Introduction To Metrology Applications In Ic Manufacturing

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Introduction to Metrology Applications in IC Manufacturing

Author : Bo Su
Publisher :
ISBN 13 : 9781628416626
Total Pages : 187 pages
Book Rating : 4.4/5 (166 download)

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Book Synopsis Introduction to Metrology Applications in IC Manufacturing by : Bo Su

Download or read book Introduction to Metrology Applications in IC Manufacturing written by Bo Su and published by . This book was released on 2015 with total page 187 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. Includes example spreadsheets of measurement uncertainty analysis--specifically, precision, matching, and relative accuracy.

Introduction to Metrology Applications in IC Manufacturing

Author : Su Bo
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9781628418118
Total Pages : 184 pages
Book Rating : 4.4/5 (181 download)

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Book Synopsis Introduction to Metrology Applications in IC Manufacturing by : Su Bo

Download or read book Introduction to Metrology Applications in IC Manufacturing written by Su Bo and published by SPIE-International Society for Optical Engineering. This book was released on 2015-08-01 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis—specifically, precision, matching, and relative accuracy.

X-Ray Metrology in Semiconductor Manufacturing

Author : D. Keith Bowen
Publisher : CRC Press
ISBN 13 : 1420005650
Total Pages : 296 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis X-Ray Metrology in Semiconductor Manufacturing by : D. Keith Bowen

Download or read book X-Ray Metrology in Semiconductor Manufacturing written by D. Keith Bowen and published by CRC Press. This book was released on 2018-10-03 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.

Handbook of Silicon Semiconductor Metrology

Author : Alain C. Diebold
Publisher : CRC Press
ISBN 13 : 0203904540
Total Pages : 703 pages
Book Rating : 4.2/5 (39 download)

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Book Synopsis Handbook of Silicon Semiconductor Metrology by : Alain C. Diebold

Download or read book Handbook of Silicon Semiconductor Metrology written by Alain C. Diebold and published by CRC Press. This book was released on 2001-06-29 with total page 703 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

Metrology and Instrumentation

Author : Samir Mekid
Publisher : John Wiley & Sons
ISBN 13 : 1119721717
Total Pages : 404 pages
Book Rating : 4.1/5 (197 download)

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Book Synopsis Metrology and Instrumentation by : Samir Mekid

Download or read book Metrology and Instrumentation written by Samir Mekid and published by John Wiley & Sons. This book was released on 2021-12-02 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metrology and Instrumentation: Practical Applications for Engineering and Manufacturing provides students and professionals with an accessible foundation in the metrology techniques, instruments, and governing standards used in mechanical engineering and manufacturing. The book opens with an overview of metrology units and scale, then moves on to explain topics such as sources of error, calibration systems, uncertainty, and dimensional, mechanical, and thermodynamic measurement systems. A chapter on tolerance stack-ups covers GD&T, ASME Y14.5-2018, and the ISO standard for general tolerances, while a chapter on digital measurements connects metrology to newer, Industry 4.0 applications.

National Semiconductor Metrology Program

Author : National Institute of Standards and Technology (U.S.)
Publisher :
ISBN 13 :
Total Pages : 146 pages
Book Rating : 4.:/5 (7 download)

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Book Synopsis National Semiconductor Metrology Program by : National Institute of Standards and Technology (U.S.)

Download or read book National Semiconductor Metrology Program written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1995 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt:

National Semiconductor Metrology Program

Author : National Semiconductor Metrology Program (U.S.)
Publisher :
ISBN 13 :
Total Pages : 148 pages
Book Rating : 4.3/5 ( download)

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Book Synopsis National Semiconductor Metrology Program by : National Semiconductor Metrology Program (U.S.)

Download or read book National Semiconductor Metrology Program written by National Semiconductor Metrology Program (U.S.) and published by . This book was released on 1999 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Introduction to Semiconductor Manufacturing Technology

Author : Hong Xiao
Publisher :
ISBN 13 : 9780130224040
Total Pages : 0 pages
Book Rating : 4.2/5 (24 download)

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Book Synopsis Introduction to Semiconductor Manufacturing Technology by : Hong Xiao

Download or read book Introduction to Semiconductor Manufacturing Technology written by Hong Xiao and published by . This book was released on 2001 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.

Physics and Technology of High-k Gate Dielectrics 4

Author : Samares Kar
Publisher : The Electrochemical Society
ISBN 13 : 1566775035
Total Pages : 565 pages
Book Rating : 4.5/5 (667 download)

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Book Synopsis Physics and Technology of High-k Gate Dielectrics 4 by : Samares Kar

Download or read book Physics and Technology of High-k Gate Dielectrics 4 written by Samares Kar and published by The Electrochemical Society. This book was released on 2006 with total page 565 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue covers, in detail, all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

Semiconductor Strain Metrology

Author : Terence K. S. Wong
Publisher : Bentham Science Publishers
ISBN 13 : 1608053598
Total Pages : 141 pages
Book Rating : 4.6/5 (8 download)

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Book Synopsis Semiconductor Strain Metrology by : Terence K. S. Wong

