Read Books Online and Download eBooks, EPub, PDF, Mobi, Kindle, Text Full Free.
Download Micro Optics And Lithography full books in PDF, epub, and Kindle. Read online Micro Optics And Lithography ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Author : Maria Kufner
Publisher : Vub Brussels University Press
ISBN 13 :
Total Pages : 212 pages
Book Rating : 4.F/5 ( download)
Download or read book Micro-optics and Lithography written by Maria Kufner and published by Vub Brussels University Press. This book was released on 1997 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Applications of Diffractive and Micro-Optics in Lithography written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Bernard C. Kress
Publisher :
ISBN 13 : 9781628411843
Total Pages : 172 pages
Book Rating : 4.4/5 (118 download)
Download or read book Field Guide to Digital Micro-optics written by Bernard C. Kress and published by . This book was released on 2014 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt: Traditional macro-optics can be designed without complex design software tools. However, digital optics, especially wafer-scale micro-optics, require specific software and tools. There is often no analytical solution, and thus complex iterative optimization algorithms may be required. This book covers refractive and diffractive micro-optics, the iterative optimization process, and modeling and fabrication techniques crucial to this field. The ability to create hybrid systems capable of producing analog and digital functionality is also addressed.
Author : Chris Mack
Publisher : John Wiley & Sons
ISBN 13 : 1119965071
Total Pages : 503 pages
Book Rating : 4.1/5 (199 download)
Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Author : Hans Zappe
Publisher : Cambridge University Press
ISBN 13 : 1139493639
Total Pages : 646 pages
Book Rating : 4.1/5 (394 download)
Download or read book Fundamentals of Micro-Optics written by Hans Zappe and published by Cambridge University Press. This book was released on 2010-09-30 with total page 646 pages. Available in PDF, EPUB and Kindle. Book excerpt: From optical fundamentals to advanced applications, this comprehensive guide to micro-optics covers all the key areas for those who need an in-depth introduction to micro-optic devices, technologies, and applications. Topics covered range from basic optics, optical materials, refraction, and diffraction, to micro-mirrors, micro-lenses, diffractive optics, optoelectronics, and fabrication. Advanced topics, such as tunable and nano-optics, are also discussed. Real-world case studies and numerous worked examples are provided throughout, making complex concepts easier to follow, whilst an extensive bibliography provides a valuable resource for further study. With exercises provided at the end of each chapter to aid and test understanding, this is an ideal textbook for graduate and advanced undergraduate students taking courses in optics, photonics, micro-optics, microsystems, and MEMs. It is also a useful self-study guide for research engineers working on optics development.
Author : Karl-Heinz Brenner
Publisher : Springer
ISBN 13 : 0387347259
Total Pages : 325 pages
Book Rating : 4.3/5 (873 download)
Download or read book Microoptics written by Karl-Heinz Brenner and published by Springer. This book was released on 2013-03-20 with total page 325 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microoptics is still an emerging field with a huge potential for a large number of applications. This monograph brings together the most recent developments in order to give a broad overview.
Author : H. P. Herzig
Publisher : CRC Press
ISBN 13 : 9780748404810
Total Pages : 388 pages
Book Rating : 4.4/5 (48 download)
Download or read book Micro-Optics written by H. P. Herzig and published by CRC Press. This book was released on 1997-04-26 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text examines the technology behind the plethora of modern industrial and domestic technologies which incorporate micro-optics eg. CDs, cameras, automated manufacturing systems, mobile communications etc. It includes a simple but comprehensive introduction to micro-optical developments design, and an overview of fabrication and replication technology. The theoretical, practical and industrial developments in micro-scale optoelectronics continue apace in the late 1990s. In this book, a distinguished group of physicists and engineers describe the current state of research and applications in micro-optics. It provides the theoretical background and an overview of current technology, with several chapters taking a deeper look at specific recent applications and future trends. The book concentrates on diffractive and refractive micro- optical elements, such as lenses, fan-out gratings, optimized phase elements and polarisers. Sections are included on the simulation and optimization of design for micro-optics and subsequently the efficient transformation from design to real optical elements, using techniques such as e-beam writing, laser beam writing, lithography, etching and thin film deposition.
Author : Wolfgang Karthe
Publisher : Springer-Verlag
ISBN 13 : 3322934306
Total Pages : 344 pages
Book Rating : 4.3/5 (229 download)
Download or read book Integrated Optics and Micro-Optics with Polymers written by Wolfgang Karthe and published by Springer-Verlag. This book was released on 2013-07-02 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Bernard C. Kress
Publisher : John Wiley & Sons
ISBN 13 : 9780470022641
Total Pages : 638 pages
Book Rating : 4.0/5 (226 download)
Download or read book Applied Digital Optics written by Bernard C. Kress and published by John Wiley & Sons. This book was released on 2009-11-04 with total page 638 pages. Available in PDF, EPUB and Kindle. Book excerpt: Miniaturization and mass replications have begun to lead the optical industry in the transition from traditional analog to novel digital optics. As digital optics enter the realm of mainstream technology through the worldwide sale of consumer electronic devices, this timely book aims to present the topic of digital optics in a unified way. Ranging from micro-optics to nanophotonics, and design to fabrication through to integration in final products, it reviews the various physical implementations of digital optics in either micro-refractives, waveguide (planar lightwave chips), diffractive and hybrid optics or sub-wavelength structures (resonant gratings, surface plasmons, photonic crystals and metamaterials). Finally, it presents a comprehensive list of industrial and commercial applications that are taking advantage of the unique properties of digital optics. Applied Digital Optics is aimed primarily at optical engineers and product development and technical marketing managers; it is also of interest to graduate-level photonics students and micro-optic foundries. Helps optical engineers review and choose the appropriate software tools to design, model and generate fabrication files. Gives product managers access to an exhaustive list of applications available in today’s market for integrating such digital optics, as well as where the next potential application of digital optics might be. Provides a broad view for technical marketing managers in all aspects of digital optics, and how such optics can be classified. Explains the numerical implementation of optical design and modelling techniques. Enables micro-optics foundries to integrate the latest fabrication and replication techniques, and accordingly fine tune their own fabrication processes.
Author : Mahesh Pitchumani
Publisher :
ISBN 13 :
Total Pages : 171 pages
Book Rating : 4.:/5 (11 download)
Download or read book Additive Lithography Fabrication and Integration of Micro Optics written by Mahesh Pitchumani and published by . This book was released on 2006 with total page 171 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical elements are the fundamental components in photonic systems and are used to transform an input optical beam into a desired beam profile or to couple the input beam into waveguides, fibers, or other optical systems or devices. Macroscopic optical elements are easily fabricated using grinding and polishing techniques, but few methods exist for inexpensive fabrication of micro optical elements. In this work we present an innovative technique termed Additive Lithography that makes use of binary masks and controlled partial exposures to sculpt photoresist into the desired optical surface relief profile.
Author :
Publisher :
ISBN 13 :
Total Pages : 228 pages
Book Rating : 4.3/5 (91 download)
Download or read book Lithographic and Micromachining Techniques for Optical Component Fabrication written by and published by . This book was released on 2003 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Shanalyn Kemme
Publisher : CRC Press
ISBN 13 : 1420019147
Total Pages : 232 pages
Book Rating : 4.4/5 (2 download)
Download or read book Microoptics and Nanooptics Fabrication written by Shanalyn Kemme and published by CRC Press. This book was released on 2018-09-03 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: The deep interconnection between micro/nanooptical components and related fabrication technologies—and the constant changes in this ever-evolving field—means that successful design depends on the engineer’s ability to accommodate cutting-edge theoretical developments in fabrication techniques and experimental realization. Documenting the state of the art in fabrication processes, Microoptics and Nanooptics Fabrication provides an up-to-date synopsis of recent breakthroughs in micro- and nanooptics that improve key developmental processes. This text elucidates the precise and miniaturized scale of today’s fabrication methods and their importance in creating new optical components to access the spectrum of physical optics. It details successful fabrication techniques and their direct effect on the intended performance of micro- and nanooptical components. The contributors explore the constraints related to material selection, component lateral extent, minimum feature size, and other issues that cause fabrication techniques to lag behind corresponding theory in the development process. Written with the professional optical engineer in mind, this book omits the already well-published broader processing fundamentals. Instead it focuses on key tricks of the trade helpful in reformulating processes to achieve necessary optical targets, improve process fidelity, and reduce production costs. The contributing authors represent the vanguard in micro-optical fabrication. The result of their combined efforts, this searing analysis of emerging fabrication technologies will continue to fuel the expansion of optics components, from the microwave to the infrared through the visible regime.
Author : Andreas Erdmann
Publisher :
ISBN 13 : 9781510639010
Total Pages : pages
Book Rating : 4.6/5 (39 download)
Download or read book Optical and EUV Lithography written by Andreas Erdmann and published by . This book was released on 2021-02 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Harry J. Levinson
Publisher : SPIE Press
ISBN 13 : 9780819430526
Total Pages : 210 pages
Book Rating : 4.4/5 (35 download)
Download or read book Lithography Process Control written by Harry J. Levinson and published by SPIE Press. This book was released on 1999 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.
Author : Stefan Sinzinger
Publisher : John Wiley & Sons
ISBN 13 : 3527606327
Total Pages : 447 pages
Book Rating : 4.5/5 (276 download)
Download or read book Microoptics written by Stefan Sinzinger and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 447 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microoptics is an important enabling technology for many areas of application. In this updated second edition of their modern text and reference book, Stefan Sinzinger and Jürgen Jahns expertly and comprehensively present the basics and applications in microoptics, while incorporating the most important developments in recent years. An absolute must for physicists and electrical engineers, from advanced students right up to designers working in the field.
Author : Bruce W. Smith
Publisher : CRC Press
ISBN 13 : 1420051539
Total Pages : 864 pages
Book Rating : 4.4/5 (2 download)
Download or read book Microlithography written by Bruce W. Smith and published by CRC Press. This book was released on 2018-10-03 with total page 864 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. New in the Second Edition In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including: Immersion Lithography 157nm Lithography Electron Projection Lithography (EPL) Extreme Ultraviolet (EUV) Lithography Imprint Lithography Photoresists for 193nm and Immersion Lithography Scatterometry Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.
Author : Aaron Thomas Cannistra
Publisher :
ISBN 13 :
Total Pages : 168 pages
Book Rating : 4.:/5 (841 download)
Download or read book Characterization of Hybrid Molding and Lithography for SU-8 Micro-optical Components written by Aaron Thomas Cannistra and published by . This book was released on 2008 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: SU-8 is a very promising material for micro-optics. It is mechanically robust with high thermal and chemical resistance, has high transmission at visible and near-infrared wavelengths, and has relatively high refractive index after curing. While lithographic processing of SU-8 is relatively common, molding of SU-8 requires different processing parameters due to challenges with solvent removal and cross linking. Understanding the effects of the molding process on SU-8 is necessary to optimize performance of molded micro-optical components, and also to enable fabrication of more complex micro-optics through subsequent lithographic processing of molded structures. In this thesis, we explore techniques for micromolding of micro- and nano-optics in SU-8 and examine properties of SU-8 as it undergoes the molding process. Elastomeric mold templates are first cast from master structures fabricated using standard techniques. The elastomeric templates are then used in low pressure molding processes to produce high-fidelity refractive and diffractive micro-optics in SU-8. The use of the elastomeric mold templates enables realization of a wider variety of optical surfaces than can be achieved with conventional lithographic patterning in SU-8, and further enables conformal fabrication of SU-8 micro-optics on non-planar surfaces. Molding processes and experimental results for both thin (diffractive) and thick (refractive) elements are presented. Replication of SU-8 micro-optics on both planar and non-planar surfaces, and hybrid processes combining molding and lithographic exposure are demonstrated. SU-8 dimensional changes during processing are characterized, and minimum moldable feature sizes are explored. Solvent content and refractive index as functions of processing parameters are also examined, along with analysis of the SU-8's lithographic properties after undergoing the molding process. The intermediary molds are characterized for shrinkage, and mold lifespan is explored. These characterizations further enable hybrid combinations of micro-molding and lithographic processing to fabricate complex micro-optics that are difficult or impossible to realize using conventional techniques.
