Modeling MEMS and NEMS

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Publisher : CRC Press
ISBN 13 : 1420035290
Total Pages : 382 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Modeling MEMS and NEMS by : John A. Pelesko

Download or read book Modeling MEMS and NEMS written by John A. Pelesko and published by CRC Press. This book was released on 2002-11-25 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

Modeling MEMS and NEMS

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Publisher :
ISBN 13 :
Total Pages : 357 pages
Book Rating : 4.:/5 (3 download)

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Book Synopsis Modeling MEMS and NEMS by : John A. Pelesko

Download or read book Modeling MEMS and NEMS written by John A. Pelesko and published by . This book was released on 2003 with total page 357 pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS and NEMS

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Author :
Publisher : CRC Press
ISBN 13 : 1351836137
Total Pages : 263 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis MEMS and NEMS by : Sergey Edward Lyshevski

Download or read book MEMS and NEMS written by Sergey Edward Lyshevski and published by CRC Press. This book was released on 2018-10-03 with total page 263 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Mems/Nems

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 0387257861
Total Pages : 2094 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Mems/Nems by : Cornelius T. Leondes

Download or read book Mems/Nems written by Cornelius T. Leondes and published by Springer Science & Business Media. This book was released on 2007-10-08 with total page 2094 pages. Available in PDF, EPUB and Kindle. Book excerpt: This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

MEMS: Field Models and Optimal Design

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Author :
Publisher : Springer
ISBN 13 : 3030214966
Total Pages : 190 pages
Book Rating : 4.0/5 (32 download)

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Book Synopsis MEMS: Field Models and Optimal Design by : Paolo Di Barba

Download or read book MEMS: Field Models and Optimal Design written by Paolo Di Barba and published by Springer. This book was released on 2019-06-26 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.

MEMS/NEMS Sensors

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Author :
Publisher : MDPI
ISBN 13 : 3039216341
Total Pages : 242 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis MEMS/NEMS Sensors by : Goutam Koley

Download or read book MEMS/NEMS Sensors written by Goutam Koley and published by MDPI. This book was released on 2019-11-20 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

Smart Material Systems and MEMS

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 0470093625
Total Pages : 418 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Smart Material Systems and MEMS by : Vijay K. Varadan

Download or read book Smart Material Systems and MEMS written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2006-11-02 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

MEMS and NEMS

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Author :
Publisher : CRC Press
ISBN 13 : 1420040510
Total Pages : 461 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS and NEMS by : Sergey Edward Lyshevski

Download or read book MEMS and NEMS written by Sergey Edward Lyshevski and published by CRC Press. This book was released on 2018-10-03 with total page 461 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Acoustic Wave and Electromechanical Resonators

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Author :
Publisher : Artech House
ISBN 13 : 1607839784
Total Pages : 364 pages
Book Rating : 4.6/5 (78 download)

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Book Synopsis Acoustic Wave and Electromechanical Resonators by : Humberto Campanella

Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

Advances in Multiphysics Simulation and Experimental Testing of Mems

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Author :
Publisher : Imperial College Press
ISBN 13 : 1860948634
Total Pages : 504 pages
Book Rating : 4.8/5 (69 download)

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Book Synopsis Advances in Multiphysics Simulation and Experimental Testing of Mems by : Attilio Frangi

Download or read book Advances in Multiphysics Simulation and Experimental Testing of Mems written by Attilio Frangi and published by Imperial College Press. This book was released on 2008 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.

Handbook of Silicon Based MEMS Materials and Technologies

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Author :
Publisher : Elsevier
ISBN 13 : 9780815519881
Total Pages : 668 pages
Book Rating : 4.5/5 (198 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2009-12-08 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Resonant MEMS

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Publisher : John Wiley & Sons
ISBN 13 : 352767635X
Total Pages : 512 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Resonant MEMS by : Oliver Brand

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

MEMS-based Circuits and Systems for Wireless Communication

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Publisher : Springer Science & Business Media
ISBN 13 : 1441987983
Total Pages : 334 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis MEMS-based Circuits and Systems for Wireless Communication by : Christian C Enz

Download or read book MEMS-based Circuits and Systems for Wireless Communication written by Christian C Enz and published by Springer Science & Business Media. This book was released on 2012-08-21 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS-based Circuits and Systems for Wireless Communications provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead. This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on design of electronic circuits incorporating MEMS. Circuit design techniques specific to MEMS resonators are applied to oscillators and active filters. In Part III contributors discuss how MEMS can advantageously be used in radios to increase their miniaturization and reduce their power consumption. RF systems built around MEMS components such as MEMS-based frequency synthesis including all-digital PLLs, ultra-low power MEMS-based communication systems and a MEMS-based automotive wireless sensor node are described.

From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications

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Author :
Publisher : CRC Press
ISBN 13 : 9780429109218
Total Pages : 650 pages
Book Rating : 4.1/5 (92 download)

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Book Synopsis From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications by : Marc J. Madou

Download or read book From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications written by Marc J. Madou and published by CRC Press. This book was released on 2011 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms.

Micro Electro Mechanical System Design

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Author :
Publisher : CRC Press
ISBN 13 : 1420027751
Total Pages : 492 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Micro Electro Mechanical System Design by : James J. Allen

Download or read book Micro Electro Mechanical System Design written by James J. Allen and published by CRC Press. This book was released on 2005-07-08 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,

Meso- to Micro- Actuators

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Publisher : CRC Press
ISBN 13 : 9781420008579
Total Pages : 416 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Meso- to Micro- Actuators by : Alberto Borboni

Download or read book Meso- to Micro- Actuators written by Alberto Borboni and published by CRC Press. This book was released on 2008-05-05 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Exploring the design and use of micro- and meso-actuators, this book begins with theory and a general synopsis of the state-of-the-art in theoretical research. It discusses how to employ modern approaches in research and design activity, then presents a systematic list of already available products and details their potential for use. Design possibilities based on new technologies are clearly separated from those due to scale reduction, aiding in the selection of proper technology. The author takes a multi-physic approach to guarantee a comprehensive modeling technique, while the many references to experimental data and to existing microacutators assure an effective applicability of proposed theories.

Mechanics of Microelectromechanical Systems

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Publisher : Springer Science & Business Media
ISBN 13 : 0387230378
Total Pages : 415 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Mechanics of Microelectromechanical Systems by : Nicolae Lobontiu

Download or read book Mechanics of Microelectromechanical Systems written by Nicolae Lobontiu and published by Springer Science & Business Media. This book was released on 2006-01-16 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.