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Experimental Development Of Microwave Cavity Plasma Reactors For Large Area And High Rate Diamond Film Deposition
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Book Synopsis Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition by : Jie Zhang
Download or read book Experimental Development of Microwave Cavity Plasma Reactors for Large Area and High Rate Diamond Film Deposition written by Jie Zhang and published by . This book was released on 1993 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Diamond Films Handbook by : Jes Asmussen
Download or read book Diamond Films Handbook written by Jes Asmussen and published by CRC Press. This book was released on 2002-01-23 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Diamond Films Handbook is an important source of information for readers involved in the new diamond film technology, emphasizing synthesis technologies and diamond film applications. Containing over 1600 references, drawings, photographs, micrographs, equations, and tables, and contributions by experts from both industry and academia, it includes specific chapters that address film characterization methods and the physics and chemistry of film synthesis. Other topics include deposition chemistry, various techniques for diamond synthesis, diamond heat spreaders, thermal management diamond active electronic devices, and diamond film optics.
Book Synopsis Mechanical Reconstruction of an Industrial 915MHz Microwave Cavity Plasma Reactor System for Chemical Vapor Deposition Diamond Processes by : Jörg Fricke
Download or read book Mechanical Reconstruction of an Industrial 915MHz Microwave Cavity Plasma Reactor System for Chemical Vapor Deposition Diamond Processes written by Jörg Fricke and published by diplom.de. This book was released on 2004-01-08 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: Inhaltsangabe:Zusammenfassung: Synthetische Diamanten sind in Industrie und Wissenschaft sehr attraktiv, schaffen sie doch den Kompromiss zwischen einzigartigen Materialeigenschaften und geringen Anschaffungskosten. Mit der Verfeinerung von geeigneten CVD-Methoden und der intensiven Entwicklung von Reaktoren und Anlagen konnten die Herstellungskosten weiter gesenkt und vor allem enorme Fortschritte bei den möglichen Anwendungen und Abmessungen erzielt werden. Diese Diplomarbeit beschäftigt sich mit dem Wiederaufbau und der Integration einer unbekannten industriellen 915MHz MCPR-Anlage (microwave cavity plasma reactor), für die Herstellung von CVD-Diamanten. Dabei wird umfangreich über den Stand der Technik bei relevanten CVD-Reaktoren, Anwendungsmöglichkeiten, Synthese und Materialeigenschaften von synthetischen Diamanten eingegangen. Weiterhin wird der Aufbau und die Wirkungsweise der MCPR-Reaktoranlage beschrieben. Neben der Analyse der Ausgangsbedingungen wird auf die Umsetzung der Teilprobleme wie den Wiederaufbau des Mikrowellensystems, Vakuumanlage, Prozessgassystem und das Wasserkühlsystem eingegangen, wobei spezifische Probleme (Design, Funktion, Fehler, notwendige Änderungen) analysiert und Lösungen besprochen werden. Dabei werden Dimensionierungen von Kühlleistungen, Gasbedarfe (Prozessgase) und Einstellungen bei unbekannten Systemeigenschaften beschrieben. Weiterhin werden Dimensionierung und Auswahl von einem Kühlaggregat und Gaskühlströmen, die Konstruktion und Dimensionierung einer Hebevorrichtung und Kammergrößenskala und adäquate Systemparameterwahl erläutert, wobei auf jeweilige (un-) bekannte Randbedingungen eingegangen werden. Mit der Entscheidung von geeigneten Methoden (Helium-Leck-Test, Mikrowellenstrahlung u.a.) wurden die Teilsysteme auf Funktion und Sicherheit überprüft. Mit geeigneten Berechnungen konnten notwendige Reinheiten im Vakuumbereich (Leckratenbeurteilung, Prozessgaswechsel) erwiesen werden. Abschließend werden Funktionstests und Auswirkungen auf den gewählten Aufbau der Anlage beschrieben und Ausblicke für weitere Modifikationen und Verbesserungen gemacht. Die Arbeit zeigt mit 29 Abbildungen, 10 Tabellen und 24 Anlagen (Skizzen, Tabellen, u.a.) unterschiedliche Problemlösungen beim Wiederaufbau der Reaktoranlage. Inhaltsverzeichnis:Table of Contents: Assignment (Aufgabenstellung)ii Bibliographical Delineation (Bibliographische Beschreibung und Referat)iii Declaration [...]
Book Synopsis Microwave Plasma-assisted CVD Polycrystalline Diamond Films Deposition at Higher Pressure Conditions by : Stanley Shengxi Zuo
Download or read book Microwave Plasma-assisted CVD Polycrystalline Diamond Films Deposition at Higher Pressure Conditions written by Stanley Shengxi Zuo and published by . This book was released on 2009 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microwave Plasma Assisted Chemical Vapor Deposition of Ultra-nanocrystalline Diamond Films by : Wen-Shin Huang
Download or read book Microwave Plasma Assisted Chemical Vapor Deposition of Ultra-nanocrystalline Diamond Films written by Wen-Shin Huang and published by . This book was released on 2004 with total page 798 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Modeling the Electromagnetic Field and the Plasma Excitation in a Moderate Pressure Microwave Cavity Plasma Source by : Wen-yi Tan
Download or read book Modeling the Electromagnetic Field and the Plasma Excitation in a Moderate Pressure Microwave Cavity Plasma Source written by Wen-yi Tan and published by . This book was released on 1994 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Synthesis of Thin and Thick Ultra-nanocrystalline Diamond Films by Microwave Plasma CVD Systems by : Dzung Tri Tran
Download or read book Synthesis of Thin and Thick Ultra-nanocrystalline Diamond Films by Microwave Plasma CVD Systems written by Dzung Tri Tran and published by . This book was released on 2005 with total page 314 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microwaves in Chemistry Applications by : Aparna Das
Download or read book Microwaves in Chemistry Applications written by Aparna Das and published by Elsevier. This book was released on 2021-05-09 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microwaves in Chemistry Applications: Fundamentals, Methods and Future Trends offers a number of benefits over conventional heating technologies, including acceleration of reaction rates, milder reaction conditions, higher chemical yields, lower energy usage and different reaction selectivity, all of which can improve the sustainability of processes. The book provides valuable insights into the underlying chemistry at play in microwave-assisted processes, introducing fundamental concepts, discussing the modeling of reactions in such processes, and also highlighting a range of key methods and applications of microwaves in chemistry for improved sustainability. Beginning with an introduction to microwave chemistry, Part One discusses foundational principles, equipment and approaches for modeling reactions and assessing the outputs of those models. Methods in microwave chemistry are then the focus of Part Two, with microwave-assisted synthesis, catalysis, reduction and reactions all explored in detail. Part Three reflects on the practical usage of these methods to address specific issues, covering a number of interesting applications. - Provides guidance on the modeling and interpretation of microwave effects - Discusses microwave chemistry in the context of green chemistry principles - Outlines a range of important microwave methods, including microwave-assisted synthesis, catalysis, reactions and reductions
Book Synopsis Temperature and Concentration of Ionic and Neutral Species in Resonant Microwave Cavity Plasma Discharges by : Gregory Louis King
Download or read book Temperature and Concentration of Ionic and Neutral Species in Resonant Microwave Cavity Plasma Discharges written by Gregory Louis King and published by . This book was released on 1994 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Chemical Vapor Deposition by : Jong-Hee Park
Download or read book Chemical Vapor Deposition written by Jong-Hee Park and published by ASM International. This book was released on 2001 with total page 477 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Proceedings of the Second International Symposium on Diamond Materials by : A. J. Purdes
Download or read book Proceedings of the Second International Symposium on Diamond Materials written by A. J. Purdes and published by . This book was released on 1991 with total page 698 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Investigation of Microwave Cavity Applicators for Plasma Assisted CVD Diamond Synthesis and Plasma Assisted Combustion by : Kadek Wardika Hemawan
Download or read book Investigation of Microwave Cavity Applicators for Plasma Assisted CVD Diamond Synthesis and Plasma Assisted Combustion written by Kadek Wardika Hemawan and published by . This book was released on 2010 with total page 710 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Low-temperature Deposition of Transparent Diamond Films with a Microwave Cavity Plasma Reactor by : Michael J. Ulczynski
Download or read book Low-temperature Deposition of Transparent Diamond Films with a Microwave Cavity Plasma Reactor written by Michael J. Ulczynski and published by . This book was released on 1998 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Dissertation Abstracts International by :
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2004 with total page 768 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis American Doctoral Dissertations by :
Download or read book American Doctoral Dissertations written by and published by . This book was released on 1992 with total page 796 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis High Density Plasma Sources by : Oleg A. Popov
Download or read book High Density Plasma Sources written by Oleg A. Popov and published by Elsevier. This book was released on 1996-12-31 with total page 467 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
