Fundamental Electron Interactions with Plasma Processing Gases

Download Fundamental Electron Interactions with Plasma Processing Gases PDF Online Free

Author :
Publisher : Springer Science & Business Media
ISBN 13 : 1441989714
Total Pages : 791 pages
Book Rating : 4.4/5 (419 download)

DOWNLOAD NOW!


Book Synopsis Fundamental Electron Interactions with Plasma Processing Gases by : Loucas G. Christophorou

Download or read book Fundamental Electron Interactions with Plasma Processing Gases written by Loucas G. Christophorou and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 791 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6.

Electron Interactions with Plasma Processing Gases

Download Electron Interactions with Plasma Processing Gases PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (443 download)

DOWNLOAD NOW!


Book Synopsis Electron Interactions with Plasma Processing Gases by :

Download or read book Electron Interactions with Plasma Processing Gases written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents electron-collision cross section data and transport coefficients for gases used in the manufacturing of semiconductor devices from the Electronics and Electrical Engineering Laboratory (EEEL) of the National Institute of Standards and Technology (NIST) in Gaithersburg, Maryland. Notes that the purpose of the information is to provide data for gases used in the plasma processing of semiconductor devices. Lists the gases that are being investigated.

Plasma Processing of Materials

Download Plasma Processing of Materials PDF Online Free

Author :
Publisher : National Academies Press
ISBN 13 : 0309045975
Total Pages : 88 pages
Book Rating : 4.3/5 (9 download)

DOWNLOAD NOW!


Book Synopsis Plasma Processing of Materials by : National Research Council

Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

Handbook of Advanced Plasma Processing Techniques

Download Handbook of Advanced Plasma Processing Techniques PDF Online Free

Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3642569897
Total Pages : 664 pages
Book Rating : 4.6/5 (425 download)

DOWNLOAD NOW!


Book Synopsis Handbook of Advanced Plasma Processing Techniques by : R.J. Shul

Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2011-06-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.

Gaseous Electronics

Download Gaseous Electronics PDF Online Free

Author :
Publisher : CRC Press
ISBN 13 : 1351833324
Total Pages : 826 pages
Book Rating : 4.3/5 (518 download)

DOWNLOAD NOW!


Book Synopsis Gaseous Electronics by : Gorur Govinda Raju

Download or read book Gaseous Electronics written by Gorur Govinda Raju and published by CRC Press. This book was released on 2018-09-03 with total page 826 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the constant emergence of new research and application possibilities, gaseous electronics is more important than ever in disciplines including engineering (electrical, power, mechanical, electronics, and environmental), physics, and electronics. The first resource of its kind, Gaseous Electronics: Tables, Atoms, and Molecules fulfills the author’s vision of a stand-alone reference to condense 100 years of research on electron-neutral collision data into one easily searchable volume. It presents most—if not all—of the properly classified experimental results that scientists, researchers, and students require for a theoretical and practical understanding of collision properties and their impact. An unprecedented collection and analysis of electron neutral collision properties This book follows a new user-friendly format that enables readers to easily retrieve, analyze, and apply specific atomic/molecular information as needed. In his previous work, Gaseous Electronics: Theory and Practice, the author first explored electron–neutron interactions. To clarify the complex fundamental processes involved, he cited as much experimental data on atoms and molecules as limited space would allow. Completing that task, this handy reference more fully compiles essential revised data on more than 420 atoms and molecules, arranging it into easily digestible chapters, sections, and appendices. Analysis parameters include total scattering, ionization, excitation, attachment cross sections, ionization and attachment coefficients, attachment rates, and ion drift velocity. Some recent research areas in gaseous electronics include: Environmentally efficient and protective lighting devices Plasma research for power generation and space applications Medical applications (some involving skin treatment and healing) Written entirely in SI units, the book includes hundreds of tables, figures, and specially drawn charts, with data expressed in both tabular and graphical form. Each chapter stands independently and contains references for further research.

Atomic-Molecular Ionization by Electron Scattering

Download Atomic-Molecular Ionization by Electron Scattering PDF Online Free

Author :
Publisher : Cambridge University Press
ISBN 13 : 1108498906
Total Pages : 286 pages
Book Rating : 4.1/5 (84 download)

DOWNLOAD NOW!


Book Synopsis Atomic-Molecular Ionization by Electron Scattering by : K. N. Joshipura

Download or read book Atomic-Molecular Ionization by Electron Scattering written by K. N. Joshipura and published by Cambridge University Press. This book was released on 2019-01-24 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covers quantum scattering theories, experimental and theoretical calculations and applications in a comprehensive manner.

Nonthermal Plasmas for Materials Processing

Download Nonthermal Plasmas for Materials Processing PDF Online Free

Author :
Publisher : John Wiley & Sons
ISBN 13 : 1119364760
Total Pages : 805 pages
Book Rating : 4.1/5 (193 download)

DOWNLOAD NOW!


Book Synopsis Nonthermal Plasmas for Materials Processing by : Jörg Florian Friedrich

Download or read book Nonthermal Plasmas for Materials Processing written by Jörg Florian Friedrich and published by John Wiley & Sons. This book was released on 2022-07-15 with total page 805 pages. Available in PDF, EPUB and Kindle. Book excerpt: NONTHERMAL PLASMAS FOR MATERIALS PROCESSING This unique book covers the physical and chemical aspects of plasma chemistry with polymers and gives new insights into the interaction of physics and chemistry of nonthermal plasmas and their applications in materials science for physicists and chemists. The properties and characteristics of plasmas, elementary (collision) processes in the gas phase, plasma surface interactions, gas discharge plasmas and technical plasma sources, atmospheric plasmas, plasma diagnostics, polymers and plasmas, plasma polymerization, post-plasma processes, plasma, and wet-chemical processing, plasma-induced generation of functional groups, and the chemical reactions on these groups along with a few exemplary applications are discussed in this comprehensive but condensed state-of-the-art book on plasma chemistry and its dependence on plasma physics. While plasma physics, plasma chemistry, and polymer science are often handled separately, the aim of the authors is to harmoniously join the physics and chemistry of low-pressure and atmospheric-pressure plasmas with polymer surface chemistry and polymerization and to compare such chemistry with classic chemistry. Readers will find in these chapters Interaction of plasma physics and chemistry in plasmas and at the surface of polymers; Explanation and interpretation of physical and chemical mechanisms on plasma polymerization and polymer surface modification; Introduction of modern techniques in plasma diagnostics, surface analysis of solids, and special behavior of polymers on exposure to plasmas; Discussion of the conflict of energy-rich plasma species with permanent energy supply and the much lower binding energies in polymers and alternatives to avoid random polymer decomposition Technical applications such as adhesion, cleaning, wettability, textile modification, coatings, films, etc. New perspectives are explained about how to use selective and mild processes to allow post-plasma chemistry on non-degraded polymer surfaces. Audience Physicists, polymer chemists, materials scientists, industrial engineers in biomedicine, coatings, printing, etc.

Advances in Atomic, Molecular, and Optical Physics

Download Advances in Atomic, Molecular, and Optical Physics PDF Online Free

Author :
Publisher : Academic Press
ISBN 13 : 012812184X
Total Pages : 642 pages
Book Rating : 4.1/5 (281 download)

DOWNLOAD NOW!


Book Synopsis Advances in Atomic, Molecular, and Optical Physics by :

Download or read book Advances in Atomic, Molecular, and Optical Physics written by and published by Academic Press. This book was released on 2017-06-07 with total page 642 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Atomic, Molecular, and Optical Physics, Volume 66 provides a comprehensive compilation of recent developments in a field that is in a state of rapid growth. New to this volume are chapters devoted to 2D Coherent Spectroscopy of Electronic Transitions, Nonlinear and Quantum Optical Properties and Applications of Intense Twin-Beams, Non-classical Light Generation from III-V and Group-IV Solid-State Cavity Quantum Systems, Trapping Atoms with Radio Frequency Adiabatic Potentials, Quantum Control of Optomechanical Systems, and Efficient Description of Bose–Einstein Condensates in Time-Dependent Rotating Traps. With timely articles written by distinguished experts that contain relevant review materials and detailed descriptions of important developments in the field, this series is a must have for those interested in the variety of topics covered. Presents the work of international experts in the field Contains comprehensive articles that compile recent developments in a field that is experiencing rapid growth, with new experimental and theoretical techniques emerging Ideal for users interested in optics, excitons, plasmas, and thermodynamics Topics covered include atmospheric science, astrophysics, surface physics, and laser physics, amongst others

Assessed Total and Partial Ionization Cross Sections for CF4, C2F6, C3F8, CHF3, CF3I, C-C4F8, Cl2, CCl2F2, BCl3, SF6, and Fragments of CF4 and SF6

Download Assessed Total and Partial Ionization Cross Sections for CF4, C2F6, C3F8, CHF3, CF3I, C-C4F8, Cl2, CCl2F2, BCl3, SF6, and Fragments of CF4 and SF6 PDF Online Free

Author :
Publisher :
ISBN 13 :
Total Pages : 8 pages
Book Rating : 4.:/5 (742 download)

DOWNLOAD NOW!


Book Synopsis Assessed Total and Partial Ionization Cross Sections for CF4, C2F6, C3F8, CHF3, CF3I, C-C4F8, Cl2, CCl2F2, BCl3, SF6, and Fragments of CF4 and SF6 by : Loucas G. Christophorou

Download or read book Assessed Total and Partial Ionization Cross Sections for CF4, C2F6, C3F8, CHF3, CF3I, C-C4F8, Cl2, CCl2F2, BCl3, SF6, and Fragments of CF4 and SF6 written by Loucas G. Christophorou and published by . This book was released on 2004 with total page 8 pages. Available in PDF, EPUB and Kindle. Book excerpt: The authors recently completed an updated review, synthesis, assessment, and discussion of low-energy electron interactions with the plasma processing gases CF4, C2F6, C3F8, CHF3, CF3I, c-C4F8, Cl2, CCl2F2, BCl3, and SF6. This work, along with fundamental knowledge on electron-molecule collision processes, the definition of the various electron collision cross-sections and rate coefficients, and the experimental and theoretical methods used for their determination have been described in Christophorou and Olthoff. It has been shown in this reference, that reliable data on the electron transport, electron attachment, and electron-impact ionization coefficients generally exist for most of these molecules, except for electron transport in strongly electronegative gases. Also, reliable data exist on the collision cross-sections for most of these molecules, but this knowledge depends on the collision process and the molecule under consideration. The cross-sections and coefficients that have been recommended or suggested were based on experimental measurements. This work has shown that while a great deal of quantitative data have become available, especially recently, for the molecules under consideration, there is still a pressing need for quantitative measurements of the cross sections for electron-impact dissociation into neutral fragments, direct and indirect vibrational (and electronic) excitation, and electron interaction processes involving excited and transient (radical) species.

Nonthermal Plasma Chemistry and Physics

Download Nonthermal Plasma Chemistry and Physics PDF Online Free

Author :
Publisher : CRC Press
ISBN 13 : 1420059165
Total Pages : 566 pages
Book Rating : 4.4/5 (2 download)

DOWNLOAD NOW!


Book Synopsis Nonthermal Plasma Chemistry and Physics by : Jurgen Meichsner

Download or read book Nonthermal Plasma Chemistry and Physics written by Jurgen Meichsner and published by CRC Press. This book was released on 2012-11-13 with total page 566 pages. Available in PDF, EPUB and Kindle. Book excerpt: In addition to introducing the basics of plasma physics, Nonthermal Plasma Chemistry and Physics is a comprehensive presentation of recent developments in the rapidly growing field of nonthermal plasma chemistry. The book offers a detailed discussion of the fundamentals of plasma chemical reactions and modeling, nonthermal plasma sources, relevant diagnostic techniques, and selected applications. Elucidating interconnections and trends, the book focuses on basic principles and illustrations across a broad field of applications. Expert contributors address environmental aspects of plasma chemistry. The book also includes selected plasma conditions and specific applications in volume plasma chemistry and treatment of material surfaces such as plasma etching in microelectronics, chemical modification of polymer surfaces and deposition of functional thin films. Designed for students of plasma physics, Nonthermal Plasma Chemistry and Physics is a concise resource also for specialists in this and related fields of research.

Materials and Processes for Next Generation Lithography

Download Materials and Processes for Next Generation Lithography PDF Online Free

Author :
Publisher : Elsevier
ISBN 13 : 0081003587
Total Pages : 636 pages
Book Rating : 4.0/5 (81 download)

DOWNLOAD NOW!


Book Synopsis Materials and Processes for Next Generation Lithography by :

Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place

Low-Energy Electrons

Download Low-Energy Electrons PDF Online Free

Author :
Publisher : CRC Press
ISBN 13 : 0429608284
Total Pages : 434 pages
Book Rating : 4.4/5 (296 download)

DOWNLOAD NOW!


Book Synopsis Low-Energy Electrons by : Oddur Ingólfsson

Download or read book Low-Energy Electrons written by Oddur Ingólfsson and published by CRC Press. This book was released on 2019-04-23 with total page 434 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-energy electrons are ubiquitous in nature and play an important role in natural phenomena as well as many potential and current industrial processes. Authored by 16 active researchers, this book describes the fundamental characteristics of low-energy electron–molecule interactions and their role in different fields of science and technology, including plasma processing, nanotechnology, and health care, as well as astro- and atmospheric physics and chemistry. The book is packed with illustrative examples, from both fundamental and application sides, features about 130 figures, and lists over 800 references. It may serve as an advanced graduate-level study course material where selected chapters can be used either individually or in combination as a basis to highlight and study specific aspects of low-energy electron–molecule interactions. It is also directed at researchers in the fields of plasma physics, nanotechnology, and radiation damage to biologically relevant material (such as in cancer therapy), especially those with an interest in high-energy-radiation-induced processes, from both an experimental and a theoretical point of view.

Molecular Processes in Plasmas

Download Molecular Processes in Plasmas PDF Online Free

Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3540725806
Total Pages : 199 pages
Book Rating : 4.5/5 (47 download)

DOWNLOAD NOW!


Book Synopsis Molecular Processes in Plasmas by : Yukikazu Itikawa

Download or read book Molecular Processes in Plasmas written by Yukikazu Itikawa and published by Springer Science & Business Media. This book was released on 2007-07-19 with total page 199 pages. Available in PDF, EPUB and Kindle. Book excerpt: A variety of plasmas include molecules rather than only ions or atoms. Examples are ionospheres of the Earth and other planets, stellar atmospheres, gaseous discharges for use in various devices and processes, and fusion plasmas in the edge region. This book describes the role of molecules in those plasmas by showing elementary collision processes involving those molecules.

Gaseous Dielectrics X

Download Gaseous Dielectrics X PDF Online Free

Author :
Publisher : Springer Science & Business Media
ISBN 13 : 9780387232980
Total Pages : 548 pages
Book Rating : 4.2/5 (329 download)

DOWNLOAD NOW!


Book Synopsis Gaseous Dielectrics X by : Loucas C. Christophorou

Download or read book Gaseous Dielectrics X written by Loucas C. Christophorou and published by Springer Science & Business Media. This book was released on 2004-12-07 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book contains a broad and in depth review by leading world experts of the progress and the problems of current interest in gaseous dielectrics and their use, especially as insulators in high-voltage equipment and substations. Recent advances in superconductivity for power transmission and in plasma technology are also included.The fundamental, applied and industrial research described in the book allows the electric power industry to transmit and distribute electrical energy in more efficient, safe and environmentally acceptable ways.

Encyclopedia of Plasma Technology - Two Volume Set

Download Encyclopedia of Plasma Technology - Two Volume Set PDF Online Free

Author :
Publisher : CRC Press
ISBN 13 : 1351204939
Total Pages : 3082 pages
Book Rating : 4.3/5 (512 download)

DOWNLOAD NOW!


Book Synopsis Encyclopedia of Plasma Technology - Two Volume Set by : J. Leon Shohet

Download or read book Encyclopedia of Plasma Technology - Two Volume Set written by J. Leon Shohet and published by CRC Press. This book was released on 2016-12-12 with total page 3082 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technical plasmas have a wide range of industrial applications. The Encyclopedia of Plasma Technology covers all aspects of plasma technology from the fundamentals to a range of applications across a large number of industries and disciplines. Topics covered include nanotechnology, solar cell technology, biomedical and clinical applications, electronic materials, sustainability, and clean technologies. The book bridges materials science, industrial chemistry, physics, and engineering, making it a must have for researchers in industry and academia, as well as those working on application-oriented plasma technologies. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail) [email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail) [email protected]

Plasma-Surface Interactions and Processing of Materials

Download Plasma-Surface Interactions and Processing of Materials PDF Online Free

Author :
Publisher : Springer Science & Business Media
ISBN 13 : 9400919468
Total Pages : 548 pages
Book Rating : 4.4/5 (9 download)

DOWNLOAD NOW!


Book Synopsis Plasma-Surface Interactions and Processing of Materials by : O. Auciello

Download or read book Plasma-Surface Interactions and Processing of Materials written by O. Auciello and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

Fundamentals of Gaseous Ionization and Plasma Electronics

Download Fundamentals of Gaseous Ionization and Plasma Electronics PDF Online Free

Author :
Publisher : John Wiley & Sons
ISBN 13 :
Total Pages : 488 pages
Book Rating : 4.:/5 (45 download)

DOWNLOAD NOW!


Book Synopsis Fundamentals of Gaseous Ionization and Plasma Electronics by : Essam Nasser

Download or read book Fundamentals of Gaseous Ionization and Plasma Electronics written by Essam Nasser and published by John Wiley & Sons. This book was released on 1971 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: