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Metal Impurities In Silicon Device Fabrication
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Book Synopsis Metal Impurities in Silicon-Device Fabrication by : Klaus Graff
Download or read book Metal Impurities in Silicon-Device Fabrication written by Klaus Graff and published by Springer Science & Business Media. This book was released on 2013-03-07 with total page 285 pages. Available in PDF, EPUB and Kindle. Book excerpt: This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.
Book Synopsis Metal Impurities in Silicon-Device Fabrication by : Klaus Graff
Download or read book Metal Impurities in Silicon-Device Fabrication written by Klaus Graff and published by Springer Science & Business Media. This book was released on 2013-03-08 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt: A discussion of the different mechanisms responsible for contamination together with a survey of their impact on device performance. The author examines the specific properties of main and rare impurities in silicon, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine gettering efficiency. Throughout all of these subjects, the book presents only reliable and up-to-date data so as to provide a thorough review of recent scientific investigations.
Book Synopsis Metal Impurities in Silicon- and Germanium-Based Technologies by : Cor Claeys
Download or read book Metal Impurities in Silicon- and Germanium-Based Technologies written by Cor Claeys and published by Springer. This book was released on 2018-08-13 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Book Synopsis Defects and Impurities in Silicon Materials by : Yutaka Yoshida
Download or read book Defects and Impurities in Silicon Materials written by Yutaka Yoshida and published by Springer. This book was released on 2016-03-30 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book emphasizes the importance of the fascinating atomistic insights into the defects and the impurities as well as the dynamic behaviors in silicon materials, which have become more directly accessible over the past 20 years. Such progress has been made possible by newly developed experimental methods, first principle theories, and computer simulation techniques. The book is aimed at young researchers, scientists, and technicians in related industries. The main purposes are to provide readers with 1) the basic physics behind defects in silicon materials, 2) the atomistic modeling as well as the characterization techniques related to defects and impurities in silicon materials, and 3) an overview of the wide range of the research fields involved.
Book Synopsis Fabrication and Characterization of Metal-molecule-silicon Devices by : Li Xu
Download or read book Fabrication and Characterization of Metal-molecule-silicon Devices written by Li Xu and published by . This book was released on 2008 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Silicon Materials Science and Technology by :
Download or read book Silicon Materials Science and Technology written by and published by . This book was released on 1998 with total page 800 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2009-12-08 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Book Synopsis Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes by : Bernd O. Kolbesen
Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes written by Bernd O. Kolbesen and published by The Electrochemical Society. This book was released on 2003 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: .".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.
Book Synopsis Modern Aspects of Bulk Crystal and Thin Film Preparation by : Nikolai Kolesnikov
Download or read book Modern Aspects of Bulk Crystal and Thin Film Preparation written by Nikolai Kolesnikov and published by BoD – Books on Demand. This book was released on 2012-01-13 with total page 622 pages. Available in PDF, EPUB and Kindle. Book excerpt: In modern research and development, materials manufacturing crystal growth is known as a way to solve a wide range of technological tasks in the fabrication of materials with preset properties. This book allows a reader to gain insight into selected aspects of the field, including growth of bulk inorganic crystals, preparation of thin films, low-dimensional structures, crystallization of proteins, and other organic compounds.
Book Synopsis Thin Film Ferroelectric Materials and Devices by : R. Ramesh
Download or read book Thin Film Ferroelectric Materials and Devices written by R. Ramesh and published by Springer Science & Business Media. This book was released on 2013-11-27 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt: The past five years have witnessed some dramatic developments in the general area of ferroelectric thin films materials and devices. Ferroelectrics are not new materials by any stretch ofimagination. Indeed, they have been known since the early partofthis century and popular ferroelectric materials such as Barium Titanate have been in use since the second world war. In the late sixties and seventies, a considerable amountofresearch and development effort was made to create a solid state nonvolatile memory using ferroelectrics in a vary simple matrix-addressed scheme. These attempts failed primarily due to problems associated with either the materials ordue to device architectures. The early eighties saw the advent of new materials processing approaches, such as sol-gel processing, that enabled researchers to fabricate sub-micron thin films of ferroelectric materials on a silicon substrate. These pioneering developments signaled the onsetofa revival in the areaofferroelectric thin films, especially ferroelectric nonvolatile memories. Research and development effort in ferroelectric materials and devices has now hit a feverish pitch, Many university laboratories, national laboratories and advanced R&D laboratories oflarge IC manufacturers are deeply involved in the pursuit of ferroelectric device technologies. Many companies worldwide are investing considerable manpower and resources into ferroelectric technologies. Some have already announced products ranging from embedded memories in micro controllers, low density stand-alone memories, microwave circuit elements, andrf identification tags. There is now considerable optimism that ferroelectric devices andproducts will occupy a significant market-share in the new millennium.
Book Synopsis High Dielectric Constant Materials by : Howard Huff
Download or read book High Dielectric Constant Materials written by Howard Huff and published by Springer Science & Business Media. This book was released on 2005-11-02 with total page 723 pages. Available in PDF, EPUB and Kindle. Book excerpt: Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology.
Book Synopsis Laser Annealing Processes in Semiconductor Technology by : Fuccio Cristiano
Download or read book Laser Annealing Processes in Semiconductor Technology written by Fuccio Cristiano and published by Woodhead Publishing. This book was released on 2021-04-21 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering. Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors
Book Synopsis Single-Photon Generation and Detection by : Sergio Cova
Download or read book Single-Photon Generation and Detection written by Sergio Cova and published by Elsevier Inc. Chapters. This book was released on 2013-11-29 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: This chapter presents a broad review of the principle, design, fabrication, operation, and performance of single-photon avalanche diodes (SPADs), and provides a comparative basis to assess the relative merits of the wide variety of devices and techniques covered. Particular attention is paid to the design of and operation of both silicon and high-speed-gated InGaAs/InP detection systems, as well as array-based systems.
Book Synopsis The Metal-Hydrogen System by : Yuh Fukai
Download or read book The Metal-Hydrogen System written by Yuh Fukai and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 365 pages. Available in PDF, EPUB and Kindle. Book excerpt: I think it is expedient here to clearly specify the readership for whom this book is intended. Some readers might infer from the title that this is a data book convenient for occasional reference purposes. Most of the data on the bulk properties and a comprehensive list of publications are indeed compiled here, will be found useful as they are. The primary purpose of the book is, however, and rather to provide a coherent and consistent description of the basic bulk properties of the metal-hydrogen system, ranging from macroscopic properties such as solubilities and phase diagrams to microscopic properties such as atomistic states and diffusion. The emphasis has been placed on the physics of how these properties actually come about. This structure of the book is considered to be useful, and even necessary, not only for physicists but also for researchers interested in the materials-science aspects of the system. Who could have anticipated that the solubility of hydrogen in iron reaches a level as high as [H]/[Fe] ~ 1 under a hydrogen pressure of 10 GPa; who could have anticip ated that the diffusivity of hydrogen in metals increases at low temperatures; who could unravel the mechanism of "cold" fusion (if this indeed exists), without a basic understanding of the metal-hydrogen system? Obviously, these prob lems are not only of academic interest but also have profound technical implications.
Book Synopsis Optical Properties of Metal Clusters by : Uwe Kreibig
Download or read book Optical Properties of Metal Clusters written by Uwe Kreibig and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical Properties of Metal Clusters deals with the electronic structure of metal clusters determined optically. Clusters - as state intermediate between molecules and the extended solid - are important in many areas, e.g. in air pollution, interstellar matter, clay minerals, photography, heterogeneous catalysis, quantum dots, and virus crystals. This book extends the approaches of optical molecular and solid-state methods to clusters, revealing how their optical properties evolve as a function of size. Cluster matter, i.e. extended systems of many clusters - the most frequently occuring form - is also treated. The combination of reviews of experimental techniques, lists of results and detailed descriptions of selected experiments will appeal to experts, newcomers and graduate students in this expanding field.
Book Synopsis Polymer Films with Embedded Metal Nanoparticles by : Andreas Heilmann
Download or read book Polymer Films with Embedded Metal Nanoparticles written by Andreas Heilmann and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents an overview of nanostructure determination and ways to find relationships to the electronic and optical properties. The methods described can be applied to a large number of other granular metal-insulator systems and used as a guideline for characterisation and modelling. In addition, the book describes the manufacture of artificially structured nanomaterials using laser or electron-beam irradiation.
Author :Bernd O. Kolbesen (Chemiker.) Publisher :The Electrochemical Society ISBN 13 :9781566772396 Total Pages :568 pages Book Rating :4.7/5 (723 download)
Book Synopsis Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes by : Bernd O. Kolbesen (Chemiker.)
Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes written by Bernd O. Kolbesen (Chemiker.) and published by The Electrochemical Society. This book was released on 1999 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: