Materials and Device Characterization in Micromachining

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Publisher :
ISBN 13 :
Total Pages : 220 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Materials and Device Characterization in Micromachining by :

Download or read book Materials and Device Characterization in Micromachining written by and published by . This book was released on 2000 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Materials and Device Characterization in Micromachining II

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Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819434722
Total Pages : 0 pages
Book Rating : 4.4/5 (347 download)

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Book Synopsis Materials and Device Characterization in Micromachining II by : Yuli Vladimirsky

Download or read book Materials and Device Characterization in Micromachining II written by Yuli Vladimirsky and published by SPIE-International Society for Optical Engineering. This book was released on 1999 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A collection of 28 scientific papers addressing materials and device charaterization in micromachining.

Materials and Device Characterization in Micromachining

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Publisher :
ISBN 13 : 9780819429711
Total Pages : 442 pages
Book Rating : 4.4/5 (297 download)

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Book Synopsis Materials and Device Characterization in Micromachining by : Craig R. Friedrich

Download or read book Materials and Device Characterization in Micromachining written by Craig R. Friedrich and published by . This book was released on 1998 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Materials and Device Characterization in Micromachining

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Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (113 download)

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Book Synopsis Materials and Device Characterization in Micromachining by :

Download or read book Materials and Device Characterization in Micromachining written by and published by . This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Materials and Device Characterization in Micromachining

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Publisher :
ISBN 13 :
Total Pages : 274 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Materials and Device Characterization in Micromachining by :

Download or read book Materials and Device Characterization in Micromachining written by and published by . This book was released on 1999 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Materials and Device Characterization in Micromachining III

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Publisher :
ISBN 13 :
Total Pages : 200 pages
Book Rating : 4.:/5 (746 download)

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Book Synopsis Materials and Device Characterization in Micromachining III by :

Download or read book Materials and Device Characterization in Micromachining III written by and published by . This book was released on 2000 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Fabrication and Material Characterization of Silver Cantilevers Via Direct Surface Micromachining

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Publisher :
ISBN 13 :
Total Pages : 61 pages
Book Rating : 4.:/5 (319 download)

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Book Synopsis Fabrication and Material Characterization of Silver Cantilevers Via Direct Surface Micromachining by : Eric Wing-Jing Lam

Download or read book Fabrication and Material Characterization of Silver Cantilevers Via Direct Surface Micromachining written by Eric Wing-Jing Lam and published by . This book was released on 2008 with total page 61 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical Systems (MEMS) rely heavily on the semiconductor industry's manufacturing paradigm. While the standardized process model allows semiconductor chips to benefit from economy of scale and be sold at low prices, MEMS devices use specialized processes and subsequently have to be sold at higher prices. This severely hinders MEMS development because it is not economically feasible to research and develop specialized devices where only small volumes are needed. As such, tools and processes which divorce MEMS fabrication from this paradigm are needed. Using Hewlett-Packard thermal inkjet technology mounted to an X-Y microcontroller stage, we present a mask-less, or direct, surface micromachining process flow with a 250°C thermal budget. The process uses Cabot Corp.'s silver-based conductive ink for the structural layer and PMMA for the sacrificial layer. Several other materials were tested for use as sacrificial inks in addition to PMMA. Silver cantilevers with dimensions of 200x50[mu]m and 200x100[mu]m were fabricated as a demonstration of the process. The silver cantilevers were mechanically characterized by using force-deflection measurements made by a P-10 contact profilometer or a Hysitron nanoindentor. We present findings of 21.9±1.50GPa or 22±1.5GPa for the silver ink's Young's modulus of elasticity, depending on the characterization method. These measurements were consistent with results measured by nanoindentating Cabot silver films. We hypothesize that the film's porosity is the cause of the silver's reduced material properties. Some preliminary data supporting this hypothesis is provided, and potential methods of improving the material properties and the surface micromachining process are discussed.

Smart Material Systems and MEMS

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Publisher : John Wiley & Sons
ISBN 13 : 0470093625
Total Pages : 418 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Smart Material Systems and MEMS by : Vijay K. Varadan

Download or read book Smart Material Systems and MEMS written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2006-11-02 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

MEMS

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Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Advanced Structural Materials

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Publisher : CRC Press
ISBN 13 : 1420017462
Total Pages : 526 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Advanced Structural Materials by : Winston O. Soboyejo

Download or read book Advanced Structural Materials written by Winston O. Soboyejo and published by CRC Press. This book was released on 2006-12-21 with total page 526 pages. Available in PDF, EPUB and Kindle. Book excerpt: A snapshot of the central ideas used to control fracture properties of engineered structural metallic materials, Advanced Structural Materials: Properties, Design Optimization, and Applications illustrates the critical role that advanced structural metallic materials play in aerospace, biomedical, automotive, sporting goods, and other indust

Micro and Nano Mechanical Testing of Materials and Devices

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Publisher : Springer Science & Business Media
ISBN 13 : 0387787011
Total Pages : 390 pages
Book Rating : 4.3/5 (877 download)

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Book Synopsis Micro and Nano Mechanical Testing of Materials and Devices by : Fuqian Yang

Download or read book Micro and Nano Mechanical Testing of Materials and Devices written by Fuqian Yang and published by Springer Science & Business Media. This book was released on 2009-02-28 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoscale and nanostructured materials have exhibited different physical properties from the corresponding macroscopic coarse-grained materials due to the size confinement. As a result, there is a need for new techniques to probe the mechanical behavior of advanced materials on the small scales. Micro and Nano Mechanical Testing of Materials and Devices presents the latest advances in the techniques of mechanical testing on the micro- and nanoscales, which are necessary for characterizing the mechanical properties of low-dimensional materials and structures. Written by a group of internationally recognized authors, this book covers topics such as: Techniques for micro- and nano- mechanical characterization; Size effects in the indentation plasticity; Characterization of low-dimensional structure including nanobelts and nanotubes; Characterization of smart materials, including piezoelectric materials and shape memory alloys; Analysis and modeling of the deformation of carbon-nanotubes. Micro and Nano Mechanical Testing of Materials and Devices is a valuable resource for engineers and researchers working in the area of mechanical characterization of advanced materials.

Nanostructured Coatings

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Publisher : Springer Science & Business Media
ISBN 13 : 0387487565
Total Pages : 671 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis Nanostructured Coatings by : Albano Cavaleiro

Download or read book Nanostructured Coatings written by Albano Cavaleiro and published by Springer Science & Business Media. This book was released on 2007-02-19 with total page 671 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book delivers practical insight into a broad range of fields related to hard coatings, from their deposition and characterization up to the hardening and deformation mechanisms allowing the interpretation of results. The text examines relationships between structure/microstructure and mechanical properties from fundamental concepts, through types of coatings, to characterization techniques. The authors explore the search for coatings that can satisfy the criteria for successful implementation in real mechanical applications.

Nano and Cell Mechanics

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Publisher : John Wiley & Sons
ISBN 13 : 111848259X
Total Pages : 519 pages
Book Rating : 4.1/5 (184 download)

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Book Synopsis Nano and Cell Mechanics by : Horacio D. Espinosa

Download or read book Nano and Cell Mechanics written by Horacio D. Espinosa and published by John Wiley & Sons. This book was released on 2012-12-12 with total page 519 pages. Available in PDF, EPUB and Kindle. Book excerpt: Research in nano and cell mechanics has received much attention from the scientific community as a result of society needs and government initiatives to accelerate developments in materials, manufacturing, electronics, medicine and healthcare, energy, and the environment. Engineers and scientists are currently engaging in increasingly complex scientific problems that require interdisciplinary approaches. In this regard, studies in this field draw from fundamentals in atomistic scale phenomena, biology, statistical and continuum mechanics, and multiscale modeling and experimentation. As a result, contributions in these areas are spread over a large number of specialized journals, which prompted the Editors to assemble this book. Nano and Cell Mechanics: Fundamentals and Frontiers brings together many of the new developments in the field for the first time, and covers fundamentals and frontiers in mechanics to accelerate developments in nano- and bio-technologies. Key features: • Provides an overview of recent advances in nano and cell mechanics. • Covers experimental, analytical, and computational tools used to investigate biological and nanoscale phenomena. • Covers fundamentals and frontiers in mechanics to accelerate developments in nano- and bio-technologies. • Presents multiscale-multiphysics modeling and experimentation techniques. • Examines applications in materials, manufacturing, electronics, medicine and healthcare. Nano and Cell Mechanics: Fundamentals and Frontiers is written by internationally recognized experts in theoretical and applied mechanics, applied physics, chemistry, and biology. It is an invaluable reference for graduate students of nano- and bio-technologies, researchers in academia and industry who are working in nano and cell mechanics, and practitioners who are interested in learning about the latest analysis tools. The book can also serve as a text for graduate courses in theoretical and applied mechanics, mechanical engineering, materials science, and applied physics.

Microelectromechanical Systems and Devices

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Publisher : IntechOpen
ISBN 13 : 9789535103066
Total Pages : 494 pages
Book Rating : 4.1/5 (3 download)

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Book Synopsis Microelectromechanical Systems and Devices by : Nazmul Islam

Download or read book Microelectromechanical Systems and Devices written by Nazmul Islam and published by IntechOpen. This book was released on 2012-03-28 with total page 494 pages. Available in PDF, EPUB and Kindle. Book excerpt: The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.

Introduction to Microfabrication

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Publisher : John Wiley & Sons
ISBN 13 : 0470020563
Total Pages : 424 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Introduction to Microfabrication by : Sami Franssila

Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2005-01-28 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Microelectromechanical Systems and Devices

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Publisher : BoD – Books on Demand
ISBN 13 : 9535103067
Total Pages : 496 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Microelectromechanical Systems and Devices by : Nazmul Islam

Download or read book Microelectromechanical Systems and Devices written by Nazmul Islam and published by BoD – Books on Demand. This book was released on 2012-03-28 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.

Smaller Satellites: Bigger Business?

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Publisher : Springer Science & Business Media
ISBN 13 : 9401730083
Total Pages : 610 pages
Book Rating : 4.4/5 (17 download)

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Book Synopsis Smaller Satellites: Bigger Business? by : Michael J Rycroft

Download or read book Smaller Satellites: Bigger Business? written by Michael J Rycroft and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: Y. Fujimori, Symposium Programme Committee Chair, and Faculty Member, International Space University e-mail: [email protected] M.Rycroft, Faculty Member, International Space University e-mail: [email protected] N. Crosby, International Space University e-mail: [email protected] For the sixth annual ISU Symposium the theme was "Smaller Satellites: Bigger Business? Concepts, Applications and Markets for Micro/Nanosatellites in a New Information World". Thus, the Symposium addressed the crucial question: are small satellites the saviour of space programmes around the world It did this from the unique perspective of the International Space today? University - the interdisciplinary, international and intercultural perspective. This Symposium brought together a variety of people working on small satellites - engineers, scientists, planners, providers, operators, policy makers and business executives, together with representatives from regulatory bodies, from national and international organizations, and from the finance sector, and also entrepreneurs. Discussion and debate were encouraged, based on the papers presented and those published here.