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Micromachined Ultrasonic Transducers
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Book Synopsis Micromachined Ultrasonic Transducers by :
Download or read book Micromachined Ultrasonic Transducers written by and published by . This book was released on 1997 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabricated ultrasonic transducers have been generated which operate in both liquids and gases. Air coupled through transmission of aluminum was observed for the first time using a pair of 2.3 MHz transducers. The dynamic range of the transducers was 110 dB, and the received signal had an SNR of 30 dB. Air coupled through transmission of steel and glass has also been observed. A theoretical model for the transducers has been refined and agrees well with experimental results. A robust microfabrication process has been developed and was used to generate air transducers which resonate from 2 to 12 MHz, as well as immersion transducers that operate in water from 1 to 20 MHz with a 60 dB dynamic range. Optimized immersion and air transducers have been designed and a dynamic range above 110 dB is anticipated. This development effort finds applications in hydrophones, medical ultrasound, nondestructive evaluation, ranging, flow metering, and scanning tip force sensing and lithography.
Book Synopsis Piezoelectric and Acoustic Materials for Transducer Applications by : Ahmad Safari
Download or read book Piezoelectric and Acoustic Materials for Transducer Applications written by Ahmad Safari and published by Springer Science & Business Media. This book was released on 2008-09-11 with total page 483 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’s transducer technology, and the principles used in transducer design. It provides examples of a wide range of applications of such materials along with the appertaining rationales. With contributions from distinguished researchers, this is a comprehensive reference on all the pertinent aspects of piezoelectric materials.
Book Synopsis Ultrasonic Transducer Materials by : O. E. Mattiat
Download or read book Ultrasonic Transducer Materials written by O. E. Mattiat and published by Springer Science & Business Media. This book was released on 2013-03-13 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years remarkable progress has been made in the development of materials for ultrasonic transducers. There is a continuing trend towards increasingly higher frequency ranges for the application of ultrasonic trans ducers in modern technology. The progress in this area has been especially rapid and articles and papers on the subject are scattered over numerous technical and scientific journals in this country and abroad. Although good books have appeared on ultrasonics in general and ultrasonic transducers in particular in which, for obvious reasons, materials play an important part, no comprehensive treatise is available that represents the state-of-the-art on modern ultrasonic transducer materials. This book intends to fill a need for a thorough review of the subject. Not all materials are covered of which, theoretically, ultrasonic trans ducers could be made but those that are or may be of technical impor tance and which have inherent electro acoustic transducer properties, i.e., materials that are either magnetostrictive, electrostrictive, or piezoelectric. The book has been devided into three parts which somewhat reflect the historic development of ultrasonic transducer materials for important tech nical application. Chapter 1 deals with magnetostrictive materials, magnetostrictive met als and their alloys, and magnetostrictive ferrites (polycrystalline ceramics). The metals are useful especially in cases where ruggednes of the transducers are of overriding importance and in the lower ultrasonic frequency range.
Book Synopsis Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications by : Der-Song Lin
Download or read book Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications written by Der-Song Lin and published by Stanford University. This book was released on 2011 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive micromachined ultrasonic transducers (CMUTs), have been widely studied in academia and industry over the last decade. CMUTs provide many benefits over traditional piezoelectric transducers including improvement in performance through wide bandwidth, and ease of electronics integration, with the potential to batch fabricate very large 2D arrays with low-cost and high-yield. Though many aspects of CMUT technology have been studied over the years, packaging the CMUT into a fully practical system has not been thoroughly explored. Two important interfaces of packaging that this thesis explores are device encapsulation (the interface between CMUTs and patients) and full electronic integration of large scale 2D arrays (the interface between CMUTs and electronics). In the first part of the work, I investigate the requirements for the CMUT encapsulation. For medical usage, encapsulation is needed to electrically insulate the device, mechanically protect the device, and maintain transducer performance, especially the access of the ultrasound energy. While hermetic sealing can protect many other MEMS devices, CMUTs require mechanical interaction to a fluid, which makes fulfilling the previous criterion very challenging. The proposed solution is to use a viscoelastic material with the glass-transition-temperature lower than room temperature, such as Polydimethylsiloxane (PDMS), to preserve the CMUT static and dynamic performance. Experimental implementation of the encapsulated imaging CMUT arrays shows the device performance was maintained; 95 % of efficiency, 85% of the maximum output pressure, and 91% of the fractional bandwidth (FBW) can be