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Experimental Study Of Flow And Heat Transfer In A Rotating Chemical Vapor Deposition Reactor
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Book Synopsis Experimental Study of Flow and Heat Transfer in a Rotating Chemical Vapor Deposition Reactor by : Sun Wong
Download or read book Experimental Study of Flow and Heat Transfer in a Rotating Chemical Vapor Deposition Reactor written by Sun Wong and published by . This book was released on 2015 with total page 54 pages. Available in PDF, EPUB and Kindle. Book excerpt: An experimental model was set up to study the rotating vertical impinging chemical vapor deposition reactor. Deposition occurs only when the system has enough thermal energy. Therefore, understanding the fluid characteristic and heat transfer of the system will provide a good basis to understand the full model. Growth rate and the uniformity of the film are the two most important factors in CVD process and it is depended on the flow and thermal characteristic within the system. Optimizing the operating parameters will result in better growth rate and uniformity. Operating parameters such as inflow velocity, inflow diameter and rotational speed are used to create different design simulations. Fluid velocities and various temperatures are recorded to see the effects of the different operating parameters. Velocities are recorded by using flow meter and hot wire anemometer. Temperatures are recorded by using various thermocouples and infrared thermometer. The result should provide a quantitative basis for the prediction, design and optimization of the system and process for design and fabrication of future CVD reactors. Further assessment of the system results will be discuss in detail such as effects of buoyancy and effects of rotation. The experimental study also coupled with a numerical study for further validation of both model. Comparisons between the two models are also presented.
Book Synopsis Flow Structure and Heat Transfer in an Impinging Jet CVD Reactor by : Nasir Memon
Download or read book Flow Structure and Heat Transfer in an Impinging Jet CVD Reactor written by Nasir Memon and published by . This book was released on 2009 with total page 67 pages. Available in PDF, EPUB and Kindle. Book excerpt: A detailed experimental study is undertaken to investigate the flow structure and heat transfer in an impinging jet Chemical Vapor Deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform deposition across the substrate. Free convection can negatively affect the gas flow as cold inlet gas impinges on the heated substrate, leading to vortices and disturbances in the normal flow path. This experimental research will be used to understand the buoyancy-induced and momentum-driven flow structure encountered in an impinging jet CVD reactor. Investigations are conducted for various operational parameters such as substrate temperature and inlet velocity. In addition, different reactor geometries with varying inlet length and height between the substrate and inlet are included in the study. Experimental results obtained from the study provide information on the temperature distribution, heat transfer rates, and flow field. Such results validate the operation of the reactor at atmospheric pressure and provide valuable insight into future design of impinging jet CVD reactors.
Author :Shih, Ping-Ho Samuel Publisher :Ann Arbor, Mich. : University Microfilms International ISBN 13 : Total Pages :530 pages Book Rating :4.:/5 (188 download)
Book Synopsis A Numerical and Experimental Investigation of the Fluid Dynamics and Heat Transfer in a Barrel-type Chemical Vapor Deposition (CVD) Reactor [microform] by : Shih, Ping-Ho Samuel
Download or read book A Numerical and Experimental Investigation of the Fluid Dynamics and Heat Transfer in a Barrel-type Chemical Vapor Deposition (CVD) Reactor [microform] written by Shih, Ping-Ho Samuel and published by Ann Arbor, Mich. : University Microfilms International. This book was released on 1988 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis The Influence of Convective Heat Transfer on Flow Stability in Rotating Disk Chemical Vapor Deposition Reactors by :
Download or read book The Influence of Convective Heat Transfer on Flow Stability in Rotating Disk Chemical Vapor Deposition Reactors written by and published by . This book was released on 1997 with total page 39 pages. Available in PDF, EPUB and Kindle. Book excerpt: Flow and heat transfer of NH3 and He were studied in a rotating disk system with applications to chemical vapor deposition reactors. Flow field and disk heat flux were obtained over a range of operating conditions. Comparisons of disk convective heat transfer were made to infinite rotating disk results to appraise uniformity of transport to the disk. Important operating variables include disk spin rate, disk and enclosure temperatures, flow rate, composition, pressure, and gas mixture temperature at the reactor inlet. These variables were studied over ranges of the spin Reynolds number, Re[omega]; disk mixed convection parameter, MCP{sub w}; and wall mixed convection parameter, MCP{sub w}. Results obtained for NH3 show that increasing Re[omega] from 314.5 to 3145 increases the uniformity of rotating disk heat flux and results in thinner thermal boundary layers at the disk surface. At Re[omega]=314.5, increasing MCP{sub d} to 15 leads to significant departure from the infinite disk result with nonuniform disk heat fluxes and recirculating flow patterns; flow becomes increasingly complex at larger values of MCP{sub d}. At Re[omega] of 3145, results are closer to the infinite disk for MCP{sub d} up to 15. For large negative (hot walls) and positive (cold walls) values of MCP{sub w}, flow recirculates and there is significant deviation from the infinite disk result; nonuniformities occur at both values of Re[omega]. The influence of MCP{sub w} on flow stability is increased at larger MCP{sub d} and lower Re[omega]. To determine the influence of viscosity and thermal conductivity variation with temperature, calculations were made with He and NH3; He transport property variation is low relative to NH3. Results show that the flow of NH3 is less stable than that of He as MCP{sub d} is increased for MCP{sub w}=0 and Re[omega]=314.5. 16 refs., 15 figs., 1 tab.
Book Synopsis Studies of Heat Transfer and Flow in the Modified Chemical Vapor Deposition Including Effects of Chemistry by : Sooyun Joh
Download or read book Studies of Heat Transfer and Flow in the Modified Chemical Vapor Deposition Including Effects of Chemistry written by Sooyun Joh and published by . This book was released on 1993 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis The Influence of Convective Heat Transfer on Flow Stability in Rotating Disk Chemical Vapor Deposition Reactors by : William S. Winters
Download or read book The Influence of Convective Heat Transfer on Flow Stability in Rotating Disk Chemical Vapor Deposition Reactors written by William S. Winters and published by . This book was released on 1997 with total page 46 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Flow and Heat Transfer in External Chemical Vapor Deposition Including the Effects of Chemistry by : Cheng-Kuan Wu
Download or read book Flow and Heat Transfer in External Chemical Vapor Deposition Including the Effects of Chemistry written by Cheng-Kuan Wu and published by . This book was released on 1997 with total page 322 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Studies of Flow, Heat Transfer and Particle Deposition During Chemical Vapor Deposition by : Yur-Tsai Lin
Download or read book Studies of Flow, Heat Transfer and Particle Deposition During Chemical Vapor Deposition written by Yur-Tsai Lin and published by . This book was released on 1991 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis A Numerical Investigation of the Axial Flow and Heat Transfer in a Barrel-type Chemical Vapor Deposition (CVD) Reactor by : P. Shih
Download or read book A Numerical Investigation of the Axial Flow and Heat Transfer in a Barrel-type Chemical Vapor Deposition (CVD) Reactor written by P. Shih and published by . This book was released on 1988 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Studies of Heat and Mass Transfer During Chemical Vapor Deposition by : Mansoo Choi
Download or read book Studies of Heat and Mass Transfer During Chemical Vapor Deposition written by Mansoo Choi and published by . This book was released on 1987 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1994 with total page 1032 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiannual, with semiannual and annual indexes. References to all scientific and technical literature coming from DOE, its laboratories, energy centers, and contractors. Includes all works deriving from DOE, other related government-sponsored information, and foreign nonnuclear information. Arranged under 39 categories, e.g., Biomedical sciences, basic studies; Biomedical sciences, applied studies; Health and safety; and Fusion energy. Entry gives bibliographical information and abstract. Corporate, author, subject, report number indexes.
Book Synopsis Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies by : Y. Pauleau
Download or read book Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Book Synopsis A Study of Transport Phenomena in External Chemical Vapor Deposition Processes by : Hsin-Chuan Tsai
Download or read book A Study of Transport Phenomena in External Chemical Vapor Deposition Processes written by Hsin-Chuan Tsai and published by . This book was released on 1994 with total page 484 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Transport Phenomena in Food Processing, First International Conference Proceedings by : Selcuk Guceri
Download or read book Transport Phenomena in Food Processing, First International Conference Proceedings written by Selcuk Guceri and published by CRC Press. This book was released on 1992-11-30 with total page 1618 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Applied Mechanics Reviews written by and published by . This book was released on 1982 with total page 916 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Vertical-Cavity Surface-Emitting Lasers by : Carl W. Wilmsen
Download or read book Vertical-Cavity Surface-Emitting Lasers written by Carl W. Wilmsen and published by Cambridge University Press. This book was released on 2001-11-12 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, first published in 1999, provides a comprehensive description of the physics, design, fabrication, characterization, and applications of vertical-cavity surface-emitting lasers.
Book Synopsis A Study of Fluid Flow, Heat Transfer and Particle Deposition in Chemical Vapor Deposition Processes by : Shao-Luen Chou
Download or read book A Study of Fluid Flow, Heat Transfer and Particle Deposition in Chemical Vapor Deposition Processes written by Shao-Luen Chou and published by . This book was released on 1999 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt:
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