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Piezoelectric Aluminum Nitride Thin Films By Pecvd
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Book Synopsis Piezoelectric Aluminum Nitride Thin Films by PECVD by : Gustavo Sanchez Mathon
Download or read book Piezoelectric Aluminum Nitride Thin Films by PECVD written by Gustavo Sanchez Mathon and published by . This book was released on 2009 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polycrystalline aluminum nitride thin films were produced with a microwave-plasma enhanced chemical vapor deposition technique. The plasma-injector distance, the substrate temperature and the RF bias were the main variables which allowed achieving this objective. At the time, it was possible to control the preferential orientation as 0001 or 1010, both interesting for piezoelectric applications. The growth mechanisms that conducted to film microstructure development under different process conditions were explained, enriched by the comparison with a physical vapor deposition sputtering technique. The obtained films were characterized in their piezoelectric performance, including the construction of surface acoustic wave devices and bulk acoustic wave devices. Adequate piezoelectric response and acoustic velocities were obtained for 0001 oriented films, while 1010 oriented films did not show piezoelectric response under the configurations essayed. An extensive analysis was done in order to explain these behaviors.
Book Synopsis Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications by : Adam Kabulski
Download or read book Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications written by Adam Kabulski and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films by : John Preston Harman
Download or read book Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films written by John Preston Harman and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications by : Masood Hasheminiasari
Download or read book Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications written by Masood Hasheminiasari and published by . This book was released on 2013 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Piezoelectric Aluminum Nitride Films by : Michael T. Duffy
Download or read book Piezoelectric Aluminum Nitride Films written by Michael T. Duffy and published by . This book was released on 1975 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt: Piezoelectric films of AlN and GaN were grown on sapphire substrates for use in the generation, propagation, and processing of surface acoustic waves. The films were grown by CVD heteroepitaxy using the metal-organic reactants trimethyl aluminum or trimethyl gallium. Greatest emphasis was placed on optimization of the aluminum nitride-sapphire system as determined by the (1,1,-2,0)AlN/(1,-1,0,2)Al2O3 epitaxial relationship. The films were examined with respect to crystallography, surface topography, optical properties, uniformity, and ease of polishing. A wide range of epitaxial growth temperatures was covered in order to establish optimum conditions for the growth of relatively thick films with minimum surface structure and residual composite strain. The possibility of growing silicon on the same substrate with AlN in a side-by-side configuration was examined and shown to be feasible. Aluminum transducer patterns were fabricated on some samples to form delay lines.
Book Synopsis Piezoelectricity, Acoustic Waves and Device Applications by : Weiqiu Chen
Download or read book Piezoelectricity, Acoustic Waves and Device Applications written by Weiqiu Chen and published by World Scientific. This book was released on 2007 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.
Book Synopsis High Temperature Studies of Thin Film Aluminum Nitride and Piezoelectric Characterization of Mesa Structures by :
Download or read book High Temperature Studies of Thin Film Aluminum Nitride and Piezoelectric Characterization of Mesa Structures written by and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films by : Agne Zukauskaite
Download or read book Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films written by Agne Zukauskaite and published by Mdpi AG. This book was released on 2023-06-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to overcome the limitations of AlN thin films in various piezoelectric applications while still enabling us to benefit from all of the advantages of the parent material system, such as a high temperature stability, CMOS compatibility, and good mechanical properties. Potential applications include RF filters (bulk acoustic wave (BAW) or surface acoustic wave (SAW) resonators), energy harvesting, sensing applications, and infra-red detectors. The recent progress in MOCVD- and MBE-grown AlScN has led to high-frequency and -power electronics, (high-electron-mobility transistors (HEMTs)). AlScN is the first wurtzite III-nitride where ferroelectric switching was observed, allowing for many new possible applications in semiconductor memories additionally, it enables the additional functionality of switching to applications where piezoelectric materials are already in use. This Special Issue was very successful in covering all of the main aspects of AlScN research, including its growth, the fundamental and application-relevant properties, and device fabrication and characterization. We can see that AlScN technology is mature enough to be utilized in wafer-level material development and complicated devices, but there is still much to discover in terms of deposition process control, anisotropy, and, in particular, ferroelectric behavior.
