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Low Pressure Plasmas And Microstructuring Technology
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Book Synopsis Low Pressure Plasmas and Microstructuring Technology by : Gerhard Franz
Download or read book Low Pressure Plasmas and Microstructuring Technology written by Gerhard Franz and published by Springer Science & Business Media. This book was released on 2009-04-09 with total page 743 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the semiconductor industry is inconceivable wi- outthegiantprogressintheplasmatechnology.Moore’slawisnotcarvedinto 1 stone, and not only the ITRS map is subject to change every ?ve years but also new branches develop and others mingle together. Moreover, the quality of conventional materials can be improved by plasma treatment:Cottonbecomesmorecrease-resistant,leathermoredurable,andthe shrinking of wool ?bers during the washing process can be signi?cantly reduced. To cut a long story short: More than 150 years after the discovery of the sputtering e?ect by Grove, plasma-based processes are about to spread out into new ?elds of research and application [1]—no wonder that the market for etching machines kept growing by an annual rate of 17 % up to the burst of the internet bubble, and it took only some years of recovery to continue the voyage [2].
Book Synopsis Low Pressure Plasmas and Microstructuring Technology by :
Download or read book Low Pressure Plasmas and Microstructuring Technology written by and published by . This book was released on 2008 with total page 758 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Surface wave driven molecular low pressure plasmas for general lighting by : Oeguen, Celal Mohan
Download or read book Surface wave driven molecular low pressure plasmas for general lighting written by Oeguen, Celal Mohan and published by KIT Scientific Publishing. This book was released on 2016-02-23 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nowadays, compact fluorescent lamps are widely-used in general lighting applications. However, they still struggle with acceptance problems due to the hazardous mercury, which serves as the radiant component inside the lamp. The presented work deals with the development of a mercury-free, electrodeless, low pressure plasma based on a molecular filling and driven by microwaves, which may represent a viable alternative to the conventional CFLs.
Book Synopsis Sensors and Biosensors, MEMS Technologies and its Applications by : Sergey Yurish
Download or read book Sensors and Biosensors, MEMS Technologies and its Applications written by Sergey Yurish and published by Lulu.com. This book was released on 2014-07-14 with total page 560 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and Biosensors, MEMS Technologies and its Applications (Book Series: Advances in Sensors: Reviews, Vol. 2) - 18 chapters with sensor related state-of-the-art reviews and descriptions of the latest achievements written by experts from academia and industry from 12 countries: China, India, Iran, Malaysia, Poland, Singapore, Spain, Taiwan, Thailand, UK, Ukraine and USA. This volume is divided into three main parts: physical sensors, biosensors, nanoparticles, MEMS technologies and applications. With this unique combination of information in each volume, the Advances in Sensors: Reviews Book Series will be of value for scientists and engineers in industry and at universities, to sensors developers, distributors, and users. Like the 1st volume of this Book Series, the 2nd volume also has been organized by topics of high interest.
Book Synopsis Encyclopedia of Plasma Technology - Two Volume Set by : J. Leon Shohet
Download or read book Encyclopedia of Plasma Technology - Two Volume Set written by J. Leon Shohet and published by CRC Press. This book was released on 2016-12-12 with total page 3082 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technical plasmas have a wide range of industrial applications. The Encyclopedia of Plasma Technology covers all aspects of plasma technology from the fundamentals to a range of applications across a large number of industries and disciplines. Topics covered include nanotechnology, solar cell technology, biomedical and clinical applications, electronic materials, sustainability, and clean technologies. The book bridges materials science, industrial chemistry, physics, and engineering, making it a must have for researchers in industry and academia, as well as those working on application-oriented plasma technologies. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail) [email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail) [email protected]
Book Synopsis Low Temperature Plasma Technology by : Paul K. Chu
Download or read book Low Temperature Plasma Technology written by Paul K. Chu and published by CRC Press. This book was released on 2013-07-15 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration into biofilms, discharge-mode transition of atmospheric pressure plasmas, and self-organization of microdischarges. It describes relevant technology and diagnostics, including nanosecond pulsed discharge, cavity ringdown spectroscopy, and laser-induced fluorescence measurement, and explores the increasing research on atmospheric pressure nonequilibrium plasma jets. The authors also discuss how low temperature plasmas are used in the synthesis of nanomaterials, environmental applications, the treatment of biomaterials, and plasma medicine. This book provides a balanced and thorough treatment of the core principles, novel technology and diagnostics, and state-of-the-art applications of low temperature plasmas. It is accessible to scientists and graduate students in low-pressure plasma physics, nanotechnology, plasma medicine, and materials science. The book is also suitable as an advanced reference for senior undergraduate students.
Book Synopsis Atomic-Molecular Ionization by Electron Scattering by : K. N. Joshipura
Download or read book Atomic-Molecular Ionization by Electron Scattering written by K. N. Joshipura and published by Cambridge University Press. This book was released on 2018-06-30 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive and up-to-date text in the field of electron scattering and ionization, covering fundamentals, experimental background, quantum scattering theories and applications. Electron impact ionization of atoms and molecules in ground/metastable states is discussed comprehensively. The text covers electron scattering phenomenon for diatomic and common molecules, polyatomic molecules and radicals including hydro-carbons, fluoro-carbons and other larger molecules together with relevant radical species in detail. Applications of electron impact ionization and excitation in gaseous or plasma and condensed matter is discussed in a separate chapter. Recent advances in the field of electron molecule scattering and ionization for polyatomic molecules is covered extensively.
Book Synopsis Plasma Processing of Materials by : National Research Council
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Book Synopsis Plasma Science and Technology by : Tetsu Mieno
Download or read book Plasma Science and Technology written by Tetsu Mieno and published by BoD – Books on Demand. This book was released on 2016-04-20 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the early twentieth century, Dr. Irving Langmuir actively studied plasma discharge and surface science. Since then, great progress has been made in the development of applications of discharges and plasmas such as discharge lamps, electric tubes, and arc welding. In relation to studies on space physics and controlled nuclear fusion, plasma physics has greatly advanced. Plasma chemistry has also progressed along with its applications in LSI fabrication technology, the chemical vapor deposition of functional films, and the production of nanomaterials. In the twenty-first century, the further development of applications of plasma physics and plasma chemistry is certainly expected. In this book, 18 chapters on the recent progress in plasma science and technology have been written by active specialists worldwide.
Book Synopsis Comprehensive Materials Processing by :
Download or read book Comprehensive Materials Processing written by and published by Newnes. This book was released on 2014-04-07 with total page 5485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive Materials Processing, Thirteen Volume Set provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources
Book Synopsis Handbook of Plasma Processing Technology by : Stephen M. Rossnagel
Download or read book Handbook of Plasma Processing Technology written by Stephen M. Rossnagel and published by William Andrew. This book was released on 1990 with total page 523 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Book Synopsis Advanced Plasma Technology by : Riccardo d'Agostino
Download or read book Advanced Plasma Technology written by Riccardo d'Agostino and published by John Wiley & Sons. This book was released on 2008-09-08 with total page 479 pages. Available in PDF, EPUB and Kindle. Book excerpt: A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.
Book Synopsis Plasma Technologies for Textiles by : Roshan Shishoo
Download or read book Plasma Technologies for Textiles written by Roshan Shishoo and published by Elsevier. This book was released on 2007-02-21 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma technologies present an environmentally-friendly and versatile way of treating textile materials in order to enhance a variety of properties such as wettability, liquid repellency, dyeability and coating adhesion. Recent advances made in commercially viable plasma systems have greatly increased the potential of using plasma technology in industrial textile finishing. This pioneering book provides an essential guide to both the technology and science related to plasmas and its practical applications in the textile industry. The first part of the book discusses the science and technology behind plasmas. Chapters give detailed and comprehensive descriptions on the characteristics of plasmas and methods of control and treatment in the processing of textiles. Both low pressure cold plasma and atmospheric pressure cold plasma processes are described as well as the diagnosis and control of plasma parameters in plasma generating reactors. A chapter is devoted to the use of plasma technology to achieve nanoscale treatment of textile surfaces. The second part of the book concentrates on specific applications of plasma technologies. Chapters cover treatments for water and oil repellency of textiles, engineering of biomedical textiles and woollen finishing techniques through the use of plasma technologies. Further chapters cover the modification of fibres for use in composites and the potential use of plasma technologies for the finishing of fabrics made of man made fibres. The final chapter in the book gives a comprehensive analysis of the surface chemical and physical characterisation of plasma treated fabrics. Written by a distinguished international team of experts, Plasma technologies for textiles is an invaluable reference for researchers, scientists and technologists alike. Summarises both the science and technology of plasma processing, and its practical applications Discusses how plasma technology improves textile properties such as wettability and liquid repelling An invaluable reference for researchers, scientists and technologists
Book Synopsis Recent Advances in Atmospheric-Pressure Plasma Technology by : Bogdan-George Rusu
Download or read book Recent Advances in Atmospheric-Pressure Plasma Technology written by Bogdan-George Rusu and published by Mdpi AG. This book was released on 2023-03-03 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma technology has arisen as a novel approach in the processing and manufacturing of novel materials in recent years. Due to its benefits, such as its superior sterilizing performance, low cost, and environmental friendliness, atmospheric pressure plasma has drawn the attention of researchers. As a result, atmospheric pressure plasma manufacturing in different configurations (plan parallel and jet plasma) is becoming more popular. The necessity to characterize these types of plasmas has greatly expanded as a result of its wide range of applications. Due to these factors, "Recent Advances in Atmospheric-Pressure Plasma Technology" Issue in the journal Applied Physics that brings together experts in all areas of experimental, computational, and theoretical research on atmospheric pressure plasmas. This Special Issue brings together cutting-edge new research on the fundamental characteristics of these plasmas as well as their applications in the fields of medicine, the food industry, agriculture, 3D printing, materials processing science, and even the automotive and aerospace industries. Despite the fact that we were only able to touch on a small percentage of the potential applications for plasma discharge, we nevertheless hope that readers will find this reprint to be interesting and that they will discover new angles for their own future research on plasma.
Book Synopsis Surface Wave Driven Molecular Low Pressure Plasmas for General Lighting by : Celal Mohan Ögün
Download or read book Surface Wave Driven Molecular Low Pressure Plasmas for General Lighting written by Celal Mohan Ögün and published by . This book was released on 2020-10-09 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nowadays, compact fluorescent lamps are widely-used in general lighting applications. However, they still struggle with acceptance problems due to the hazardous mercury, which serves as the radiant component inside the lamp. The presented work deals with the development of a mercury-free, electrodeless, low pressure plasma based on a molecular filling and driven by microwaves, which may represent a viable alternative to the conventional CFLs. This work was published by Saint Philip Street Press pursuant to a Creative Commons license permitting commercial use. All rights not granted by the work's license are retained by the author or authors.
Book Synopsis Industrial Plasma Technology by : Yoshinobu Kawai
Download or read book Industrial Plasma Technology written by Yoshinobu Kawai and published by John Wiley & Sons. This book was released on 2010-04-26 with total page 467 pages. Available in PDF, EPUB and Kindle. Book excerpt: Clearly structured in five major sections on applications, this monograph covers such hot technologies as nanotechnology, solar cell technology, biomedical and clinical applications, and sustainability. Since the topic, applications and readers are highly interdisciplinary, the book bridges materials science, industrial chemistry, physics, and engineering -- making it a must-have for researchers in industry and academia, as well as those working in application-oriented plasma technology.
Book Synopsis Low Temperature Plasmas by : Rainer Hippler
Download or read book Low Temperature Plasmas written by Rainer Hippler and published by Wiley-VCH. This book was released on 2008-03-03 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: With its strong focus on the links between theory and experiment or technological process, this book presents the latest advances in our understanding of how plasmas behave. New contributions to this second edition cover dusty plasmas, cross-correlation spectroscopy, atmospheric pressure glow discharges, as well as applications in lightening, microelectronics, polymer surface modification, sterilization, biology and medicine. Straddling the boundaries between physics, chemistry and materials science, this is of interest to a wide community. From reviews of the first edition: "... it makes a highly valuable contribution to the subject area and will be accessible to scientists and engineers working in the field." ChemPhysChem
