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Author : R. W. McMahon
Publisher :
ISBN 13 :
Total Pages : 5 pages
Book Rating : 4.:/5 (6 download)
Download or read book Generic Equipment Automation for Thin Film Processes written by R. W. McMahon and published by . This book was released on 1989 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Krishna Seshan
Publisher : William Andrew
ISBN 13 : 0815517785
Total Pages : 430 pages
Book Rating : 4.8/5 (155 download)
Download or read book Handbook of Thin Film Deposition Processes and Techniques written by Krishna Seshan and published by William Andrew. This book was released on 2001-02-01 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Author : Krishna Seshan
Publisher : CRC Press
ISBN 13 : 1482269686
Total Pages : 72 pages
Book Rating : 4.4/5 (822 download)
Download or read book Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon written by Krishna Seshan and published by CRC Press. This book was released on 2002-02-01 with total page 72 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec
Author : Werner Kern
Publisher : Elsevier
ISBN 13 : 0080524214
Total Pages : 881 pages
Book Rating : 4.0/5 (85 download)
Download or read book Thin Film Processes II written by Werner Kern and published by Elsevier. This book was released on 2012-12-02 with total page 881 pages. Available in PDF, EPUB and Kindle. Book excerpt: This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Provides an all-new sequel to the 1978 classic, Thin Film Processes Introduces new topics, and several key topics presented in the original volume are updated Emphasizes practical applications of major thin film deposition and etching processes Helps readers find the appropriate technology for a particular application
Author : American Society of Tool and Manufacturing Engineers
Publisher :
ISBN 13 :
Total Pages : 200 pages
Book Rating : 4.:/5 (31 download)
Download or read book ASTME Technical Digest written by American Society of Tool and Manufacturing Engineers and published by . This book was released on 1989 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Klaus K. Schuegraf
Publisher : William Andrew
ISBN 13 :
Total Pages : 440 pages
Book Rating : 4.3/5 (91 download)
Download or read book Handbook of Thin-film Deposition Processes and Techniques written by Klaus K. Schuegraf and published by William Andrew. This book was released on 1988 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.
Author : John L. Vossen
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (91 download)
Download or read book Thin Film Processes written by John L. Vossen and published by . This book was released on 1991 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gary S. May
Publisher : John Wiley & Sons
ISBN 13 : 0471790273
Total Pages : 428 pages
Book Rating : 4.4/5 (717 download)
Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Author :
Publisher :
ISBN 13 :
Total Pages : 356 pages
Book Rating : 4.3/5 (91 download)
Download or read book Technical Digest written by and published by . This book was released on 1994 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Hasan Zaman
Publisher : LAP Lambert Academic Publishing
ISBN 13 : 9783838382319
Total Pages : 364 pages
Book Rating : 4.3/5 (823 download)
Download or read book Process Compilation Methods for Thin Film Devices written by Hasan Zaman and published by LAP Lambert Academic Publishing. This book was released on 2010-07 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a systematic method of automatic generation of fabrication process flows for thin film devices from the schematics of the device structures. According to Prof. Duane S. Boning of MIT, "The work is important: it is the first to define a solid fundamental and mathematical basis for process synthesis." The method combines formal mathematical flow construction methods with a set of library-specific available resources to generate flows compatible with a particular laboratory. It uses a partially ordered set (poset) representation of the device topology. The sequence of fabriction steps is essentially determined from the poset linear extensions. The algorithms have been implemented in a software tool named MISTIC that includes the capability of grading the generated process flows based on the expected device yield and some empirical factors. The compilation procedure has been successfully tested with several conventional Integrated Circuit (IC) and Micro-Electro Mechanical System (MEMS) devices and also circuits using both VLSI and MEMS structures.
Author :
Publisher :
ISBN 13 :
Total Pages : 498 pages
Book Rating : 4.3/5 (91 download)
Download or read book Instrument Practice for Process Control and Automation written by and published by . This book was released on 1970 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Lawrence Robert Stevens
Publisher :
ISBN 13 :
Total Pages : 268 pages
Book Rating : 4.:/5 (438 download)
Download or read book Thin Film Deposition Chamber Automation written by Lawrence Robert Stevens and published by . This book was released on 2000 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 744 pages
Book Rating : 4.:/5 (31 download)
Download or read book Applied Mechanics Reviews written by and published by . This book was released on 1989 with total page 744 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Rolf E. Hummel
Publisher : CRC Press
ISBN 13 : 9780849324840
Total Pages : 378 pages
Book Rating : 4.3/5 (248 download)
Download or read book Handbook of Optical Properties written by Rolf E. Hummel and published by CRC Press. This book was released on 1995-02-24 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Films for Optical Coating emphasizes the applications of thin films, deposition of thin films, and thin film characterization. Unlike monographs on this subject, this book presents the views of many expert authors. Individual chapters span a wide arc of topics within this field of study. The book offers an introduction to usual and unusual applications of optical thin films, treating in a more qualitative way general topics such as anticounterfeiting coatings, decorative coatings, light switches, contrast enhancement coatings, multiplexers, optical memories, and more. Contributors review thin film media for optical data storage, UV broadband and narrow-band filters, and optically active thin film coatings. Ion beam sputtering and magnetron sputtering deposition methods are described in detail. Characterization techniques are provided, including Raman spectroscopy and absorption measurements. The book also offers theories on light scattering of thin dielectric films and the electromagnetic properties of nanocermet thin films. This reference incorporates recent research by the individual authors with their views of current developments in their respective fields. Of particular interest to the reader will be an assessment of the historical developments of thin film physics written by one of the fathers of thin film technology, Professor M. Auwärter.
Author :
Publisher :
ISBN 13 :
Total Pages : 438 pages
Book Rating : 4.0/5 ( download)
Download or read book Energy Research Abstracts written by and published by . This book was released on 1994-05 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt:
![Download Generic Equipment Model for Effective Factory Automation /[prepared By] Semiconductor Equipment and Materials International PDF Online Free](https://books.google.com/books/content/images/frontcover/N-PrHAAACAAJ?fife=w200-h370)
Author : Semiconductor Equipment and Materials International
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (85 download)
Download or read book Generic Equipment Model for Effective Factory Automation /[prepared By] Semiconductor Equipment and Materials International written by Semiconductor Equipment and Materials International and published by . This book was released on 1991 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 300 pages
Book Rating : 4.:/5 (31 download)
Download or read book Accessing Space written by and published by . This book was released on 1990 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt:
