma and Focused Ion Beams written by Sudeep Bhattacharjee and published by Taylor & Francis. This book was released on 2013-12-12 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent research has brought the application of microwaves from the classical fields of heating, communication, and generation of plasma discharges into the generation of compact plasmas that can be used for applications such as FIB and small plasma thrusters. However, these new applications bring with them a new set of challenges. With coverage ranging from the basics to new and emerging applications, Compact Plasma and Focused Ion Beams discusses how compact high-density microwave plasmas with dimensions smaller than the geometrical cutoff dimension can be generated and utilized for providing focused ion beams of various elements. Starting with the fundamentals of the cutoff problem for wave propagation in waveguides and plasma diagnostics, the author goes on to explain in detail the plasma production by microwaves in a compact geometry and narrow tubes. He then thoroughly discusses wave interaction with bounded plasmas and provides a deeper understanding of the physics. The book concludes with an up-to-date account of recent research on pulsed microwaves and the application of compact microwave plasmas for multi-element FIB. It provides a consolidated and unified description of the emerging areas in plasma science and technology utilizing wave-based plasma sources based on the author’s own work and experience. The book will be useful not only to established researchers in this area but will also serve as an excellent introduction to those interested in applying these ideas to various current and new applications.
Book Synopsis Properties of Electron Cyclotron Resonance Plasma Sources by : Aseem Kumar Srivastava
Download or read book Properties of Electron Cyclotron Resonance Plasma Sources written by Aseem Kumar Srivastava and published by . This book was released on 1995 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Perturbative Measurements of Electron Cyclotron Resonance Ion Source Plasmas by : Derek Elwin Neben
Download or read book Perturbative Measurements of Electron Cyclotron Resonance Ion Source Plasmas written by Derek Elwin Neben and published by . This book was released on 2019 with total page 227 pages. Available in PDF, EPUB and Kindle. Book excerpt: Heavy ion accelerators are a valuable resource for the nuclear science community to study atomic physics. One such heavy ion accelerator is the Coupled Cyclotron Facility (CCF) at the National Superconducting Cyclotron Laboratory (NSCL) which relies on Electron Cyclotron Resonance (ECR) ion sources to provide the primary beam to the target. ECR ion sources are essential for the efficient operation of research accelerators such as the CCF, providing high currents of highly charged ions. Highly charged ion beams increase the efficiency of the accelerators, but require longer confinement times and higher temperature plasmas in the ion sources than is necessary to produce singly charged beams. The need to use high temperature and low density plasmas creates challenges including those relating to plasma stability. ECR ion sources provide a good platform to accept metallic vapor ovens and sputtering probes allowing the CCF to accelerate up to 30 types of beams ranging from oxygen to uranium. Furthermore, ECR ion sources use no filaments or cathodes providing a high degree of reliability for the accelerator facility. As the intensity frontier demands ever rarer isotopes from accelerator facilities, the heavy ion beam intensity must increase [70], which creates new demands from the ion sources.The work presented within this dissertation set out to better understand the mechanism that confines highly charged ions in the ECR plasma. Specifically, it was explored if hot electrons (energy larger than 50 keV) contribute to ion confinement by generating an electrostatic well in the plasma potential [68]. Perturbative measurements of ECR ion sources are presented with the aim to explore ion confinement times: pulsed sputtering (Chapter 4) and amplitude modulation (Chapter 5). Chapter 3 explores the geometry of the sputtering probe with respect to the magnetic field which was crucial to produce reliable pulsed sputtering results on the ECR ion source. Axial pulsed sputtering, which could be conveniently implemented on fully superconducting sources, incorporated a bias disc effect that highly perturbed the plasma. Radial sputtering was emulated by placing a semi-shielded probe along the plasma chamber wall in between the electron loss surfaces.Ion confinement time was characterized through the decay time of the beam current, which is proportional to ion confinement time. Ion beam decay times were measured for different charge states of gold in an oxygen plasma in Chapter 4. Decay time always increased with increasing charge state. Decay time also increased with hot electron temperature for lower frequency operation (13 GHz), but reached an optimized value for higher frequency operation (18 GHz) due to plasma instabilities. Electrostatic confinement of ions appeared to be the most plausible mechanism to explain the observed decay time behaviors. A novel perturbative measurement technique was developed for ECR ion sources using Amplitude Modulation (AM) of microwave power. The AM measurement was originally motivated by whether or not 50~kHz modulation in microwave power (from the microwave source) would be observable in the beam current. A systematic study was organized on the University of Jyvaskyla Physics Department (JYFL) normal conducting ECR ion source in Jyvaskyla Finland. Chapter 5 presents the beam current response to AM on the 14 GHz ECR ion source for different weights of noble gases, magnetic fields, and vacuum pressures. The beam current amplitude generally decayed exponentially for frequencies higher than around 400 Hz with the modulation highly suppressed at 10 kHz.
