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Exhaust Systems In Semiconductor Manufacturing
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Book Synopsis Semiconductor Industry by : J. Michael Sherer
Download or read book Semiconductor Industry written by J. Michael Sherer and published by CRC Press. This book was released on 2018-10-03 with total page 214 pages. Available in PDF, EPUB and Kindle. Book excerpt: Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.
Book Synopsis Exhaust Systems in Semiconductor Manufacturing by : Charles Nehme
Download or read book Exhaust Systems in Semiconductor Manufacturing written by Charles Nehme and published by Independently Published. This book was released on 2024-06-19 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the dynamic world of semiconductor manufacturing, where precision meets innovation, the role of exhaust systems is often overlooked but crucial. These systems play a vital role in ensuring the safety of workers, protecting the environment, and maintaining the integrity of semiconductor production processes. From managing toxic gases in reactive ion etching to controlling fumes in general ventilation, each type of exhaust system is tailored to mitigate specific risks and optimize operational efficiency. This preface sets the stage for exploring the intricate network of exhaust systems within semiconductor plants. It delves into their functions, components, and significance, highlighting how these systems uphold stringent standards of safety, environmental stewardship, and operational excellence. By understanding their pivotal role, semiconductor professionals can appreciate the meticulous planning and engineering that underpin these critical infrastructure components.
Book Synopsis HVAC for Semiconductor FAB & Exhaust Management by : Charles Nehme
Download or read book HVAC for Semiconductor FAB & Exhaust Management written by Charles Nehme and published by Charles Nehme. This book was released on 2021-05-12 with total page 30 pages. Available in PDF, EPUB and Kindle. Book excerpt: HVAC stands for (Heating, Ventilation & Air Conditioning) This book is about HVAC applications of Semiconductor Plants & How they require large amounts of exhaust due to all the chemicals used in manufacturing silicon wafers. I will simplify this book as much as possible to be understood by non HVAC literate professionals or beginners in the HVAC industry. Charles Nehme is an HVAC Consultant with 30 years of international expertise and has accomplished and implemented many projects on different applications. keywords: hvac semiconductor hvac systems for semiconductor clean rooms Cleanroom semiconductor manufacturing semiconductor clean room standards semiconductor fabrication facility
Book Synopsis Semiconductor Industrial Hygiene Handbook by : David G. Baldwin
Download or read book Semiconductor Industrial Hygiene Handbook written by David G. Baldwin and published by William Andrew. This book was released on 1995-12-31 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
Book Synopsis Handbook of Semiconductor Manufacturing Technology by : Yoshio Nishi
Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2017-12-19 with total page 1720 pages. Available in PDF, EPUB and Kindle. Book excerpt: Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Book Synopsis Code Compliance for Advanced Technology Facilities by : William R. Acorn
Download or read book Code Compliance for Advanced Technology Facilities written by William R. Acorn and published by William Andrew. This book was released on 1994-12-31 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Facilities which utilize hazardous liquids and gases represent a significant potential liability to the owner, operator, and general public in terms of personnel safety and preservation of assets. It is obvious that a catastrophic incident or loss of property or personnel is to be avoided at all costs. This book was conceived to give the reader a guide to understanding the requirements of the various codes and regulations that apply to the design, construction, and operation of facilities utilizing hazardous materials in their processes.
Book Synopsis Semiconductor Exhaust Ventilation Guidebook by : D. J. Burton
Download or read book Semiconductor Exhaust Ventilation Guidebook written by D. J. Burton and published by . This book was released on 1995-06-01 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Digital Transformation for Improved Industry and Supply Chain Performance by : Khan, Muhammad Rahies
Download or read book Digital Transformation for Improved Industry and Supply Chain Performance written by Khan, Muhammad Rahies and published by IGI Global. This book was released on 2024-05-01 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the rapidly evolving landscape of Industry 4.0, integrating digital technologies into supply chain management (SCM) presents opportunities and challenges. While Industry 4.0 promises increased efficiency, productivity, and competitiveness, its impact on sustainability within SCM remains a pressing concern. Existing literature often needs to look more into the holistic integration of Industry 4.0 technologies with sustainable practices in SCM, leaving a critical gap in understanding and implementation. This gap not only inhibits the realization of sustainable performance but also hinders firms from aligning with global sustainability agendas such as the United Nations Sustainable Development Goals (UNSDG) 2030. Digital Transformation for Improved Industry and Supply Chain Performance offers a comprehensive solution by examining the integration of Industry 4.0 technology and SCM sustainability. It addresses the urgent need for firms to undergo digital transformation to achieve sustainable performance. It provides insights into how Industry 4.0 technologies can be strategically leveraged to promote sustainability in SCM operations. Through in-depth analysis of critical topics such as cybersecurity, resilience, circular economy practices, and ethical considerations, this book equips readers with the knowledge and tools necessary to navigate the complexities of Industry 4.0-enabled SCM sustainability.
Download or read book CleanRooms written by and published by . This book was released on 2008-02 with total page 68 pages. Available in PDF, EPUB and Kindle. Book excerpt: A central resource of technology and methods for environments where the control of contamination is critical.
Book Synopsis Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry by : OECD
Download or read book Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry written by OECD and published by OECD Publishing. This book was released on 2015-04-03 with total page 80 pages. Available in PDF, EPUB and Kindle. Book excerpt: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.
Book Synopsis Semiconductor Manufacturing Handbook by : Hwaiyu Geng
Download or read book Semiconductor Manufacturing Handbook written by Hwaiyu Geng and published by McGraw Hill Professional. This book was released on 2005-05-18 with total page 915 pages. Available in PDF, EPUB and Kindle. Book excerpt: WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems
Download or read book CleanRooms written by and published by . This book was released on 2007-04 with total page 48 pages. Available in PDF, EPUB and Kindle. Book excerpt: A central resource of technology and methods for environments where the control of contamination is critical.
Book Synopsis Official Gazette of the United States Patent and Trademark Office by : United States. Patent and Trademark Office
Download or read book Official Gazette of the United States Patent and Trademark Office written by United States. Patent and Trademark Office and published by . This book was released on 2002 with total page 1370 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries by : Laura Mendicino
Download or read book Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries written by Laura Mendicino and published by The Electrochemical Society. This book was released on 2001 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Handbook of Integrated Circuit Industry by : Yangyuan Wang
Download or read book Handbook of Integrated Circuit Industry written by Yangyuan Wang and published by Springer Nature. This book was released on 2023-12-29 with total page 2006 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by hundreds experts who have made contributions to both enterprise and academics research, these excellent reference books provide all necessary knowledge of the whole industrial chain of integrated circuits, and cover topics related to the technology evolution trends, fabrication, applications, new materials, equipment, economy, investment, and industrial developments of integrated circuits. Especially, the coverage is broad in scope and deep enough for all kind of readers being interested in integrated circuit industry. Remarkable data collection, update marketing evaluation, enough working knowledge of integrated circuit fabrication, clear and accessible category of integrated circuit products, and good equipment insight explanation, etc. can make general readers build up a clear overview about the whole integrated circuit industry. This encyclopedia is designed as a reference book for scientists and engineers actively involved in integrated circuit research and development field. In addition, this book provides enough guide lines and knowledges to benefit enterprisers being interested in integrated circuit industry.
Author :California. Division of Occupational Safety and Health. Task Force on the Electronics Industry Publisher : ISBN 13 : Total Pages :368 pages Book Rating :4.F/5 ( download)
Book Synopsis Semiconductor Industry Study by : California. Division of Occupational Safety and Health. Task Force on the Electronics Industry
Download or read book Semiconductor Industry Study written by California. Division of Occupational Safety and Health. Task Force on the Electronics Industry and published by . This book was released on 1981 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :Electrochemical Society. Dielectric Science and Technology Division Publisher :The Electrochemical Society ISBN 13 :9781566772723 Total Pages :244 pages Book Rating :4.7/5 (727 download)
Book Synopsis Environmental Issues in the Electronics and Semiconductor Industries by : Electrochemical Society. Dielectric Science and Technology Division
Download or read book Environmental Issues in the Electronics and Semiconductor Industries written by Electrochemical Society. Dielectric Science and Technology Division and published by The Electrochemical Society. This book was released on 2000 with total page 244 pages. Available in PDF, EPUB and Kindle. Book excerpt:
