Nanolithography and Patterning Techniques in Microelectronics

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Publisher : Elsevier
ISBN 13 : 1845690907
Total Pages : 424 pages
Book Rating : 4.8/5 (456 download)

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Book Synopsis Nanolithography and Patterning Techniques in Microelectronics by : D Bucknall

Download or read book Nanolithography and Patterning Techniques in Microelectronics written by D Bucknall and published by Elsevier. This book was released on 2005-09-30 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications.A number of chapters look at ways of forming and modifying surfaces for patterning. These are complemented by chapters on particular patterning techniques such as soft lithography, ion beam patterning, the use of nanostencils, photolithography and inkjet printing. The book also discusses prototyping and the manufacture of particular devices.With its distinguished international team of contributors, Non-conventional lithography and patterning is a standard reference for both those researching and using advanced polymers in such areas as microelectronics and biomedical devices. - Looks at alternative approaches used to develop complex patterns at the nanoscale - Concentrates on state of the art nanolithographic methods - Written by a distinguished international team of contributors

Nanolithography

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Publisher : Woodhead Publishing
ISBN 13 : 0857098756
Total Pages : 599 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Nanolithography by : M Feldman

Download or read book Nanolithography written by M Feldman and published by Woodhead Publishing. This book was released on 2014-02-13 with total page 599 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next? and "How do we get there?Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. - Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions - Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography - Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics

Micro/Nanolithography

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Publisher : BoD – Books on Demand
ISBN 13 : 1789230306
Total Pages : 136 pages
Book Rating : 4.7/5 (892 download)

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Book Synopsis Micro/Nanolithography by : Jagannathan Thirumalai

Download or read book Micro/Nanolithography written by Jagannathan Thirumalai and published by BoD – Books on Demand. This book was released on 2018-05-02 with total page 136 pages. Available in PDF, EPUB and Kindle. Book excerpt: The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction of periodic nanopyramid structures using UV nanoimprint lithography for solar cell applications, large-area nanoimprint lithography and applications, micro-/nanopatterning on polymers, OPC under immersion lithography associated to novel luminescence applications, achromatic Talbot lithography (ATL) and the soft X-ray interference lithography. Individual chapters provide a base for a wide range of readers from different fiels, students and researchers, who may be doing research pertinent to the topics discussed in this book and find basic as well as advanced principles of designated subjects related to these phenomena explained plainly. The book contains six chapters by experts in different fields of lithographic fabrication and technology from over 15 research institutes across the globe.

Nano Lithography

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Publisher : John Wiley & Sons
ISBN 13 : 1118621700
Total Pages : 424 pages
Book Rating : 4.1/5 (186 download)

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Book Synopsis Nano Lithography by : Stefan Landis

Download or read book Nano Lithography written by Stefan Landis and published by John Wiley & Sons. This book was released on 2013-03-04 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics, chemistry, mechanics and fluidics, and are now developing the nanoworld with new tools and technologies. Beyond the scientific challenges that are endemic in this miniaturization race, next generation lithography techniques are essential for creating new devices, new functionalities and exploring new application fields. Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures − meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS). This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography. It is written for engineers or researchers new to the field, and will help readers to expand their knowledge of technologies that are constantly evolving.

Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines

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Publisher : Elsevier
ISBN 13 : 0323480586
Total Pages : 604 pages
Book Rating : 4.3/5 (234 download)

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Book Synopsis Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines by : Munir H. Nayfeh

Download or read book Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines written by Munir H. Nayfeh and published by Elsevier. This book was released on 2018-06-29 with total page 604 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines: Current and Future Trends addresses current and future trends in the application and commercialization of nanosilicon. The book presents current, innovative and prospective applications and products based on nanosilicon and their binary system in the fields of energy harvesting and storage, lighting (solar cells and nano-capacitor and fuel cell devices and nanoLEDs), electronics (nanotransistors and nanomemory, quantum computing, photodetectors for space applications; biomedicine (substance detection, plasmonic treatment of disease, skin and hair care, implantable glucose sensor, capsules for drug delivery and underground water and oil exploration), and art (glass and pottery). Moreover, the book includes material on the use of advanced laser and proximal probes for imaging and manipulation of nanoparticles and atoms. In addition, coverage is given to carbon and how it contrasts and integrates with silicon with additional related applications. This is a valuable resource to all those seeking to learn more about the commercialization of nanosilicon, and to researchers wanting to learn more about emerging nanosilicon applications. - Features a variety of designs and operation of nano-devices, helping engineers to make the best use of nanosilicon - Contains underlying principles of how nanomaterials work and the variety of applications they provide, giving those new to nanosilicon a fundamental understanding - Assesses the viability of various nanoslicon devices for mass production and commercialization, thereby providing an important source of information for engineers

Nanofabrication

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Publisher :
ISBN 13 : 9780750326087
Total Pages : 0 pages
Book Rating : 4.3/5 (26 download)

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Book Synopsis Nanofabrication by : José María de Teresa

Download or read book Nanofabrication written by José María de Teresa and published by . This book was released on 2020 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed, cost, etc. At the end of this section, the reader will be able to decide which technique to use for different applications. The second section explores more specific applications of the nanolithography techniques previously described; as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.

Nanofabrication

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Publisher : Springer Science & Business Media
ISBN 13 : 3709104246
Total Pages : 344 pages
Book Rating : 4.7/5 (91 download)

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Book Synopsis Nanofabrication by : Maria Stepanova

Download or read book Nanofabrication written by Maria Stepanova and published by Springer Science & Business Media. This book was released on 2011-11-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Nanotechnology and Tissue Engineering

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Publisher : CRC Press
ISBN 13 : 1420051830
Total Pages : 388 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Nanotechnology and Tissue Engineering by : Cato T. Laurencin

Download or read book Nanotechnology and Tissue Engineering written by Cato T. Laurencin and published by CRC Press. This book was released on 2008-06-16 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanofabrication gives us the ability to mimic biological structures with molecular level precision. Offering a natural progression of topics, Nanotechnology and Tissue Engineering: The Scaffold provides a state-of-the-art account of groundbreaking research in this rapidly emerging area of biomedical engineering. Emphasizing the importance of scaffo

Nanotechnology and Regenerative Engineering

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Publisher : CRC Press
ISBN 13 : 1466585382
Total Pages : 468 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Nanotechnology and Regenerative Engineering by : Cato T. Laurencin

Download or read book Nanotechnology and Regenerative Engineering written by Cato T. Laurencin and published by CRC Press. This book was released on 2014-10-28 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology and regenerative engineering have emerged to the forefront as the most versatile and innovative technologies to foster novel therapeutic techniques and strategies of the twenty-first century. The first edition of Nanotechnology and Tissue Engineering: The Scaffold was the first comprehensive source to explain the developments in nano

Microlithography

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Publisher : CRC Press
ISBN 13 : 1420051539
Total Pages : 864 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Microlithography by : Bruce W. Smith

Download or read book Microlithography written by Bruce W. Smith and published by CRC Press. This book was released on 2018-10-03 with total page 864 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. New in the Second Edition In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including: Immersion Lithography 157nm Lithography Electron Projection Lithography (EPL) Extreme Ultraviolet (EUV) Lithography Imprint Lithography Photoresists for 193nm and Immersion Lithography Scatterometry Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

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Publisher : BoD – Books on Demand
ISBN 13 : 9535110853
Total Pages : 238 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies by : Kenichi Takahata

Download or read book Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies written by Kenichi Takahata and published by BoD – Books on Demand. This book was released on 2013-05-29 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

Nanocoatings and Ultra-Thin Films

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Publisher : Elsevier
ISBN 13 : 0857094904
Total Pages : 449 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Nanocoatings and Ultra-Thin Films by : Abdel Salam Hamdy Makhlouf

