Nanofabrication Using Block Copolymer Lithography

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Nanofabrication

Author : Maria Stepanova
Publisher : Springer Science & Business Media
ISBN 13 : 3709104246
Total Pages : 344 pages
Book Rating : 4.7/5 (91 download)

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Book Synopsis Nanofabrication by : Maria Stepanova

Download or read book Nanofabrication written by Maria Stepanova and published by Springer Science & Business Media. This book was released on 2011-11-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Directed Self-assembly of Block Co-polymers for Nano-manufacturing

Author : Roel Gronheid
Publisher : Woodhead Publishing
ISBN 13 : 0081002610
Total Pages : 328 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Directed Self-assembly of Block Co-polymers for Nano-manufacturing by : Roel Gronheid

Download or read book Directed Self-assembly of Block Co-polymers for Nano-manufacturing written by Roel Gronheid and published by Woodhead Publishing. This book was released on 2015-07-17 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques. - Authoritative outlining of theoretical principles and modeling techniques to give a thorough introdution to the topic - Discusses a broad range of practical applications for directed self-assembly in nano-manufacturing - Highlights the importance of this technology to both the present and future of nano-manufacturing by exploring its potential use in a range of fields

Nanolithography and Patterning Techniques in Microelectronics

Author : D Bucknall
Publisher : Elsevier
ISBN 13 : 1845690907
Total Pages : 424 pages
Book Rating : 4.8/5 (456 download)

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Book Synopsis Nanolithography and Patterning Techniques in Microelectronics by : D Bucknall

Download or read book Nanolithography and Patterning Techniques in Microelectronics written by D Bucknall and published by Elsevier. This book was released on 2005-09-30 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications.A number of chapters look at ways of forming and modifying surfaces for patterning. These are complemented by chapters on particular patterning techniques such as soft lithography, ion beam patterning, the use of nanostencils, photolithography and inkjet printing. The book also discusses prototyping and the manufacture of particular devices.With its distinguished international team of contributors, Non-conventional lithography and patterning is a standard reference for both those researching and using advanced polymers in such areas as microelectronics and biomedical devices. - Looks at alternative approaches used to develop complex patterns at the nanoscale - Concentrates on state of the art nanolithographic methods - Written by a distinguished international team of contributors

Nanofabrication

Author : Ampere A. Tseng
Publisher : World Scientific
ISBN 13 : 9812790896
Total Pages : 583 pages
Book Rating : 4.8/5 (127 download)

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Book Synopsis Nanofabrication by : Ampere A. Tseng

Download or read book Nanofabrication written by Ampere A. Tseng and published by World Scientific. This book was released on 2008 with total page 583 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.

Fundamental Principles of Optical Lithography

Author : Chris Mack
Publisher : John Wiley & Sons
ISBN 13 : 1119965071
Total Pages : 503 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Fundamental Principles of Optical Lithography by : Chris Mack

Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

Block Copolymers II

Author : Volker Abetz
Publisher : Springer Science & Business Media
ISBN 13 : 9783540269021
Total Pages : 272 pages
Book Rating : 4.2/5 (69 download)

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Book Synopsis Block Copolymers II by : Volker Abetz

Download or read book Block Copolymers II written by Volker Abetz and published by Springer Science & Business Media. This book was released on 2005-12-02 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: . A.J. M ller, V. Balsamo, M.L. Arnal: Nucleation and Crystallization in Diblock and Triblock Copolymers.- 2 J.-F. Gohy: Block Copolymer Micelles.- 3 M.A. Hillmyer: Nanoporous Materials from Block Copolymer Precursors.- 4 M. Li, C. Coenjarts, C.K. Ober: Patternable Block Copolymers.-

Nanofabrication

Author : Zheng Cui (author)
Publisher : Springer Nature
ISBN 13 : 3031625463
Total Pages : 418 pages
Book Rating : 4.0/5 (316 download)

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Book Synopsis Nanofabrication by : Zheng Cui (author)

Download or read book Nanofabrication written by Zheng Cui (author) and published by Springer Nature. This book was released on with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Introduction to Microlithography

Author : L. F. Thompson
Publisher : Academic
ISBN 13 :
Total Pages : 568 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Introduction to Microlithography by : L. F. Thompson

Download or read book Introduction to Microlithography written by L. F. Thompson and published by Academic. This book was released on 1994 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reviews the theory, materials, and processes used in the lithographic process by which circuit elements are fabricated (it is these elements' decreasing size that has made possible the miniaturization of electronic devices). After a brief historical introduction, four major topics are discussed: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. The new edition reflects the many changes that have occurred since the 1983 publication of this tutorial/reference. Annotation copyright by Book News, Inc., Portland, OR

Nanofabrication Handbook

Author : Stefano Cabrini
Publisher : CRC Press
ISBN 13 : 1420090526
Total Pages : 548 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Nanofabrication Handbook by : Stefano Cabrini

Download or read book Nanofabrication Handbook written by Stefano Cabrini and published by CRC Press. This book was released on 2012-02-24 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research. Helping readers to select the proper fabricating technique for their experiments, the book provides a broad vision of the most critical problems and explains how to solve them. It includes basic definitions and introduces the main underlying concepts of nanofabrication. The book also discusses the major advantages and disadvantages of each approach and offers a wide variety of examples of cutting-edge applications. Each chapter focuses on a particular method or aspect of study. For every method, the contributors describe the underlying theoretical basis, resolution, patterns and substrates used, and applications. They show how applications at the nanoscale require a different process and understanding than those at the microscale. For each experiment, they elucidate key solutions to problems relating to materials, methods, and surface considerations. A complete resource for this rapidly emerging interdisciplinary field, this handbook provides practical information for planning the experiments of any project that employs nanofabrication techniques. It gives readers a foundation to enter the complex world of nanofabrication and inspires the scientific community at large to push the limits of nanometer resolution.

