Enhanced Reactive Magnetron Sputtering Of Aluminum Nitride

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Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications

Author : Filipe Vaz
Publisher : Bentham Science Publishers
ISBN 13 : 1608051560
Total Pages : 363 pages
Book Rating : 4.6/5 (8 download)

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Book Synopsis Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications by : Filipe Vaz

Download or read book Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications written by Filipe Vaz and published by Bentham Science Publishers. This book was released on 2013-06-21 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: Oxynitride thin film technology is rapidly impacting a broad spectrum of applications, ranging from decorative functions (through optoelectronics) to corrosion resistance. Developing a better understanding of the relationships between deposition processes, structure and composition of the deposited films is critical to the continued evolution of these applications. This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes. Its contents are spread in twelve main and concise chapters through which the book thoroughly reviews the bases of oxynitride thin film technology and deposition processes, sputtering processes and the resulting behaviors of these oxynitride thin films. More importantly, the solutions for the growth of oxynitride technology are given in detail with an emphasis on some particular compounds. This is a valuable resource for academic learners studying materials science and industrial coaters, who are concerned not only about fundamental aspects of oxynitride synthesis, but also by their innate material characteristics.

Physics of Semiconductor Devices

Author : K. N. Bhat
Publisher : Alpha Science Int'l Ltd.
ISBN 13 : 9788173195679
Total Pages : 1310 pages
Book Rating : 4.1/5 (956 download)

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Book Synopsis Physics of Semiconductor Devices by : K. N. Bhat

Download or read book Physics of Semiconductor Devices written by K. N. Bhat and published by Alpha Science Int'l Ltd.. This book was released on 2004 with total page 1310 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contributed papers of the workshop held at IIT, Madras, in 2003.

Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications

Author : Meckbach, Johannes Maximilian
Publisher : KIT Scientific Publishing
ISBN 13 : 3731501228
Total Pages : 204 pages
Book Rating : 4.7/5 (315 download)

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Book Synopsis Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications by : Meckbach, Johannes Maximilian

Download or read book Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications written by Meckbach, Johannes Maximilian and published by KIT Scientific Publishing. This book was released on 2013-12-24 with total page 204 pages. Available in PDF, EPUB and Kindle. Book excerpt: Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-μm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.

Physics Briefs

Author :
Publisher :
ISBN 13 :
Total Pages : 934 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Physics Briefs by :

Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 934 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Emerging Ferroelectric Materials and Devices

Author :
Publisher : Elsevier
ISBN 13 : 0443193916
Total Pages : 186 pages
Book Rating : 4.4/5 (431 download)

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Book Synopsis Emerging Ferroelectric Materials and Devices by :

Download or read book Emerging Ferroelectric Materials and Devices written by and published by Elsevier. This book was released on 2023-11-27 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors and Semimetals series, highlights new advances in the field, with this new volume presenting interesting chapters. Each chapter is written by an international board of authors. - 2019 marks the year that nitride ferroelectrics were reported, and the indicators and mechanisms used for oxide ferroelectricity appear inadequate - The emergence of nitride ferroelectrics has opened new frontiers in ferroelectric materials research and ferroelectric based technologies. This book is a direct consequence of this - Draws upon the collective knowledge and expertise of leading scientists and researchers in this field to provide a holistic view on the state of ferroelectric nitride research and applications

Low Energy Ion Beam and Plasma Modification of Materials: Volume 223

Author : James M. E. Harper
Publisher :
ISBN 13 :
Total Pages : 424 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Low Energy Ion Beam and Plasma Modification of Materials: Volume 223 by : James M. E. Harper

Download or read book Low Energy Ion Beam and Plasma Modification of Materials: Volume 223 written by James M. E. Harper and published by . This book was released on 1991-08-16 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presentations from the Symposium on Low Energy Ion Beam and Plasma Modification of Materials held at the Spring 1991 Materials Research Society Conference.

Current Research in Pulsed Laser Deposition

Author : Liviu Duta
Publisher : MDPI
ISBN 13 : 3036510443
Total Pages : 224 pages
Book Rating : 4.0/5 (365 download)

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Book Synopsis Current Research in Pulsed Laser Deposition by : Liviu Duta

Download or read book Current Research in Pulsed Laser Deposition written by Liviu Duta and published by MDPI. This book was released on 2021-08-30 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: Despite its limitation in terms of surface covered area, the PLD technique still gathers interest among researchers by offering endless possibilities for tuning thin film composition and enhancing their properties of interest due to: (i) the easiness of a stoichiometric transfer even for very complex target materials, (ii) high adherence of the deposited structures to the substrate, (iii) controlled degree of phase, crystallinity, and thickness of deposited coatings, (iv) versatility of the experimental set-up which allows for simultaneous ablation of multiple targets resulting in combinatorial maps or consecutive ablation of multiple targets producing multi-layered structures, and (v) adjustment of the number of laser pulses, resulting in either a spread of nanoparticles, islands of materials or a complete covering of a surface. Moreover, a variation of PLD, known as Matrix Assisted Pulsed Laser Evaporation, allows for deposition of organic materials, ranging from polymers to proteins and even living cells, otherwise difficult to transfer unaltered in the form of thin films by other techniques. Furthermore, the use of laser light as transfer agent ensures purity of films and pulse-to-pulse deposition allows for an unprecedented control of film thickness at the nm level. This Special Issue is a collection of state-of-the art research papers and reviews in which the topics of interest are devoted to thin film synthesis by PLD and MAPLE, for numerous research and industry field applications, such as bio-active coatings for medical implants and hard, protective coatings for cutting and drilling tools withstanding high friction and elevated temperatures, sensors, solar cells, lithography, magnetic devices, energy-storage and conversion devices, controlled drug delivery and in situ microstructuring for boosting of surface properties.

High Power Impulse Magnetron Sputtering

Author : Daniel Lundin
Publisher : Elsevier
ISBN 13 : 0128124547
Total Pages : 398 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis High Power Impulse Magnetron Sputtering by : Daniel Lundin

Download or read book High Power Impulse Magnetron Sputtering written by Daniel Lundin and published by Elsevier. This book was released on 2019-08-30 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution.

Piezoelectricity, Acoustic Waves and Device Applications

Author : Weiqiu Chen
Publisher : World Scientific
ISBN 13 : 981277016X
Total Pages : 400 pages
Book Rating : 4.8/5 (127 download)

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Book Synopsis Piezoelectricity, Acoustic Waves and Device Applications by : Weiqiu Chen

Download or read book Piezoelectricity, Acoustic Waves and Device Applications written by Weiqiu Chen and published by World Scientific. This book was released on 2007 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.

Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium

Author : Ji Wang
Publisher : World Scientific
ISBN 13 : 9814474851
Total Pages : 400 pages
Book Rating : 4.8/5 (144 download)

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Book Synopsis Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium by : Ji Wang

Download or read book Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium written by Ji Wang and published by World Scientific. This book was released on 2007-09-27 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.

High Power Impulse Magnetron Sputtering

Author : Daniel Lundin
Publisher : Elsevier
ISBN 13 : 0128124555
Total Pages : 400 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis High Power Impulse Magnetron Sputtering by : Daniel Lundin

Download or read book High Power Impulse Magnetron Sputtering written by Daniel Lundin and published by Elsevier. This book was released on 2019-08-28 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution. - Includes a comprehensive description of the HiPIMS process from fundamental physics to applications - Provides a distinctive link between the process plasma and thin film communities - Discusses the industrialization of HiPIMS and its real world applications

MEMS Technology for Biomedical Imaging Applications

Author : Qifa Zhou
Publisher : MDPI
ISBN 13 : 303921604X
Total Pages : 218 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis MEMS Technology for Biomedical Imaging Applications by : Qifa Zhou

Download or read book MEMS Technology for Biomedical Imaging Applications written by Qifa Zhou and published by MDPI. This book was released on 2019-10-23 with total page 218 pages. Available in PDF, EPUB and Kindle. Book excerpt: Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community.

Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure

Download Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure PDF Online Free

Author : Simon Fichtner
Publisher : BoD – Books on Demand
ISBN 13 : 3750431426
Total Pages : 180 pages
Book Rating : 4.7/5 (54 download)

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Book Synopsis Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure by : Simon Fichtner

Download or read book Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure written by Simon Fichtner and published by BoD – Books on Demand. This book was released on 2020-02-18 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (MEMS) as well as of microelectronics in general. Since the device performance thus becomes directly connected to the properties of the functional film, new as well as improved piezoelectric and ferroelectric materials can allow substantial technological innovation. This dissertation focused on enhancing the piezoelectric properties of AlN by forming solid solutions with ScN and includes the first experimental observation of ferroelectricity in AlScN, and thus the first discovery of ferroelectricity in a III-V semiconductor based material in general. Compared to AlN, piezoelectric coefficients that are up to 450% higher were realized in AlScN, with d33f reaching a maximum of 17.2 pm/V and e31f reaching 3.2 C/m2. In this context, the identification and subsequent rectification of a major morphological instability in AlScN that becomes more pronounced with increasing Sc content was reported. Thus, films free of morphological inhomogeneities with close to ideal piezoelectric properties could be deposited up to 0.43% ScN. Control of the intrinsic film stress was demonstrated over a wide range from strongly tensile to strongly compressive for all the investigated Sc contents. The improved piezoelectric coefficients together with the possibility of stress control allowed the fabrication of suspended MEMS structures with electromechanical coupling coefficients improved by more than 320% relative to AlN. Ferroelectrictiy in AlScN was observed starting at ScN contents of 27%. Its emergence was connected to the same gradual evolution from the initial wurtzite structure to the layered hexagonal structure that also causes the enhanced piezoelectric coefficients while increasing the Sc content. Ferroelectric AlScN allowed the first experimental observation of the spontaneous polarization of the wurtzite structure and confirms that this polarization is more than one order of magnitude above most previous theoretical predictions. The large, tunable coercive fields and polarization constants together with the broad linear strain intervals, a paraelectric transition temperature above 600°C as well as the technological compatibility of the III-nitrides lead to a combination of exceptional properties that was previously inaccessible in ferroelectric thin films.

Thin Films

Author : Dongfang Yang
Publisher : BoD – Books on Demand
ISBN 13 : 1803564555
Total Pages : 224 pages
Book Rating : 4.8/5 (35 download)

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Book Synopsis Thin Films by : Dongfang Yang

Download or read book Thin Films written by Dongfang Yang and published by BoD – Books on Demand. This book was released on 2023-03-29 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. Thin films have been employed in many applications to provide surfaces that possess specific optical, electronic, chemical, mechanical and thermal properties. Through ten chapters consisting of original research studies and literature reviews written by experts from the international scientific community, this book covers the deposition and application of thin films.

Spectroscopic Ellipsometry

Author : Hiroyuki Fujiwara
Publisher : John Wiley & Sons
ISBN 13 : 9780470060186
Total Pages : 388 pages
Book Rating : 4.0/5 (61 download)

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Book Synopsis Spectroscopic Ellipsometry by : Hiroyuki Fujiwara

Download or read book Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and published by John Wiley & Sons. This book was released on 2007-09-27 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Friction, Wear and Wear Protection

Author : Alfons Fischer
Publisher : John Wiley & Sons
ISBN 13 : 3527628525
Total Pages : 784 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Friction, Wear and Wear Protection by : Alfons Fischer

Download or read book Friction, Wear and Wear Protection written by Alfons Fischer and published by John Wiley & Sons. This book was released on 2011-02-10 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings collect invited and contributed papers from more than 150 scientists and engineers worldwide which provide an up-to-date overview of the current research on friction and wear, including new systematic approaches as well as innovative technical solutions.

Research Methodologies for Beginners

Author : Kitsakorn Locharoenrat
Publisher : CRC Press
ISBN 13 : 1315340895
Total Pages : 226 pages
Book Rating : 4.3/5 (153 download)

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Book Synopsis Research Methodologies for Beginners by : Kitsakorn Locharoenrat

Download or read book Research Methodologies for Beginners written by Kitsakorn Locharoenrat and published by CRC Press. This book was released on 2017-03-31 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook introduces the general points of view of research methodology in the scientific and engineering fields of studies and presents an overview of the technical and professional communication needed for article publication in journals. It comprises several practice exercises that will give beginners the confidence to move on the communicative activities. Every chapter provides problem sets that will help readers check their understanding of each concept. The book will also help readers formulate specific research topics, research questions, and hypotheses; conduct literature reviews relevant to the research topics; develop applicable research methodologies; and write and present their research outlining the key elements of the proposed projects. It is very useful for students and researchers opting for a course on research methodology and for seminars at undergraduate and graduate levels.