Download or read book Nanocoatings and Ultra-Thin Films written by Abdel Salam Hamdy Makhlouf and published by Elsevier. This book was released on 2011-09-14 with total page 449 pages. Available in PDF, EPUB and Kindle. Book excerpt: Coatings are used for a wide range of applications, from anti-fogging coatings for glass through to corrosion control in the aerospace and automotive industries. Nanocoatings and ultra-thin films provides an up-to-date review of the fundamentals, processes of deposition, characterisation and applications of nanocoatings.Part one covers technologies used in the creation and analysis of thin films, including chapters on current and advanced coating technologies in industry, nanostructured thin films from amphiphilic molecules, chemical and physical vapour deposition methods and methods for analysing nanocoatings and ultra-thin films. Part two focuses on the applications of nanocoatings and ultra-thin films, with chapters covering topics such as nanocoatings for architectural glass, packaging applications, conventional and smart nanocoatings for corrosion protection in aerospace engineering and ultra-thin membranes for sensor applications.With its distinguished editors and international team of contributors, Nanocoatings and ultra-thin films is an essential reference for professional engineers in the glazing, consctruction, electronics and transport industries, as well as all those with an academic research interest in the field. - Provides an up-to-date review of the fundamentals, processes of deposition, characterisation and applications of nanocoatings - Focuses on the applications of nanocoatings and ultra-thin films, covering topics such as nanocoatings for architectural glass, packaging applications and ultra-thin membranes for sensor applications - Includes chapters on current and advanced coating technologies in industry, nanostructured thin films from amphiphilic molecules, chemical and physical vapour deposition methods and methods for analysing nanocoatings and ultra-thin films

Micro/Nano Patterning on Polymers Using Soft Lithography Technique

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Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (115 download)

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Book Synopsis Micro/Nano Patterning on Polymers Using Soft Lithography Technique by : Sujatha Lakshminarayanan

Download or read book Micro/Nano Patterning on Polymers Using Soft Lithography Technique written by Sujatha Lakshminarayanan and published by . This book was released on 2018 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication is essential in the field of science and technology. The development and innovations in this field are already prominent in the society through microelectronics and optoelectronics. The lithography or transfer of pattern to the substrate/surface of a layer is an important process step in microfabrication and is usually carried out with photolithography. Though photolithography is a well-established technique, it suffers from drawbacks such as limited feature size due to optical diffraction, requirement of high-energy radiation for small features, and high-cost involvement for sophisticated instruments. Also, it cannot be applied to nonplanar surfaces. Soft lithography is complement to photolithography which overcomes the above-mentioned drawbacks. Soft lithography is a simple and inexpensive method, and also, it suits to wide range of materials and very large surface areas. High-quality micropatterns or nanopatterns can be made using a patterned elastomeric stamp. This article briefly describes the various soft lithography techniques to obtain high-resolution structures for nanofabrication.

Handbook of Advanced Dielectric, Piezoelectric and Ferroelectric Materials

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Publisher : Elsevier
ISBN 13 : 1845694007
Total Pages : 1091 pages
Book Rating : 4.8/5 (456 download)

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Book Synopsis Handbook of Advanced Dielectric, Piezoelectric and Ferroelectric Materials by : Z-G Ye

Download or read book Handbook of Advanced Dielectric, Piezoelectric and Ferroelectric Materials written by Z-G Ye and published by Elsevier. This book was released on 2008-03-20 with total page 1091 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive book covers recent developments in advanced dielectric, piezoelectric and ferroelectric materials. Dielectric materials such as ceramics are used to manufacture microelectronic devices. Piezoelectric components have been used for many years in radioelectrics, time-keeping and, more recently, in microprocessor-based devices. Ferroelectric materials are widely used in various devices such as piezoelectric/electrostrictive transducers and actuators, pyroelectric infrared detectors, optical integrated circuits, optical data storage and display devices.The book is divided into eight parts under the general headings: High strain high performance piezo- and ferroelectric single crystals; Electric field-induced effects and domain engineering; Morphotropic phase boundary related phenomena; High power piezoelectric and microwave dielectric materials; Nanoscale piezo- and ferroelectrics; Piezo- and ferroelectric films; Novel processing and new materials; Novel properties of ferroelectrics and related materials. Each chapter looks at key recent research on these materials, their properties and potential applications.Advanced dielectric, piezoelectric and ferroelectric materials is an important reference tool for all those working in the area of electrical and electronic materials in general and dielectrics, piezoelectrics and ferroelectrics in particular. - Covers the latest developments in advanced dielectric, piezoelectric and ferroelectric materials - Includes topics such as high strain high performance piezo and ferroelectric single crystals - Discusses novel processing and new materials, and novel properties of ferroelectrics and related materials

