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Author : New York Photolithographers' Association
Publisher :
ISBN 13 :
Total Pages : 198 pages
Book Rating : 4.:/5 (334 download)
Download or read book Handbook of Photo-lithography ... written by New York Photolithographers' Association and published by . This book was released on 1935 with total page 198 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : New York Photo-Lithographers' Association
Publisher :
ISBN 13 :
Total Pages : 196 pages
Book Rating : 4.0/5 ( download)
Download or read book Handbook of Photo-lithography, 1935 written by New York Photo-Lithographers' Association and published by . This book was released on 1935 with total page 196 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : David Cumming
Publisher :
ISBN 13 :
Total Pages : 368 pages
Book Rating : 4.:/5 (64 download)
Download or read book Handbook of Lithography written by David Cumming and published by . This book was released on 1948 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Chris Mack
Publisher : John Wiley & Sons
ISBN 13 : 1119965071
Total Pages : 503 pages
Book Rating : 4.1/5 (199 download)
Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Author : David Cumming
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (85 download)
Download or read book Handbook of Lithography ... with Additional Chapters Dealing with Offset Printing, Photo-lithography and Other Modern Processes written by David Cumming and published by . This book was released on 1948 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Chris A. Mack
Publisher : Society of Photo Optical
ISBN 13 : 9780819462077
Total Pages : 122 pages
Book Rating : 4.4/5 (62 download)
Download or read book Field Guide to Optical Lithography written by Chris A. Mack and published by Society of Photo Optical. This book was released on 2006 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. It details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.
Author : David Cumming
Publisher : Nabu Press
ISBN 13 : 9781294400639
Total Pages : 304 pages
Book Rating : 4.4/5 (6 download)
Download or read book Handbook of Lithography written by David Cumming and published by Nabu Press. This book was released on 2013-12 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a reproduction of a book published before 1923. This book may have occasional imperfections such as missing or blurred pages, poor pictures, errant marks, etc. that were either part of the original artifact, or were introduced by the scanning process. We believe this work is culturally important, and despite the imperfections, have elected to bring it back into print as part of our continuing commitment to the preservation of printed works worldwide. We appreciate your understanding of the imperfections in the preservation process, and hope you enjoy this valuable book.
Author : David Cumming
Publisher :
ISBN 13 :
Total Pages : 306 pages
Book Rating : 4.:/5 (319 download)
Download or read book Handbook of Lithography written by David Cumming and published by . This book was released on 1904 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : P. Rai-Choudhury
Publisher : SPIE Press
ISBN 13 : 9780819423795
Total Pages : 706 pages
Book Rating : 4.4/5 (237 download)
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Author : David Cumming
Publisher : Sagwan Press
ISBN 13 : 9781297904356
Total Pages : 304 pages
Book Rating : 4.9/5 (43 download)
Download or read book Handbook of Lithography written by David Cumming and published by Sagwan Press. This book was released on 2015-08-21 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work has been selected by scholars as being culturally important, and is part of the knowledge base of civilization as we know it. This work was reproduced from the original artifact, and remains as true to the original work as possible. Therefore, you will see the original copyright references, library stamps (as most of these works have been housed in our most important libraries around the world), and other notations in the work. This work is in the public domain in the United States of America, and possibly other nations. Within the United States, you may freely copy and distribute this work, as no entity (individual or corporate) has a copyright on the body of the work.As a reproduction of a historical artifact, this work may contain missing or blurred pages, poor pictures, errant marks, etc. Scholars believe, and we concur, that this work is important enough to be preserved, reproduced, and made generally available to the public. We appreciate your support of the preservation process, and thank you for being an important part of keeping this knowledge alive and relevant.
Author : David 1846-1922 Cumming
Publisher :
ISBN 13 : 9781362653240
Total Pages : 302 pages
Book Rating : 4.6/5 (532 download)
Download or read book HANDBK OF LITHOGRAPHY written by David 1846-1922 Cumming and published by . This book was released on 2016-08-26 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : William B. Glendinning
Publisher : William Andrew
ISBN 13 : 1437728227
Total Pages : 672 pages
Book Rating : 4.4/5 (377 download)
Download or read book Handbook of VLSI Microlithography written by William B. Glendinning and published by William Andrew. This book was released on 2012-12-02 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
Author : Harry J. Levinson
Publisher : SPIE Press
ISBN 13 : 9780819456601
Total Pages : 446 pages
Book Rating : 4.4/5 (566 download)
Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Author : David Cumming
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (439 download)
Download or read book Handbook of Lithography written by David Cumming and published by . This book was released on 1904 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : John N. Helbert
Publisher : Cambridge University Press
ISBN 13 : 0080946801
Total Pages : 1026 pages
Book Rating : 4.0/5 (89 download)
Download or read book Handbook of VLSI Microlithography, 2nd Edition written by John N. Helbert and published by Cambridge University Press. This book was released on 2001-04 with total page 1026 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely coveredùincluding an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
Author : Irene Harvey Sayre
Publisher :
ISBN 13 :
Total Pages : 532 pages
Book Rating : 4.0/5 ( download)
Download or read book Photography and Platemaking for Photo-lithography written by Irene Harvey Sayre and published by . This book was released on 1965 with total page 532 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : David Cumming
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (187 download)
Download or read book Handbook of Lithography written by David Cumming and published by . This book was released on 1946 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
