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Effects Of Process Parameters On Micro Feature Topography In Femtosecond Laser Micromachining Of Silicon
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Book Synopsis Effects of Process Parameters on Micro Feature Topography in Femtosecond Laser Micromachining of Silicon by : Gaurav Keswani
Download or read book Effects of Process Parameters on Micro Feature Topography in Femtosecond Laser Micromachining of Silicon written by Gaurav Keswani and published by . This book was released on 2004 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Experimental Characterization of Femtosecond Laser Micromachining for Silicon Mold Fabrication and Hot Embossing for Polymer Microreplication by : Sunil Ranganath Belligundu
Download or read book Experimental Characterization of Femtosecond Laser Micromachining for Silicon Mold Fabrication and Hot Embossing for Polymer Microreplication written by Sunil Ranganath Belligundu and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Hot embossing is a fabrication technique employed for replicating microfeatures on a polymer surface that was primarily developed to fabricate MEMS devices for microfluidic applications. This manuscript deals with characterization of the femtosecond laser micromachining (FLM) and hot embossing (HEMM) processes for master mold fabrication on silicon and polymer replication respectively. Given the required size of the features to be fabricated or replicated, process parameters for FLM can be determined using the derived empirical equations, process parameters for the HEMM process can be established using the characteristic plots. A novel two-stage embossing process is developed and introduced that employs polymer molds during the second stage. Validation experiments along with results focusing on mold quality with respect to the embossing cycles of the secondary polymer mold and the embossing quality of the substrate as compared to the primary silicon mold have been presented. Micromachining of a biodegradable polymer, PLLA, with potential drug delivery applications have been performed using hot embossing and laser micromachining. The comparison of flow rate of PLLA into the mold during single and two stage embossing has been studied. Threshold fluence values of different number of pulses for PLLA during femtosecond laser micromachining have been determined. Finally, process parameters for thermal bonding using the HEMM system of two PMMA substrates are established along with their effects on feature quality after bonding.
Book Synopsis Feasible Laser Parameters in Fabrication of MEMS Structures on Silicon by : Chee Ping Yong
Download or read book Feasible Laser Parameters in Fabrication of MEMS Structures on Silicon written by Chee Ping Yong and published by . This book was released on 2010 with total page 42 pages. Available in PDF, EPUB and Kindle. Book excerpt: The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by using laser micromachining and the effects of parameters of laser micromachining on silicon.STATISTICA is used to design and analyze the experiments. Two experimental sets: (1) laser processing with assist gas and (2)laser processing without assist gas were carried out. Basic feature of MEMS and micro spots were generated. The micro features were investigated under SEM. Experimental results were analyzed in STATISTICA. Analyzed results show that laser power is the most significant effect followed by pulse width and the assist gas on the micro feature size and particularly feature quality. It was found that laser processing without assist gas produce promising results.
Book Synopsis Femtosecond Laser Micromachining of Engineering Materials: Process Parameters Study and Microrapid Prototyping by : Nitin Uppal
Download or read book Femtosecond Laser Micromachining of Engineering Materials: Process Parameters Study and Microrapid Prototyping written by Nitin Uppal and published by . This book was released on 2005 with total page 100 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond laser micromachining is a promising technology for micromachining of various engineering materials. The interaction mechanism of femtosecond laser pulses with matter is completely different compared to traditional lasers. This work presents a detailed study on the ablation of common engineering materials in air with femtosecond laser pulses. The single and multi-shot ablation threshold fluence and incubation coefficient of Nickel, SMA, Tungsten, PZT, Copper, Cobalt, Stainless Steel, Iron, Titanium, Brass and Aluminum are evaluated. The morphological changes on the material are discussed along with the identification of gentle and strong ablation phases.
Download or read book 日本のリーダー written by and published by . This book was released on 1983 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Femtosecond Laser Micromachining by : Roberto Osellame
Download or read book Femtosecond Laser Micromachining written by Roberto Osellame and published by Springer Science & Business Media. This book was released on 2012-03-05 with total page 485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.