Microelectronics

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Publisher : Scientific e-Resources
ISBN 13 : 1839472340
Total Pages : 320 pages
Book Rating : 4.8/5 (394 download)

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Book Synopsis Microelectronics by : Mason Snider

Download or read book Microelectronics written by Mason Snider and published by Scientific e-Resources. This book was released on 2018-06-21 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectronics is the cornerstone of the information technologies that pervade virtually every aspect of contemporary life. It is difficult to imagine any field of science or technology that has had a more profound impact on the latter half of the 20 century than microelectronics. Microelectronics industry has been able to provide transistors, chips and products that are becoming smaller, faster, cheaper and better every year. As transistors become smaller, they become faster, more and more of such transistors can be packed on a chip, and thus chips are able to store and process more information. Digital circuits are made from analog components. The design must assure that the analog nature of the components doesn't dominate the desired digital behaviour. Digital systems must manage noise and timing margins, parasitic inductances and capacitances, and filter power connections. Bad designs have intermittent problems such as "e;glitches"e;, vanishingly-fast pulses that may trigger some logic but not others, "e;runt pulses"e; that do not reach valid "e;threshold"e; voltages, or unexpected ("e;undecoded"e;) combinations of logic states. A digital circuit is often constructed from small electronic circuits called logic gates that can be used to create combinational logic. Each logic gate represents a function of boolean logic. A logic gate is an arrangement of electrically controlled switches, better known as transistors. Each logic symbol is represented by a different shape. This book is designed for advanced undergraduates and graduate students with background knowledge in basic electronics including biasing, modeling, circuit, analysis, and frequency response.

Recent Advances in Nanofabrication Techniques and Applications

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Author :
Publisher : BoD – Books on Demand
ISBN 13 : 953307602X
Total Pages : 630 pages
Book Rating : 4.5/5 (33 download)

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Book Synopsis Recent Advances in Nanofabrication Techniques and Applications by : Bo Cui

Download or read book Recent Advances in Nanofabrication Techniques and Applications written by Bo Cui and published by BoD – Books on Demand. This book was released on 2011-12-02 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.

Nanostructure Control of Materials

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Publisher : Woodhead Publishing
ISBN 13 : 1845691180
Total Pages : 373 pages
Book Rating : 4.8/5 (456 download)

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Book Synopsis Nanostructure Control of Materials by : R H J Hannink

Download or read book Nanostructure Control of Materials written by R H J Hannink and published by Woodhead Publishing. This book was released on 2006-02-28 with total page 373 pages. Available in PDF, EPUB and Kindle. Book excerpt: The ability to measure and manipulate matter on the nanometer level is making possible a new generation of materials with enhanced mechanical, optical, transport and magnetic properties. This important book summarises key developments in nanotechnology and their impact on the processing of metals, polymers, composites and ceramics.After a brief introduction, a number of chapters discuss the practical issues involved in the commercial production and use of nanomaterials. Other chapters review ways of nanoengineering steel, aluminium and titanium alloys. Elsewhere the book discusses the use of nanoengineered metal hydrides to store hydrogen as an energy source, and the development of nanopolymers for batteries and other energy storage devices. Other chapters discuss the use of nanotechnology to enhance the toughness of ceramics, the production of synthetic versions of natural materials such as bone, and the development of nanocomposites.Nanostructure control of materials is an ideal introduction to the ways nanotechnology is being used to create new materials for industry. It will be welcomed by R&D managers in such sectors as automotive engineering as well as academics working in this exciting area. - Reviews key developments in nanotechnology and their impact on various materials - Edited by leading experts in the field