Download or read book Energy Research Abstracts written by and published by . This book was released on 1992-08 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1991 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electron Cyclotron Resonance Ion Sources by : Matthaeus Leitner
Download or read book Electron Cyclotron Resonance Ion Sources written by Matthaeus Leitner and published by American Institute of Physics. This book was released on 2005-03-23 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: Berkeley, California, 26-30 September 2004
Book Synopsis Handbook of Ion Sources by : Bernhard Wolf
Download or read book Handbook of Ion Sources written by Bernhard Wolf and published by CRC Press. This book was released on 2017-07-12 with total page 558 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application. The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources. The problems related to the production of ions of non-gaseous elements are detailed, and data on useful materials for evaporation and ion source construction are summarized. Additional chapters are dedicated to extraction and beam formation, ion beam diagnosis, ion source electronics, and computer codes for extraction, acceleration, and beam transport. Emittance and brilliance are described and space charge effects and neutralization discussed. Various methods for the measurement of current, profile, emittance, and time structure are presented and compared. Intensity limits for these methods are provided for different ion energies. Typical problems related to the operation of ion source plasmas are discussed and practical examples of circuits are given. The influence of high voltage on ion source electronics and possibilities for circuit protection are covered. The generation of microwaves and various microwave equipment are described and special problems related to microwave operation are summarized. The Handbook of Ion Sources is a valuable reference on the subject, of benefit to practitioners and graduate students interested in accelerators, ion implantation, and ion beam techniques.
Book Synopsis Microwave Electron Cyclotron Electron Resonance (ECR) Ion Source with a Large, Uniformly Distributed, Axially Symmetric, ECR Plasma Volume by :
Download or read book Microwave Electron Cyclotron Electron Resonance (ECR) Ion Source with a Large, Uniformly Distributed, Axially Symmetric, ECR Plasma Volume written by and published by . This book was released on 1996 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: An electron cyclotron resonance (ECR) ion source includes a primary mirror coil disposed coaxially around a vacuum vessel in which a plasma is induced and introducing a solenoidal ECR-producing field throughout the length of the vacuum vessel. Radial plasma confinement is provided by a multi-cusp, multi-polar permanent magnet array disposed azimuthally around the vessel and within the primary mirror coil. Axial confinement is provided either by multi-cusp permanent magnets at the opposite axial ends of the vessel, or by secondary mirror coils disposed on opposite sides of the primary coil.
Book Synopsis An Ultra Compact 10 GHz Electron-cyclotron-resonance Ion Source (ECRIS) for the Production of Multiply Charged Ions by :
Download or read book An Ultra Compact 10 GHz Electron-cyclotron-resonance Ion Source (ECRIS) for the Production of Multiply Charged Ions written by and published by . This book was released on 1996 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: There is a growing interest in the use of beams of multiply charged ions produced in special environments like high voltage platforms, Dynamitrons, Van-de-Graaff accelerators or on-line production systems for radioactive beam facilities. A compact 10 GHz ECR ion source (200 mm long, 170 mm diameter) has been developed and tested. The complete magnetic structure made from permanent magnet material is comprised of four ring magnets producing an asymmetric axial magnetic field with a mirror ratio of 2.5 and a 24 piece hexapole magnet with a maximum radial field of 0.94 T inside the plasma chamber of 25 mm inner diameter. The coupling of the microwave to the plasma using a resonant transition line from rectangular to circular waveguide shows efficient ECR plasma heating at microwave power levels around 10 watts. Charge state distributions for various elements with intensities up to 320 e[mu]A and their dependence on operation parameters will be presented as well as VUV spectra in the wavelength region down to 15 nm.
Book Synopsis Future Prospects for ECR Plasma Generators with Improved Charge State Distributions by :
Download or read book Future Prospects for ECR Plasma Generators with Improved Charge State Distributions written by and published by . This book was released on 1997 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt: The growing number and variety of fundamental, applied, and industrial uses for high intensity, high charge state ion beams continues to be the driving force behind efforts to develop Electron Cyclotron Resonance (ECR) ion sources with superior performance characteristics. Incumbent with the advent of sub-micron electronic devices and their fabrication has been the demand for improved process control and optimization. These demands have led to the development of methods for cleaning, chemical etching, and deposition of thin films based on the use of plasma devices including ECR sources. Despite the steady advance in the technology, ECR plasma heating has not yet reached its full potential in terms of charge state and intensity within a particular charge state, in part, because of the narrow band width, single-frequency microwave radiation commonly used to heat the plasma electrons. This heating technique, coupled with conventional minimum-B configuration magnetic fields used for confining the electrons, resulting in the formation of the thin, ECR surfaces within the plasma volumes of these sources. This report identifies fundamentally important methods for enhancing the performances of ECR plasma generators by transforming the ECR zones from surfaces to volumes. Two methods are readily available for increasing the sizes of these zones. These techniques include: (1) a tailored magnetic field configuration in combination with single-frequency microwave radiation to create a large uniformly distributed ECR volume and; (2) the use of broadband-frequency domain techniques derived from standard TWT technology, to transform the resonant plasma surfaces of traditional ECR ion sources into resonant plasma volumes.
Book Synopsis The Design and Testing of a Compact Electron Cyclotron Resonant Microwave-cavity Ion Source by : Leonard Joseph Mahoney
Download or read book The Design and Testing of a Compact Electron Cyclotron Resonant Microwave-cavity Ion Source written by Leonard Joseph Mahoney and published by . This book was released on 1989 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Design and Testing of an Electron Cyclotron Resonance Heating Ion Source for Use in High Field Compact Superconducting Cyclotrons by : Mark E. Artz
Download or read book Design and Testing of an Electron Cyclotron Resonance Heating Ion Source for Use in High Field Compact Superconducting Cyclotrons written by Mark E. Artz and published by . This book was released on 2012 with total page 82 pages. Available in PDF, EPUB and Kindle. Book excerpt: The main goal of this project is to evaluate the feasibility of axial injection of a high brightness beam from an Electron Cyclotron Resonance ion source into a high magnetic field cyclotron. Axial injection from an ion source with high brightness is important to reduce particle losses in the first several turns of acceleration within the cyclotron. Beam brightness is a measure of the beam current and rate of spread of the beam. The ultimate goal in developing an ECR ion source is to enable reduced beam losses along the entire acceleration path from the ion source through the cyclotron, allowing for a high beam current accelerator. Cyclotrons with high beam current have the potential to improve the availability of proton radiation therapy. Proton radiation therapy is a precisely targeted treatment capable of providing an excellent non-invasive treatment option for tumors located deep within tissue. In order to model injection into high field it is necessary to measure the parameters of the beam extracted from the ion source. The two most important beam parameters are emittance and beam current. The emittance of the beam is a measurement of the rate of beam spread along the path of the beam and beam current is a measurement of the energy and quantity of particles within a charged particle beam. This thesis presents the design and analysis of an ECR Ion Source and the instruments used to measure the emittance and beam current. Based on the modeling of the ECR ion source beam and the data gathered during testing, the ECR ion source presented in this thesis has the potential to provide a high brightness beam capable of high field axial injection. Beam simulations provide insight into the performance of the ECR ion source in high magnetic field. Axial beam injection from an external ion source is promising with moderate refinements to the ECR ion source.