preserved. A viscoelastic finite element model was also developed and shows the performance effects of the coating can be accurately predicted. Four designs, providing acoustic crosstalk suppression, flexible substrate, lens focusing, and blood flow monitoring using PDMS layer were also demonstrated. The second part of the work, presents contributions towards the electronic integration and packaging of large-area 2-D arrays. A very large 2D array is appealing for it can enable advanced novel imaging applications, such as a reconfigurable array, and a compression plate for breast cancer screening. With these goals in mind, I developed the first large-scale fully populated and integrated 2D CMUTs array with 32 by 192 elements. In this study, I demonstrate a flexible and reliable integration approach by successfully combining a simple UBM preparation technique and a CMUTs-interposer-ASICs sandwich design. The results show high shear strength of the UBM (26.5 g), 100% yield of the interconnections, and excellent CMUT resonance uniformity ([lowercase Sigma] = 0.02 MHz). As demonstrated, this allows for a large-scale assembly of a tile-able array by using an interposer. Interface engineering is crucial towards the development of CMUTs into a practical ultrasound system. With the advances in encapsulation technique with a viscoelastic polymer and the combination of the UBM technique to the TSV fabrication for electronics integration, a fully integrated CMUT system can be realized.
Book Synopsis Micromachined Ultrasonic Transducers by : Butrus T. Khuri-Yakub
Download or read book Micromachined Ultrasonic Transducers written by Butrus T. Khuri-Yakub and published by . This book was released on 2005-11-01 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this book is to teach the design and construction of micromachined ultrasonic transducers, an area rapidly increasing in popularity, and contrast and compare these transducers to each other and to traditional piezoelectric transducers. Micromachined ultrasonic transducers are gaining wide acceptance because of the use of silicon micromachining for their manufacture. This also enables capabilities of these transducers that outperform piezoelectric transducers and enable configurations that are practically impossible otherwise. This book teaches the principles of operations of micromachined ultrasonic transducers. The theory of their operation and the technology of their manufacturing will be discussed and compared to that of traditional piezoelectric transducers. Specific to the field of ultrasonic transducers, Micromachined Ultrasonic Transducers is directed at the communities that use ultrasound in the frequency range of kHz to many MHz for use in airborne and immersion applications.
Download or read book ウィンター・ニット written by and published by . This book was released on 1989 with total page 64 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Capacitive Micromachined Ultrasonic Transducers with Substrate-embedded Springs by : Byung Chul Lee
Download or read book Capacitive Micromachined Ultrasonic Transducers with Substrate-embedded Springs written by Byung Chul Lee and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: After the first capacitive micromachined ultrasonic transducer (CMUT) was invented in 1994, it became one of the candidate technologies to advance the state-of-the-art of medical ultrasound imaging. Benefiting from its fabrication technique based on the semiconductor industry, CMUT technology has broadened the medical and therapeutic applications such as real-time volumetric ultrasound imaging, catheter-based forward-looking intravascular ultrasound (IVUS), photoacoustic imaging, high-intensity focused ultrasound (HIFU) and so on. In spite of many advantages, however, CMUT technology has been criticized with its relatively low transmit sensitivity (~10 kPa/V) or low average volume displacement efficiency (0.1 nm/V) as well as large drive and bias voltage requirements (in a range of a few hundreds of volts). In order to resolve these issues and open up new potential of clinical applications, this dissertation describes the design, fabrication, and system implementation of CMUTs with substrate-embedded springs, so-called post-CMUT (PCMUT). Since PCMUT structure resembles an ideal piston transducer, the improvements in performance mainly stem from the higher average displacement of the top plate for a given gap height. The overview of the first generation PCMUT is introduced and two main issues in simulation and fabrication aspects of the first generation PCMUT is discussed. To further improve the PCMUT device, a 3D finite element analysis (FEA) model of the PCMUT is demonstrated to predict the performance of the first generation PCMUT. In addition, the design guideline of the second generation PCMUT is proposed for achieving the maximum fractional bandwidth (100 %) as well as with the highest transmit sensitivity (~28 kPa/V). The second generation PCMUT is fabricated by using three combination MEMS processes: usage of two silicon-on-insulator (SOI) wafers, wafer bonding process, and wafer polishing process. The second generation PCMUT achieves high transmit sensitivity (~21 kPa/V) or large average volume displacement efficiency (1.1 nm/V) with a low bias voltage (55 V). Compared to a commercial piezoelectric transducer, the second generation PCMUT improves 2.75 times of the maximum output pressure and 5.25 times of the average volume displacement efficiency with respect to the same voltage. After fabrication and performance characterization of the second generation PCMUT, this dissertation demonstrates the feasibility of PCMUT to use it in medical imaging system by integrating PCMUT with a custom-built integrated circuit (IC). Photoacoustic imaging is also presented for one of its application examples.
Book Synopsis Capacitive Micromachined Ultrasonic Transducers for Therpaeutic [sic] Ultrasound by : Serena H. Wong
Download or read book Capacitive Micromachined Ultrasonic Transducers for Therpaeutic [sic] Ultrasound written by Serena H. Wong and published by . This book was released on 2008 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Row-column Capacitive Micromachined Ultrasonic Transducers for Medical Imaging by : Albert I-Hsiang Chen
Download or read book Row-column Capacitive Micromachined Ultrasonic Transducers for Medical Imaging written by Albert I-Hsiang Chen and published by . This book was released on 2016 with total page 151 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasound imaging plays an important role in modern medical diagnosis. Recent progress in real-time 3-D ultrasound imaging can offer critical information such as the accurate estimation of organ, cyst, or tumour volumes. However, compared to conventional 2-D ultrasound imaging, the large amount of data and circuit complexity found in 3-D ultrasound imaging results in very expensive systems. Therefore, a simplification scheme for 3-D ultrasound imaging technology is needed for a more wide-spread use and to advance clinical development of volumetric ultrasound. Row-column addressing 2-D array is one particular simplification scheme that requires only N + N addressing lines to activate each element in an N x N array. As a result, the fabrication, circuit, and processing complexity dramatically decrease. Capacitive micromachined ultrasonic transducer (CMUT) technology was chosen to fabricate the array as it offers micro-precision fabrication and a wide bandwidth, which make it an attractive transducer technology. The objective of this thesis is to investigate and demonstrate the imaging potential of row-column CMUT arrays for RT3D imaging. First, the motivation, physics, and modelling of both CMUTs and row-column arrays are described, followed by the demonstration of a customized row-column CMUT pseudo-real-time 3-D imaging system. One particular limitation about row-column arrays discovered as part of this dissertation work is the limited field-of-view of the row-column arrays' imaging performance. A curved row-column CMUT array was proposed to improve the field-of-view, and the resulting modelling of the acoustic field and simulated reconstructed image are presented. Furthermore, a new fabrication process was proposed to construct a curved row-column CMUT array. The resulting device was tested to demonstrate its flexibility to achieve the necessary curvature. Finally, a new wafer bonding process is introduced to tackle the next generation of RC-CMUT fabrication. Many of the new fabrication techniques reported in this work are useful for CMUT fabrication engineers. The analysis on row-column array also provides additional insights for 2-D array simplification research.
