Optical Diagnostics for Thin Film Processing

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Publisher : Elsevier
ISBN 13 : 0080538088
Total Pages : 815 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Optical Diagnostics for Thin Film Processing by : Irving P. Herman

Download or read book Optical Diagnostics for Thin Film Processing written by Irving P. Herman and published by Elsevier. This book was released on 1996-10-23 with total page 815 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. - The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing - Useful as an introduction to the subject or as a resource handbook - Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing - Examples emphasize applications in microelectronics and optoelectronics - Introductory chapter serves as a guide to all optical diagnostics and their applications - Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic

Scattering, Two-Volume Set

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Publisher : Elsevier
ISBN 13 : 0080540732
Total Pages : 1831 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Scattering, Two-Volume Set by : E. R. Pike

Download or read book Scattering, Two-Volume Set written by E. R. Pike and published by Elsevier. This book was released on 2001-10-09 with total page 1831 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scattering is the collision of two objects that results in a change of trajectory and energy. For example, in particle physics, such as electrons, photons, or neutrons are "scattered off" of a target specimen, resulting in a different energy and direction. In the field of electromagnetism, scattering is the random diffusion of electromagnetic radiation from air masses is an aid in the long-range sending of radio signals over geographic obstacles such as mountains. This type of scattering, applied to the field of acoustics, is the spreading of sound in many directions due to irregularities in the transmission medium. Volume I of Scattering will be devoted to basic theoretical ideas, approximation methods, numerical techniques and mathematical modeling. Volume II will be concerned with basic experimental techniques, technological practices, and comparisons with relevant theoretical work including seismology, medical applications, meteorological phenomena and astronomy. This reference will be used by researchers and graduate students in physics, applied physics, biophysics, chemical physics, medical physics, acoustics, geosciences, optics, mathematics, and engineering. This is the first encyclopedic-range work on the topic of scattering theory in quantum mechanics, elastodynamics, acoustics, and electromagnetics. It serves as a comprehensive interdisciplinary presentation of scattering and inverse scattering theory and applications in a wide range of scientific fields, with an emphasis, and details, up-to-date developments. Scattering also places an emphasis on the problems that are still in active current research. The first interdisciplinary reference source on scattering to gather all world expertise in this technique Covers the major aspects of scattering in a common language, helping to widening the knowledge of researchers across disciplines The list of editors, associate editors and contributors reads like an international Who's Who in the interdisciplinary field of scattering

Optical Thin Films and Structures

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Author :
Publisher : MDPI
ISBN 13 : 3036508929
Total Pages : 128 pages
Book Rating : 4.0/5 (365 download)

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Book Synopsis Optical Thin Films and Structures by : Tsvetanka Babeva

Download or read book Optical Thin Films and Structures written by Tsvetanka Babeva and published by MDPI. This book was released on 2021-06-22 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book is devoted to the design, application and characterization of thin films and structures, with special emphasis on optical applications. It comprises ten papers—five featured and five regular—authored by scientists all over the world. Diverse materials are studied and their possible applications are demonstrated and discussed—transparent conductive coatings and structures from ZnO doped with Al and Ga and Ti-doped SnO2, polymers and nanosized zeolite thin films for optical sensing, TiO2 with linear and nonlinear optical properties, organic diamagnetic materials, broadband optical coatings, CrWN glass molding coatings, and silicon on insulator waveguides.

Understanding Surface and Thin Film Science

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Publisher : CRC Press
ISBN 13 : 1482233061
Total Pages : 373 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Understanding Surface and Thin Film Science by : Thomas M. Christensen

Download or read book Understanding Surface and Thin Film Science written by Thomas M. Christensen and published by CRC Press. This book was released on 2022-12-08 with total page 373 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a conceptual overview of surface and thin film science, providing a basic and straightforward understanding of the most common ideas and methods used in these fields. Fundamental scientific ideas, deposition methods, and characterization methods are all examined. Relying on simple, conceptual models and figures, fundamental scientific ideas are introduced and then applied to surfaces and thin films in the first half of the book. Topics include vacuum and plasma environments, crystal structure, atomic motion, thermodynamics, electrical and magnetic properties, optical and thermal properties, and adsorbed atoms on surfaces. Common methods of gas-phase thin film deposition are then introduced, starting with an overview of the film growth process and then a discussion of both physical and chemical vapor deposition methods. This is followed by an overview of a wide range of characterization techniques including imaging, structural, chemical, electrical, magnetic, optical, thermal, and mechanical techniques. Thin film science is a natural extension of surface science, especially as applications involve thinner and thinner films; distinct from other literature in the field, this book combines the two topics in a single volume. Simple, conceptual models and figures are used, supported by some mathematical expressions, to convey key ideas to students as well as practicing engineers, scientists, and technicians.

Mechanical Properties of Structural Films

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Author :
Publisher : ASTM International
ISBN 13 : 0803128894
Total Pages : 333 pages
Book Rating : 4.8/5 (31 download)

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Book Synopsis Mechanical Properties of Structural Films by : Christopher L. Muhlstein

Download or read book Mechanical Properties of Structural Films written by Christopher L. Muhlstein and published by ASTM International. This book was released on 2001 with total page 333 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent advances in the mechanical properties of structural films are described in these papers from a November 2000 symposium held in Orlando, Florida. Papers are organized in sections on fracture and fatigue of structural films, elastic behavior and residual stress in thin films, tensile testing of

Ultrasonic and Electromagnetic NDE for Structure and Material Characterization

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Author :
Publisher : CRC Press
ISBN 13 : 1466570474
Total Pages : 890 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Ultrasonic and Electromagnetic NDE for Structure and Material Characterization by : Tribikram Kundu

Download or read book Ultrasonic and Electromagnetic NDE for Structure and Material Characterization written by Tribikram Kundu and published by CRC Press. This book was released on 2016-04-19 with total page 890 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most books on nondestructive evaluation (NDE) focus either on the theoretical background or on advanced applications. Bridging the gap between the two, Ultrasonic and Electromagnetic NDE for Structure and Material Characterization: Engineering and Biomedical Applications brings together the principles, equations, and applications of ultrasonic and

Handbook of Thin Films

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Author :
Publisher : Elsevier
ISBN 13 : 0080533248
Total Pages : 3436 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Handbook of Thin Films by : Hari Singh Nalwa

Download or read book Handbook of Thin Films written by Hari Singh Nalwa and published by Elsevier. This book was released on 2001-11-17 with total page 3436 pages. Available in PDF, EPUB and Kindle. Book excerpt: This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures.Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices.Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Thin Films

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Publisher :
ISBN 13 :
Total Pages : 936 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Thin Films by : Materials Research Society

Download or read book Thin Films written by Materials Research Society and published by . This book was released on 1995 with total page 936 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Functional Polymer Films, 2 Volume Set

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Publisher : John Wiley & Sons
ISBN 13 : 3527638490
Total Pages : 1107 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Functional Polymer Films, 2 Volume Set by : Wolfgang Knoll

Download or read book Functional Polymer Films, 2 Volume Set written by Wolfgang Knoll and published by John Wiley & Sons. This book was released on 2013-02-12 with total page 1107 pages. Available in PDF, EPUB and Kindle. Book excerpt: Very thin film materials have emerged as a highly interesting and useful quasi 2D-state functionality. They have given rise to numerous applications ranging from protective and smart coatings to electronics, sensors and display technology as well as serving biological, analytical and medical purposes. The tailoring of polymer film properties and functions has become a major research field. As opposed to the traditional treatise on polymer and resin-based coatings, this one-stop reference is the first to give readers a comprehensive view of the latest macromolecular and supramolecular film-based nanotechnology. Bringing together all the important facets and state-of-the-art research, the two well-structured volumes cover film assembly and depostion, functionality and patterning, and analysis and characterization. The result is an in-depth understanding of the phenomena, ordering, scale effects, fabrication, and analysis of polymer ultrathin films. This book will be a valuable addition for Materials Scientists, Polymer Chemists, Surface Scientists, Bioengineers, Coatings Specialists, Chemical Engineers, and Scientists working in this important research field and industry.

Sputtering Materials for VLSI and Thin Film Devices

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Author :
Publisher : William Andrew
ISBN 13 : 0815519877
Total Pages : 614 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Sputtering Materials for VLSI and Thin Film Devices by : Jaydeep Sarkar

Download or read book Sputtering Materials for VLSI and Thin Film Devices written by Jaydeep Sarkar and published by William Andrew. This book was released on 2010-12-13 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . - Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements - Practical information on technology trends, role of sputtering and major OEMs - Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. - Practical case-studies on target performance and troubleshooting - Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry

Ultrasonic Nondestructive Evaluation

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Publisher : CRC Press
ISBN 13 : 9780203501962
Total Pages : 848 pages
Book Rating : 4.5/5 (19 download)

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Book Synopsis Ultrasonic Nondestructive Evaluation by : Tribikram Kundu

Download or read book Ultrasonic Nondestructive Evaluation written by Tribikram Kundu and published by CRC Press. This book was released on 2003-12-29 with total page 848 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most books on ultrasonic nondestructive evaluation (NDE) focus either on its theoretical background or on advanced applications. Furthermore, information on the most current applications, such as guided wave techniques and acoustic microscopy, is scattered throughout various conference proceedings and journals. No one book has integrated these aspe

Magnetic Ultra Thin Films, Multilayers and Surfaces

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Publisher : Elsevier
ISBN 13 : 9780444205032
Total Pages : 560 pages
Book Rating : 4.2/5 (5 download)

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Book Synopsis Magnetic Ultra Thin Films, Multilayers and Surfaces by : F. Petroff

Download or read book Magnetic Ultra Thin Films, Multilayers and Surfaces written by F. Petroff and published by Elsevier. This book was released on 1997-12-18 with total page 560 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Symposium on Magnetic Ultrathin Films, Multilayers and Surfaces, hosted by the European Materials Research Society, was held at the Palais de la Musique et des Congré in Strasbourg, France on June 4-7, 1996. Its central theme was the relationship of magnetic properties and device performance to structure at the nano and micrometer length scale. Research on the magnetism of surfaces, ultrathin films and multilayers has increased dramatically during recent years. This development was triggered by the discovery of coupling between ferromagnetic layers across nonmagnetic spacer layers and of the giant magnetoresistance effect in systems of reduced dimension using various micro and nanofabrication techniques has become a subject of special interest. It is certainly the promising application potential of these effects in new magnetic recording device geometries which causes this intensive research, which is done both by companies and at universities and research institutes. A selection of invited and contributed papers presented at the Symposium and accepted for publication is contained in this volume. The contents of these proceedings are organized into seven sections. A. Nanowires, Nanoparticles, Nanostructuring B. Ultrathin Films and Surfaces, Characterization C. Giant Magnetoresistance D. Coupling, Tunneling E. Growth, Structure, Magnetism F. Growth, Structure, Magnetoresistance G. Coupling, Magnetic processes, Magneto-optics. The first four sections contain invited and oral contributed papers in the listed research domains, while the last three sections contain the contributions presented during three large poster sessions.

Optical Characterization of Thin Solid Films

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Author :
Publisher : Springer
ISBN 13 : 3319753258
Total Pages : 474 pages
Book Rating : 4.3/5 (197 download)

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Book Synopsis Optical Characterization of Thin Solid Films by : Olaf Stenzel

Download or read book Optical Characterization of Thin Solid Films written by Olaf Stenzel and published by Springer. This book was released on 2018-03-09 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an up-to-date survey of the major optical characterization techniques for thin solid films. Emphasis is placed on practicability of the various approaches. Relevant fundamentals are briefly reviewed before demonstrating the application of these techniques to practically relevant research and development topics. The book is written by international top experts, all of whom are involved in industrial research and development projects.

Light Scattering Reviews 4

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Publisher : Springer Science & Business Media
ISBN 13 : 354074276X
Total Pages : 516 pages
Book Rating : 4.5/5 (47 download)

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Book Synopsis Light Scattering Reviews 4 by : Alexander A. Kokhanovsky

Download or read book Light Scattering Reviews 4 written by Alexander A. Kokhanovsky and published by Springer Science & Business Media. This book was released on 2009-07-25 with total page 516 pages. Available in PDF, EPUB and Kindle. Book excerpt: This fourth volume of Light Scattering Reviews is composed of three parts. The ?rstpartisconcernedwiththeoreticalandexperimentalstudiesofsinglelightsc- tering by small nonspherical particles. Light scattering by small particles such as, for instance, droplets in the terrestrial clouds is a well understood area of physical optics. On the other hand, exact theoretical calculations of light scattering p- terns for most of nonspherical and irregularly shaped particles can be performed only for the restricted values of the size parameter, which is proportional to the ratio of the characteristic size of the particle to the wavelength?. For the large nonspherical particles, approximations are used (e. g. , ray optics). The exact th- retical techniques such as the T-matrix method cannot be used for extremely large particles, such as those in ice clouds, because then the size parameter in the v- iblex=2?a/???,wherea is the characteristic size (radius for spheres), and the associated numerical codes become unstable and produce wrong answers. Yet another problem is due to the fact that particles in many turbid media (e. g. , dust clouds) cannot be characterized by a single shape. Often, refractive indices also vary. Because of problems with theoretical calculations, experimental (i. e. , la- ratory) investigations are important for the characterization and understanding of the optical properties of such types of particles. The ?rst paper in this volume, written by B. Gustafson, is aimed at the descr- tionofscaledanalogueexperimentsinelectromagneticscattering.

Liquid Crystals

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Publisher : CRC Press
ISBN 13 : 1482275287
Total Pages : 1300 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Liquid Crystals by : Patrick Oswald

Download or read book Liquid Crystals written by Patrick Oswald and published by CRC Press. This book was released on 2018-10-03 with total page 1300 pages. Available in PDF, EPUB and Kindle. Book excerpt: These volumes are a result of the personal research and graduate lectures given by the authors at the ecole Normale Superieure de Lyon and the University of Paris VII, respectively. Featuring an easy-to-follow, accessible style, each volume describes important concepts and physical properties using classroom-friendly experiments, many of which the

Thin Films

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Publisher :
ISBN 13 :
Total Pages : 934 pages
Book Rating : 4.X/5 (3 download)

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Book Synopsis Thin Films by :

Download or read book Thin Films written by and published by . This book was released on 1994 with total page 934 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nanostructured Thin Films and Coatings

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Publisher : CRC Press
ISBN 13 : 1420094033
Total Pages : 552 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Nanostructured Thin Films and Coatings by : Sam Zhang

Download or read book Nanostructured Thin Films and Coatings written by Sam Zhang and published by CRC Press. This book was released on 2010-06-18 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films an