Nanolithography

Author : M Feldman
Publisher : Woodhead Publishing
ISBN 13 : 0857098756
Total Pages : 599 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Nanolithography by : M Feldman

Download or read book Nanolithography written by M Feldman and published by Woodhead Publishing. This book was released on 2014-02-13 with total page 599 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next? and "How do we get there?Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. - Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions - Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography - Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics

Nanoimprint Lithography: An Enabling Process for Nanofabrication

Author : Weimin Zhou
Publisher : Springer Science & Business Media
ISBN 13 : 3642344283
Total Pages : 270 pages
Book Rating : 4.6/5 (423 download)

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Book Synopsis Nanoimprint Lithography: An Enabling Process for Nanofabrication by : Weimin Zhou

Download or read book Nanoimprint Lithography: An Enabling Process for Nanofabrication written by Weimin Zhou and published by Springer Science & Business Media. This book was released on 2013-01-04 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274663
Total Pages : 1983 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by : Marc J. Madou

Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1983 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Nanoparticles

Author : Vincent Rotello
Publisher : Springer Science & Business Media
ISBN 13 : 1441990429
Total Pages : 291 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Nanoparticles by : Vincent Rotello

Download or read book Nanoparticles written by Vincent Rotello and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt: The integration of top-down lithographic techniques with synthetic organic and inorganic technologies is a key challenge for the development of effective nanosca1e devices. In terms of assembly, nanoparticles provide an excellent tool for bridging the gap between the resolution of electron beam lithography (-60 nm) and the molecular level. Nanoparticles possess an array of unique properties associated with their core materials, including distinctive magnetic, photonic and electronic behavior. This behavior can be controlled and applied through monolayer functionalization and assembly strategies, making nanoparticles both scaffolds and building blocks for nanotechnology. The diverse structures and properties of nanoparticles makes them useful tools for both fundamental studies and pragmatic applications in a range of disciplines. This volume is intended to provide an integrated overview of the synthesis and assembly of nanoparticles, and their applications in chemistry, biology, and materials science. The first three chapters focus on the creation and intrinsic properties of nanoparticles, covering some of the myriad core materials and shapes that have been created. The remaining chapters of the book discuss the assembly of nanoparticles, and applications of both discrete particles and particle assemblies in a wide range of fields, including device and sensor fabrication, catalysis, biology, and nanosca1e electronic and magnetic systems.

The Physics of Block Copolymers

Author : Ian W. Hamley
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (139 download)

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Book Synopsis The Physics of Block Copolymers by : Ian W. Hamley

Download or read book The Physics of Block Copolymers written by Ian W. Hamley and published by . This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Manufacturing Techniques for Microfabrication and Nanotechnology

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1420055194
Total Pages : 672 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Manufacturing Techniques for Microfabrication and Nanotechnology by : Marc J. Madou

Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Microfabrication of Stimuli-Responsive Polymers

Author : Chuanliang Feng
Publisher : Springer Nature
ISBN 13 : 9813368691
Total Pages : 194 pages
Book Rating : 4.8/5 (133 download)

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Book Synopsis Microfabrication of Stimuli-Responsive Polymers by : Chuanliang Feng

Download or read book Microfabrication of Stimuli-Responsive Polymers written by Chuanliang Feng and published by Springer Nature. This book was released on 2021-03-08 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces readers to interfacial reactions in confinement on stimuli-responsive homopolymer and diblock copolymer films. It also includes investigations concerning the immobilization of (bio)molecules and the fabrication of biomolecular patterns by reactive microcontact printing on these reactive polymer films. In turn, the book takes advantage of the microphase separation of diblock copolymer films to study the fabrication of nanopatterns, which could contribute to the future development of a model system that allows us to area-selectively deposit and address (bio)molecules. Given its scope, the book broadens readers’ perspective on the microfabrication of stimuli-responsive polymers.

Nano- and Microfabrication for Industrial and Biomedical Applications

Author : Regina Luttge
Publisher : William Andrew
ISBN 13 : 0323389287
Total Pages : 280 pages
Book Rating : 4.3/5 (233 download)

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Book Synopsis Nano- and Microfabrication for Industrial and Biomedical Applications by : Regina Luttge

Download or read book Nano- and Microfabrication for Industrial and Biomedical Applications written by Regina Luttge and published by William Andrew. This book was released on 2016-06-12 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. - Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D - Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk - Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems