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Author :
Publisher :
ISBN 13 : 9781424457632
Total Pages : pages
Book Rating : 4.4/5 (576 download)
Download or read book MEMS 2010 Hong Kong written by and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Oliver Brand
Publisher : John Wiley & Sons
ISBN 13 : 352767635X
Total Pages : 512 pages
Book Rating : 4.5/5 (276 download)
Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Author : Frederic Nabki
Publisher : MDPI
ISBN 13 : 3039288652
Total Pages : 164 pages
Book Rating : 4.0/5 (392 download)
Download or read book MEMS Sensors and Resonators written by Frederic Nabki and published by MDPI. This book was released on 2020-05-27 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) have had a profound impact on a wide range of applications. The degree of miniaturization made possible by MEMS technology has significantly improved the functionalities of many systems, and the performance of MEMS has steadily improved as its uses augment. Notably, MEMS sensors have been prevalent in motion sensing applications for decades, and the sensing mechanisms leveraged by MEMS have been continuously extended to applications spanning the detection of gases, magnetic fields, electromagnetic radiation, and more. In parallel, MEMS resonators have become an emerging field of MEMS and affected subfields such as electronic timing and filtering, and energy harvesting. They have, in addition, enabled a wide range of resonant sensors. For many years now, MEMS have been the basis of various industrial successes, often building on novel academic research. Accordingly, this Special Issue explores many research innovations in MEMS sensors and resonators, from biomedical applications to energy harvesting, gas sensing, resonant sensing, and timing.
Author : Masayoshi Esashi
Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Author : Babak Kateb
Publisher : CRC Press
ISBN 13 : 1439849412
Total Pages : 605 pages
Book Rating : 4.4/5 (398 download)
Download or read book The Textbook of Nanoneuroscience and Nanoneurosurgery written by Babak Kateb and published by CRC Press. This book was released on 2013-07-25 with total page 605 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoneuroscience, nanoneurosurgery, and nanobioelectronics have the potential to revolutionize medicine and improve the prevention, diagnosis, and treatment of neurological disorders over the next 10-20 years. The Textbook of Nanoneuroscience and Nanoneurosurgery presents a state-of-the-art review of the field, providing current information about nanoplatforms and their use in neurosurgery, neurology, neuroscience, and neuroradiology. The text also reviews the latest regulatory guidelines that influence the translation of nanotechnological research from the laboratory to the clinic, as well as the most recent information on biodevices and pharmaceutical spinoffs. It highlights presidential and congressional initiatives and programs that may significantly impact the field in the near future. Chapters discuss the latest science and technologies—which are applied to diagnosis and treatment of neurological disorders—as well as regulatory issues that impact product development. This volume describes advances that have already been translated to the clinic or hold significant promise for future application in nanoneurosurgery, as well as their potential impact. A full-color text, the book contains contributions by more than 120 researchers, original and descriptive illustrations, and more than 3,000 references. Offering broad coverage of nanotechnological applications in diverse areas and addressing FDA regulation and healthcare policy, this volume provides a foundation of ideas and methods for scientists and physicians to devise successful, less invasive procedures for future treatment of nervous system disorders.
Author : Luca Susmel
Publisher : Gruppo Italiano Frattura
ISBN 13 : 8895940490
Total Pages : 1208 pages
Book Rating : 4.8/5 (959 download)
Download or read book Frattura ed Integrità Strutturale: Annals 2014 written by Luca Susmel and published by Gruppo Italiano Frattura. This book was released on 2014-09-12 with total page 1208 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Elena Blokhina
Publisher : Springer
ISBN 13 : 331920355X
Total Pages : 359 pages
Book Rating : 4.3/5 (192 download)
Download or read book Nonlinearity in Energy Harvesting Systems written by Elena Blokhina and published by Springer. This book was released on 2016-11-10 with total page 359 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a single-source guide to nonlinearity and nonlinear techniques in energy harvesting, with a focus on vibration energy harvesters for micro and nanoscale applications. The authors demonstrate that whereas nonlinearity was avoided as an undesirable phenomenon in early energy harvesters, now it can be used as an essential part of these systems. Readers will benefit from an overview of nonlinear techniques and applications, as well as deeper insight into methods of analysis and modeling of energy harvesters, employing different nonlinearities. The role of nonlinearity due to different aspects of an energy harvester is discussed, including nonlinearity due to mechanical-to-electrical conversion, nonlinearity due to conditioning electronic circuits, nonlinearity due to novel materials (e.g., graphene), etc. Coverage includes tutorial introductions to MEMS and NEMS technology, as well as a wide range of applications, such as nonlinear oscillators and transducers for energy harvesters and electronic conditioning circuits for effective energy processing.
Author : Leo Kounis
Publisher : BoD – Books on Demand
ISBN 13 : 1789239516
Total Pages : 206 pages
Book Rating : 4.7/5 (892 download)
Download or read book Reliability and Maintenance written by Leo Kounis and published by BoD – Books on Demand. This book was released on 2020-07-01 with total page 206 pages. Available in PDF, EPUB and Kindle. Book excerpt: Amid a plethora of challenges, technological advances in science and engineering are inadvertently affecting an increased spectrum of today’s modern life. Yet for all supplied products and services provided, robustness of processes, methods, and techniques is regarded as a major player in promoting safety. This book on systems reliability, which equally includes maintenance-related policies, presents fundamental reliability concepts that are applied in a number of industrial cases. Furthermore, to alleviate potential cost and time-specific bottlenecks, software engineering and systems engineering incorporate approximation models, also referred to as meta-processes, or surrogate models to reproduce a predefined set of problems aimed at enhancing safety, while minimizing detrimental outcomes to society and the environment.
Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author : Tanveer Saleh
Publisher : Elsevier
ISBN 13 : 0128231807
Total Pages : 413 pages
Book Rating : 4.1/5 (282 download)
Download or read book Micro Electro-fabrication written by Tanveer Saleh and published by Elsevier. This book was released on 2021-05-14 with total page 413 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro Electro-fabrication outlines three major nanoscale electro-fabrication techniques, including electro-discharge machining, electrochemical machining and electrochemical deposition. Applications covered include the fabrication of nozzles for automobiles, miniature hole machining for aerospace turbine blade cooling, biomedical device fabrication, such as stents, the fabrication of microchannels for microfluidic application, the production of various MEMS devices, rapid prototyping of micro components, and nanoelectrode fabrication for scanning electron microscopy. This comprehensive book discusses the fundamental nature of the various electro-fabrication processes as well as mathematical modelling and applications. It is an important reference for materials scientists and engineers working at the nanoscale. Provides state-of-the-art research investigations on various topics of micro/nano EDM, micro LECD, micro/nano ECM and ECDM techniques Compares a variety of electro-fabrication techniques, outlining which is best in different situations Outlines a variety of modeling and optimization techniques relating to micro/nano EDM, micro LECD, micro/nano ECM and ECDM
Author : Pilar Gonzalez Ruiz
Publisher : Springer Science & Business Media
ISBN 13 : 9400767994
Total Pages : 210 pages
Book Rating : 4.4/5 (7 download)
Download or read book Poly-SiGe for MEMS-above-CMOS Sensors written by Pilar Gonzalez Ruiz and published by Springer Science & Business Media. This book was released on 2013-07-17 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence of deposition conditions, germanium content and doping concentration on the electrical and piezoresistive properties of boron-doped poly-SiGe. The development of a CMOS-compatible process flow, with special attention to the sealing method, is also described. Piezoresistive pressure sensors with different areas and piezoresistor designs were fabricated and tested. Together with the piezoresistive pressure sensors, also functional capacitive pressure sensors were successfully fabricated on the same wafer, proving the versatility of poly-SiGe for MEMS sensor applications. Finally, a detailed analysis of the MEMS processing impact on the underlying CMOS circuit is also presented.
Author : Yasuhisa Omura
Publisher : The Electrochemical Society
ISBN 13 : 1566778662
Total Pages : 347 pages
Book Rating : 4.5/5 (667 download)
Download or read book Advanced Semiconductor-on-Insulator Technology and Related Physics 15 written by Yasuhisa Omura and published by The Electrochemical Society. This book was released on 2011-04 with total page 347 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the continuation of the long running ¿Silicon-on-Insulator Technology and Devices¿ symposium. The issue of ECS Transactions covers recent significant advances in SOI technologies, SOI-based nanoelectronics and innovative applications including scientific interests. It will be of interest to materials and device scientists, as well as to process and applications oriented engineers and scientists.
Author : Hüseyin Canbolat
Publisher : BoD – Books on Demand
ISBN 13 : 9535102397
Total Pages : 164 pages
Book Rating : 4.5/5 (351 download)
Download or read book Electrostatics written by Hüseyin Canbolat and published by BoD – Books on Demand. This book was released on 2012-03-14 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, the authors provide state-of-the-art research studies on electrostatic principles or include the electrostatic phenomena as an important factor. The chapters cover diverse subjects, such as biotechnology, bioengineering, actuation of MEMS, measurement and nanoelectronics. Hopefully, the interested readers will benefit from the book in their studies. It is probable that the presented studies will lead the researchers to develop new ideas to conduct their research.
Author : Huikai Xie
Publisher : MDPI
ISBN 13 : 3039213032
Total Pages : 176 pages
Book Rating : 4.0/5 (392 download)
Download or read book Optical MEMS written by Huikai Xie and published by MDPI. This book was released on 2019-08-06 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines
Author : Johannes Karl Fink
Publisher : William Andrew
ISBN 13 : 0323311431
Total Pages : 442 pages
Book Rating : 4.3/5 (233 download)
Download or read book High Performance Polymers written by Johannes Karl Fink and published by William Andrew. This book was released on 2014-07-04 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt: Approaching the material from a chemistry and engineering perspective, High Performance Polymers presents the most reliable and current data available about state-of-the-art polymerization, fabrication, and application methods of high performance industrial polymers. Chapters are arranged according to the chemical constitution of the individual classes, beginning with main chain carbon-carbon polymers and leading to ether-containing, sulfur-containing, and so on. Each chapter follows an easily readable template, provides a brief overview and history of the polymer, and continues on to such sub-topics as monomers; polymerization and fabrication; properties; fabrication methods; special additives; applications; suppliers and commercial grades; safety; and environmental impact and recycling. High Performance Polymers brings a wealth of up-to-date, high performance polymer data to you library, in a format that allows for either a fast fact-check or more detailed study. In this new edition the data has been fully updated to reflect all developments since 2008, particularly in the topics of monomers, synthesis of polymers, special polymer types, and fields of application. Presents the state-of-the-art polymerization, fabrication and application methods of high performance industrial polymers Provides fundamental information for practicing engineers working in industries that develop advanced applications (including electronics, automotive and medical) Discusses environmental impact and recycling of polymers
Author : Prasad Yarlagadda
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038261327
Total Pages : 2716 pages
Book Rating : 4.0/5 (382 download)
Download or read book Industrial Instrumentation and Control Systems II written by Prasad Yarlagadda and published by Trans Tech Publications Ltd. This book was released on 2013-07-15 with total page 2716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Collection of selected, peer reviewed papers from the 2013 2nd International Conference on Measurement, Instrumentation and Automation (ICMIA 2013), April 23-24, 2013, Guilin, China. Volume is indexed by Thomson Reuters CPCI-S (WoS). The 503 papers are grouped as follows: Chapter 1: Intelligent Electrician, Electricity Instruments; Chapter 2: Sensors and Navigation Engineering; Chapter 3: Control System Modeling, Simulation and Modelling Technology; Chapter 4: Fluid, Flow and Hydravlic Engineering, Control Technology; Chapter 5: Mechatronics; Chapter 6: Industrial Robot, Power Systems Engineering and Automation; Chapter 7: Auto Control System; Chapter 8: CAD / CAM / CAE and Related Modelling Technologies; Chapter 9: Electric, Electronic, Microelectronic, Embedded Systems and Engineering; Chapter 10: Communication and Wireless Engineering Technology; Chapter 11: Software Development, WEB-Service Engineering and Mathematical Modelling; Chapter 12: Information Technologies and Computer Applications in Industry and Engineering; Chapter 13: Network Engineering and Network Security; Chapter 14: The Internet of Things, PDM, ERP and Supply Chain Management.
Author : C. Colinge
Publisher : The Electrochemical Society
ISBN 13 : 1566778239
Total Pages : 656 pages
Book Rating : 4.5/5 (667 download)
Download or read book Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gösele written by C. Colinge and published by The Electrochemical Society. This book was released on 2010-10 with total page 656 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor wafer bonding continues to evolve as a crucial technology extending new integration schemes and disseminating new product architectures in such diverse areas as high quality silicon-on-insulator (SOI) materials for electronic applications, Si-Ge strained layers, Germanium-on-Insulator (GeOI), 3D device integration, Si on quartz or glass for thin film displays, compound semiconductor-on-Si heterostructures and Micro-Electro-Mechanical Systems.
