Laser Induced Thin Film Processing

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Laser Processing of Thin Films and Microstructures

Author : Ian W. Boyd
Publisher : Springer Science & Business Media
ISBN 13 : 3642831362
Total Pages : 328 pages
Book Rating : 4.6/5 (428 download)

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Book Synopsis Laser Processing of Thin Films and Microstructures by : Ian W. Boyd

Download or read book Laser Processing of Thin Films and Microstructures written by Ian W. Boyd and published by Springer Science & Business Media. This book was released on 2013-03-08 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro cessing of thin films, particularly, though by no means exclu sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.

Optical Diagnostics for Thin Film Processing

Author : Irving P. Herman
Publisher : Elsevier
ISBN 13 : 0080538088
Total Pages : 815 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Optical Diagnostics for Thin Film Processing by : Irving P. Herman

Download or read book Optical Diagnostics for Thin Film Processing written by Irving P. Herman and published by Elsevier. This book was released on 1996-10-23 with total page 815 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. - The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing - Useful as an introduction to the subject or as a resource handbook - Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing - Examples emphasize applications in microelectronics and optoelectronics - Introductory chapter serves as a guide to all optical diagnostics and their applications - Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic

Laser Processing and Diagnostics

Author : D. Bäuerle
Publisher : Springer Science & Business Media
ISBN 13 : 3642823815
Total Pages : 561 pages
Book Rating : 4.6/5 (428 download)

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Book Synopsis Laser Processing and Diagnostics by : D. Bäuerle

Download or read book Laser Processing and Diagnostics written by D. Bäuerle and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 561 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.

Applications of Laser Ablation

Author : Dongfang Yang
Publisher : BoD – Books on Demand
ISBN 13 : 9535128116
Total Pages : 430 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Applications of Laser Ablation by : Dongfang Yang

Download or read book Applications of Laser Ablation written by Dongfang Yang and published by BoD – Books on Demand. This book was released on 2016-12-21 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser ablation refers to the phenomenon in which a low wavelength and short pulse (ns-fs) duration of laser beam irradiates the surface of a target to induce instant local vaporization of the target material generating a plasma plume consisting of photons, electrons, ions, atoms, molecules, clusters, and liquid or solid particles. This book covers various aspects of using laser ablation phenomenon for material processing including laser ablation applied for the deposition of thin films, for the synthesis of nanomaterials, and for the chemical compositional analysis and surface modification of materials. Through the 18 chapters written by experts from international scientific community, the reader will have access to the most recent research and development findings on laser ablation through original research studies and literature reviews.

Thin Film Processes II

Author : Werner Kern
Publisher : Elsevier
ISBN 13 : 0080524214
Total Pages : 881 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Thin Film Processes II by : Werner Kern

Download or read book Thin Film Processes II written by Werner Kern and published by Elsevier. This book was released on 2012-12-02 with total page 881 pages. Available in PDF, EPUB and Kindle. Book excerpt: This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. - Provides an all-new sequel to the 1978 classic, Thin Film Processes - Introduces new topics, and several key topics presented in the original volume are updated - Emphasizes practical applications of major thin film deposition and etching processes - Helps readers find the appropriate technology for a particular application

Laser Printing of Functional Materials

Author : Alberto Piqué
Publisher : John Wiley & Sons
ISBN 13 : 3527805133
Total Pages : 474 pages
Book Rating : 4.5/5 (278 download)

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Book Synopsis Laser Printing of Functional Materials by : Alberto Piqué

Download or read book Laser Printing of Functional Materials written by Alberto Piqué and published by John Wiley & Sons. This book was released on 2018-01-04 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first book on this hot topic includes such major research areas as printed electronics, sensors, biomaterials and 3D cell printing. Well-structured and with a strong focus on applications, the text is divided in three sections with the first describing the fundamentals of laser transfer. The second provides an overview of the wide variety of materials that can be used for laser transfer processing, while the final section comprehensively discusses a number of practical uses, including printing of electronic materials, printing of 3D structures as well as large-area, high-throughput applications. The book is rounded off by a look at the future for laser printed materials. Invaluable reading for a broad audience ranging from material developers to mechanical engineers, from academic researchers to industrial developers and for those interested in the development of micro-scale additive manufacturing techniques.

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

Author : Y. Pauleau
Publisher : Springer Science & Business Media
ISBN 13 : 940100353X
Total Pages : 372 pages
Book Rating : 4.4/5 (1 download)

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Book Synopsis Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies by : Y. Pauleau

Download or read book Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.

Pulsed Laser Deposition of Thin Films

Author : Douglas B. Chrisey
Publisher : Wiley-Interscience
ISBN 13 : 9780471592181
Total Pages : 0 pages
Book Rating : 4.5/5 (921 download)

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Book Synopsis Pulsed Laser Deposition of Thin Films by : Douglas B. Chrisey

Download or read book Pulsed Laser Deposition of Thin Films written by Douglas B. Chrisey and published by Wiley-Interscience. This book was released on 1994-06-21 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of what is required to set up and begin research in this newly developing technology and understand the basics of the process. Internationally recognized experts in their fields cover such fundamentals as history, theory, film characteristics, surface modification, laser technology, materials and applications including excellent reviews regarding the entire areas of semiconductor buffer layers, thin-film ferroelectrics and ferrites along with the work involving films deposited by PLD.

Laser Induced Damage in Optical Materials

Author :
Publisher :
ISBN 13 :
Total Pages : 424 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Laser Induced Damage in Optical Materials by :

Download or read book Laser Induced Damage in Optical Materials written by and published by . This book was released on 1994 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Laser Processing and Chemistry

Author : Dieter Bäuerle
Publisher : Springer Science & Business Media
ISBN 13 : 3642176135
Total Pages : 846 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Laser Processing and Chemistry by : Dieter Bäuerle

Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2011-09-02 with total page 846 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This fourth edition has been revised and enlarged to cover new topics such as 3D microfabrication, advances in nanotechnology, ultrafast laser technology and laser chemical processing (LCP). Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.

Laser Surface Processing and Characterization

Author : I.W. Boyd
Publisher : Elsevier
ISBN 13 : 0444596801
Total Pages : 552 pages
Book Rating : 4.4/5 (445 download)

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Book Synopsis Laser Surface Processing and Characterization by : I.W. Boyd

Download or read book Laser Surface Processing and Characterization written by I.W. Boyd and published by Elsevier. This book was released on 1992-03-09 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: The contributions in this volume reflect not only the growing understanding of the underlying mechanisms controlling the various reactions in laser surface processing, but also the potential of several developing applications of direct processing. The most notable trend in the field currently is the technique of laser ablation, which is reported in almost a quarter of the papers in this volume. Whilst by no means a new phenomenon, attention has until recent years remained in the area of lithography and UV-sensitive materials. The growth in interest lies in the use of the technique to grow multi-component thin films and multi-layers. A number of papers on the topic of process diagnostics and in-situ measurements are also included. The theme of these annual meetings is centred around the physical and chemical modification of thin films and surfaces induced by the action of photon, ion, neutral, or electron beams in a variety of environments. Consequently these proceedings provide a comprehensive and unified presentation of the latest developments in this field.

Laser Growth and Processing of Photonic Devices

Author : Nikolaos A Vainos
Publisher : Elsevier
ISBN 13 : 0857096222
Total Pages : 492 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Laser Growth and Processing of Photonic Devices by : Nikolaos A Vainos

Download or read book Laser Growth and Processing of Photonic Devices written by Nikolaos A Vainos and published by Elsevier. This book was released on 2012-07-10 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of lasers in the processing of electronic and photonic material is becoming increasingly widespread, with technological advances reducing costs and increasing both the quality and range of novel devices which can be produced. Laser growth and processing of photonic devices is the first book to review this increasingly important field.Part one investigates laser-induced growth of materials and surface structures, with pulsed laser deposition techniques, the formation of nanocones and the fabrication of periodic photonic microstructures explored in detail. Laser-induced three-dimensional micro- and nano-structuring are the focus of part two. Exploration of multiphoton lithography, processing and fabrication is followed by consideration of laser-based micro- and nano-fabrication, laser-induced soft matter organization and microstructuring, and laser-assisted polymer joining methods. The book concludes in part three with an investigation into laser fabrication and manipulation of photonic structures and devices. Laser seeding and thermal processing of glass with nanoscale resolution, laser-induced refractive index manipulation, and the thermal writing of photonic devices in glass and polymers are all considered.With its distinguished editor and international team of expert contributors, Laser growth and processing of photonic devices is an essential tool for all materials scientists, engineers and researchers in the microelectronics industry. - The first book to review the increasingly important field of laser growth and processing of photonic devices - Investigates laser-induced growth of materials and surface structures, pulsed laser deposition techniques, the formation of nanocones and the fabrication of periodic photonic microstructures - Examines laser-induced three-dimensional micro- and nano-structuring and concludes with an investigation into laser fabrication and manipulation of photonic structures and devices

Recent Advances in Laser Processing of Materials

Author : Jacques Perriere
Publisher : Elsevier
ISBN 13 : 0080459714
Total Pages : 469 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis Recent Advances in Laser Processing of Materials by : Jacques Perriere

Download or read book Recent Advances in Laser Processing of Materials written by Jacques Perriere and published by Elsevier. This book was released on 2006-03-29 with total page 469 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser materials interaction and processing is an established and growing field within the materials science community. By taking a detailed look at the fundamentals of laser matter interaction, Recent Advances in Laser Processing of Materials charts the recent progress of laser materials interaction and processing in various emerging materials science domains. With special emphasis placed on nanostructures and future developments, this book provides an interdisciplinary support for basic and applied photo-assisted processing research. Coverage includes: - laser assisted synthesis of new materials (nanoparticles, nanotubes, active molecules, new phases...) - laser assisted surface transformation (nanostructuring, lithography, etching...) - laser assisted bulk material transformation (doping, marking, crystallisation...) - Laser assisted synthesis of new materials (nanoparticles, nanotubes, active molecules, new phases...) - Laser assisted surface transformation (nanostructuring, lithography, etching...) - Laser assisted bulk material transformation (doping, marking, crystallisation...)

Laser-induced Damage in Optical Materials: 1996

Author : Harold Earl Bennett
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819423702
Total Pages : 690 pages
Book Rating : 4.4/5 (237 download)

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Book Synopsis Laser-induced Damage in Optical Materials: 1996 by : Harold Earl Bennett

Download or read book Laser-induced Damage in Optical Materials: 1996 written by Harold Earl Bennett and published by SPIE-International Society for Optical Engineering. This book was released on 1997 with total page 690 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Physical Processes in Laser-Materials Interactions

Author : M. Bertolotti
Publisher : Springer Science & Business Media
ISBN 13 : 1468443224
Total Pages : 518 pages
Book Rating : 4.4/5 (684 download)

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Book Synopsis Physical Processes in Laser-Materials Interactions by : M. Bertolotti

Download or read book Physical Processes in Laser-Materials Interactions written by M. Bertolotti and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 518 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is a pleasure to write a few words as an introduction to the proceedings of the 1980 NATO ASI on "Physical Processes in Laser Naterial Interaction." This ASI is the ninth course of a series devoted to lasers and their applications, held under the responsibility of the Quantum Electronics Division of the European Physical Society, and for this reason known as the "Europhysics School of Quantum Electronics." Since 1971 the School has been operating with the joint direc tion of myself as representative of the academic research, and Dr. D. Roess (formerly with Siemens AEG, Munich, and now with Sick, Optik und Electronik, GmbH, Munich) for the industrial applications. Indeed the aim of the School is to alternate fundamental and applied frontier topics in the area of quantum electronics and modern optics, in order to introduce young research people from universities and industrial R&D laboratories to the new aspects of research opened by the laser.

Laser Microfabrication

Author : Daniel J. Ehrlich
Publisher : Elsevier
ISBN 13 : 0080918026
Total Pages : 602 pages
Book Rating : 4.0/5 (89 download)

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Book Synopsis Laser Microfabrication by : Daniel J. Ehrlich

Download or read book Laser Microfabrication written by Daniel J. Ehrlich and published by Elsevier. This book was released on 1989-06-21 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

Additive Manufacturing: Materials, Processes, Quantifications and Applications

Author : Jing Zhang
Publisher : Butterworth-Heinemann
ISBN 13 : 0128123273
Total Pages : 364 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Additive Manufacturing: Materials, Processes, Quantifications and Applications by : Jing Zhang

Download or read book Additive Manufacturing: Materials, Processes, Quantifications and Applications written by Jing Zhang and published by Butterworth-Heinemann. This book was released on 2018-05-17 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: Additive Manufacturing: Materials, Processes, Quantifications and Applications is designed to explain the engineering aspects and physical principles of available AM technologies and their most relevant applications. It begins with a review of the recent developments in this technology and then progresses to a discussion of the criteria needed to successfully select an AM technology for the embodiment of a particular design, discussing material compatibility, interfaces issues and strength requirements. The book concludes with a review of the applications in various industries, including bio, energy, aerospace and electronics. This book will be a must read for those interested in a practical, comprehensive introduction to additive manufacturing, an area with tremendous potential for producing high-value, complex, individually customized parts. As 3D printing technology advances, both in hardware and software, together with reduced materials cost and complexity of creating 3D printed items, these applications are quickly expanding into the mass market. - Includes a discussion of the historical development and physical principles of current AM technologies - Exposes readers to the engineering principles for evaluating and quantifying AM technologies - Explores the uses of Additive Manufacturing in various industries, most notably aerospace, medical, energy and electronics