Book Synopsis High Efficient Piezoelectric Micromachined Ultrasonic Transducer Arrays by : Qi Wang
Download or read book High Efficient Piezoelectric Micromachined Ultrasonic Transducer Arrays written by Qi Wang and published by . This book was released on 2018 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Piezoelectric micromachined ultrasonic transducers (PMUTs) have been developed for many applications such as biometric identification, medical imaging and gesture recognition as an economic and small replacement for current bulk piezoelectric ultrasonic transducers. The PMUTs fabrication process compatibility to complementary metal-oxide-semiconductor (CMOS) is an advantage for making circuit integrated systems in the same process to achieve low cost and small size, especially for mobile and wearable devices. The current PMUTs have no sufficient output pressures compare to bulk piezoelectric ultrasonic transducers. This thesis will focus on improving the efficiency of the PMUTs and their arrays from the perspective of piezoelectric materials, individual PMUT structures, arrays designs and the acoustic couplings in the arrays. Firstly, the background of the piezoelectric ultrasonic transducers will be introduced. Comparisons of the micromachined ultrasonic transducers (MUT, including piezoelectric and capacitive micromachined ultrasonic transducers) with current bulk piezoelectric ultrasonic transducers show that MUTs have the advantages in the low cost, small size for more potential applications. Then, to improve the current performance of the PMUTs, novel piezoelectric materials are utilized to fabricate PMUT arrays. Characterization results indicated that scandium aluminum nitride is a promising thin film for the future PMUT products. Furthermore, the acoustic coupling is a major source of the cross talk in the large PMUT arrays and will influence the imaging resolution. An equivalent circuit model is built and verified experimentally to improve the PMUT array designs. Meanwhile, the acoustic coupling is also utilized to achieve improved pulse-echo performance with a novel PMUT structure. Next, the PMUT array optimizations based on different structural thicknesses will be studied theoretically and experimentally in the following chapter. The results show that a thin and densely packed array is the key to achieve high performance. Current cavity SOI wafer-based fabrication process is not good enough to achieve high fill-factor for high-frequency PMUT arrays. Thus, a novel surface micromachining process is proposed to fabricate high fill-factor PMUT arrays with improved performance.
Book Synopsis Ultrasound in Food Processing by : Mar Villamiel
Download or read book Ultrasound in Food Processing written by Mar Villamiel and published by John Wiley & Sons. This book was released on 2017-04-25 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part I: Fundamentals of ultrasound This part will cover the main basic principles of ultrasound generation and propagation and those phenomena related to low and high intensity ultrasound applications. The mechanisms involved in food analysis and process monitoring and in food process intensification will be shown. Part II: Low intensity ultrasound applications Low intensity ultrasound applications have been used for non-destructive food analysis as well as for process monitoring. Ultrasonic techniques, based on velocity, attenuation or frequency spectrum analysis, may be considered as rapid, simple, portable and suitable for on-line measurements. Although industrial applications of low-intensity ultrasound, such as meat carcass evaluation, have been used in the food industry for decades, this section will cover the most novel applications, which could be considered as highly relevant for future application in the food industry. Chapters addressing this issue will be divided into three subsections: (1) food control, (2) process monitoring, (3) new trends. Part III: High intensity ultrasound applications High intensity ultrasound application constitutes a way to intensify many food processes. However, the efficient generation and application of ultrasound is essential to achieving a successful effect. This part of the book will begin with a chapter dealing with the importance of the design of efficient ultrasonic application systems. The medium is essential to achieve efficient transmission, and for that reason the particular challenges of applying ultrasound in different media will be addressed. The next part of this section constitutes an up-to-date vision of the use of high intensity ultrasound in food processes. The chapters will be divided into four sections, according to the medium in which the ultrasound vibration is transmitted from the transducers to the product being treated. Thus, solid, liquid, supercritical and gas media have been used for ultrasound propagation. Previous books addressing ultrasonic applications in food processing have been based on the process itself, so chapters have been divided in mass and heat transport, microbial inactivation, etc. This new book will propose a revolutionary overview of ultrasonic applications based on (in the authors’ opinion) the most relevant factor affecting the efficiency of ultrasound applications: the medium in which ultrasound is propagated. Depending on the medium, ultrasonic phenomena can be completely different, but it also affects the complexity of the ultrasonic generation, propagation and application. In addition, the effect of high intensity ultrasound on major components of food, such as proteins, carbohydrates and lipids will be also covered, since this type of information has not been deeply studied in previous books. Other aspects related to the challenges of food industry to incorporate ultrasound devices will be also considered. This point is also very important since, in the last few years, researchers have made huge efforts to integrate fully automated and efficient ultrasound systems to the food production lines but, in some cases, it was not satisfactory. In this sense, it is necessary to identify and review the main related problems to efficiently produce and transmit ultrasound, scale-up, reduce cost, save energy and guarantee the production of safe, healthy and high added value foods.