Download or read book Semiconductor Strain Metrology written by Terence K. S. Wong and published by Bentham Science Publishers. This book was released on 2012 with total page 141 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterizati

Handbook of Industrial Metrology

Author : American Society of Tool and Manufacturing Engineers
Publisher :
ISBN 13 :
Total Pages : 520 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Handbook of Industrial Metrology by : American Society of Tool and Manufacturing Engineers

Download or read book Handbook of Industrial Metrology written by American Society of Tool and Manufacturing Engineers and published by . This book was released on 1967 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Gallium Nitride and Silicon Carbide Power Technologies 7

Author : M. Dudley
Publisher : The Electrochemical Society
ISBN 13 : 1607688247
Total Pages : 297 pages
Book Rating : 4.6/5 (76 download)

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Book Synopsis Gallium Nitride and Silicon Carbide Power Technologies 7 by : M. Dudley

Download or read book Gallium Nitride and Silicon Carbide Power Technologies 7 written by M. Dudley and published by The Electrochemical Society. This book was released on with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Industrial Optical Sensing and Metrology

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (746 download)

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Book Synopsis Industrial Optical Sensing and Metrology by :

Download or read book Industrial Optical Sensing and Metrology written by and published by . This book was released on 1993 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Engineering Metrology and Measurements

Author : Raghavendra,
Publisher : OUP India
ISBN 13 : 9780198085492
Total Pages : 0 pages
Book Rating : 4.0/5 (854 download)

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Book Synopsis Engineering Metrology and Measurements by : Raghavendra,

Download or read book Engineering Metrology and Measurements written by Raghavendra, and published by OUP India. This book was released on 2013-05 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Engineering Metrology and Measurements is a textbook designed for students of mechanical, production and allied disciplines to facilitate learning of various shop-floor measurement techniques and also understand the basics of mechanical measurements.

Handbook of Metrology and Applications

Author : Dinesh K. Aswal
Publisher : Springer Nature
ISBN 13 : 9819920744
Total Pages : 2504 pages
Book Rating : 4.8/5 (199 download)

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Book Synopsis Handbook of Metrology and Applications by : Dinesh K. Aswal

Download or read book Handbook of Metrology and Applications written by Dinesh K. Aswal and published by Springer Nature. This book was released on 2023-08-23 with total page 2504 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook provides comprehensive and up-to-date information on the topic of scientific, industrial and legal metrology. It discusses the state-of-art review of various metrological aspects pertaining to redefinition of SI Units and their implications, applications of time and frequency metrology, certified reference materials, industrial metrology, industry 4.0, metrology in additive manufacturing, digital transformations in metrology, soft metrology and cyber security, optics in metrology, nano-metrology, metrology for advanced communication, environmental metrology, metrology in biomedical engineering, legal metrology and global trade, ionizing radiation metrology, advanced techniques in evaluation of measurement uncertainty, etc. The book has contributed chapters from world’s leading metrologists and experts on the diversified metrological theme. The internationally recognized team of editors adopt a consistent and systematic approach and writing style, including ample cross reference among topics, offering readers a user-friendly knowledgebase greater than the sum of its parts, perfect for frequent consultation. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only metrology but also mechanical/material science, optics, physics, chemistry, biomedical and more. This handbook is ideal for academic and professional readers in the traditional and emerging areas of metrology and related fields.

Integrated Circuit Metrology, Inspection, and Process Control V

Author : William H. Arnold
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 648 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Integrated Circuit Metrology, Inspection, and Process Control V by : William H. Arnold

Download or read book Integrated Circuit Metrology, Inspection, and Process Control V written by William H. Arnold and published by SPIE-International Society for Optical Engineering. This book was released on 1991 with total page 648 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Industrial Metrology

Author : Graham T. Smith
Publisher : Springer Science & Business Media
ISBN 13 : 9781852335076
Total Pages : 360 pages
Book Rating : 4.3/5 (35 download)

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Book Synopsis Industrial Metrology by : Graham T. Smith

Download or read book Industrial Metrology written by Graham T. Smith and published by Springer Science & Business Media. This book was released on 2002-06-13 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: The subject of this book is surface metrology, in particular two major aspects: surface texture and roundness. It has taken a long time for manufacturing engineers and designers to realise the usefulness of these features in quality of conformance and quality of design. Unfortunately this awareness has come at a time when engineers versed in the use and specification of surfaces are at a premium. Traditionally surface metrology usage has been dictated by engineers who have served long and demanding apprenticeships, usually in parallel with studies leading to technician-level qualifications. Such people understood the processes and the achievable accuracies of machine tools, thereby enabling them to match production capability with design requirements. This synergy, has been made possible by the understanding of adherence to careful metrological procedures and a detailed knowledge of surface measuring instruments and their operation, in addition to wider inspection room techniques. With the demise in the UK of polytechnics and technical colleges, this source of skilled technicians has all but dried up. The shortfall has been made up of semi skilled craftsmen, or inexperienced graduates who cannot be expected to satisfy tradition al or new technology needs. Miniaturisation, for example, has had a pro found effect. Engineering parts are now routinely being made with nanometre surface texture and fiatness. At these molecular and atomic scales, the engineer has to be a physicist.