Piezoelectric Mems

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Piezoelectric MEMS Resonators

Author : Harmeet Bhugra
Publisher : Springer
ISBN 13 : 3319286889
Total Pages : 423 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Piezoelectric MEMS

Author : Ulrich Schmid
Publisher : MDPI
ISBN 13 : 3038970050
Total Pages : 177 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis Piezoelectric MEMS by : Ulrich Schmid

Download or read book Piezoelectric MEMS written by Ulrich Schmid and published by MDPI. This book was released on 2018-07-10 with total page 177 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines

Piezoelectric and Acoustic Materials for Transducer Applications

Author : Ahmad Safari
Publisher : Springer Science & Business Media
ISBN 13 : 0387765409
Total Pages : 483 pages
Book Rating : 4.3/5 (877 download)

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Book Synopsis Piezoelectric and Acoustic Materials for Transducer Applications by : Ahmad Safari

Download or read book Piezoelectric and Acoustic Materials for Transducer Applications written by Ahmad Safari and published by Springer Science & Business Media. This book was released on 2008-09-11 with total page 483 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’s transducer technology, and the principles used in transducer design. It provides examples of a wide range of applications of such materials along with the appertaining rationales. With contributions from distinguished researchers, this is a comprehensive reference on all the pertinent aspects of piezoelectric materials.

3D and Circuit Integration of MEMS

Author : Masayoshi Esashi
Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)

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Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi

Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.

Piezoelectric MEMS

Author : Ulrich Schmid
Publisher :
ISBN 13 : 9783038970064
Total Pages : pages
Book Rating : 4.9/5 (7 download)

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Book Synopsis Piezoelectric MEMS by : Ulrich Schmid

Download or read book Piezoelectric MEMS written by Ulrich Schmid and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advanced Piezoelectric Materials

Author : Kenji Uchino
Publisher :
ISBN 13 : 9781613443811
Total Pages : pages
Book Rating : 4.4/5 (438 download)

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Book Synopsis Advanced Piezoelectric Materials by : Kenji Uchino

Download or read book Advanced Piezoelectric Materials written by Kenji Uchino and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS

Author : Vikas Choudhary
Publisher : CRC Press
ISBN 13 : 135183228X
Total Pages : 481 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis MEMS by : Vikas Choudhary

Download or read book MEMS written by Vikas Choudhary and published by CRC Press. This book was released on 2017-12-19 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Piezoelectric MEMS

Author : Ulrich Schmid (Ed.)
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (122 download)

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Book Synopsis Piezoelectric MEMS by : Ulrich Schmid (Ed.)

Download or read book Piezoelectric MEMS written by Ulrich Schmid (Ed.) and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Electroceramic-Based MEMS

Author : Nava Setter
Publisher : Springer Science & Business Media
ISBN 13 : 0387233199
Total Pages : 416 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Electroceramic-Based MEMS by : Nava Setter

Download or read book Electroceramic-Based MEMS written by Nava Setter and published by Springer Science & Business Media. This book was released on 2006-03-30 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

Piezoelectric Multilayer Beam Bending Actuators

Author : Rüdiger G. Ballas
Publisher : Springer Science & Business Media
ISBN 13 : 3540326421
Total Pages : 358 pages
Book Rating : 4.5/5 (43 download)

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Book Synopsis Piezoelectric Multilayer Beam Bending Actuators by : Rüdiger G. Ballas

Download or read book Piezoelectric Multilayer Beam Bending Actuators written by Rüdiger G. Ballas and published by Springer Science & Business Media. This book was released on 2007-03-06 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the application of piezoelectric materials, particularly piezoceramics, in the wide field of actuators and sensors. It gives a step-by-step introduction to the structure and mechanics of piezoelectric beam bending actuators in multilayer technology, which are of increasing importance for industrial applications. The book presents the suitability of the developed theoretical aspects in a memorable way.

Resonant MEMS

Author : Oliver Brand
Publisher : John Wiley & Sons
ISBN 13 : 3527335455
Total Pages : 512 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Resonant MEMS by : Oliver Brand

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-06-08 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Piezoelectric Energy Harvesting

Author : Alper Erturk
Publisher : John Wiley & Sons
ISBN 13 : 1119991358
Total Pages : 377 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Piezoelectric Energy Harvesting by : Alper Erturk

Download or read book Piezoelectric Energy Harvesting written by Alper Erturk and published by John Wiley & Sons. This book was released on 2011-04-04 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.

Optical MEMS, Nanophotonics, and Their Applications

Author : Guangya Zhou
Publisher : CRC Press
ISBN 13 : 1498741347
Total Pages : 447 pages
Book Rating : 4.4/5 (987 download)

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Book Synopsis Optical MEMS, Nanophotonics, and Their Applications by : Guangya Zhou

Download or read book Optical MEMS, Nanophotonics, and Their Applications written by Guangya Zhou and published by CRC Press. This book was released on 2017-12-14 with total page 447 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

Energy Harvesting with Functional Materials and Microsystems

Author : Madhu Bhaskaran
Publisher : CRC Press
ISBN 13 : 1466587253
Total Pages : 289 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Energy Harvesting with Functional Materials and Microsystems by : Madhu Bhaskaran

Download or read book Energy Harvesting with Functional Materials and Microsystems written by Madhu Bhaskaran and published by CRC Press. This book was released on 2017-12-19 with total page 289 pages. Available in PDF, EPUB and Kindle. Book excerpt: For decades, people have searched for ways to harvest energy from natural sources. Lately, a desire to address the issue of global warming and climate change has popularized solar or photovoltaic technology, while piezoelectric technology is being developed to power handheld devices without batteries, and thermoelectric technology is being explored to convert wasted heat, such as in automobile engine combustion, into electricity. Featuring contributions from international researchers in both academics and industry, Energy Harvesting with Functional Materials and Microsystems explains the growing field of energy harvesting from a materials and device perspective, with resulting technologies capable of enabling low-power implantable sensors or a large-scale electrical grid. In addition to the design, implementation, and components of energy-efficient electronics, the book covers current advances in energy-harvesting materials and technology, including: High-efficiency solar technologies with lower cost than existing silicon-based photovoltaics Novel piezoelectric technologies utilizing mechanical energy from vibrations and pressure The ability to harness thermal energy and temperature profiles with thermoelectric materials Whether you’re a practicing engineer, academician, graduate student, or entrepreneur looking to invest in energy-harvesting devices, this book is your complete guide to fundamental materials and applied microsystems for energy harvesting.

Micro Energy Harvesting

Author : Danick Briand
Publisher : John Wiley & Sons
ISBN 13 : 3527319026
Total Pages : 492 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Micro Energy Harvesting by : Danick Briand

Download or read book Micro Energy Harvesting written by Danick Briand and published by John Wiley & Sons. This book was released on 2015-06-22 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.

Handbook of Silicon Based MEMS Materials and Technologies

Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Handbook of Industrial Inkjet Printing

Author : Werner Zapka
Publisher : John Wiley & Sons
ISBN 13 : 3527687203
Total Pages : 946 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Handbook of Industrial Inkjet Printing by : Werner Zapka

Download or read book Handbook of Industrial Inkjet Printing written by Werner Zapka and published by John Wiley & Sons. This book was released on 2017-09-29 with total page 946 pages. Available in PDF, EPUB and Kindle. Book excerpt: Unique in its integration of individual topics to achieve a full-system approach, this book addresses all the aspects essential for industrial inkjet printing. After an introduction listing the industrial printing techniques available, the text goes on to discuss individual topics, such as ink, printheads and substrates, followed by metrology techniques that are required for reliable systems. Three iteration cycles are then described, including the adaptation of the ink to the printhead, the optimization of the ink to the substrate and the integration of machine manufacturing, monitoring, and data handling, among others. Finally, the book summarizes a number of case studies and success stories from selected areas, including graphics, printed electronics, and 3D printing as well a list of ink suppliers, printhead manufacturers and integrators. Practical hints are included throughout for a direct hands-on experience. Invaluable for industrial users and academics, whether ink developers or mechanical engineers, and working in areas ranging from metrology to intellectual property.