Methods and Devices for Optical and Electrical Metrology with Application to Phase-shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers

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Publisher :
ISBN 13 :
Total Pages : 342 pages
Book Rating : 4.:/5 (35 download)

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Book Synopsis Methods and Devices for Optical and Electrical Metrology with Application to Phase-shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers by : David Gordon Garmire

Download or read book Methods and Devices for Optical and Electrical Metrology with Application to Phase-shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers written by David Gordon Garmire and published by . This book was released on 2007 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Fringe Pattern Analysis for Optical Metrology

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Publisher : John Wiley & Sons
ISBN 13 : 3527411526
Total Pages : 344 pages
Book Rating : 4.5/5 (274 download)

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Book Synopsis Fringe Pattern Analysis for Optical Metrology by : Manuel Servin

Download or read book Fringe Pattern Analysis for Optical Metrology written by Manuel Servin and published by John Wiley & Sons. This book was released on 2014-08-18 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The main objective of this book is to present the basic theoretical principles and practical applications for the classical interferometric techniques and the most advanced methods in the field of modern fringe pattern analysis applied to optical metrology. A major novelty of this work is the presentation of a unified theoretical framework based on the Fourier description of phase shifting interferometry using the Frequency Transfer Function (FTF) along with the theory of Stochastic Process for the straightforward analysis and synthesis of phase shifting algorithms with desired properties such as spectral response, detuning and signal-to-noise robustness, harmonic rejection, etc.

Optical Metrology for Fluids, Combustion and Solids

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Publisher : Springer Science & Business Media
ISBN 13 : 9781402074073
Total Pages : 490 pages
Book Rating : 4.0/5 (74 download)

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Book Synopsis Optical Metrology for Fluids, Combustion and Solids by : Carolyn Mercer

Download or read book Optical Metrology for Fluids, Combustion and Solids written by Carolyn Mercer and published by Springer Science & Business Media. This book was released on 2003-07-31 with total page 490 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical Metrology for Fluids, Combustion and Solids is the first practical handbook that presents the assemblage of the techniques necessary to provide a basic understanding of optical measurement for fluids, combustion, and solids. The use of light as a measurement tool has grown over the past twenty years from a narrowly specialized activity to a mainstay of modern research today. Until recently, the knowledge that could be extracted from the light interaction of light with physical objects was limited to specialized activities. The invention of the laser, the computer and microelectronics has enabled a measurement revolution such that virtually every parameter of engineering interest can be measured using the minimally intrusive properties of light. The authors of this book's chapters are leaders in this revolution. They work on the front lines of research in government, industry, and universities, inventing yet more ways to harness the power of light for the generation of knowledge.

Fringe Pattern Analysis for Optical Metrology

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Publisher : Wiley-VCH
ISBN 13 : 9783527411528
Total Pages : 0 pages
Book Rating : 4.4/5 (115 download)

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Book Synopsis Fringe Pattern Analysis for Optical Metrology by : Manuel Servin

Download or read book Fringe Pattern Analysis for Optical Metrology written by Manuel Servin and published by Wiley-VCH. This book was released on 2014-08-18 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The main objective of this book is to present the basic theoretical principles and practical applications for the classical interferometric techniques and the most advanced methods in the field of modern fringe pattern analysis applied to optical metrology. A major novelty of this work is the presentation of a unified theoretical framework based on the Fourier description of phase shifting interferometry using the Frequency Transfer Function (FTF) along with the theory of Stochastic Process for the straightforward analysis and synthesis of phase shifting algorithms with desired properties such as spectral response, detuning and signal-to-noise robustness, harmonic rejection, etc.

Optical Metrology

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Publisher : Springer
ISBN 13 :
Total Pages : 824 pages
Book Rating : 4.:/5 (43 download)

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Book Synopsis Optical Metrology by : Olivério D.D. Soares

Download or read book Optical Metrology written by Olivério D.D. Soares and published by Springer. This book was released on 1987-06-30 with total page 824 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the NATO Advanced Study Institute held in Viana do Castelo, Portugal, July 16-27, 1984

Optical Metrology for Precision Engineering

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Publisher : Walter de Gruyter GmbH & Co KG
ISBN 13 : 3110542366
Total Pages : 655 pages
Book Rating : 4.1/5 (15 download)

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Book Synopsis Optical Metrology for Precision Engineering by : Wei Gao

Download or read book Optical Metrology for Precision Engineering written by Wei Gao and published by Walter de Gruyter GmbH & Co KG. This book was released on 2021-11-22 with total page 655 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way

Interferometers

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Publisher : Nova Science Publishers
ISBN 13 : 9781634836920
Total Pages : 0 pages
Book Rating : 4.8/5 (369 download)

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Book Synopsis Interferometers by : Kystal Harmon

Download or read book Interferometers written by Kystal Harmon and published by Nova Science Publishers. This book was released on 2015 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents readers with the latest research in interferometry. Chapters include research done on an approach that can be used to identify the performance of coherence scanning interferometers in the presence of vibration; the permeability engineering of semiconductor photonic devices; several interferometric structures based on bulk optics to achieving optical interleaving; interference lithography; recent results on laser surface patterning using interferometers and femtosecond laser radiation; the realisation of the optical interferometers with the optical MEMS technology; a simple two-ray interferometer tuned by rotation; tuning of interference pattern period by rotation of an interferometer itself; the characteristics of a two-ray interferometer with fixed mirrors; the detection of acoustic fields from bounded ultrasonic beams by using laser interferometry techniques; and the use of lateral shearing interferometry as an important area of general interferometry.

Field Guide to Interferometric Optical Testing

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Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819465108
Total Pages : 0 pages
Book Rating : 4.4/5 (651 download)

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Book Synopsis Field Guide to Interferometric Optical Testing by : Eric P. Goodwin

Download or read book Field Guide to Interferometric Optical Testing written by Eric P. Goodwin and published by SPIE-International Society for Optical Engineering. This book was released on 2006 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on the author's course at University of Arizona, this guide covers the key fundamentals of interferometry, types of interferometers and interferograms, concepts of phase-shifting interferometry, long-wavelength interferometry, testing of aspheric surfaces, measurement of surface microstructure, flat and curved surface testing, and more.

Selected Papers on Interference, Interferometry, and Interferometric Metrology

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Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 730 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Selected Papers on Interference, Interferometry, and Interferometric Metrology by : P. Hariharan

Download or read book Selected Papers on Interference, Interferometry, and Interferometric Metrology written by P. Hariharan and published by SPIE-International Society for Optical Engineering. This book was released on 1995 with total page 730 pages. Available in PDF, EPUB and Kindle. Book excerpt: SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.

The Physics of Moire Metrology

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Publisher : Wiley-Interscience
ISBN 13 :
Total Pages : 216 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis The Physics of Moire Metrology by : Oded Kafri

Download or read book The Physics of Moire Metrology written by Oded Kafri and published by Wiley-Interscience. This book was released on 1990 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: This one volume treatise presents a comprehensive discussion of moire metrology analysis. The authors work from a new point of view, treating the gratings used in moire analysis as an artificial analog to electromagnetic waves, thereby comparing moire analysis with conventional optical methods based on wave properties such as interferometry. It is shown that for every interferometric technique in metrology, there is an analogous technique in moire metrology and vice versa, and that scientists involved in optical metrology have a real choice between interferometric and moire methods.

Handbook of Optical Dimensional Metrology

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Publisher : CRC Press
ISBN 13 : 1439854815
Total Pages : 509 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Handbook of Optical Dimensional Metrology by : Kevin Harding

Download or read book Handbook of Optical Dimensional Metrology written by Kevin Harding and published by CRC Press. This book was released on 2013-02-26 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to their speed, data density, and versatility, optical metrology tools play important roles in today’s high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods. The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it to other forms of metrology, such as mechanical gaging, highlighting the limitations and errors associated with each mode of measurement at a general level. This comparison is particularly helpful to current industry users who operate the most widely applied mechanical tools. The book then focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. It describes the measurement of large objects on the scale of buildings, the measurement of durable manufactured goods such as aircraft engines and appliances, and the measurement of fine features on the micron and nanometer scales. In each area, the book covers fast, coarse measures as well as the finest measurements possible. Best practices and practical examples for each technology aid readers in effectively using the methods. Requiring no prior expertise in optical dimensional metrology, this handbook helps engineers and quality specialists understand the capabilities and limitations of optical metrology methods. It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems.

Advances in Speckle Metrology and Related Techniques

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Publisher : John Wiley & Sons
ISBN 13 : 3527633871
Total Pages : 322 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Advances in Speckle Metrology and Related Techniques by : Guillermo H. Kaufmann

Download or read book Advances in Speckle Metrology and Related Techniques written by Guillermo H. Kaufmann and published by John Wiley & Sons. This book was released on 2011-01-25 with total page 322 pages. Available in PDF, EPUB and Kindle. Book excerpt: Speckle metrology includes various optical techniques that are based on the speckle fields generated by reflection from a rough surface or by transmission through a rough diffuser. These techniques have proven to be very useful in testing different materials in a non-destructive way. They have changed dramatically during the last years due to the development of modern optical components, with faster and more powerful digital computers, and novel data processing approaches. This most up-to-date overview of the topic describes new techniques developed in the field of speckle metrology over the last decade, as well as applications to experimental mechanics, material science, optical testing, and fringe analysis.

