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Plasma Enhanced Chemical Vapor Deposition Of Diamondlike Carbon Films Using Acetylene
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Book Synopsis Plasma Enhanced Chemical Vapor Deposition of Diamondlike Carbon Films Using Acetylene by : Sriram Vishwanathan
Download or read book Plasma Enhanced Chemical Vapor Deposition of Diamondlike Carbon Films Using Acetylene written by Sriram Vishwanathan and published by . This book was released on 1998 with total page 114 pages. Available in PDF, EPUB and Kindle. Book excerpt: This study is focussed on the synthesis and characterization of diamondlike carbon (DLQ films deposited on silicon wafers and glass by plasma enhanced chemical vapor deposition (PECVD), using acetylene (C2H4) as a precursor. The process parameters, such as temperature, pressure, power and reactant gas flow rate have been systematically varied and their effects on the film growth rate and properties were investigated. The optimized deposition condition appeared to be at 150°C, 200mTorr, 200 Watts and flow rate = 25 sccm. For these conditions, the films were hard and found to have good adhesion to the substrate, and resistant to BF etching (49% BY diluted to 10% with distilled water). It was found that the adhesion of the DLC film to the substrate is good if the substrate is first etched with oxygen and CF4 prior to the deposition.
Book Synopsis Friction and Wear Performance of Diamondlike Carbon Films Grown in Various Source Gas Plasmas by :
Download or read book Friction and Wear Performance of Diamondlike Carbon Films Grown in Various Source Gas Plasmas written by and published by . This book was released on 2000 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this study, the authors investigated the effects of various source gases (methane, ethane, ethylene, and acetylene) on the friction and wear performance of diamondlike carbon (DLC) films prepared in a plasma enhanced chemical vapor deposition (PECVD) system. Films were deposited on AISI H13 steel substrates and tested in a pin-on-disk machine against DLC-coated M50 balls in dry nitrogen. They found a close correlation between friction coefficient and source gas composition. Specifically, films grown in source gases with higher hydrogen-to-carbon ratios exhibited lower friction coefficients and higher wear resistance than films grown in source gases with lower hydrogen-to-carbon (H/C) ratios. The lowest friction coefficient (0.014) was achieved with a film derived from methane with an WC ratio of 4, whereas the coefficient of films derived from acetylene (H/C = 1) was of 0.15. Similar correlations were observed for wear rates. Specifically, films derived from gases with lower H/C values were worn out and the substrate material was exposed, whereas films from methane and ethane remained intact and wore at rates that were nearly two orders of magnitude lower than films obtained from acetylene.
Book Synopsis Characterization of Plasma-enhanced Chemical-vapor-deposited Diamond-like Carbon Films by : G. Sreenivas
Download or read book Characterization of Plasma-enhanced Chemical-vapor-deposited Diamond-like Carbon Films written by G. Sreenivas and published by . This book was released on 1992 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Atmospheric Plasma Deposition of Diamond-like Carbon Coatings by :
Download or read book Atmospheric Plasma Deposition of Diamond-like Carbon Coatings written by and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: There is great demand for thin functional coatings in the semiconductor, optics, electronics, medical, automotive and aerospace industries [1-13]. As fabricated components become smaller and more complex, the properties of the materials' surface take on greater importance. Thin coatings play a key role in tailoring surfaces to give them the desired hardness, wear resistance, chemical inertness, and electrical characteristics. Diamond-like carbon (DLC) coatings possess an array of desirable properties, including outstanding abrasion and wear resistance, chemical inertness, hardness, a low coefficient of friction and exceptionally high dielectric strength [14-22]. Diamond-like carbon is considered to be an amorphous material, containing a mixture of sp2 and sp3 bonded carbon. Based on the percentage of sp3 carbon and the hydrogen content, four different types of DLC coatings have been identified: tetrahedral carbon (ta-C), hydrogenated amorphous carbon (a-C:H) hard, a-C:H soft, and hydrogenated tetrahedral carbon (ta-C:H) [20,24,25]. Possessing the highest hardness of 80 GPa, ta-C possesses an sp3 carbon content of 80 to 88u%, and no appreciable hydrogen content whereas a-C:H soft possesses a hardness of less than 10 GPa, contains an sp3 carbon content of 60% and a hydrogen content between 30 to 50%. Methods used to deposit DLC coatings include ion beam deposition, cathodic arc spray, pulsed laser ablation, argon ion sputtering, and plasma-enhanced chemical vapor deposition [73-83]. Researchers contend that several advantages exist when depositing DLC coatings in a low-pressure environment. For example, ion beam processes are widely utilized since the ion bombardment is thought to promote denser sp3-bonded carbon networks. Other processes, such as sputtering, are better suited for coating large parts [29,30,44]. However, the deposition of DLC in a vacuum system has several disadvantages, including high equipment cost and restrictions on the size and shape of material that may be treated. The deposition of DLC at atmospheric pressure has been demonstrated by several researchers. Izake, et al [53] and Novikov and Dymont [54] have demonstrated an electrochemical process that is carried out with organic compounds such as methanol and acetylene dissolved in ammonia. This process requires that the substrates be immersed in the liquid [53-54]. The atmospheric pressure deposition of DLC was also demonstrated by Kulik, et al. utilizing a plasma torch. However, this process requires operating temperatures in excess of 800 oC [55]. In this report, we investigate the deposition of diamond-like carbon films using a low temperature, atmospheric pressure plasma-enhanced chemical vapor deposition (PECVD) process. The films were characterized by solid-state carbon-13 nuclear magnetic resonance (13C NMR) and found to have a ratio of sp2 to sp3 carbon of 43 to 57%. The films were also tested for adhesion, coefficient of friction, and dielectric strength.
Book Synopsis Synthesis and Characterization of Diamond-like Carbon Coatings Deposited by Plasma Source Ion Implantation and Conventional Ion Beam Assisted Deposition Processes by : Brian M. Stout
Download or read book Synthesis and Characterization of Diamond-like Carbon Coatings Deposited by Plasma Source Ion Implantation and Conventional Ion Beam Assisted Deposition Processes written by Brian M. Stout and published by . This book was released on 1999 with total page 114 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond-like carbon coatings produced by Plasma Source Ion Implantation (PSII) and beamline Ion Beam Assisted Deposition (IBAD) were synthesized and studied. Gas pressure and electrical current were used as variables to design four independent PSII test sets. Beamline IBAD samples were produced with a pre-optimized set of parameters. Profilometry measurements showed the films to have thicknesses between 1.44 +/- 09 and 1.64 +/- 04 microns and to possess very low roughness averages, ranging from 14 +/- 3 to 28 +/- 3 nm, which correlate with substrate surface roughness. Atomic Force Microscopy revealed that diamond-like carbon crystal sizes varied significantly with chamber pressure. Crystals were generally spherical in shape suggesting that films were highly amorphous. Microhardness and nanohardness test results showed the hardest films to be greater than 3 times the hardness of untreated steel. The elastic modulus of the films, measured during the nanohardness test, was directly related to film hardness. Fretting wear and Pin-on-Disk tests were performed to quantitatively assess the ability of films to resist wear. Fretting wear tests showed a dramatic decrease in friction for diamond-like carbon films with friction levels ranging from 10% to 30% of that of untreated steel. Pin-on-Disk tests revealed a significant improvement in wear resistance prior to stylus penetration into the substrate.
Book Synopsis Tribology of Diamond-like Carbon Films by : Christophe Donnet
Download or read book Tribology of Diamond-like Carbon Films written by Christophe Donnet and published by Springer Science & Business Media. This book was released on 2007-12-06 with total page 673 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book highlights some of the most important structural, chemical, mechanical and tribological characteristics of DLC films. It is particularly dedicated to the fundamental tribological issues that impact the performance and durability of these coatings. The book provides reliable and up-to-date information on available industrial DLC coatings and includes clear definitions and descriptions of various DLC films and their properties.
Book Synopsis The Synthesis of Diamond Films and Diamond Like Carbon (DLC) Films Using a Two Factorial Experimental Design by : Dawn Heather Fant
Download or read book The Synthesis of Diamond Films and Diamond Like Carbon (DLC) Films Using a Two Factorial Experimental Design written by Dawn Heather Fant and published by . This book was released on 1995 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focuses on using the first level of a two level factorial design to characterize a radio frequency plasma enhanced chemical vapor deposition system.
Download or read book העלאת נר התמיד באהל-יזכר written by and published by . This book was released on 1970 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Low Dielectric Constant Fluorinated Diamond-like Carbon Thin Films by Plasma Enhanced Chemical Vapor Deposition by : Jeong Woo Yi
Download or read book Low Dielectric Constant Fluorinated Diamond-like Carbon Thin Films by Plasma Enhanced Chemical Vapor Deposition written by Jeong Woo Yi and published by . This book was released on 1999 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Radio-Frequency Plasma Enhanced Chemical Vapor Deposition of Diamond-like Carbon Using Methanol by : Chiao Wen Liu
Download or read book Radio-Frequency Plasma Enhanced Chemical Vapor Deposition of Diamond-like Carbon Using Methanol written by Chiao Wen Liu and published by . This book was released on 2000 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Plasma Applications for Material Modification by : Francisco L. Tabarés
Download or read book Plasma Applications for Material Modification written by Francisco L. Tabarés and published by CRC Press. This book was released on 2021-09-24 with total page 322 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an up-to-date review of the most important plasma-based techniques for material modification, from microelectronics to biological materials and from fusion plasmas to atmospheric ones. Each its technical chapters is written by long-experienced, internationally recognised researchers. The book provides a deep and comprehensive insight into plasma technology and its associated elemental processes and is illustrated throughout with excellent figures and references to complement each section. Although some of the topics covered can be traced back several decades, care has been taken to emphasize the most recent findings and expected evolution. The first time the word ‘plasma’ appeared in print in a scientific text related to the study of electrical discharges in gases was 1928, when Irving Langmuir published his article ‘Oscillations in Ionized Gases’. It was the baptism of the predominant state of matter in the known universe (it is estimated that up to 99% of matter is plasma), although not on earth, where the conditions of pressure and temperature make normal the states of matter (solid, liquid, gas) which, in global terms, are exotic. It is enough to add energy to a solid (in the form of heat or electromagnetic radiation) to go into the liquid state, from which gas is obtained through an additional supply of energy. If we continue adding energy to the gas, we will partially or totally ionise it and reach a new state of matter, plasma, made up of free electrons, atoms and molecules (electrically neutral particles) and ions (endowed with a positive or a negative electric charge).
Book Synopsis Synthesis of Carbon and Tungsten Based Thin Films by Plasma Enhanced Chemical Vapor Deposition by :
Download or read book Synthesis of Carbon and Tungsten Based Thin Films by Plasma Enhanced Chemical Vapor Deposition written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :Stephanus Büttgenbach Publisher :Springer Science & Business Media ISBN 13 :364212903X Total Pages :447 pages Book Rating :4.6/5 (421 download)
Book Synopsis Design and Manufacturing of Active Microsystems by : Stephanus Büttgenbach
Download or read book Design and Manufacturing of Active Microsystems written by Stephanus Büttgenbach and published by Springer Science & Business Media. This book was released on 2011-03-04 with total page 447 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Book Synopsis Diamond-like Carbon Films for Electroluminescent Applications by : Seung-bae Kim
Download or read book Diamond-like Carbon Films for Electroluminescent Applications written by Seung-bae Kim and published by . This book was released on 1988 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: White electroluminescence (EL) was observed for the first time from diamond-like carbon (DLC) films at room temperature. Electroluminescence was observed by the application of ac voltages in excess of 200 V to a metal-insulator- semiconductor (i.e. DLC)-insulator-metal (MISIM) device structure. For EL applications, three types of the DLC films were prepared by plasma-enhanced chemical vapor deposition (PECVD) using a commercially available reactor (Semi-Group System 1000). The plasma excitation frequency was either 13.56 MHz or 100 kHz and the system has a capacitively coupled, parallel plate configuration in which the substrate electrode was either grounded or powered. DLC films were deposited using a source gas mixture of 10 % methane diluted in helium. The critical temperature for obtaining a DLC deposition was found to be a function of the electrode spacing. Using the conventional electrode spacing of 25 mm, it was not possible to deposit DLC films above 200°C. When the electrode spacing was decreased to 14.5 mm, however, DLC films were obtained at substrate temperatures up to 300°C. The optical bandgap of the DLC films could be varied from 2.2-3.0 eV using typical process deposition parameters. In contrast to other reports, the optical bandgap did not strongly depend on the deposition temperature, rf power, or pressure. A reduction in optical bandgap of thermally annealed DLC films was observed, compared to that of the asdeposited DLC films. The films also exhibited photoluminescence (PL) which was observed at room temperature. The EL and the PL spectra were compared. The PL peak energy shifts were observed by decreasing measuring temperature and by changing the deposition power. Periodic oscillations in the PL spectrum were observed when a low optical pumping energy was used; these oscillations were attributed to C-H wagging modes.
Book Synopsis Synthesis of Diamondlike Carbon Films with Superlow Friction and Wear Properties by :
Download or read book Synthesis of Diamondlike Carbon Films with Superlow Friction and Wear Properties written by and published by . This book was released on 2000 with total page 23 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this study, the authors introduce a new diamondlike carbon (DLC) film providing a friction coefficient of 0.001 and wear rates of 10−9 to 10−1° mm3/N.m in inert-gas environments (e.g., dry nitrogen and argon). The film was grown on steel and sapphire substrates in a plasma enhanced chemical vapor deposition system that uses using a hydrogen-rich plasma. Employing a combination of surface and structure analytical techniques, they explored the structural chemistry of the resultant DLC films and correlated these findings with the friction and wear mechanisms of the films. The results of tribological tests under a 10-N load (creating initial peak Hertz pressures of 1 and 2.2 GPa on steel and sapphire test pairs, respectively) and at 0.2 to 0.5 m/s sliding velocities indicated that a close correlation exists between the friction and wear coefficients of DLC films and the source gas chemistry. Specifically, films grown in source gases with higher hydrogen-to-carbon ratios had the lowest fiction coefficients and the highest wear resistance. The lowest friction coefficient (0.001) was achieved with a film on sapphire substrates produced in a gas discharge plasma consisting of 25% methane and 75% hydrogen.
Book Synopsis Alkynes—Advances in Research and Application: 2012 Edition by :
Download or read book Alkynes—Advances in Research and Application: 2012 Edition written by and published by ScholarlyEditions. This book was released on 2012-12-26 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt: Alkynes—Advances in Research and Application: 2012 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Alkynes. The editors have built Alkynes—Advances in Research and Application: 2012 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Alkynes in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Alkynes—Advances in Research and Application: 2012 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.
Book Synopsis The Characterization of Thin Carbon Films Created Via Radio Frequency Plasma-enhanced Chemical Vapor Deposition by : George Tecos
Download or read book The Characterization of Thin Carbon Films Created Via Radio Frequency Plasma-enhanced Chemical Vapor Deposition written by George Tecos and published by . This book was released on 2011 with total page 112 pages. Available in PDF, EPUB and Kindle. Book excerpt: Various deposition parameters have been adopted to deposit carbon-based thin films on silicon subtrates via Plasma-Enhanced Chemical Vapor Detection (PECVD) with a Radio-Frequency Plasma. We seek a recipe and formulation for carbon film deposition by varying the ratios of input gases and subtrate temperature, with the goal of observing these effects on the deposited carbon film. Characterization of the samples was carried out through various procedures, including the Ion Beam Analysis (IBA) techniques: Rutherford/Non-Rutherford Backscattering Spectrometry (RBS/NRBS), Elastic Recoil Detection Analysis (ERDA), and Raman Spectroscopy. This data was analyzed to determine the purity, quality, elemental compensation, and interface integrity of each respective sample. We conclude that the films deposited on Si subtrates are polymer-like carbon films with 30-35 at% C and 65-70 at% H. The interface between the film and subtrate was found to be abrupt. The effect of subtrate temperature on the microstructure of the deposited films was found to be inconclusive. This study will lay the basis for future explorations into Western Michigan University produced CVD carbon-based films, and investigate the properties of these unique and profitable materials.
