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Lateral Field Excitation Film Bulk Acoustic Wave Resonator For High Frequency Wireless Communications
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Book Synopsis Lateral-field-excitation Film Bulk Acoustic Wave Resonator for High Frequency Wireless Communications by : Woo Wai Lau
Download or read book Lateral-field-excitation Film Bulk Acoustic Wave Resonator for High Frequency Wireless Communications written by Woo Wai Lau and published by . This book was released on 1996 with total page 104 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Tuneable Film Bulk Acoustic Wave Resonators by : Spartak Gevorgian
Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-14 with total page 255 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.
Book Synopsis Lateral Field Excitation Film Bulk Acoustic Wave Resonator Using Interdigitated Electrodes by : Kuok Chun Lou
Download or read book Lateral Field Excitation Film Bulk Acoustic Wave Resonator Using Interdigitated Electrodes written by Kuok Chun Lou and published by . This book was released on 1998 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Multilayer Integrated Film Bulk Acoustic Resonators by : Yafei Zhang
Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
Book Synopsis Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems by : Hasnain Lakdawala
Download or read book Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems written by Hasnain Lakdawala and published by . This book was released on 1997 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Resonator of Bulk-acoustic Wave Generated by Lateral Field in ZnO Film by : Yonghua Song
Download or read book Resonator of Bulk-acoustic Wave Generated by Lateral Field in ZnO Film written by Yonghua Song and published by . This book was released on 1995 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Acoustic Wave and Electromechanical Resonators by : Humberto Campanella
Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Book Synopsis Surface Acoustic Wave Devices in Telecommunications by : Ken-Ya Hashimoto
Download or read book Surface Acoustic Wave Devices in Telecommunications written by Ken-Ya Hashimoto and published by Springer Science & Business Media. This book was released on 2000-06-21 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface acoustic wave (SAW) devices are widely used in mobile communications, a rapidly evolving market. This book gives an overview on the latest SAW technologies with an emphasis on the design and simulation of devices, such as resonator-based devices employing the SH-type leaky SAW.
Book Synopsis High Frequency Thin-film Bulk Acoustic Wave Resonators for Gas- and Bio-analytical Applications by : G. M. Ashley
Download or read book High Frequency Thin-film Bulk Acoustic Wave Resonators for Gas- and Bio-analytical Applications written by G. M. Ashley and published by . This book was released on 2005 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Quantitative Determination of Lateral Mode Dispersion in Film Bulk Acoustic Resonators Through Laser Acoustic Imaging by : John D. Larson III.
Download or read book Quantitative Determination of Lateral Mode Dispersion in Film Bulk Acoustic Resonators Through Laser Acoustic Imaging written by John D. Larson III. and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Film Bulk Acoustic Resonators are useful for many signal processing applications. Detailed knowledge of their operation properties are needed to optimize their design for specific applications. The finite size of these resonators precludes their use in single acoustic modes; rather, multiple wave modes, such as, lateral wave modes are always excited concurrently. In order to determine the contributions of these modes, we have been using a newly developed full-field laser acoustic imaging approach to directly measure their amplitude and phase throughout the resonator. This paper describes new results comparing modeling of both elastic and piezoelectric effects in the active material with imaging measurement of all excited modes. Fourier transformation of the acoustic amplitude and phase displacement images provides a quantitative determination of excited mode amplitude and wavenumber at any frequency. Images combined at several frequencies form a direct visualization of lateral mode excitation and dispersion for the device under test allowing mode identification and comparison with predicted operational properties. Discussion and analysis are presented for modes near the first longitudinal thickness resonance (~900 MHz) in an AlN thin film resonator. Plate wave modeling, taking account of material crystalline orientation, elastic and piezoelectric properties and overlayer metallic films, will be discussed in relation to direct image measurements.
Book Synopsis Micro Electro Mechanical Systems by : Qing-An Huang
Download or read book Micro Electro Mechanical Systems written by Qing-An Huang and published by Springer. This book was released on 2018-05-04 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.
Book Synopsis Masters Theses in the Pure and Applied Sciences Accepted by Colleges and Universities of the United States and Canada by :
Download or read book Masters Theses in the Pure and Applied Sciences Accepted by Colleges and Universities of the United States and Canada written by and published by . This book was released on 1996 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Bulk Acoustic Wave Devices by : Tuomas Pensala
Download or read book Thin Film Bulk Acoustic Wave Devices written by Tuomas Pensala and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mobile phones for the most demanding filtering applications and complement the surface acoustic wave (SAW) based filters. Their main advantages are small size and high performance at frequencies above 2 GHz. This work concentrates on the characterization, performance optimization, and modelling techniques of thin film BAW devices. Laser interferometric vibration measurements together with plate wave dispersion modeling are used to extract the full set of elastic material parameters for sputter deposited ZnO, demonstrating a method for obtaining material data needed for accurate simulation of the devices. The effectiveness of the acoustic interference reflector used to isolate the vibration from the substrate is studied by 1-D modeling, 2-D finite element method and by electrical and laser interferometric measurements. It is found that the Q-value of reflector-based BAW resonators operating at 2 GHz is limited to approximately 2000 by mechanisms other than leakage through the reflector. Suppression of spurious resonances in ZnO resonators is studied in depth by modeling and measurements. It is verified that the approximate mode orthogonality is behind the suppression in boundary frame type ZnO devices operating in the piston mode, but also another narrow band mode suppression mechanism is found. A plate wave dispersion based 2-D simulation scheme for laterally acoustically coupled BAW resonator filters is developed and employed in designing of experimental devices, which show both good agreement with the model predictions and a remarkable 4.9 % relative bandwidth.
Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra
Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Book Synopsis Design and Implementation of Solid/solid Phononic Crystal Structures in Lateral Extensional Thin-film Piezoelectric on Silicon Micromechanical Resonators by : Abdulrahman Alsolami
Download or read book Design and Implementation of Solid/solid Phononic Crystal Structures in Lateral Extensional Thin-film Piezoelectric on Silicon Micromechanical Resonators written by Abdulrahman Alsolami and published by . This book was released on 2020 with total page 85 pages. Available in PDF, EPUB and Kindle. Book excerpt: Achieving high quality factor in MEMS resonator devices is a critical demand for today’s wireless communication and sensing technologies. In order to reach this goal, several dedicated prior works have been conducted based on published literature at different frequency ranges. Particularly, piezoelectrically transduced resonators, which are widely deployed in commercial wireless communication systems, could benefit from greatly improved qualify factor. So far, their development has evolved from thin film bulk acoustic resonators (FBAR’s) using surface attached piezoelectric thin-film transducers with moderate Q factors to high Q resonators equipped with a side-supporting tether (anchor) attached vibrating resonators that allow the devices to operate at very high frequency (VHF) and ultra-high frequency (UHF) ranges.This dissertation presents a newly developed fabrication methodology to replace existing expensive SOI technologies with much cheaper single crystalline wafers using a modified Single-Crystalline Reactive Etched and Metallization (SCREAM) process. Piezoelectrically transduced MEMS resonators have been fabricated at USF cleanroom facility, which have been designed and tested successfully in air with a quality factor of 1,528 and an insertion loss of -32.1 dB for a disk shaped resonators. A quality factor of 1,013 along with an insertion loss of -19 dB have been achieved for a rectangular plate resonator. In these devices, varied silicon layer thickness ranging from submicrons to tens of microns from a single layer were achieved as opposed to an uniform thickness of the device layer across the silicon-on-insulator (SOI) wafers, allowing device batch fabrication while maintaining the same number of photolithography steps. Resonators with varied Si resonator structure layer thickness have been implemented and studied in terms of motional resistance (Rm), quality factor (Q) and resonance frequency.To our best knowledge, this work has pioneered the implementation of soild/soild phononic crystals (PnCs) in fully suspended, lateral extensional and contour mode bulk acoustic wave (BAW) resonators. The in-house fabrication of the PnCs was performed on silicon-on-insulator (SOI) substrate. Silicon and tungsten were chosen as alternated layers for PnCs with a 4.5 ratio of acoustic impedance mismatch between the two chosen solid materials. The analysis of solid/solid PnCs bandgap is also conducted for determining the frequency regime, where no phonons exist. PnCs are strategically designed with piezoelectric transduction mechanism to operate within the phononic bandgap regime. Finite Element method (FEM) is also performed to investigate PnCs behavior in acoustic wave rejection, in which it was evaluated to be ~11 dB rejection per crystal.Lastly, the fully released thin-piezo on silicon (TPoS) resonators in this work have been fabricated, characterized and modeled. The work of fabricating fully released BAW resonators with embedded PnCs one of the pioneering work of solid/solid PnCs in the MEMS resonator field. The electrical equivalent circuit parameters of the devices were extracted and the quality factors for these devices have shown 7-10 times enhancement as compared to counterparts without PnCs.
Book Synopsis Switchable and Tunable Bulk Acoustic Wave Devices Based on Ferroelectric Material by : Almonir Abdulgader Mansour
Download or read book Switchable and Tunable Bulk Acoustic Wave Devices Based on Ferroelectric Material written by Almonir Abdulgader Mansour and published by . This book was released on 2017 with total page 203 pages. Available in PDF, EPUB and Kindle. Book excerpt: The explosive development of personal communications systems, navigation, satellite communications as well as personal computer and data processing systems together with the constant demand for higher speeds and larger bandwidths has driven fabrication technology to its limits. This, in turn, necessitates the development of novel functional materials for the fabrication of devices with superior performance and higher capacity at reduced manufacturing costs. Ferroelectric materials such as barium strontium titanate (BST) and strontium titanium oxide (STO) have received more attention by researchers and industry because of their field-induced piezoelectric property. This property gives these types of ferroelectric materials the ability to be switchable and tunable in the presence of an electric field. These features have allowed the ferroelectric materials to be used in many applications such as non-volatile memory and DRAMs, sensors, pyroelectric detectors, and tunable microwave devices. Therefore, with the ever increasing complexity in RF front-end receivers, and the demand for services (which in turn requires more functionalities), ferroelectric bulk acoustic wave (BAW) resonators and filters that are intrinsically switchable and promise to reduce the size and complexity of component parts. In this work, we present the design, fabrication and experimental evaluation of switchable and tunable thin film bulk acoustic wave (BAW) resonators, filters and duplexers for radio frequency (RF) applications. The switchability and tunability of these devices come from utilizing the electrostrictive effect of ferroelectric materials such as barium strontium titanate (BST) with the application of an external DC-bias voltage. The BAW resonators, filters and duplexers in this work were fabricated on different substrates as solidly mounted resonator (SMR) structure with number of periodic layers of silicon dioxide and tantalum oxide as a Bragg reflector in order to acoustically isolate the resonator from the damping effect of the substrate, enhancing the quality factor and temperature compensation.
Book Synopsis Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices by : Marco G. Beghi
Download or read book Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices written by Marco G. Beghi and published by BoD – Books on Demand. This book was released on 2013-08-28 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.
