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Integration Of Advanced Micro And Nanoelectronic Devices Critical Issues And Solutions
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Book Synopsis Integration of Advanced Micro- and Nanoelectronic Devices--critical Issues and Solutions by : Materials Research Society. Meeting
Download or read book Integration of Advanced Micro- and Nanoelectronic Devices--critical Issues and Solutions written by Materials Research Society. Meeting and published by . This book was released on 2004 with total page 506 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This volume is the joint proceedings of papers presented in Symposium D, 'High-k Insulators and Ferroelectrics for Advanced Microelectronic Devices,' and Symposium E, 'Integration Challenges in Next-Generation Oxide-Based Nanoelectronics,' held April 13-16 at the 2004 MRS Spring Meeting in San Francisco, California."--p. x
Book Synopsis Nanoengineered Assemblies and Advanced Micro/Nanosystems: Volume 820 by : Materials Research Society. Meeting
Download or read book Nanoengineered Assemblies and Advanced Micro/Nanosystems: Volume 820 written by Materials Research Society. Meeting and published by . This book was released on 2004-09-09 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Advanced Gate Stacks for High-Mobility Semiconductors by : Athanasios Dimoulas
Download or read book Advanced Gate Stacks for High-Mobility Semiconductors written by Athanasios Dimoulas and published by Springer Science & Business Media. This book was released on 2008-01-01 with total page 397 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.
Book Synopsis Handbook for Cleaning for Semiconductor Manufacturing by : Karen A. Reinhardt
Download or read book Handbook for Cleaning for Semiconductor Manufacturing written by Karen A. Reinhardt and published by John Wiley & Sons. This book was released on 2011-04-12 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides an In-depth discussion of surface conditioning for semiconductor applications The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications provides an in-depth discussion of surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet processing is reviewed as well as surface and colloidal aspects of cleaning and etching. Topics covered in this new reference include: Front end line (FEOL) and back end of line (BEOL) cleaning applications such as high-k/metal gate post-etch cleaning and pore sealing, high-dose implant stripping and cleaning, and germanium, and silicon passivation Formulation development practices, methodology and a new directions are presented including chemicals used for preventing corrosion of copper lines, cleaning aluminium lines, reclaiming wafers, and water bonding, as well as the filtering and recirculating of chemicals including reuse and recycling Wetting, cleaning, and drying of features, such as high aspect ratio features and hydrophilic surface states, especially how to dry without watermarks, the abilities to wet hydrophobic surfaces and to remove liquid from deep features The chemical reactions and mechanisms of silicon dioxide etching with hydrofluoric acid, particle removal with ammonium hydroxide/hydrogen peroxide mixture, and metal removal with hydrochloric acid The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications is a valuable resource for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industries that assures cleanliness of chemicals, material, and equipment in the manufacturing area will also find this handbook an indispensible reference.
Book Synopsis High Permittivity Gate Dielectric Materials by : Samares Kar
Download or read book High Permittivity Gate Dielectric Materials written by Samares Kar and published by Springer Science & Business Media. This book was released on 2013-06-25 with total page 515 pages. Available in PDF, EPUB and Kindle. Book excerpt: "The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects." .
Book Synopsis Intergrative and Inerdisciplinary Aspects of Intermetallics: Volume 842 by : Materials Research Society. Meeting
Download or read book Intergrative and Inerdisciplinary Aspects of Intermetallics: Volume 842 written by Materials Research Society. Meeting and published by . This book was released on 2005-06-02 with total page 586 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Computer Aided Design Of Micro- And Nanoelectronic Devices by : Chinmay Kumar Maiti
Download or read book Computer Aided Design Of Micro- And Nanoelectronic Devices written by Chinmay Kumar Maiti and published by World Scientific. This book was released on 2016-10-27 with total page 465 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro and nanoelectronic devices are the prime movers for electronics, which is essential for the current information age. This unique monograph identifies the key stages of advanced device design and integration in semiconductor manufacturing. It brings into one resource a comprehensive device design using simulation. The book presents state-of-the-art semiconductor device design using the latest TCAD tools.Professionals, researchers, academics, and graduate students in electrical & electronic engineering and microelectronics will benefit from this reference text.
Book Synopsis Nanoscale Materials Science in Biology and Medicine by : Cato T. Laurencin
Download or read book Nanoscale Materials Science in Biology and Medicine written by Cato T. Laurencin and published by . This book was released on 2005 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electron Microscopy of Molecular and Atom-Scale Mechanical Behavior, Chemistry and Structure: Volume 839 by : Materials Research Society. Meeting
Download or read book Electron Microscopy of Molecular and Atom-Scale Mechanical Behavior, Chemistry and Structure: Volume 839 written by Materials Research Society. Meeting and published by . This book was released on 2005-06-15 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2005, showcases how electron microscopy is applied to materials problems and to encourage ideas from both the solid-state and biological communities.
Book Synopsis Enabling Technology for MEMS and Nanodevices by : Henry Baltes
Download or read book Enabling Technology for MEMS and Nanodevices written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-27 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen Buchreihe vor: Advanced Micro and Nano Systems 1. Henry Baltes und seine Co-Autoren knüpfen mit AMN an die Sensors Update-Reihe an. Das Autorenteam wurde um weitere Experten erweitert. AMN wird zwei Mal pro Jahr mit einem neuen Band die aktuellen Entwicklungen in der Mikro- und Nano-Welt begleiten. Die Erforschung und der Einsatz von Mikro- und Nanosystemen sind eines der brandaktuellen Themen im Wissenschaftsbereich. Die Forschungsergebnisse werden mehr und mehr auch konkret umgesetzt. Damit werden Mikro- und Nanotechnologie zu Wirtschaftsfaktoren. Aktuelle Entwicklungen, neue Technologien, Nano-Bauelemente und Systeme im Mikromaßstab - Advanced Micro and Nano Systems, die neue Buchreihe, wird Spiegel der spannenden und faszinierenden Mikro- und Nano-Welt sein. Zweimal pro Jahr wird es einen neuen AMN-Band geben. Die Autoren sind ausgewiesene Spezialisten. Zu den Herausgebern zählt Henry Baltes, Professor an der ETH Zürich. Er zeichnete bereits für die Bände der Sensors Update-Reihe verantwortlich. Die Artikel ermöglichen Neueinsteigern einen ersten Zugriff auf die Materie. Fachleute erhalten einen umfassenden Überblick. Anspruch der Herausgeber ist es, nicht nur die theoretischen Grundlagen von Mikro- und Nanosystemen zu reflektieren, sondern immer auch praktische Möglichkeiten und die Grenzen der Anwendung im Blick zu haben. Die AMN-Bände sind Handbücher und Nachschlagewerke in einem. Die Reihe richtet sich an Vertreter unterschiedlicher Fachrichtungen: Biologie, Chemie, Mathematik, Sensorindustrie und Materialwissenschaften.
Book Synopsis Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics - 2004 by : R. J. Carter
Download or read book Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics - 2004 written by R. J. Carter and published by . This book was released on 2004-09 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scaling of device dimensions with a simultaneous increase in functional density has imposed tremendous challenges for materials, technology, integration and reliability of interconnects. To meet requirements of the ITRS roadmap, new materials are being introduced at a faster pace in all functions of multilevel interconnects. The issues addressed in this book cannot be dispelled as simply selecting a low-k material and integrating it into a copper damascene process. The intricacies of the back end for sub-100nm technology include novel processing of low-k materials, employing pore-sealing techniques and capping layers, introducing advanced dielectric and diffusion barriers, and developing novel integration schemes. This is in addition to concerns of performance, yield, and reliability appropriate to nanoscaled interconnects. Although many challenges continue to impede progress along the ITRS roadmap, the contributions in this book confront them head-on. It provides a scientific understanding of the issues and stimulate new approaches to advanced multilevel interconnects.
Download or read book Solid State Ionics written by and published by . This book was released on 2005 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Micro- and Nanoelectronics by : Tomasz Brozek
Download or read book Micro- and Nanoelectronics written by Tomasz Brozek and published by CRC Press. This book was released on 2017-12-19 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro- and Nanoelectronics: Emerging Device Challenges and Solutions presents a comprehensive overview of the current state of the art of micro- and nanoelectronics, covering the field from fundamental science and material properties to novel ways of making nanodevices. Containing contributions from experts in both industry and academia, this cutting-edge text: Discusses emerging silicon devices for CMOS technologies, fully depleted device architectures, characteristics, and scaling Explains the specifics of silicon compound devices (SiGe, SiC) and their unique properties Explores various options for post-CMOS nanoelectronics, such as spintronic devices and nanoionic switches Describes the latest developments in carbon nanotubes, iii-v devices structures, and more Micro- and Nanoelectronics: Emerging Device Challenges and Solutions provides an excellent representation of a complex engineering field, examining emerging materials and device architecture alternatives with the potential to shape the future of nanotechnology.
Book Synopsis Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics by :
Download or read book Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics written by and published by . This book was released on 2004 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Nanoelectronic Devices for Hardware and Software Security by : Arun Kumar Singh
Download or read book Nanoelectronic Devices for Hardware and Software Security written by Arun Kumar Singh and published by CRC Press. This book was released on 2021-10-31 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoelectronic Devices for Hardware and Software Security has comprehensive coverage of the principles, basic concepts, structure, modeling, practices, and circuit applications of nanoelectronics in hardware/software security. It also covers the future research directions in this domain. In this evolving era, nanotechnology is converting semiconductor devices dimensions from micron technology to nanotechnology. Nanoelectronics would be the key enabler for innovation in nanoscale devices, circuits, and systems. The motive for this research book is to provide relevant theoretical frameworks that include device physics, modeling, circuit design, and the latest developments in experimental fabrication in the field of nanotechnology for hardware/software security. There are numerous challenges in the development of models for nanoscale devices (e.g., FinFET, gate-all-around devices, TFET, etc.), short channel effects, fringing effects, high leakage current, and power dissipation, among others. This book will help to identify areas where there are challenges and apply nanodevice and circuit techniques to address hardware/software security issues.
Book Synopsis Amorphous and Nanocrystalline Silicon Science and Technology ... by :
Download or read book Amorphous and Nanocrystalline Silicon Science and Technology ... written by and published by . This book was released on 2004 with total page 768 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Kinetics-Driven Nanopatterning on Surfaces: Volume 849 by : Materials Research Society. Meeting
Download or read book Kinetics-Driven Nanopatterning on Surfaces: Volume 849 written by Materials Research Society. Meeting and published by . This book was released on 2005 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanopattern formation on surfaces is influenced by many processes involving kinetics, mechanics and thermodynamics. This volume presents recent advances in technology and in scientific understanding of nanopatterning in a variety of amaterials systems. A particular emphasis is on developments in surface nanopatterning as a result of kinetics. Various other factors, such as mechanical strain and particle-source collimation, are intimately coupled with the kinetics. The book covers self-assembly and various fabrication processes of nanostructures, the fundamental mechanisms of nanostructure formation, and related topics. The papers are a valuable source of reference for researchers entering the field of nanostructures formation on surfaces. In addition, several invited papers provide a critical literature assessment, which should also prove helpful to those new to the field.
