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Author : Huikai Xie
Publisher : MDPI
ISBN 13 : 3038428671
Total Pages : 217 pages
Book Rating : 4.0/5 (384 download)
Download or read book MEMS Mirrors written by Huikai Xie and published by MDPI. This book was released on 2018-05-04 with total page 217 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines
Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author : D. P. Yasin
Publisher : DEStech Publications, Inc
ISBN 13 : 1605951560
Total Pages : 520 pages
Book Rating : 4.6/5 (59 download)
Download or read book 2014 International Conference on Mechanical Design, Manufacture and Automation Engineering (MDMAE2014) written by D. P. Yasin and published by DEStech Publications, Inc. This book was released on 2014-02-04 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: Automation Engineering (MDMAE2014) is to provide a platform for all researchers in the field of Mechanical, Manufacture, Automation and Material Engineering to share the most advanced knowledge from both academic and industrial world, and to communicate with each other about their experiences and the most up-to-date research achievements, discussing forward issues and future prospects, seeking a better way to solve practical problems in this fields. As the first international conference on MDMAE, consisting of five main topics: Mechanical Engineering, Automation Engineering, Manufacturing Systems, Materials Engineering and Measurement and Test, which offer attendees free space to present their inspiring works and academic achievements mixed with the atmosphere of industry and academia, it has attracted many scholars, researchers and practitioners in these fields from various countries to get together in this conference, sharing their latest research achievements with each other , enriching their professional knowledge and broadening their horizons as well.
Author : Guangya Zhou
Publisher : CRC Press
ISBN 13 : 1498741347
Total Pages : 447 pages
Book Rating : 4.4/5 (987 download)
Download or read book Optical MEMS, Nanophotonics, and Their Applications written by Guangya Zhou and published by CRC Press. This book was released on 2017-12-14 with total page 447 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
Author : Jaume Verd
Publisher : MDPI
ISBN 13 : 3039210688
Total Pages : 166 pages
Book Rating : 4.0/5 (392 download)
Download or read book Development of CMOS-MEMS/NEMS Devices written by Jaume Verd and published by MDPI. This book was released on 2019-06-25 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]
Author : Huikai Xie
Publisher : MDPI
ISBN 13 : 3039213032
Total Pages : 176 pages
Book Rating : 4.0/5 (392 download)
Download or read book Optical MEMS written by Huikai Xie and published by MDPI. This book was released on 2019-08-06 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines
Author : Alissa M. Fitzgerald
Publisher : Springer Nature
ISBN 13 : 3030617092
Total Pages : 282 pages
Book Rating : 4.0/5 (36 download)
Download or read book MEMS Product Development written by Alissa M. Fitzgerald and published by Springer Nature. This book was released on 2021-03-16 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Drawing on their experiences in successfully executing hundreds of MEMS development projects, the authors present the first practical guide to navigating the technical and business challenges of MEMS product development, from the initial concept stage all the way to commercialization. The strategies and tactics presented, when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. MEMS Product Development illuminates what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.
Author : Qifa Zhou
Publisher : MDPI
ISBN 13 : 303921604X
Total Pages : 218 pages
Book Rating : 4.0/5 (392 download)
Download or read book MEMS Technology for Biomedical Imaging Applications written by Qifa Zhou and published by MDPI. This book was released on 2019-10-23 with total page 218 pages. Available in PDF, EPUB and Kindle. Book excerpt: Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community.
Author : S Nihtianov
Publisher : Woodhead Publishing
ISBN 13 : 0081020562
Total Pages : 606 pages
Book Rating : 4.0/5 (81 download)
Download or read book Smart Sensors and MEMS written by S Nihtianov and published by Woodhead Publishing. This book was released on 2018-02-27 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications
Author : Chang Liu
Publisher : Pearson Higher Ed
ISBN 13 : 1292013982
Total Pages : 577 pages
Book Rating : 4.2/5 (92 download)
Download or read book Foundation of MEMA written by Chang Liu and published by Pearson Higher Ed. This book was released on 2014-09-18 with total page 577 pages. Available in PDF, EPUB and Kindle. Book excerpt: For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
Author : Harmeet Bhugra
Publisher : Springer
ISBN 13 : 3319286889
Total Pages : 423 pages
Book Rating : 4.3/5 (192 download)
Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Author : Trupti Ranjan Lenka
Publisher : Springer Nature
ISBN 13 : 9819944953
Total Pages : 519 pages
Book Rating : 4.8/5 (199 download)
Download or read book Micro and Nanoelectronics Devices, Circuits and Systems written by Trupti Ranjan Lenka and published by Springer Nature. This book was released on 2023-10-04 with total page 519 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents select proceedings of the International Conference on Micro and Nanoelectronics Devices, Circuits and Systems (MNDCS-2023). The book includes cutting-edge research papers in the emerging fields of micro and nanoelectronics devices, circuits, and systems from experts working in these fields over the last decade. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.
Author : Siva Yellampalli
Publisher : BoD – Books on Demand
ISBN 13 : 1789233941
Total Pages : 220 pages
Book Rating : 4.7/5 (892 download)
Download or read book MEMS Sensors written by Siva Yellampalli and published by BoD – Books on Demand. This book was released on 2018-07-18 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The sensors in MEMS gather information from the surrounding, which is then processed by the electronics for decision-making to control the environment. MEMS offers opportunities to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as consumer electronics, biotechnology and communication and it holds great promise for continued contributions in the future. This book focuses on understanding the design, development and various applications of MEMS sensors.
Author : Ricardo López-Ruiz
Publisher : Springer
ISBN 13 : 3319123289
Total Pages : 291 pages
Book Rating : 4.3/5 (191 download)
Download or read book Nonlinear Maps and their Applications written by Ricardo López-Ruiz and published by Springer. This book was released on 2015-03-11 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the field of Dynamical Systems, nonlinear iterative processes play an important role. Nonlinear mappings can be found as immediate models for many systems from different scientific areas, such as engineering, economics, biology, or can also be obtained via numerical methods permitting to solve non-linear differential equations. In both cases, the understanding of specific dynamical behaviors and phenomena is of the greatest interest for scientists. This volume contains papers that were presented at the International Workshop on Nonlinear Maps and their Applications (NOMA 2013) held in Zaragoza, Spain, on September 3-4, 2013. This kind of collaborative effort is of paramount importance in promoting communication among the various groups that work in dynamical systems and networks in their research theoretical studies as well as for applications. This volume is suitable for graduate students as well as researchers in the field.
Author : Marc J. Madou
Publisher : Momentum Press
ISBN 13 : 1606508849
Total Pages : 139 pages
Book Rating : 4.6/5 (65 download)
Download or read book Carbon: The Next Silicon? written by Marc J. Madou and published by Momentum Press. This book was released on 2016-01-12 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nuclear Magnetic Resonance (NMR) and Electron Spin Resonance (ESR) spectroscopies are well-known characterization techniques that reveal the molecular details of a sample non-invasively. The authors discuss how NMR can provide useful information on the microstructure of carbon and its surface properties and explain how C-MEMS/C-NEMS technology can be explored for building improved NMR microdevices. The authors highlight the manipulation of fluids and particles by dielectrophoresis and the use of carbon electrodes for dielectrophoresis in Lab-on-a-Chip. The use of these electrodes in sample preparation through electrical polarization of a sample for identification, manipulation, and lysis of bioparticles is also discussed and they introduce a new generation of neural prosthetics based on glassy carbon micromachined electrode arrays. The tuning of the electrical, electrochemical and mechanical properties of these patternable electrodes for applications in bio-electrical signal recording and stimulation, and results from in-vivo testing of these glassy carbon microelectrode arrays is reported, demonstrating a quantifiable superior performance compared to metal electrodes.
Author : Atul Tiwari
Publisher : John Wiley & Sons
ISBN 13 : 1119083869
Total Pages : 435 pages
Book Rating : 4.1/5 (19 download)
Download or read book Materials and Failures in MEMS and NEMS written by Atul Tiwari and published by John Wiley & Sons. This book was released on 2015-09-11 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.
Author : Deepak Uttamchandani
Publisher : Elsevier
ISBN 13 : 0081004508
Total Pages : 290 pages
Book Rating : 4.0/5 (81 download)
Download or read book Wireless MEMS Networks and Applications written by Deepak Uttamchandani and published by Elsevier. This book was released on 2016-08-30 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt: Wireless MEMS Networks and Applications reviews key emerging applications of MEMS in wireless and mobile networks. This book covers the different types of wireless MEMS devices, also exploring MEMS in smartphones, tablets, and the MEMS used for energy harvesting. The book reviews the range of applications of wireless MEMS networks in manufacturing, infrastructure monitoring, environmental monitoring, space applications, agricultural monitoring for food safety, health applications, and systems for smart cities. Focuses on the use of MEMS in the emerging area of wireless applications Contains comprehensive coverage of the range of applications of MEMS for wireless networks Presents an international range of expert contributors who identify key research in the field
