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Excimer Laser Micromachining Of Mems Materials
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Book Synopsis Excimer Laser Micromachining of MEMS Materials by : Kewei Liu
Download or read book Excimer Laser Micromachining of MEMS Materials written by Kewei Liu and published by . This book was released on 2013 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Conventional photolithography-based microfabrication techniques are limited to two-dimensional fabrication and only particular materials can be used. Excimer laser micromachining enables to overcome those limitations and facilitates three-dimensional micromanufacturing with a variety of materials. The objective of this research is to present a comprehensive characterization study which provides guidelines to the efforts to identify optimal process parameters for excimer laser micromachining of micro-electro-mechanical systems (MEMS) materials. By using 248 nm KrF excimer laser and 193 nm ArF excimer laser with five representative MEMS materials (Si, soda-lime glass, SU-8 photoresist, poly-dimethysiloxane (PDMS) and polyimide), relations between laser parameters (fluence, frequency and number of laser pulses) and etch rates in vertical and lateral directions, aspect ratio of laser machined trenches and surface quality were investigated. Etch rate per shot was proportional to laser fluence but inversely proportional to number of laser pulses. Laser frequency did not show a notable impact on etch rates. Aspect ratio was also proportional to laser fluence and number of laser pulses but is not affected by laser frequency. Physical deformation in laser machined sites was investigated using SEM imaging. This qualitative study demonstrated that either laser frequency or laser fluence or sometimes their combined effect is the dominant factor in terms of ablation surface quality while the dominant factor varies from material to material under different wavelengths. Energy dispersive x-ray spectroscopy (EDXS) was utilized to analyze material surface before and after laser ablation. It was found that for all five materials oxygen amount increased while the amounts of other elements decreased after laser ablation. The mechanisms behind the process-feature relations are discussed based on the experimental data. This comprehensive characterization study provides guidelines to identify optimized laser ablation parameters for desired microscale structures on MEMS materials. In order to demonstrate the three-dimensional microfabrication capability of KrF and ArF excimer laser, two novel implantable biomedical microscale devices made of SU-8 and PDMS were successfully fabricated using the optimized KrF excimer laser ablation parameters obtained in the current study as well as cutting and local removal of insulation for a novel floating braided neural probe made of polyimide and nichrome using the optimized ArF excimer laser ablation parameters.
Book Synopsis Micromachining Techniques for Fabrication of Micro and Nano Structures by : Mojtaba Kahrizi
Download or read book Micromachining Techniques for Fabrication of Micro and Nano Structures written by Mojtaba Kahrizi and published by BoD – Books on Demand. This book was released on 2012-02-03 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
Book Synopsis Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology by : Bijoy Bhattacharyya
Download or read book Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology written by Bijoy Bhattacharyya and published by William Andrew. This book was released on 2015-04-10 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)
Book Synopsis Excimer Laser Micromachining of Inorganic Materials by : Philip Henry Key
Download or read book Excimer Laser Micromachining of Inorganic Materials written by Philip Henry Key and published by . This book was released on 1989 with total page 313 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microengineering, MEMS, and Interfacing by : Danny Banks
Download or read book Microengineering, MEMS, and Interfacing written by Danny Banks and published by CRC Press. This book was released on 2006-03-23 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering
Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi
Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Author :Cornelius T. Leondes Publisher :Springer Science & Business Media ISBN 13 :0387257861 Total Pages :2142 pages Book Rating :4.3/5 (872 download)
Download or read book Mems/Nems written by Cornelius T. Leondes and published by Springer Science & Business Media. This book was released on 2007-10-08 with total page 2142 pages. Available in PDF, EPUB and Kindle. Book excerpt: This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Download or read book MEMS Cost Analysis written by Ron Lawes and published by CRC Press. This book was released on 2016-04-19 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume demonstrates show cost analysis can be adapted to MEMS, taking into account the wide range of processes and equipment, the major differences with the established semiconductor industry, and the presence of both large-scale, product-orientated manufacturers and small- and medium-scale foundries. The content examines the processes and equ
Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Book Synopsis Fundamentals of Laser Micromachining by : Ronald Schaeffer
Download or read book Fundamentals of Laser Micromachining written by Ronald Schaeffer and published by Taylor & Francis. This book was released on 2016-04-19 with total page 249 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical etching, in manufacturing a wide variety of products, from medical implants, gyroscopes, and drug delivery catheters to aircraft engines, printed circuit boards, and fuel cells. Fundamentals
Book Synopsis Micromachining of Engineering Materials by : J.A. McGeough
Download or read book Micromachining of Engineering Materials written by J.A. McGeough and published by CRC Press. This book was released on 2001-11-29 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining of Engineering Materials outlines advances in material removal that have led to micromachining, discusses procedures for precise measurement, includes molecular-level theories, describes vapo
Book Synopsis Electro-Micromachining and Microfabrication by : Sandip Kunar
Download or read book Electro-Micromachining and Microfabrication written by Sandip Kunar and published by CRC Press. This book was released on 2024-04-09 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bridging the gap between the need for micro elements and the profitable microfabrication of goods, this new book provides an informative overview of the electro-micromachining and microfabrication processes, varieties, and important applications. Opening with an overview of a variety of micromachining technologies, with an emphasis on nontraditional approaches and recent advances in each, the volume discusses the ultrasonic micromachining processes for producing a variety of micro-shapes, such as micro-holes, micro-slots, and micro-walls, as well as assisted hybrid micromachining with ultrasonic vibration of the tool or workpiece, all which help to improve precision and to advance research. Computer-aided design and computer-aided manufacturing dental micromachining technologies are discussed. Micro-electrical discharge machining, laser micro grooving, and laser micromachining are among the advanced micro-manufacturing processes addressed as well. The volume also covers the use of an electrochemical micromachining method to improve micro texturing and the use of nano-additives to enhance MQL and micromachining process optimization.
Book Synopsis MEMS and Nanotechnology for Gas Sensors by : Sunipa Roy
Download or read book MEMS and Nanotechnology for Gas Sensors written by Sunipa Roy and published by CRC Press. This book was released on 2017-12-19 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.
Book Synopsis Tribology Issues and Opportunities in MEMS by : Bharat Bhushan
Download or read book Tribology Issues and Opportunities in MEMS written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.
Book Synopsis Micromachining and Microfabrication Process Technology by :
Download or read book Micromachining and Microfabrication Process Technology written by and published by . This book was released on 2005 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Micro and Nano Machining of Engineering Materials by : Kaushik Kumar
Download or read book Micro and Nano Machining of Engineering Materials written by Kaushik Kumar and published by Springer. This book was released on 2018-09-26 with total page 150 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the recent developments in the production of micro and nano size products, which cater to the needs of the industry. The processes to produce the miniature sized products with unique characteristics are addressed. Moreover, their application in areas such as micro-engines, micro-heat exchangers, micro-pumps, micro-channels, printing heads and medical implants are also highlighted. The book presents such microsystem-based products as important contributors to a sustainable economy. The recent research in this book focuses on the development of new micro and nano manufacturing platforms while integrating the different technologies to manufacture the micro and nano components in a high throughput and cost effective manner. The chapters contain original theoretical and applied research in the areas of micro- and nano-manufacturing that are related to process innovation, accuracy, and precision, throughput enhancement, material utilization, compact equipment development, environmental and life-cycle analysis, and predictive modeling of manufacturing processes with feature sizes less than one hundred micrometers.
Author :Karen W. Markus Publisher :SPIE-International Society for Optical Engineering ISBN 13 : Total Pages :352 pages Book Rating :4.:/5 (318 download)
Book Synopsis Micromachining and Microfabrication Process Technology by : Karen W. Markus
Download or read book Micromachining and Microfabrication Process Technology written by Karen W. Markus and published by SPIE-International Society for Optical Engineering. This book was released on 1995 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt:
