Plasma-Assisted Atomic Layer Deposition of III-Nitride Thin Films

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Author :
Publisher : LAP Lambert Academic Publishing
ISBN 13 : 9783659208232
Total Pages : 180 pages
Book Rating : 4.2/5 (82 download)

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Book Synopsis Plasma-Assisted Atomic Layer Deposition of III-Nitride Thin Films by : Çağla Özgit-Akgün

Download or read book Plasma-Assisted Atomic Layer Deposition of III-Nitride Thin Films written by Çağla Özgit-Akgün and published by LAP Lambert Academic Publishing. This book was released on 2014-03 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: III-nitride compound semiconductors (AlN, GaN, InN) and their alloys have emerged as versatile and high-performance materials for a wide range of electronic and optoelectronic device applications. Although high quality III-nitride thin films can be grown at high temperatures (>1000 C) with significant rates, deposition of these films on temperature-sensitive device layers and substrates necessitates the adaptation of low-temperature methods such as atomic layer deposition (ALD). When compared to other low-temperature thin film deposition techniques, ALD stands out with its self-limiting growth mechanism, which enables the deposition of highly uniform and conformal thin films with sub-angstrom thickness control. These unique characteristics make ALD a powerful method especially for depositing films on nanostructured templates, as well as preparing alloy thin films with well-defined compositions. This monograph reports on the development of low-temperature ( 200 C) plasma-assisted ALD processes for III-nitrides, and presents detailed characterization results for the deposited thin films and fabricated nanostructures."

Atomic Layer Deposition for Semiconductors

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Publisher : Springer Science & Business Media
ISBN 13 : 146148054X
Total Pages : 266 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Atomic Layer Deposition for Semiconductors by : Cheol Seong Hwang

Download or read book Atomic Layer Deposition for Semiconductors written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Thin Films, Atomic Layer Deposition, and 3D Printing

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Author :
Publisher : CRC Press
ISBN 13 : 100099919X
Total Pages : 287 pages
Book Rating : 4.0/5 (9 download)

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Book Synopsis Thin Films, Atomic Layer Deposition, and 3D Printing by : Kingsley Ukoba

Download or read book Thin Films, Atomic Layer Deposition, and 3D Printing written by Kingsley Ukoba and published by CRC Press. This book was released on 2023-11-29 with total page 287 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Films, Atomic Layer Deposition, and 3D Printing explains the concept of thin films, atomic layers deposition, and the Fourth Industrial Revolution (4IR) with an aim to illustrate existing resources and give a broader perspective of the involved processes as well as provide a selection of different types of 3D printing, materials used for 3D printing, emerging trends and applications, and current top-performing 3D printers using different technologies. It covers the concept of the 4IR and its role in current and future human endeavors for both experts/nonexperts. The book includes figures, diagrams, and their applications in real-life situations. Features: Provides comprehensive material on conventional and emerging thin film, atomic layer, and additive technologies. Discusses the concept of Industry 4.0 in thin films technology. Details the preparation and properties of hybrid and scalable (ultra) thin materials for advanced applications. Explores detailed bibliometric analyses on pertinent applications. Interconnects atomic layer deposition and additive manufacturing. This book is aimed at researchers and graduate students in mechanical, materials, and metallurgical engineering.

Handbook of Manufacturing Engineering and Technology

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Author :
Publisher : Springer
ISBN 13 : 9781447146698
Total Pages : 0 pages
Book Rating : 4.1/5 (466 download)

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Book Synopsis Handbook of Manufacturing Engineering and Technology by : Andrew Y. C. Nee

Download or read book Handbook of Manufacturing Engineering and Technology written by Andrew Y. C. Nee and published by Springer. This book was released on 2014-10-31 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Springer Reference Work Handbook of Manufacturing Engineering and Technology provides overviews and in-depth and authoritative analyses on the basic and cutting-edge manufacturing technologies and sciences across a broad spectrum of areas. These topics are commonly encountered in industries as well as in academia. Manufacturing engineering curricula across universities are now essential topics covered in major universities worldwide.

Handbook of Deposition Technologies for Films and Coatings

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Author :
Publisher : William Andrew
ISBN 13 : 0815520328
Total Pages : 932 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Handbook of Deposition Technologies for Films and Coatings by : Peter M. Martin

Download or read book Handbook of Deposition Technologies for Films and Coatings written by Peter M. Martin and published by William Andrew. This book was released on 2009-12-01 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.

Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform]

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Author :
Publisher : Ann Arbor, Mich. : University Microfilms International
ISBN 13 :
Total Pages : 308 pages
Book Rating : 4.:/5 (576 download)

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Book Synopsis Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform] by : Becker, Jill Svenja

Download or read book Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform] written by Becker, Jill Svenja and published by Ann Arbor, Mich. : University Microfilms International. This book was released on 2002 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Atomic Layer Deposition

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 1118062779
Total Pages : 274 pages
Book Rating : 4.1/5 (18 download)

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Book Synopsis Atomic Layer Deposition by : Tommi Kääriäinen

Download or read book Atomic Layer Deposition written by Tommi Kääriäinen and published by John Wiley & Sons. This book was released on 2013-05-28 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

Atomic Layer Deposition of Nanostructured Materials

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Publisher : John Wiley & Sons
ISBN 13 : 3527639926
Total Pages : 463 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Atomic Layer Deposition of Nanostructured Materials by : Nicola Pinna

Download or read book Atomic Layer Deposition of Nanostructured Materials written by Nicola Pinna and published by John Wiley & Sons. This book was released on 2012-09-19 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique). This book is a must-have for all Materials Scientists, Surface Chemists, Physicists, and Scientists in the Semiconductor Industry.

Handbook Of Synthetic Methodologies And Protocols Of Nanomaterials (In 4 Volumes)

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Publisher : World Scientific
ISBN 13 : 9813277882
Total Pages : 2370 pages
Book Rating : 4.8/5 (132 download)

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Book Synopsis Handbook Of Synthetic Methodologies And Protocols Of Nanomaterials (In 4 Volumes) by :

Download or read book Handbook Of Synthetic Methodologies And Protocols Of Nanomaterials (In 4 Volumes) written by and published by World Scientific. This book was released on 2019-08-13 with total page 2370 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive book set includes four volumes, covering the methods and protocols for the synthesis, fabrication, and characterization of nanomaterials. The first two books introduce the solution phase and gas synthesis approaches for nanomaterials, providing a number of most widely used protocols for each nanomaterial. An exhaustive list of nanomaterials are included, which are arranged according to the atomic number of the main element in the compound for easy search. For each material, the protocols are categorized according to the morphology of the nanostructure. A detailed reference is included in each protocol to point the readers to the source of the protocol. The third book describes many unconventional methods for the fabrication of nanostructures, including lithography and printing, self-assembly, chemical transformation, templated synthesis, electrospinning, laser induced synthesis, flame and plasma synthesis, and atomic layer deposition processes. The fourth book covers the typical methods for structural characterization of nanomaterials, including electron diffraction, electron microscopy, atomic force microscopy, scanning tunneling microscopy, X-ray diffraction, in-situ and operando X-ray techniques, X-ray absorption fine structure spectroscopy, static and dynamic light scattering, vibrational characterization methods, and NMR spectroscopy. In addition to the introduction of the basic operational principles of these tools, the book focuses explicitly on how they can be applied for analyzing nanomaterials. The handbook is a complete reference that can provide readers easily accessible information on how to synthesize and characterize nanomaterials desired for their target applications.

Atomic Layer Deposition in Energy Conversion Applications

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Publisher : John Wiley & Sons
ISBN 13 : 3527694838
Total Pages : 366 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Atomic Layer Deposition in Energy Conversion Applications by : Julien Bachmann

Download or read book Atomic Layer Deposition in Energy Conversion Applications written by Julien Bachmann and published by John Wiley & Sons. This book was released on 2017-03-15 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt: Combining the two topics for the first time, this book begins with an introduction to the recent challenges in energy conversion devices from a materials preparation perspective and how they can be overcome by using atomic layer deposition (ALD). By bridging these subjects it helps ALD specialists to understand the requirements within the energy conversion field, and researchers in energy conversion to become acquainted with the opportunities offered by ALD. With its main focus on applications of ALD for photovoltaics, electrochemical energy storage, and photo- and electrochemical devices, this is important reading for materials scientists, surface chemists, electrochemists, electrotechnicians, physicists, and those working in the semiconductor industry.

Organometallic Chemistry

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Publisher : Royal Society of Chemistry
ISBN 13 : 1788010671
Total Pages : 210 pages
Book Rating : 4.7/5 (88 download)

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Book Synopsis Organometallic Chemistry by : Nathan J Patmore

Download or read book Organometallic Chemistry written by Nathan J Patmore and published by Royal Society of Chemistry. This book was released on 2018-11-16 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the increase in volume, velocity and variety of information, researchers can find it difficult to keep up to date with the literature in their field. Providing an invaluable resource, this volume contains analysed, evaluated and distilled information on the latest in organometallic chemistry research and emerging fields. The reviews range in scope and include π-coordinated arene metal complexes and catalysis by arene exchange, rylenes as chromophores in catalysts for CO2 photoreduction, metal nodes and metal sites in metal–organic frameworks, developments in molecular precursors for CVD and ALD, and multiphoton luminescence processes in f-element containing compounds.

Plasma-assisted Atomic Layer Deposition for Microelectronics Applications

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Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (118 download)

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Book Synopsis Plasma-assisted Atomic Layer Deposition for Microelectronics Applications by : Akinwumi Abimbola Amusan

Download or read book Plasma-assisted Atomic Layer Deposition for Microelectronics Applications written by Akinwumi Abimbola Amusan and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Recent Advances in Thin Films

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Publisher : Springer Nature
ISBN 13 : 9811561168
Total Pages : 721 pages
Book Rating : 4.8/5 (115 download)

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Book Synopsis Recent Advances in Thin Films by : Sushil Kumar

Download or read book Recent Advances in Thin Films written by Sushil Kumar and published by Springer Nature. This book was released on 2020-08-27 with total page 721 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume comprises the expert contributions from the invited speakers at the 17th International Conference on Thin Films (ICTF 2017), held at CSIR-NPL, New Delhi, India. Thin film research has become increasingly important over the last few decades owing to the applications in latest technologies and devices. The book focuses on current advances in thin film deposition processes and characterization including thin film measurements. The chapters cover different types of thin films like metal, dielectric, organic and inorganic, and their diverse applications across transistors, resistors, capacitors, memory elements for computers, optical filters and mirrors, sensors, solar cells, LED's, transparent conducting coatings for liquid crystal display, printed circuit board, and automobile headlamp covers. This book can be a useful reference for students, researchers as well as industry professionals by providing an up-to-date knowledge on thin films and coatings.

Atomic Layer Deposition Applications 6

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 1566778212
Total Pages : 469 pages
Book Rating : 4.5/5 (667 download)

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Book Synopsis Atomic Layer Deposition Applications 6 by : J. W. Elam

Download or read book Atomic Layer Deposition Applications 6 written by J. W. Elam and published by The Electrochemical Society. This book was released on 2010-10 with total page 469 pages. Available in PDF, EPUB and Kindle. Book excerpt: The continuously expanding realm of Atomic Layer Deposition (ALD) Applications is the focus of this reoccurring symposium. ALD can enable the precise deposition of ultra-thin, highly conformal coatings over complex 3D topographies with controlled thickness and composition. This issue of ECS Transactions contains peer reviewed papers presented at the symposium. A broad spectrum of ALD applications is featured, including novel nano-composites and nanostructures, dielectrics for state-of-the-art transistors and capacitors, optoelectronics, and a variety of other emerging applications.

Advanced Ceramic Coatings and Interfaces V

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Publisher : John Wiley & Sons
ISBN 13 : 0470943955
Total Pages : 204 pages
Book Rating : 4.4/5 (79 download)

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Book Synopsis Advanced Ceramic Coatings and Interfaces V by : Dongming Zhu

Download or read book Advanced Ceramic Coatings and Interfaces V written by Dongming Zhu and published by John Wiley & Sons. This book was released on 2010-11-23 with total page 204 pages. Available in PDF, EPUB and Kindle. Book excerpt: The present volume contains sixteen contributed papers from the symposium, with topics including advanced coating processing, advanced coating for wear, corrosion, and oxidation resistance, and thermal and mechanical properties, highlighting the state-of-the-art ceramic coatings technologies for various critical engineering applications.

Atomic Layer Deposition Applications 14

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 1607688522
Total Pages : 83 pages
Book Rating : 4.6/5 (76 download)

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Book Synopsis Atomic Layer Deposition Applications 14 by : F. Roozeboom

Download or read book Atomic Layer Deposition Applications 14 written by F. Roozeboom and published by The Electrochemical Society. This book was released on 2018-09-21 with total page 83 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Atomic Layer Deposition Applications 7

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 1607682567
Total Pages : 353 pages
Book Rating : 4.6/5 (76 download)

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Book Synopsis Atomic Layer Deposition Applications 7 by : J. W. Elam

Download or read book Atomic Layer Deposition Applications 7 written by J. W. Elam and published by The Electrochemical Society. This book was released on 2011 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: