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Author : Yeong Yau Loh
Publisher :
ISBN 13 :
Total Pages : 154 pages
Book Rating : 4.3/5 (121 download)
Download or read book Fabrication Design of Micro Pressure Sensor with Built-in Automated Calibration written by Yeong Yau Loh and published by . This book was released on 2006 with total page 154 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Young Hoon Kim
Publisher :
ISBN 13 :
Total Pages : 176 pages
Book Rating : 4.3/5 (121 download)
Download or read book Design of Micro Pressure Sensors with Built-in Automated Calibration written by Young Hoon Kim and published by . This book was released on 2006 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Parvej Ahmad Alvi
Publisher : Lulu.com
ISBN 13 : 8461622073
Total Pages : 176 pages
Book Rating : 4.4/5 (616 download)
Download or read book MEMS Pressure Sensors: Fabrication and Process Optimization written by Parvej Ahmad Alvi and published by Lulu.com. This book was released on 2014-07-14 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.
Author : Siddarth Kumar
Publisher :
ISBN 13 :
Total Pages : 178 pages
Book Rating : 4.:/5 (151 download)
Download or read book Design and Fabrication of an Optical Pressure Micro Sensor for Skin Mechanics Studies written by Siddarth Kumar and published by . This book was released on 2006 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt: (Cont.) The entire device is fabricated bottom up on a silicon wafer using soft lithography techniques and the textured pattern is imprinted onto the PDMS using photolithography techniques. This flexible pressure sensor is designed to be used on the fingerpad skin to determine the pressure distribution due to incident loads. The sensor is placed between the OCT head and the finger pad to be imaged. The OCT head (along with the indenter) acts as the mechanical stimulus and is used to indent the finger pad. As a result of this stimulus, the human skin along with the pressure sensor gets deformed and both these deformations are picked up by the OCT image. The deflection between the two bands of patterns is used to estimate the stress at the pressure sensor and skin interface through the development of a continuum mechanics model which is also developed and introduced in this thesis. The manufactured device is tested and calibrated for use with the fingerpad.
Author : Gert van der Horn
Publisher : Springer
ISBN 13 : 9781475728910
Total Pages : 202 pages
Book Rating : 4.7/5 (289 download)
Download or read book Integrated Smart Sensors written by Gert van der Horn and published by Springer. This book was released on 2012-11-28 with total page 202 pages. Available in PDF, EPUB and Kindle. Book excerpt: 1 1. 1 Introduction The (signal processing and storage) capacity ofthe human brain enables us to become powerful autonomous beings, but only if our brains operate in conjunction with (at least some of) our senses and muscles. Using these organs, we can interact with our environment, learn to adapt, and improve important aspects of our life. Similarly, the signal processing capabilities of modern electronics (computers) could be combined with electronic sensors and actuators to enable interaction with, and adaptation to, the (non-electrical) environment. This willlead to smarter and more powerful automated tools and machines. To facilitate and stimulate such a development, easy-to-use low-cost sensors are needed. The combination of electronic interface functions and a sensor in an integrated smart sensor, that provides a standard, digital, and bus-compatible output, would simplify the connection of sensors to standard electronic signal processors (microcontrollers, computers, etc. ). Currently, the calibration procedure, required for standardization of the sensor output signal level, contributes largely to the production costs of accurate sensors. To enable automation of the calibration procedure, and hence reduce the sensor fabrication costs, a digital calibrationjunction should be included in the smart sensor. INTEGRATED SMART SENSORS: Design and Calibration Introduction 1. 2 Sensors and actuators In industry many processes are electronically controlled. As depicted in Fig.
Author : Ting Hu
Publisher :
ISBN 13 :
Total Pages : 240 pages
Book Rating : 4.3/5 (121 download)
Download or read book Development of Micro Built-in-calibration Pressure Sensors with Piezoelectric Energy Harvesters written by Ting Hu and published by . This book was released on 2006 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Wah Seng Wong
Publisher :
ISBN 13 :
Total Pages : 366 pages
Book Rating : 4.:/5 (96 download)
Download or read book Design, Fabrication and Performance Analysis of SU-8 Piezoresistive Micro Pressure Sensor written by Wah Seng Wong and published by . This book was released on 2012 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 312 pages
Book Rating : 4.3/5 (91 download)
Download or read book Master's Theses Directories written by and published by . This book was released on 2007 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Education, arts and social sciences, natural and technical sciences in the United States and Canada".
Author : Yash Rajan Rasaikar
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (137 download)
Download or read book Hyper-sensitive MEMS Pressure Sensor Array for Microscale Bubble Pressure Measurement written by Yash Rajan Rasaikar and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: "As technology is advancing, more complex, efficient, and powerful devices are being made. These powerful devices generate a lot of heat which needs to be taken out to maximize their performance. Hence, efforts are being made to improve cooling techniques for these devices. Boiling is one such technique used in the cooling of devices. The heat transfer performance in the flow boiling systems is higher than that in pool boiling systems. With a simple add-on tapered manifold over a plain surface, we can convert pool boiling to flow boiling. This study will lead to improved performance and reliability of microelectronic devices, supercomputers, server chips, etc. The forces from bubbles growing can provide a pumpless, self-sustained unidirectional flow effectively transforming pool boiling into the extremely efficient flow boiling, resulting in energy savings. MEMS pressure sensor array will be mounted at the end of tapered manifold to map the pressure field around a nucleating bubble. The thesis describes the design, fabrication, packaging, and testing of a bulk micromachined sensor array that is capable of monitoring the pressure progression of a bubble. The sensor utilizes an extremely thin 225 nm square Si3N4 diaphragm which is produced by etching away the bulk silicon with XeF2 through holes present in the diaphragm. A unique process flow was developed to achieve the diaphragm thickness in nanometers. Four polysilicon piezoresistors, mounted on the surface of the diaphragm, where the stress is maximum, are used by the sensor. The thesis also discusses the results obtained from the response of the fabricated sensor. Various attempts were made to get a voltage output in response to applied pressure. These values were acquired over a number of experiments repeated at similar experimental conditions to demonstrate the repeatability of the calibration data. The value of sensitivity, derived from the slope of the linear calibration plot of Vout (V) vs. Pressure (Pa), is 5.26 [micro]V/Pa, which is very close to the required target hyper-sensitivity of 5 [micro]V/Pa."--Abstract.
Author : Penglai Li
Publisher :
ISBN 13 :
Total Pages : 98 pages
Book Rating : 4.:/5 (255 download)
Download or read book Design and Fabrication of a MEMS Passive Pressure Sensor written by Penglai Li and published by . This book was released on 2006 with total page 98 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-ElectroMechanical Systems is an inter-disciplinary technology field that has seen considerable growth over the years. It utilizes conventional semiconductor fabrication process flow as well as novel micro-fabrication techniques to create highly integrated ElectroMechanical systems such as sensors, actuators, switches, pumps and other devices with a wide range of industrial applications. By providing the capability of creating System-On-A-Chip, MEMS technology offers the prospect of highly sophisticated and integrated systems that are very low cost. The purpose of this project is to design, fabricate, and test a MEMS based, passive pressure sensor as a proof of concept targeted at possible remote sensing applications. For the targeted applications, purely passive sensor is a better alternative to sensors involving active circuitry, since it removes much of the design complexities from the sensor, and no battery is needed. Information such as technology selection, analysis of the sensor's response to pressure, and detailed fabrication process flow will be presented. Results from laboratory testing will also be presented.
Author : Ryan D. Pooran
Publisher :
ISBN 13 :
Total Pages : 194 pages
Book Rating : 4.:/5 (515 download)
Download or read book Design, Fabrication and Testing of a Bulk Micromachined Fabry-Perot Pressure Sensor written by Ryan D. Pooran and published by . This book was released on 2002 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Elena Yin Ling Chan
Publisher :
ISBN 13 :
Total Pages : 53 pages
Book Rating : 4.:/5 (15 download)
Download or read book Design, Fabrication and Characterization of Bulk-type MEMS High Pressure Sensor written by Elena Yin Ling Chan and published by . This book was released on 2018 with total page 53 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gert van der Horn
Publisher : Springer Science & Business Media
ISBN 13 : 1475728905
Total Pages : 210 pages
Book Rating : 4.4/5 (757 download)
Download or read book Integrated Smart Sensors written by Gert van der Horn and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: 1 1. 1 Introduction The (signal processing and storage) capacity ofthe human brain enables us to become powerful autonomous beings, but only if our brains operate in conjunction with (at least some of) our senses and muscles. Using these organs, we can interact with our environment, learn to adapt, and improve important aspects of our life. Similarly, the signal processing capabilities of modern electronics (computers) could be combined with electronic sensors and actuators to enable interaction with, and adaptation to, the (non-electrical) environment. This willlead to smarter and more powerful automated tools and machines. To facilitate and stimulate such a development, easy-to-use low-cost sensors are needed. The combination of electronic interface functions and a sensor in an integrated smart sensor, that provides a standard, digital, and bus-compatible output, would simplify the connection of sensors to standard electronic signal processors (microcontrollers, computers, etc. ). Currently, the calibration procedure, required for standardization of the sensor output signal level, contributes largely to the production costs of accurate sensors. To enable automation of the calibration procedure, and hence reduce the sensor fabrication costs, a digital calibrationjunction should be included in the smart sensor. INTEGRATED SMART SENSORS: Design and Calibration Introduction 1. 2 Sensors and actuators In industry many processes are electronically controlled. As depicted in Fig.
Author : Jonas Talandis
Publisher :
ISBN 13 :
Total Pages : 84 pages
Book Rating : 4.:/5 (13 download)
Download or read book An Instrumentation Design for the Automated Calibration of Clinical Blood Pressure Transducers written by Jonas Talandis and published by . This book was released on 1983 with total page 84 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : A. Nayyar
Publisher : IOS Press
ISBN 13 : 1643683519
Total Pages : 278 pages
Book Rating : 4.6/5 (436 download)
Download or read book Proceedings of the 2022 International Conference on Smart Manufacturing and Material Processing (SMMP2022) written by A. Nayyar and published by IOS Press. This book was released on 2022-11-29 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart manufacturing is a broad category of manufacturing that employs computer-integration, high levels of adaptability and rapid design changes, together with digital information technology and a technically-trained workforce. This book presents the proceedings of SMMP2022, the 2022 International Conference on Smart Manufacturing and Material Processing, held on 12 and 13 August 2022 as a virtual event due to continuing restrictions related to the COVID-19 pandemic, and hosted from Shanghai, China. The conference provides a platform for researchers and scientists from smart manufacturing and material sciences to come together with researchers from various other application areas to discuss problems and solutions, identify new issues, and shape future directions for research. The conference received 60 submissions. These were submitted to a rigorous peer review process by a committee of experts from various disciplines, after which, 23 were accepted for presentation at the conference and publication here. The topics covered include materials processing and product manufacture, sensors and smart material systems, functional materials, industrial automation and process control, and discussion of the state-of-the-art and future direction of smart manufacturing and material sciences. Providing an overview of current developments in smart manufacturing and material processing, the book will be of interest to all those working in the field.
Author : Richard Shell
Publisher : CRC Press
ISBN 13 : 9780203908587
Total Pages : 912 pages
Book Rating : 4.9/5 (85 download)
Download or read book Handbook Of Industrial Automation written by Richard Shell and published by CRC Press. This book was released on 2000-08-29 with total page 912 pages. Available in PDF, EPUB and Kindle. Book excerpt: Supplies the most essential concepts and methods necessary to capitalize on the innovations of industrial automation, including mathematical fundamentals, ergonometrics, industrial robotics, government safety regulations, and economic analyses.
Author : Minhang Bao
Publisher : Elsevier
ISBN 13 : 008045562X
Total Pages : 327 pages
Book Rating : 4.0/5 (84 download)
Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
