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Micromachining Scanning Probe Lithography
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Book Synopsis Micromachining: Scanning Probe Lithography by : Lydia Anggraini
Download or read book Micromachining: Scanning Probe Lithography written by Lydia Anggraini and published by Independently Published. This book was released on 2019-03-13 with total page 82 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describe how nanoscale resist patterns technology were machined or fabricated on a silicon substrate using a scanning probe microscope (SPM) based on nanolithography (SPNL). The advantage by using this technology is the low cost of nanopatterning device technology can be created, where an atomic force microscope (AFM) is used. Conventional SPNL directly writes nanopatterns using a single probe cantilever.
Book Synopsis Scanning Probe Lithography by : Hyongsok T. Soh
Download or read book Scanning Probe Lithography written by Hyongsok T. Soh and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography by : P. Rai-Choudhury
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Book Synopsis Scanning Probe Lithography by : Yu Kyoung Ryu
Download or read book Scanning Probe Lithography written by Yu Kyoung Ryu and published by CRC Press. This book was released on 2022-12-22 with total page 145 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials. • Introduces historical background of SPL, including evolution of the technique and tools • Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied • Shows the different types of devices and structures fabricated by SPL, together with the processing steps • Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups • Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.
Book Synopsis Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology by : Bijoy Bhattacharyya
Download or read book Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology written by Bijoy Bhattacharyya and published by William Andrew. This book was released on 2015-04-10 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)
Book Synopsis Applied Scanning Probe Methods IV by : Bharat Bhushan
Download or read book Applied Scanning Probe Methods IV written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2006-04-28 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microlithography and Metrology in Micromachining by :
Download or read book Microlithography and Metrology in Micromachining written by and published by . This book was released on 1997 with total page 154 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Advancements in Scanning Probe Lithography and Nanostructure Fabrication by : Hyongsok T. Soh
Download or read book Advancements in Scanning Probe Lithography and Nanostructure Fabrication written by Hyongsok T. Soh and published by . This book was released on 1999 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Materials and Processes for Next Generation Lithography by :
Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place
Book Synopsis Fundamentals of Microfabrication by : Marc J. Madou
Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2018-10-08 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Book Synopsis Development of a Microfluidic Device for Patterning Multiple Species by Scanning Probe Lithography by : Juan Alberto Rivas Cardona
Download or read book Development of a Microfluidic Device for Patterning Multiple Species by Scanning Probe Lithography written by Juan Alberto Rivas Cardona and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Probe Lithography (SPL) is a versatile nanofabrication platform that leverages microfluidic 0́ink0́+ delivery systems with Scanning Probe Microscopy (SPM) for generating surface-patterned chemical functionality on the sub-100 nm length scale. One of the prolific SPL techniques is Dip Pen Nanolithography4́Ø (DPN4́Ø). High resolution, multiplexed registration and parallel direct-write capabilities make DPN (and other SPL techniques) a power tool for applications that are envisioned in micro/nano-electronics, molecular electronics, catalysis, cryptography (brand protection), combinatorial synthesis (nano-materials discovery and characterization), biological recognition, genomics, and proteomics. One of the greatest challenges for the successful performance of the DPN process is the delivery of multiple inks to the scanning probe tips for nano-patterning. The purpose of the present work is to fabricate a microfluidic ink delivery device (called 0́Centiwell0́+) for DPN (and other SPL) applications. The device described in this study maximizes the number of chemical species (inks) for nanofabrication that can be patterned simultaneously by DPN to conform the industrial standards for fluid handling for biochemical assays (e.g., genomic and proteomic). Alternate applications of Centiwell are also feasible for the various envisioned applications of DPN (and other SPL techniques) that were listed above. The Centiwell consists of a two-dimensional array of 96 microwells that are bulk micromachined on a silicon substrate. A thermoelectric module is attached to the back side of the silicon substrate and is used to cool the silicon substrate to temperatures below the dew point. By reducing the temperature of the substrate to below the dew point, water droplets are condensed in the microwell array. Microbeads of a hygroscopic material (e.g., poly-ethylene glycol) are dispensed into the microwells to prevent evaporation of the condensed water. Furthermore, since poly-ethylene glycol (PEG) is water soluble, it forms a solution inside the microwells which is subsequently used as the ink for the DPN process. The delivery of the ink to the scanning probe tip is performed by dipping the tip (or multiple tips in an array) into the microwells containing the PEG solution. This thesis describes the various development steps for the Centiwell. These steps include the mask design, the bulk micromachining processes explored for the micro-fabrication of the microwell array, the thermal design calculations performed for the selection of the commercially available thermoelectric coolers, the techniques explored for the synthesis of the PEG microbeads, and the assembly of all the components for integration into a functional Centiwell. Finally, the successful implementation of the Centiwell for nanolithography of PEG solutions is also demonstrated.
Book Synopsis Micromanufacturing by : Kornel F. Ehmann
Download or read book Micromanufacturing written by Kornel F. Ehmann and published by Springer Science & Business Media. This book was released on 2007-04-29 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt: This international technology assessment study has focused on the emerging global trend toward the miniaturization of manufacturing processes, equipment and systems for microscale components and products. The study has investigated both the state-of-the-art as well as emerging technologies from the scientific, technological, and commercialization perspectives across key industrial sectors in the USA, Asia and Europe.
Book Synopsis Scanning Probe Microscopy by : Nikodem Tomczak
Download or read book Scanning Probe Microscopy written by Nikodem Tomczak and published by World Scientific. This book was released on 2011 with total page 277 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Probe Microscopy (SPM) is the enabling tool for nano(bio)technology, which has opened new vistas in many interdisciplinary research areas. Concomitant with the developments in SPM instrumentation and techniques are new and previously unthought-of opportunities in materials nanofabrication and characterisation. In particular, the developments in addressing and manipulating matter at the level of single atoms or molecules, and studies of biological materials (e.g. live cells, or cell membranes) result in new and exciting discoveries. The rising importance of SPM demands a concise treatment in the form of a book which is accessible to interdisciplinary practitioners. This book highlights recent advances in the field of SPM with sufficient depth and breadth to provide an intellectually stimulating overview of the current state of the art. The book is based on a set of carefully selected original works from renowned contributors on topics that range from atom technology, scanning tunneling spectroscopy of self-assembled nanostructures, SPM probe fabrication, scanning force microscopy applications in biology and materials science down to the single molecule level, novel scanning probe techniques, and nanolithography. The variety of topics underlines the strong interdisciplinary character of SPM related research and the combined expertise of the contributors gives us a unique opportunity to discuss possible future trends in SPM related research. This makes the book not merely a collection of already published material but an enlightening insight into cutting edge research and global SPM research trends.
Author :Terry A. Michalske Publisher :SPIE-International Society for Optical Engineering ISBN 13 : Total Pages :166 pages Book Rating :4.3/5 (91 download)
Book Synopsis Micromachining and Imaging by : Terry A. Michalske
Download or read book Micromachining and Imaging written by Terry A. Michalske and published by SPIE-International Society for Optical Engineering. This book was released on 1997 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Nanofabrication by : Ampere A. Tseng
Download or read book Nanofabrication written by Ampere A. Tseng and published by World Scientific. This book was released on 2008 with total page 583 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.
Book Synopsis Materials & Process Integration for MEMS by : Francis E. H. Tay
Download or read book Materials & Process Integration for MEMS written by Francis E. H. Tay and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contains useful process details, recipes, tables, charts and includes numerous device applications.