Book Synopsis Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium by : Ji Wang
Download or read book Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium written by Ji Wang and published by World Scientific. This book was released on 2007-09-27 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.
Book Synopsis Piezoelectric Technology by : Swetapadma Praharaj
Download or read book Piezoelectric Technology written by Swetapadma Praharaj and published by CRC Press. This book was released on 2023-12-01 with total page 211 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explains the state-of-the-art green piezoelectric energy harvesting (PEH) technology. It highlights different aspects of PEH, starting right from the materials, their synthesis, and characterization techniques to applications. Various types of materials, including ceramics, polymers, composites, and bio-inspired compounds in nano, micro, and meso scale and their recent advancements are captured in detail with special focus on lead-free systems. Different challenges and issues faced while designing a PEH are also included. Features: Guides on how to harvest piezoelectric energy in a sustainable manner Describes related figures of merit for piezoelectric energy harvesting Covers synthesis of piezoelectric materials in the form of bulk, single crystal, nano, and thin/thick film Includes pertinent advanced characterization techniques Reviews piezo-energy harvesting devices and structures This book is aimed at researchers, professionals, and graduate students in electrical engineering, materials, and energy.
Book Synopsis Micro Energy Harvesting by : Danick Briand
Download or read book Micro Energy Harvesting written by Danick Briand and published by John Wiley & Sons. This book was released on 2015-04-21 with total page 490 pages. Available in PDF, EPUB and Kindle. Book excerpt: With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.
Book Synopsis Anti-Abrasive Nanocoatings by : M Aliofkhazraei
Download or read book Anti-Abrasive Nanocoatings written by M Aliofkhazraei and published by Elsevier. This book was released on 2014-12-09 with total page 627 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an overview of the fabrication methods for anti-abrasive nanocoatings. The connections among fabrication parameters, the characteristics of nanocoatings and the resulting properties (i.e. nanohardness, toughness, wear rate, load-bearing ability, friction coefficient, and scratch resistance) are discussed. Size-affected mechanical properties of nanocoatings are examined, including their uses. Anti-abrasive nanocoatings, including metallic-, ceramic-, and polymeric-based layers, as well as different kinds of nanostructures, such as multi-layered nanocomposites and thin films, are reviewed. Provides a comprehensive overview of the fabrication methods for anti-abrasive nanocoatings Discusses the connections among fabrication parameters, the characteristics of nanocoatings and the resulting properties Reviews advantages and drawbacks of fabrication methods for anti-abrasive nanocoatings and clarifies the place of these nanocoatings in the world of nanotechnology
Book Synopsis Pulsed Laser Deposition of Aluminum Nitride and Silicon Nitride Thin Films by : Xiangqun Xu
Download or read book Pulsed Laser Deposition of Aluminum Nitride and Silicon Nitride Thin Films written by Xiangqun Xu and published by . This book was released on 1993 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators by : Rajan Sharad Naik
Download or read book Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators written by Rajan Sharad Naik and published by . This book was released on 1998 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Diamond and Aluminum Nitride Thin Films by : Been-Yu Liaw
Download or read book Diamond and Aluminum Nitride Thin Films written by Been-Yu Liaw and published by . This book was released on 1995 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book JJAP Letters written by and published by . This book was released on 1996 with total page 936 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Advances in Surface Acoustic Wave Technology, Systems and Applications by : Clemens C. W. Ruppel
Download or read book Advances in Surface Acoustic Wave Technology, Systems and Applications written by Clemens C. W. Ruppel and published by World Scientific. This book was released on 2000 with total page 325 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface acoustic wave (SAW) devices are recognized for their versatility and efficiency in controlling and processing electrical signals. This has resulted in a multitude of device concepts for a wide range of signal processing functions, such as delay lines, filters, resonators, pulse compressors, convolvers, and many more. As SAW technology has found its way into mass market products such as TV receivers, pagers, keyless entry systems and cellular phones, the production volume has risen to millions of devices produced every day. At the other end of the scale, there are specialized high performance signal processing SAW devices for satellite communication and military applications, such as radar and electronic warfare. This volume, together with Volume 2, presents an overview of recent advances in SAW technology, systems and applications by some of the foremost researchers in this exciting field.
