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Author : Craig R. Friedrich
Publisher :
ISBN 13 : 9780819429711
Total Pages : 442 pages
Book Rating : 4.4/5 (297 download)
Download or read book Materials and Device Characterization in Micromachining written by Craig R. Friedrich and published by . This book was released on 1998 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (113 download)
Download or read book Materials and Device Characterization in Micromachining written by and published by . This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 220 pages
Book Rating : 4.3/5 (91 download)
Download or read book Materials and Device Characterization in Micromachining written by and published by . This book was released on 2000 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 274 pages
Book Rating : 4.3/5 (91 download)
Download or read book Materials and Device Characterization in Micromachining written by and published by . This book was released on 1999 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Yuli Vladimirsky
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819434722
Total Pages : 0 pages
Book Rating : 4.4/5 (347 download)
Download or read book Materials and Device Characterization in Micromachining II written by Yuli Vladimirsky and published by SPIE-International Society for Optical Engineering. This book was released on 1999 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A collection of 28 scientific papers addressing materials and device charaterization in micromachining.
Author :
Publisher :
ISBN 13 :
Total Pages : 200 pages
Book Rating : 4.:/5 (746 download)
Download or read book Materials and Device Characterization in Micromachining III written by and published by . This book was released on 2000 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Roberto Osellame
Publisher : Springer Science & Business Media
ISBN 13 : 364223366X
Total Pages : 485 pages
Book Rating : 4.6/5 (422 download)
Download or read book Femtosecond Laser Micromachining written by Roberto Osellame and published by Springer Science & Business Media. This book was released on 2012-03-05 with total page 485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.
Author : Fuqian Yang
Publisher : Springer Science & Business Media
ISBN 13 : 0387787011
Total Pages : 390 pages
Book Rating : 4.3/5 (877 download)
Download or read book Micro and Nano Mechanical Testing of Materials and Devices written by Fuqian Yang and published by Springer Science & Business Media. This book was released on 2009-02-28 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoscale and nanostructured materials have exhibited different physical properties from the corresponding macroscopic coarse-grained materials due to the size confinement. As a result, there is a need for new techniques to probe the mechanical behavior of advanced materials on the small scales. Micro and Nano Mechanical Testing of Materials and Devices presents the latest advances in the techniques of mechanical testing on the micro- and nanoscales, which are necessary for characterizing the mechanical properties of low-dimensional materials and structures. Written by a group of internationally recognized authors, this book covers topics such as: Techniques for micro- and nano- mechanical characterization; Size effects in the indentation plasticity; Characterization of low-dimensional structure including nanobelts and nanotubes; Characterization of smart materials, including piezoelectric materials and shape memory alloys; Analysis and modeling of the deformation of carbon-nanotubes. Micro and Nano Mechanical Testing of Materials and Devices is a valuable resource for engineers and researchers working in the area of mechanical characterization of advanced materials.
Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 9781420050905
Total Pages : 1386 pages
Book Rating : 4.0/5 (59 download)
Download or read book The MEMS Handbook written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2001-09-27 with total page 1386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.
Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)
Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Author : Stephen M. Hsu
Publisher : Springer Science & Business Media
ISBN 13 : 1461510236
Total Pages : 442 pages
Book Rating : 4.4/5 (615 download)
Download or read book Nanotribology written by Stephen M. Hsu and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotribology: Critical Assessment and Research Needs is an excellent reference for both academic and industrial researchers working in the fields of nanotechnology, tribology, mechanical engineering, materials science and engineering, MEMS, NEMS, magnetic recording, and biomedical devices. It will also be of interest to those pursuing scanning probe microscopy, nanoimaging, mesomanufacturing, sensors, actuators, aerospace, defense (controllers, microsystems), and military systems. Nanotribology: Critical Assessment and Research Needs provides a critical assessment of the current state of the art of nanotribology within the context of MEMS, mesomanufacturing, nanotechnology and microsystems. It contains chapters written by the leading experts in these fields. It identifies gaps in current knowledge and barriers to applications, and recommends research areas that need to be addressed to enable the rapid development of technologies.
Author : Eric Wing-Jing Lam
Publisher :
ISBN 13 :
Total Pages : 61 pages
Book Rating : 4.:/5 (319 download)
Download or read book Fabrication and Material Characterization of Silver Cantilevers Via Direct Surface Micromachining written by Eric Wing-Jing Lam and published by . This book was released on 2008 with total page 61 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical Systems (MEMS) rely heavily on the semiconductor industry's manufacturing paradigm. While the standardized process model allows semiconductor chips to benefit from economy of scale and be sold at low prices, MEMS devices use specialized processes and subsequently have to be sold at higher prices. This severely hinders MEMS development because it is not economically feasible to research and develop specialized devices where only small volumes are needed. As such, tools and processes which divorce MEMS fabrication from this paradigm are needed. Using Hewlett-Packard thermal inkjet technology mounted to an X-Y microcontroller stage, we present a mask-less, or direct, surface micromachining process flow with a 250°C thermal budget. The process uses Cabot Corp.'s silver-based conductive ink for the structural layer and PMMA for the sacrificial layer. Several other materials were tested for use as sacrificial inks in addition to PMMA. Silver cantilevers with dimensions of 200x50[mu]m and 200x100[mu]m were fabricated as a demonstration of the process. The silver cantilevers were mechanically characterized by using force-deflection measurements made by a P-10 contact profilometer or a Hysitron nanoindentor. We present findings of 21.9±1.50GPa or 22±1.5GPa for the silver ink's Young's modulus of elasticity, depending on the characterization method. These measurements were consistent with results measured by nanoindentating Cabot silver films. We hypothesize that the film's porosity is the cause of the silver's reduced material properties. Some preliminary data supporting this hypothesis is provided, and potential methods of improving the material properties and the surface micromachining process are discussed.
Author : EDFAS Desk Reference Committee
Publisher : ASM International
ISBN 13 : 1615037268
Total Pages : 673 pages
Book Rating : 4.6/5 (15 download)
Download or read book Microelectronics Failure Analysis written by EDFAS Desk Reference Committee and published by ASM International. This book was released on 2011 with total page 673 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes bibliographical references and index.
Author : Wengang (Wayne) Bi
Publisher : CRC Press
ISBN 13 : 1498747140
Total Pages : 709 pages
Book Rating : 4.4/5 (987 download)
Download or read book Handbook of GaN Semiconductor Materials and Devices written by Wengang (Wayne) Bi and published by CRC Press. This book was released on 2017-10-20 with total page 709 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses material growth, device fabrication, device application, and commercialization of energy-efficient white light-emitting diodes (LEDs), laser diodes, and power electronics devices. It begins with an overview on basics of semiconductor materials, physics, growth and characterization techniques, followed by detailed discussion of advantages, drawbacks, design issues, processing, applications, and key challenges for state of the art GaN-based devices. It includes state of the art material synthesis techniques with an overview on growth technologies for emerging bulk or free standing GaN and AlN substrates and their applications in electronics, detection, sensing, optoelectronics and photonics. Wengang (Wayne) Bi is Distinguished Chair Professor and Associate Dean in the College of Information and Electrical Engineering at Hebei University of Technology in Tianjin, China. Hao-chung (Henry) Kuo is Distinguished Professor and Associate Director of the Photonics Center at National Chiao-Tung University, Hsin-Tsu, Taiwan, China. Pei-Cheng Ku is an associate professor in the Department of Electrical Engineering & Computer Science at the University of Michigan, Ann Arbor, USA. Bo Shen is the Cheung Kong Professor at Peking University in China.
Author : Nazmul Islam
Publisher : BoD – Books on Demand
ISBN 13 : 9535103067
Total Pages : 496 pages
Book Rating : 4.5/5 (351 download)
Download or read book Microelectromechanical Systems and Devices written by Nazmul Islam and published by BoD – Books on Demand. This book was released on 2012-03-28 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.
Author : Fernando A. Lasagni
Publisher : Springer Science & Business Media
ISBN 13 : 3642177824
Total Pages : 227 pages
Book Rating : 4.6/5 (421 download)
Download or read book Fabrication and Characterization in the Micro-Nano Range written by Fernando A. Lasagni and published by Springer Science & Business Media. This book was released on 2011-03-23 with total page 227 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book shows an update in the field of micro/nano fabrications techniques of two and three dimensional structures as well as ultimate three dimensional characterization methods from the atom range to the micro scale. Several examples are presented showing their direct application in different technological fields such as microfluidics, photonics, biotechnology and aerospace engineering, between others. The effects of the microstructure and topography on the macroscopic properties of the studied materials are discussed, together with a detailed review of 3D imaging techniques.
Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 0815519885
Total Pages : 670 pages
Book Rating : 4.8/5 (155 download)
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2009-12-08 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
