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Author : Willem Frederik van Dorp
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (842 download)
Download or read book Sub-10 Nm Focused Electron Beam Induced Deposition written by Willem Frederik van Dorp and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : José María de Teresa
Publisher :
ISBN 13 : 9780750326087
Total Pages : 0 pages
Book Rating : 4.3/5 (26 download)
Download or read book Nanofabrication written by José María de Teresa and published by . This book was released on 2020 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed, cost, etc. At the end of this section, the reader will be able to decide which technique to use for different applications. The second section explores more specific applications of the nanolithography techniques previously described; as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.
Author : Tristan Bret
Publisher :
ISBN 13 :
Total Pages : 220 pages
Book Rating : 4.:/5 (427 download)
Download or read book Physico-chemical Study of the Focused Electron Beam Induced Deposition Process written by Tristan Bret and published by . This book was released on 2005 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ampere A. Tseng
Publisher : World Scientific
ISBN 13 : 9812790896
Total Pages : 583 pages
Book Rating : 4.8/5 (127 download)
Download or read book Nanofabrication written by Ampere A. Tseng and published by World Scientific. This book was released on 2008 with total page 583 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.
Author : Ivo Utke
Publisher : Oxford University Press
ISBN 13 : 0199920990
Total Pages : 830 pages
Book Rating : 4.1/5 (999 download)
Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by Oxford University Press. This book was released on 2012-03-05 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabrication and nanocharacterization. Limitations of the FIB/FEB techniques, especially important when nanoscale resolution is considered, as well as possible ways to overcome the experimental difficulties in creating new nanodevices and improving resolution of processing, are outlined. Chapters include tutorials describing fundamental aspects of the interaction of beams (FIB/FEB) with surfaces, nanostructures and adsorbed molecules; electron and ion beam chemistries; basic theory, design and configuration of equipment; simulations of processes; basic solutions for nanoprototyping. Emerging technologies as processing by cluster beams are also discussed. In addition, the book considers numerous applications of these techniques (milling, etching, deposition) for nanolithography, nanofabrication and characterization, involving different nanostructured materials and devices. Its main focus is on practical details of using focused ion and electron beams with gas assistance (deposition and etching) and without gas assistance (milling/cutting) for fabrication of devices from the fields of nanoelectronics, nanophotonics, nanomagnetics, functionalized scanning probe tips, nanosensors and other types of NEMS (nanoelectromechanical systems). Special attention is given to strategies designed to overcome limitations of the techniques (e.g., due to damaging produced by energetic ions interacting with matter), particularly those involving multi-step processes and multi-layer materials. Through its thorough demonstration of fundamental concepts and its presentation of a wide range of technologies developed for specific applications, this volume is ideal for researches from many different disciplines, as well as engineers and professors in nanotechnology and nanoscience.
Author : Oddur Ingólfsson
Publisher : CRC Press
ISBN 13 : 0429602766
Total Pages : 274 pages
Book Rating : 4.4/5 (296 download)
Download or read book Low-Energy Electrons written by Oddur Ingólfsson and published by CRC Press. This book was released on 2019-04-23 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-energy electrons are ubiquitous in nature and play an important role in natural phenomena as well as many potential and current industrial processes. Authored by 16 active researchers, this book describes the fundamental characteristics of low-energy electron–molecule interactions and their role in different fields of science and technology, including plasma processing, nanotechnology, and health care, as well as astro- and atmospheric physics and chemistry. The book is packed with illustrative examples, from both fundamental and application sides, features about 130 figures, and lists over 800 references. It may serve as an advanced graduate-level study course material where selected chapters can be used either individually or in combination as a basis to highlight and study specific aspects of low-energy electron–molecule interactions. It is also directed at researchers in the fields of plasma physics, nanotechnology, and radiation damage to biologically relevant material (such as in cancer therapy), especially those with an interest in high-energy-radiation-induced processes, from both an experimental and a theoretical point of view.
Author : Giorgia Di Prima
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (133 download)
Download or read book Single-electron Transport in Focused Electron Beam Induced Deposition (FEBID)-based Nanostructures written by Giorgia Di Prima and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Rosa Córdoba Castillo
Publisher : Springer Science & Business Media
ISBN 13 : 3319020811
Total Pages : 157 pages
Book Rating : 4.3/5 (19 download)
Download or read book Functional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition written by Rosa Córdoba Castillo and published by Springer Science & Business Media. This book was released on 2013-10-08 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis constitutes a detailed study of functional nanostructures (ferromagnetic, superconducting, metallic and semiconducting) fabricated by focused electron/ion beam induced deposition techniques. The nanostructures were grown using different precursor materials such as Co2(CO)8, Fe2(CO)9, W(CO)6, (CH3)3Pt(CpCH3) and were characterized by a wide range of techniques. This work reports results obtained for the morphology, the microstructure, the composition, the electrical transport mechanism, magnetic and superconducting properties of nanostructures. The results offers exciting prospects in a wide range of applications in nanotechnology and condensed matter physics.
Author : Aleksandra Szkudlarek
Publisher :
ISBN 13 :
Total Pages : 139 pages
Book Rating : 4.:/5 (892 download)
Download or read book Surface Kinetics Fundamentals of Focused-electron-beam-induced-deposition written by Aleksandra Szkudlarek and published by . This book was released on 2014 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Jakub Mateusz Jurczyk
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (129 download)
Download or read book Study of Novel Precursors for Focused Electron Beam Induced Deposition of Metal Nanowires written by Jakub Mateusz Jurczyk and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ivo Utke
Publisher : OUP USA
ISBN 13 : 0199734216
Total Pages : 830 pages
Book Rating : 4.1/5 (997 download)
Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by OUP USA. This book was released on 2012-05 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
Author : Frances M. Ross
Publisher : Cambridge University Press
ISBN 13 : 1107116570
Total Pages : 529 pages
Book Rating : 4.1/5 (71 download)
Download or read book Liquid Cell Electron Microscopy written by Frances M. Ross and published by Cambridge University Press. This book was released on 2017 with total page 529 pages. Available in PDF, EPUB and Kindle. Book excerpt: 2.6.2 Electrodes for Electrochemistry
Author : Alexandre Perentes
Publisher :
ISBN 13 :
Total Pages : 218 pages
Book Rating : 4.:/5 (428 download)
Download or read book Oxygen Assisted Focused Electron Beam Induced Deposition of Silicon Dioxide written by Alexandre Perentes and published by . This book was released on 2007 with total page 218 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Matthew D. Bresin
Publisher :
ISBN 13 :
Total Pages : 141 pages
Book Rating : 4.:/5 (843 download)
Download or read book An Exploration of Focused Electron Beam-induced-deposition at Cryogenic Temperatures written by Matthew D. Bresin and published by . This book was released on 2011 with total page 141 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Lucille A. Giannuzzi
Publisher : Springer Science & Business Media
ISBN 13 : 038723313X
Total Pages : 362 pages
Book Rating : 4.3/5 (872 download)
Download or read book Introduction to Focused Ion Beams written by Lucille A. Giannuzzi and published by Springer Science & Business Media. This book was released on 2006-05-18 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Author : Toivo T. Kodas
Publisher : John Wiley & Sons
ISBN 13 : 3527615849
Total Pages : 562 pages
Book Rating : 4.5/5 (276 download)
Download or read book The Chemistry of Metal CVD written by Toivo T. Kodas and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.
Author : Rosa Cordoba Castillo
Publisher :
ISBN 13 : 9783319020822
Total Pages : 164 pages
Book Rating : 4.0/5 (28 download)
Download or read book Functional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition written by Rosa Cordoba Castillo and published by . This book was released on 2013-10-31 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt:
