Electron And Ion Optics

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Electron and Ion Optics

Author : Miklos Szilagyi
Publisher : Springer Science & Business Media
ISBN 13 : 1461309239
Total Pages : 550 pages
Book Rating : 4.4/5 (613 download)

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Book Synopsis Electron and Ion Optics by : Miklos Szilagyi

Download or read book Electron and Ion Optics written by Miklos Szilagyi and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.

Introduction to Electron and Ion Optics

Author : Poul Dahl
Publisher : Elsevier
ISBN 13 : 0323160905
Total Pages : 156 pages
Book Rating : 4.3/5 (231 download)

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Book Synopsis Introduction to Electron and Ion Optics by : Poul Dahl

Download or read book Introduction to Electron and Ion Optics written by Poul Dahl and published by Elsevier. This book was released on 2012-12-02 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction to Electron and Ion Optics provides the theoretical background needed to understand the subject matter and even be helpful in laboratory works. Seven major parts comprise the book where each focuses on a certain aspect or field. The book begins with an introduction to the general principles about electron and ion optics, specifically as basis for the design of the optical components used in particle analyzers and accelerators. The following parts tackle different aspects such as geometrical optics; scaling rules and dispersion coefficients; fields (paraxial, sector, fringing, quadrupole); lenses (electrostatic, immersion, unipotential, etc.); analyzers (electrostatic, spherical, etc.); and space charge and beam production. Towards the last part of the book, there is an exercises section where various problems are given for the reader to answer. This book caters to students specifically in the field of physics.

Principles of Electron Optics

Author : Peter W. Hawkes
Publisher : Academic Press
ISBN 13 : 0080984169
Total Pages : 755 pages
Book Rating : 4.0/5 (89 download)

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Book Synopsis Principles of Electron Optics by : Peter W. Hawkes

Download or read book Principles of Electron Optics written by Peter W. Hawkes and published by Academic Press. This book was released on 2012-12-02 with total page 755 pages. Available in PDF, EPUB and Kindle. Book excerpt: The three volumes in the PRINCIPLES OF ELECTRON OPTICS Series constitute the first comprehensive treatment of electron optics in over forty years. While Volumes 1 and 2 are devoted to geometrical optics, Volume 3 is concerned with wave optics and effects due to wave length. Subjects covered include:Derivation of the laws of electron propagation from SchrUdinger's equationImage formation and the notion of resolutionThe interaction between specimens and electronsImage processingElectron holography and interferenceCoherence, brightness, and the spectral functionTogether, these works comprise a unique and informative treatment of the subject. Volume 3, like its predecessors, will provide readers with both a textbook and an invaluable reference source.

Aberration Theory in Electron and Ion Optics

Author : Peter W. Hawkes
Publisher : Elsevier
ISBN 13 : 0443193215
Total Pages : 376 pages
Book Rating : 4.4/5 (431 download)

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Book Synopsis Aberration Theory in Electron and Ion Optics by : Peter W. Hawkes

Download or read book Aberration Theory in Electron and Ion Optics written by Peter W. Hawkes and published by Elsevier. This book was released on 2023-06-02 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Imaging and Electron Physics, Volume 227 in the Advances in Imaging and Electron Physics series, merges two long-running serials, Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. The series features articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science, digital image processing, electromagnetic wave propagation, electron microscopy and the computing methods used in all these domains. - Provides the authority and expertise of leading contributors from an international board of authors - Presents the latest release in the Advances in Imaging and Electron Physics series

Applied Charged Particle Optics

Author : Helmut Liebl
Publisher : Springer Science & Business Media
ISBN 13 : 3540719253
Total Pages : 131 pages
Book Rating : 4.5/5 (47 download)

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Book Synopsis Applied Charged Particle Optics by : Helmut Liebl

Download or read book Applied Charged Particle Optics written by Helmut Liebl and published by Springer Science & Business Media. This book was released on 2008-01-12 with total page 131 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a pioneer in the field, this overview of charged particle optics provides a solid introduction to the subject area for all physicists wishing to design their own apparatus or better understand the instruments with which they work. It begins by introducing electrostatic lenses and fields used for acceleration, focusing and deflection of ions or electrons. Subsequent chapters give detailed descriptions of electrostatic deflection elements, uniform and non-uniform magnetic sector fields, image aberrations, and, finally, fringe field confinement.

Focusing of Charged Particles V2

Author : Albert Septier
Publisher : Elsevier
ISBN 13 : 0323148468
Total Pages : 487 pages
Book Rating : 4.3/5 (231 download)

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Book Synopsis Focusing of Charged Particles V2 by : Albert Septier

Download or read book Focusing of Charged Particles V2 written by Albert Septier and published by Elsevier. This book was released on 2012-12-02 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing of Charged Particles, Volume II presents the aspects of particle optics, including the electron, the ion optical domains, and the accelerator field. This book provides a detailed analysis of the principles of the laws of propagation of beams. Comprised of three parts encompassing three chapters, this volume starts with an overview of how a beam of charged particles traverses a region that is at a uniform, constant, electrostatic potential. This book then discusses the principle of charge repulsion effect by which the space charge of the beam modifies the potential in the region that it traverses. Other chapters examine the general design techniques and performances obtainable for electron guns applicable for use in initiating a beam for linear beam tubes that is given in a condensed form. The last chapter deals with the two stable charged particles that can be accelerated, namely, protons and electrons. This book is a valuable resource to physicists, accelerator experts, and experimenters in search of interactions in the detector target.

Aberration Theory in Electron and Ion Optics

Author : Jiye Ximen
Publisher :
ISBN 13 : 9780120145799
Total Pages : 462 pages
Book Rating : 4.1/5 (457 download)

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Book Synopsis Aberration Theory in Electron and Ion Optics by : Jiye Ximen

Download or read book Aberration Theory in Electron and Ion Optics written by Jiye Ximen and published by . This book was released on 1986 with total page 462 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Charged Particle Optics

Author : Jon Orloff
Publisher : CRC Press
ISBN 13 : 1351835777
Total Pages : 938 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Handbook of Charged Particle Optics by : Jon Orloff

Download or read book Handbook of Charged Particle Optics written by Jon Orloff and published by CRC Press. This book was released on 2017-12-19 with total page 938 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.

High Resolution Focused Ion Beams: FIB and its Applications

Author : Jon Orloff
Publisher : Springer Science & Business Media
ISBN 13 : 1461507650
Total Pages : 304 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis High Resolution Focused Ion Beams: FIB and its Applications by : Jon Orloff

Download or read book High Resolution Focused Ion Beams: FIB and its Applications written by Jon Orloff and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.

Geometrical Charged-Particle Optics

Author : Harald H. Rose
Publisher : Springer Science & Business Media
ISBN 13 : 3540859152
Total Pages : 422 pages
Book Rating : 4.5/5 (48 download)

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Book Synopsis Geometrical Charged-Particle Optics by : Harald H. Rose

Download or read book Geometrical Charged-Particle Optics written by Harald H. Rose and published by Springer Science & Business Media. This book was released on 2009 with total page 422 pages. Available in PDF, EPUB and Kindle. Book excerpt: This resource covering all theoretical aspects of modern geometrical charged-particle optics is aimed at anyone involved in the design of electron optical instruments and beam-guiding systems for charged particles.

Scanning Electron Microscope Optics and Spectrometers

Author : Anjam Khursheed
Publisher : World Scientific
ISBN 13 : 9812836675
Total Pages : 417 pages
Book Rating : 4.8/5 (128 download)

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Book Synopsis Scanning Electron Microscope Optics and Spectrometers by : Anjam Khursheed

Download or read book Scanning Electron Microscope Optics and Spectrometers written by Anjam Khursheed and published by World Scientific. This book was released on 2011 with total page 417 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.

Optics of Charged Particles

Author : Hermann Wollnik
Publisher : Academic Press
ISBN 13 : 012821466X
Total Pages : 319 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis Optics of Charged Particles by : Hermann Wollnik

Download or read book Optics of Charged Particles written by Hermann Wollnik and published by Academic Press. This book was released on 2021-10-23 with total page 319 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optics of Charged Particles, 2nd edition, describes how charged particles move in the fields of magnetic and electrostatic dipoles, quadrupoles, higher order multipoles, and field-free regions. Since the first edition, published over 30 years ago, new technologies have emerged and have been used for new ion optical instruments like, for instance, time-of-flight mass analyzers, which are described now. Fully updated and revised, this new edition provides ways to design mass separators, spectrographs, and spectrometers, which are the key tools in organic chemistry and for drug developments, in environmental trace analyses and for investigations in nuclear physics like the search for super heavy elements as well as molecules in space science. The book discusses individual particle trajectories as well as particle beams in space and in phase-space, and it provides guidelines for the design of particle optical instruments. For experienced researchers, working in the field, it highlights the latest developments in new ion optical instruments and provides guidelines and examples for the design of new instruments for the transport of beams of charged particles and the mass/charge or energy/charge analyses of ions. Furthermore, it provides background knowledge required to accurately understand and analyze results, when developing ion-optical instruments. By providing a comprehensive overview of the field of charged particle optics, this edition of the book supports all those working, directly or indirectly, with charged-particle research or the development of ion- and electron-analyzing instruments. Provides enhanced, clear descriptions, and derivations making complex aspects of the general motion of charged particles understandable as well as features of charged particle analyzing instruments Assists the reader in applying insights obtained from the principles of charged particle optics to the design of new transporting and mass- or energy-analyzing instruments for ions Discusses new applications and newly occurring issues, which have arisen since the first edition

Fundamentals of Electric Propulsion

Author : Dan M. Goebel
Publisher : John Wiley & Sons
ISBN 13 : 0470436263
Total Pages : 528 pages
Book Rating : 4.4/5 (74 download)

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Book Synopsis Fundamentals of Electric Propulsion by : Dan M. Goebel

Download or read book Fundamentals of Electric Propulsion written by Dan M. Goebel and published by John Wiley & Sons. This book was released on 2008-12-22 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Throughout most of the twentieth century, electric propulsion was considered the technology of the future. Now, the future has arrived. This important new book explains the fundamentals of electric propulsion for spacecraft and describes in detail the physics and characteristics of the two major electric thrusters in use today, ion and Hall thrusters. The authors provide an introduction to plasma physics in order to allow readers to understand the models and derivations used in determining electric thruster performance. They then go on to present detailed explanations of: Thruster principles Ion thruster plasma generators and accelerator grids Hollow cathodes Hall thrusters Ion and Hall thruster plumes Flight ion and Hall thrusters Based largely on research and development performed at the Jet Propulsion Laboratory (JPL) and complemented with scores of tables, figures, homework problems, and references, Fundamentals of Electric Propulsion: Ion and Hall Thrusters is an indispensable textbook for advanced undergraduate and graduate students who are preparing to enter the aerospace industry. It also serves as an equally valuable resource for professional engineers already at work in the field.

An Assessment of U.S.-Based Electron-Ion Collider Science

Author : National Academies of Sciences, Engineering, and Medicine
Publisher : National Academies Press
ISBN 13 : 0309478561
Total Pages : 153 pages
Book Rating : 4.3/5 (94 download)

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Book Synopsis An Assessment of U.S.-Based Electron-Ion Collider Science by : National Academies of Sciences, Engineering, and Medicine

Download or read book An Assessment of U.S.-Based Electron-Ion Collider Science written by National Academies of Sciences, Engineering, and Medicine and published by National Academies Press. This book was released on 2018-10-13 with total page 153 pages. Available in PDF, EPUB and Kindle. Book excerpt: Understanding of protons and neutrons, or "nucleons"â€"the building blocks of atomic nucleiâ€"has advanced dramatically, both theoretically and experimentally, in the past half century. A central goal of modern nuclear physics is to understand the structure of the proton and neutron directly from the dynamics of their quarks and gluons governed by the theory of their interactions, quantum chromodynamics (QCD), and how nuclear interactions between protons and neutrons emerge from these dynamics. With deeper understanding of the quark-gluon structure of matter, scientists are poised to reach a deeper picture of these building blocks, and atomic nuclei themselves, as collective many-body systems with new emergent behavior. The development of a U.S. domestic electron-ion collider (EIC) facility has the potential to answer questions that are central to completing an understanding of atoms and integral to the agenda of nuclear physics today. This study assesses the merits and significance of the science that could be addressed by an EIC, and its importance to nuclear physics in particular and to the physical sciences in general. It evaluates the significance of the science that would be enabled by the construction of an EIC, its benefits to U.S. leadership in nuclear physics, and the benefits to other fields of science of a U.S.-based EIC.

Principles of Lithography

Author : Harry J. Levinson
Publisher : SPIE Press
ISBN 13 : 9780819456601
Total Pages : 446 pages
Book Rating : 4.4/5 (566 download)

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Book Synopsis Principles of Lithography by : Harry J. Levinson

Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

Collisions of Electrons with Atoms and Molecules

Author : G.F. Drukarev
Publisher : Springer Science & Business Media
ISBN 13 : 1461317797
Total Pages : 252 pages
Book Rating : 4.4/5 (613 download)

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Book Synopsis Collisions of Electrons with Atoms and Molecules by : G.F. Drukarev

Download or read book Collisions of Electrons with Atoms and Molecules written by G.F. Drukarev and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a short outline of the present state of the theory of electron collisions with atomic particles - atoms, molecules and ions. It is addressed to those who by nature of their work need detailed information about the cross sections of various processes of electron collisions with atomic particles: experimentalists working in plasma physics, optics, quantum electronics, atmospheric and space physics, 'etc. Some of the cross sections have been measured. But in many important cases the only source of information is theoretical calcu lation. The numerous theoretical papers dealing with electronic collision processes contain various approximations. The inter relation between them and the level of their accuracy is often diffi cult to understand without a systematic study of the theory of atomic collisions, not to mention that theoretical considerations are necessary for the consistent interpretation of experimental results. The main constituents of the book are: 1. General theory with special emphasis on the topics most impor tant for understanding and discussing electron collisions with atomic particles.

Chemistry and Lithography

Author : Uzodinma Okoroanyanwu
Publisher : SPIE Press
ISBN 13 : 9781118030028
Total Pages : 0 pages
Book Rating : 4.0/5 (3 download)

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Book Synopsis Chemistry and Lithography by : Uzodinma Okoroanyanwu

Download or read book Chemistry and Lithography written by Uzodinma Okoroanyanwu and published by SPIE Press. This book was released on 2011-03-08 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemistry and Lithography provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a wide readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time, from the very first recorded reflections on the nature of matter to the latest developments at the frontiers of lithography science and technology. Part I presents several important chemical and physical principles involved in the invention and evolution of lithography. Part II covers the processes for the synthesis, manufacture, usage, and handling of lithographic chemicals and materials. Part III investigates several important chemical and physical principles involved in the practice of lithography. Chemistry and Lithography is a useful reference for anyone working in the semiconductor industry.