Applications of Optical Metrology--techniques and Measurements II

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Publisher :
ISBN 13 :
Total Pages : 228 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Applications of Optical Metrology--techniques and Measurements II by : John J. Lee

Download or read book Applications of Optical Metrology--techniques and Measurements II written by John J. Lee and published by . This book was released on 1983 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Optical Measurements, Modeling, and Metrology, Volume 5

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Publisher : Springer Science & Business Media
ISBN 13 : 146140228X
Total Pages : 412 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Optical Measurements, Modeling, and Metrology, Volume 5 by : Tom Proulx

Download or read book Optical Measurements, Modeling, and Metrology, Volume 5 written by Tom Proulx and published by Springer Science & Business Media. This book was released on 2011-05-27 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical Measurements, Modeling, and Metrology represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; MEMS and Nanotechnology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress.

Optical Transducers and Techniques in Engineering Measurement

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Publisher : Springer
ISBN 13 :
Total Pages : 326 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Optical Transducers and Techniques in Engineering Measurement by : A.R. Luxmoore

Download or read book Optical Transducers and Techniques in Engineering Measurement written by A.R. Luxmoore and published by Springer. This book was released on 1983-09-30 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical measurement techniques have been stimulated in recent years by the advent of lasers and also by modern electro-optical devices. Despite the considerable research and developments in this field, these techniques are not widely appreciated by engineers, who are often unaware of their versatility. This book provides a single comprehensive source giving the basic science and technology involved in the implementation of these latest methods, for use by industrial and research engineers, in the solution of measurement problems and the design of measurement systems. The book covers the most recent and useful innovations and emphasises applications to practical problems. The emphasis in each chapter has been placed on the transducer aspect, i.e. on the instrumentation necessary to perform specific tasks, so that all the necessary components-basic theory, practical details and devices, application to actual problems· are included, as well as information concerning probable sensitivity, accuracy, etc. Simple explanations of complex physical phenomena have been used instead of rigorous treatments, the latter usually being available from the references associated with each chapter. Engineers and applied scientists are often faced with the measurement of a wide range of parameters, e.g. dimension, displacement, strain, force, pressure, torque, fluid flow, fluid level, time dependent effects, etc., and optical methods may seem inappropriate at first glance, but all those mentioned are capable of evaluation using optics and most physical parameters are susceptible to this type of measurement.

Real-time Signal Processing Techniques and Hardware Implementation for Optical Metrology

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Publisher :
ISBN 13 :
Total Pages : 156 pages
Book Rating : 4.:/5 (12 download)

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Book Synopsis Real-time Signal Processing Techniques and Hardware Implementation for Optical Metrology by : Chen Wang

Download or read book Real-time Signal Processing Techniques and Hardware Implementation for Optical Metrology written by Chen Wang and published by . This book was released on 2018 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Optical metrology uses characteristics of light to perform measurements. This could be in the form of calibrating the physical size of an object, measuring the distance between two objects, or measuring the displacement of two objects, to name a few. Typically, optical metrology is characterized for its high resolution and high dynamic range. However, several optical, electrical, and mechanical error sources could impact the accuracy of a given measurement. The following three error sources are studied in this research. Data age error is the time delay and signal processing-induced phase shift of displacement interferometer measurement results, which means it cannot precisely represent the current position of the target. It becomes significant but often overlooked when there are rapid position changes, whose errors could be up to hundreds of nanometers. This research investigates the causes of this error and reports on a signal processing algorithm and its hardware implementation to compensate the data age error during real-time measurements. Periodic error is from imperfect optical devices and frequency mixing in traditional displacement interferometer configurations. It is usually on the order of nanometers, which impacts dynamic measurement accuracy. This research presents a signal processing algorithm based on an extended Kalman filter and its FPGA implementation for on-line estimation and real-time correction of periodic error. Straightness error is a parasitic translation along a direction perpendicular to the primary displacement axis of a linear stage, which could be coupled into other primary displacement directions of a multi-axis platform. This ultimately impacts the precision of multi-axis metrology, calibration, and manufacturing. This research presents configurations based on image registration, and two-dimensional (2D) optical knife-edge sensing to characterize 2D straightness error."--Pages x-xi.

Handbook of Silicon Semiconductor Metrology

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Publisher : CRC Press
ISBN 13 : 0203904540
Total Pages : 703 pages
Book Rating : 4.2/5 (39 download)

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Book Synopsis Handbook of Silicon Semiconductor Metrology by : Alain C. Diebold

Download or read book Handbook of Silicon Semiconductor Metrology written by Alain C. Diebold and published by CRC Press. This book was released on 2001-06-29 with total page 703 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay