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Download or read book Integrated Circuit Metrology, Inspection, & Process Control written by and published by . This book was released on 1987 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : William H. Arnold
Publisher :
ISBN 13 : 9780819403087
Total Pages : 0 pages
Book Rating : 4.4/5 (3 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control IV written by William H. Arnold and published by . This book was released on 1990 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Marylyn Hoy Bennett
Publisher :
ISBN 13 :
Total Pages : 553 pages
Book Rating : 4.:/5 (124 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control VIII written by Marylyn Hoy Bennett and published by . This book was released on 1994 with total page 553 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Kevin M. Monahan
Publisher :
ISBN 13 :
Total Pages : 340 pages
Book Rating : 4.E/5 ( download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control written by Kevin M. Monahan and published by . This book was released on 1987 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Michael T. Postek
Publisher :
ISBN 13 :
Total Pages : 594 pages
Book Rating : 4.:/5 (759 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control VII written by Michael T. Postek and published by . This book was released on 1993 with total page 594 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Marylyn Hoy Bennett
Publisher :
ISBN 13 : 9780819417879
Total Pages : 514 pages
Book Rating : 4.4/5 (178 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control IX written by Marylyn Hoy Bennett and published by . This book was released on 1995 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : William H. Arnold
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 648 pages
Book Rating : 4.:/5 (318 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control V written by William H. Arnold and published by SPIE-International Society for Optical Engineering. This book was released on 1991 with total page 648 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Marylyn Hoy Bennett
Publisher : Society of Photo Optical
ISBN 13 : 9780819414915
Total Pages : 553 pages
Book Rating : 4.4/5 (149 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control VIII written by Marylyn Hoy Bennett and published by Society of Photo Optical. This book was released on 1994 with total page 553 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Michael T. Postek
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 716 pages
Book Rating : 4.0/5 ( download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control VI written by Michael T. Postek and published by SPIE-International Society for Optical Engineering. This book was released on 1992 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 540 pages
Book Rating : 4.3/5 (91 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control written by and published by . This book was released on 1995 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gordon S. Kino
Publisher : Academic Press
ISBN 13 : 008052978X
Total Pages : 353 pages
Book Rating : 4.0/5 (85 download)
Download or read book Confocal Scanning Optical Microscopy and Related Imaging Systems written by Gordon S. Kino and published by Academic Press. This book was released on 1996-09-18 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given. The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes. Provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers Explains many practical applications of scanning optical and interference microscopy in such diverse fields as biology and semiconductor metrology Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations Considers the practical aspects of building a confocal scanning or interference microscope and explores some of the design tradeoffs made for microscopes used in various applications Discusses the theory and design of near-field optical microscopes Explains phase imaging in the scanning optical and interference microscopes
Author : Society of Photo-optical Instrumentation Engineers
Publisher :
ISBN 13 :
Total Pages : 697 pages
Book Rating : 4.:/5 (657 download)
Download or read book Integrated Circuit Metrology Inspection, and Process Control VI written by Society of Photo-optical Instrumentation Engineers and published by . This book was released on 1990 with total page 697 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : John N. Helbert
Publisher : Cambridge University Press
ISBN 13 : 0080946801
Total Pages : 1026 pages
Book Rating : 4.0/5 (89 download)
Download or read book Handbook of VLSI Microlithography, 2nd Edition written by John N. Helbert and published by Cambridge University Press. This book was released on 2001-04 with total page 1026 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely coveredùincluding an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
Author : Kevin M. Monahan
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 376 pages
Book Rating : 4.:/5 (318 download)
Download or read book Handbook of Critical Dimension Metrology and Process Control written by Kevin M. Monahan and published by SPIE-International Society for Optical Engineering. This book was released on 1994 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Author : Kevin M. Monahan
Publisher :
ISBN 13 :
Total Pages : 476 pages
Book Rating : 4.:/5 (318 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control II written by Kevin M. Monahan and published by . This book was released on 1988 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : P. Rai-Choudhury
Publisher : The Electrochemical Society
ISBN 13 : 9781566771399
Total Pages : 496 pages
Book Rating : 4.7/5 (713 download)
Download or read book Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices written by P. Rai-Choudhury and published by The Electrochemical Society. This book was released on 1997 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : M.W. Burke
Publisher : Springer Science & Business Media
ISBN 13 : 9400900694
Total Pages : 959 pages
Book Rating : 4.4/5 (9 download)
Download or read book Image Acquisition written by M.W. Burke and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 959 pages. Available in PDF, EPUB and Kindle. Book excerpt: MV engineering is a truly multidisciplinary area and perhaps because of this, it is plagued with imprecise jargon. This book attempts to collect the fundamental concepts into a single, well-integrated, self-consistent exposition that will serve as a relatively painless introduction to the field of MV Engineering. The ultimate goal is an enlightened practitioner capable of using this powerful new technology effectively.
