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Author :
Publisher :
ISBN 13 : 9780791836422
Total Pages : 631 pages
Book Rating : 4.8/5 (364 download)
Download or read book Micro-electro-mechanical Systems (MEMS)--2002 written by and published by . This book was released on 2002 with total page 631 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher : Business Center for Academic
ISBN 13 : 9780780371859
Total Pages : 736 pages
Book Rating : 4.3/5 (718 download)
Download or read book MEMS 2002 written by and published by Business Center for Academic. This book was released on 2002 with total page 736 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Nadim Maluf
Publisher : Artech House
ISBN 13 : 9781580535915
Total Pages : 312 pages
Book Rating : 4.5/5 (359 download)
Download or read book An Introduction to Microelectromechanical Systems Engineering written by Nadim Maluf and published by Artech House. This book was released on 2004 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Author : IEEE, Press Staff
Publisher :
ISBN 13 : 9780780371873
Total Pages : pages
Book Rating : 4.3/5 (718 download)
Download or read book Micro Electro Mechanical Systems Conference (Mems), 2002 IEEE 15th International written by IEEE, Press Staff and published by . This book was released on 2002-01-01 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 : 9780791837214
Total Pages : 737 pages
Book Rating : 4.8/5 (372 download)
Download or read book Micro-electro-mechanical Systems (MEMS)--2003 written by and published by . This book was released on 2003 with total page 737 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Nicolae Lobontiu
Publisher : Springer Science & Business Media
ISBN 13 : 0387230378
Total Pages : 415 pages
Book Rating : 4.3/5 (872 download)
Download or read book Mechanics of Microelectromechanical Systems written by Nicolae Lobontiu and published by Springer Science & Business Media. This book was released on 2006-01-16 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.
Author : Institute of Electrical and Electronics Engineers, Inc. Staff
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (113 download)
Download or read book Micro Electro Mechanical Systems written by Institute of Electrical and Electronics Engineers, Inc. Staff and published by . This book was released on 1993 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : James J. Allen
Publisher : CRC Press
ISBN 13 : 1420027751
Total Pages : 492 pages
Book Rating : 4.4/5 (2 download)
Download or read book Micro Electro Mechanical System Design written by James J. Allen and published by CRC Press. This book was released on 2005-07-08 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,
Author : Arturo A. Ayón
Publisher :
ISBN 13 :
Total Pages : 344 pages
Book Rating : 4.:/5 (318 download)
Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687 written by Arturo A. Ayón and published by . This book was released on 2002-05-23 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.
Author : Nazmul Islam
Publisher : BoD – Books on Demand
ISBN 13 : 9535103067
Total Pages : 496 pages
Book Rating : 4.5/5 (351 download)
Download or read book Microelectromechanical Systems and Devices written by Nazmul Islam and published by BoD – Books on Demand. This book was released on 2012-03-28 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.
Author : Abraham Phillip Lee
Publisher :
ISBN 13 : 9780791835555
Total Pages : 892 pages
Book Rating : 4.8/5 (355 download)
Download or read book MEMS--2001 written by Abraham Phillip Lee and published by . This book was released on 2001-01-01 with total page 892 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 750 pages
Book Rating : 4.3/5 (91 download)
Download or read book Microelectromechanical Systems written by and published by . This book was released on 2007 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Rebecca Cheung
Publisher : Imperial College Press
ISBN 13 : 1860949096
Total Pages : 193 pages
Book Rating : 4.8/5 (69 download)
Download or read book Silicon Carbide Micro Electromechanical Systems for Harsh Environments written by Rebecca Cheung and published by Imperial College Press. This book was released on 2006 with total page 193 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996OCo2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research."
Author : Shekhar Bhansali
Publisher : Elsevier
ISBN 13 : 0857096273
Total Pages : 511 pages
Book Rating : 4.8/5 (57 download)
Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy
Author :
Publisher :
ISBN 13 :
Total Pages : 344 pages
Book Rating : 4.3/5 (91 download)
Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices written by and published by . This book was released on 2001 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Britt Ekwall
Publisher : Nova Science Publishers
ISBN 13 : 9781613246986
Total Pages : 404 pages
Book Rating : 4.2/5 (469 download)
Download or read book Micro Electro Mechanical Systems (Mems) written by Britt Ekwall and published by Nova Science Publishers. This book was released on 2014-05-14 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Chang Liu
Publisher : Pearson Higher Ed
ISBN 13 : 1292013982
Total Pages : 577 pages
Book Rating : 4.2/5 (92 download)
Download or read book Foundation of MEMA written by Chang Liu and published by Pearson Higher Ed. This book was released on 2014-09-18 with total page 577 pages. Available in PDF, EPUB and Kindle. Book excerpt: For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