Book Synopsis Ultrasonic Transducers by : K Nakamura
Download or read book Ultrasonic Transducers written by K Nakamura and published by Elsevier. This book was released on 2012-08-23 with total page 749 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasonic transducers are key components in sensors for distance, flow and level measurement as well as in power, biomedical and other applications of ultrasound. Ultrasonic transducers reviews recent research in the design and application of this important technology. Part one provides an overview of materials and design of ultrasonic transducers. Piezoelectricity and basic configurations are explored in depth, along with electromagnetic acoustic transducers, and the use of ceramics, thin film and single crystals in ultrasonic transducers. Part two goes on to investigate modelling and characterisation, with performance modelling, electrical evaluation, laser Doppler vibrometry and optical visualisation all considered in detail. Applications of ultrasonic transducers are the focus of part three, beginning with a review of surface acoustic wave devices and air-borne ultrasound transducers, and going on to consider ultrasonic transducers for use at high temperature and in flaw detection systems, power, biomedical and micro-scale ultrasonics, therapeutic ultrasound devices, piezoelectric and fibre optic hydrophones, and ultrasonic motors are also described. With its distinguished editor and expert team of international contributors,Ultrasonic transducers is an authoritative review of key developments for engineers and materials scientists involved in this area of technology as well as in its applications in sectors as diverse as electronics, wireless communication and medical diagnostics. Reviews recent research in the design and application of ultrasonic transducers Provides an overview of the materials and design of ultrasonic transducers, with an in-depth exploration of piezoelectricity and basic configurations Investigates modelling and characterisation, applications of ultrasonic transducers, and ultrasonic transducers for use at high temperature and in flaw detection systems
Book Synopsis Fabrication of PZT-based Piezoelectric Micromachined Ultrasonic Transducers by : James Vincent Gigliotti
Download or read book Fabrication of PZT-based Piezoelectric Micromachined Ultrasonic Transducers written by James Vincent Gigliotti and published by . This book was released on 2013 with total page 209 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Development of Piezoelectric Micromachined Ultrasonic Transducers for Range-finding Applications by :
Download or read book Development of Piezoelectric Micromachined Ultrasonic Transducers for Range-finding Applications written by and published by . This book was released on 2023 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Curved and Bimorph Piezoelectric Micromachined Ultrasonic Transducers (PMUT) by : Sina Akhbari
Download or read book Curved and Bimorph Piezoelectric Micromachined Ultrasonic Transducers (PMUT) written by Sina Akhbari and published by . This book was released on 2016 with total page 125 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Novel Applications of Capacitive Micromachined Ultrasonic Transducers by :
Download or read book Novel Applications of Capacitive Micromachined Ultrasonic Transducers written by and published by . This book was released on 2007 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Capacitive Micromachined Ultrasonic Transducers by : Dilruba Zaman Jeba
Download or read book Capacitive Micromachined Ultrasonic Transducers written by Dilruba Zaman Jeba and published by . This book was released on 2014 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive micromachined ultrasonic transducers (CMUTs) have been developed as an alternative to piezoelectric transducers for ultrasonic imaging in non-destructive testing applications. These CMUTs offer substantial advantages over their piezoelectric counterparts, which include a highly miniaturized system, easy integration with electronic control circuitry, a wider bandwidth, and a higher sensitivity. In this thesis, the design, fabrication and characterization of several single and array CMUT devices are reported. Many sizes of CMUTs, aiming to operate at different resonant frequencies, were fabricated using a PolyMUMPs sacrificial technique. An analytical and finite element model was used to further understanding of the physical behaviour of the transducer. The basic functionality of the CMUT devices was investigated through capacitance and electrical impedance measurements. These devices showed greater change in the capacitance and impedance data while operating close to their collapse voltages. This higher change in both capacitance and impedance is a result of a larger membrane displacement. The acoustic output power is directly related to the magnitude of the membrane's displacement. The transducers performance thus can be enhanced by operating close to their collapse voltage and obtained higher sensitivity. The optical characterization, performed on the single devices and on the 1-D arrays, provided a better understanding of the membrane vibration modes and displacement profiles at different resonant frequency modes. Acoustic measurements were performed to demonstrate the transmission capability of the CMUTs. The generated acoustic signals were detected using a commercial detector. These acoustic experiments demonstrated that these CMUTs can potentially be used as ultrasonic transducers alternative to piezoelectric transducers.
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