Book Synopsis Effect of Beam Parameters on Femtosecond Laser Induced Surface Structures on Titanium and Copper by : Sanchari Biswas
Download or read book Effect of Beam Parameters on Femtosecond Laser Induced Surface Structures on Titanium and Copper written by Sanchari Biswas and published by . This book was released on 2020 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: "Femtosecond (fs) laser micromachining has the ability to impart a large variety of hierarchical microstructures in a single processing step on all types of materials, under any ambient condition and without the requirement of clean room or high vacuum facilities. Thereby with years, fs laser micromachining has become an emergent surface engineering technique. Since the nature of the micromachining outcome strongly depends on several micromachining parameters, in order to exercise control over the machining outcome, it is desirable to understand how these parameters influence surface structure formation. However, the major focus of existing research has been on understanding the effects of micromachining parameters on single or multiple pulse ablation threshold with limited discussion on structure formation. Furthermore, most reports discuss the effect of parameters such as the fluence, or scan velocity or number of scans. Again, limited reports exist that outline the effect of laser beam parameters such as the pulse repetition rate and the laser irradiation wavelength. This thesis aims to show the effect of the beam parameters (the repetition rate and irradiation wavelength) on structure formation in pursuit of bridging the gaps in literature.To analyze the effect of repetition rate, structures resulting from micromachining metallic samples, titanium (Ti) and copper (Cu), at 1 and 10 kHz repetition rate were compared. It was discovered that the effect of repetition rate on the structure thresholds strongly depend on the material properties such as the electron-phonon (e-ph) coupling constant and the thermal conductivity (k). On Cu, the structure thresholds decreased whereas on Ti the structure thresholds increased with the increase in repetition rate. This opposing trend was attributed to the opposing material characteristic and the resultant melt dynamics. When machining Ti at 10 kHz, the melt layer induced by one laser pulse persists until the next pulse arrives. The melt layer acts as a dielectric for the subsequent pulse, thereby increasing the structure thresholds. On Cu, however, the melt layer quickly resolidifies, and no such dielectric-like phase is observed.Additionally, the effect of repetition rate on surface texture was carried out through lacunarity analysis. Structures on both metals that were fabricated at relatively lower fluence had higher lacunarity when micromachined at 10 kHz. On the contrary, structures that were fabricated at higher fluence had higher lacunarity when micromachined at 1 kHz.Next, the effect of irradiation wavelength on structure formation was examined. Ti and Cu samples were micromachined at four different wavelengths in the UV-Vis-IR range (275 nm, 400 nm, 800 nm and 1200 nm). This conveniently allowed to map the structure evolution along the entire wavelength spectrum. The effect of irradiation wavelength on the structure thresholds was also determined. It was discovered that the structure thresholds strongly depend on the material's absorbance spectra. Interestingly, in contrast to results from single spot ablation where a positive correlation is found between the ablation threshold and wavelength, our results for the structure thresholds rather demonstrate a negative correlation with a material's absorbance across the wavelength spectrum.Additionally, several other new surface structures were fabricated and reported for the first time, among which the formation mechanism of ‘aggregate’ structures, one of the new surface structures, is presented in this thesis.Altogether, this thesis contributes to the current knowledge on the (fs) laser-material interaction in the direct (fs) laser micromachining technique by addressing the gaps that exist in determining the effect of laser beam parameters on the micromachining outcome"--
Book Synopsis Micromachining by : Zdravko Stanimirović
Download or read book Micromachining written by Zdravko Stanimirović and published by BoD – Books on Demand. This book was released on 2019-11-20 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes. The editors hope that this book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic.
Book Synopsis Properties of Aluminium Gallium Arsenide by : Sadao Adachi
Download or read book Properties of Aluminium Gallium Arsenide written by Sadao Adachi and published by IET. This book was released on 1993 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt: The alloy system A1GaAs/GaAs is potentially of great importance for many high-speed electronics and optoelectronic devices, because the lattice parameter difference GaAs and A1GaAs is very small, which promises an insignificant concentration of undesirable interface states. Thanks to this prominent feature, a number of interesting properties and phenomena, such as high-mobility low-dimensional carrier gases, resonant tunnelling and fractional quantum Hall effect, have been found in the A1GaAs/GaAs heterostructure system. New devices, such as modulation-doped FETs, heterojunction bipolar transistors, resonant tunnelling transistors, quantum-well lasers, and other photonic and quantum-effect devices, have also been developed recently using this material system. These areas are recognized as not being the most interesting and active fields in semiconductor physics and device engineering.
Book Synopsis Investigation of Temporal Contrast Effects in Femtosecond Pulse Laser Micromachining of Metals by : Benjamin Campbell
Download or read book Investigation of Temporal Contrast Effects in Femtosecond Pulse Laser Micromachining of Metals written by Benjamin Campbell and published by . This book was released on 2006 with total page 24 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond pulse laser drilling has evolved to become a preferred process for selective (maskless) micromachining in a variety of materials, including metals, polymers, semiconductors, ceramics, and living tissue. Manufacturers of state-of-the-art femtosecond laser systems advertise the inherent advantage of micromachining with ultra short pulses: the absence of a heat affected zone. In the ideal case, this leads to micro and nano scale features without distortion due to melt or recast. However, recent studies have shown that this is limited to the low fluence regime in many cases. High dynamic range autocorrelation studies were performed on two commercial Ti:sapphire femtosecond laser systems to investigate the possible presence of a nanosecond pedestal in the femtosecond pulse produced by chirped pulse amplification. If confirmed, nanosecond temporal phenomena may explain many of the thermal effects witnessed in high fluence micromachining. The material removal rate was measured in addition to feature morphology observations for percussion micro drilling of metal substrates in vacuum and ambient environments. Trials were repeated with proposed corrective optics installed, including a variable aperture and a nonlinear frequency doubling crystal. Results were compared. Although the investigation of nanosecond temporal phenomena is ongoing, early results have confirmed published accounts of higher removal rates in a vacuum environment.
Book Synopsis Non-traditional Micromachining Processes by : Golam Kibria
Download or read book Non-traditional Micromachining Processes written by Golam Kibria and published by Springer. This book was released on 2017-03-07 with total page 431 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.
Book Synopsis Thermal Reponse of Silicon During Virtual Laser Micromachining by : Muhammad Hasri Ibrahim
Download or read book Thermal Reponse of Silicon During Virtual Laser Micromachining written by Muhammad Hasri Ibrahim and published by . This book was released on 2009 with total page 49 pages. Available in PDF, EPUB and Kindle. Book excerpt: This project presents thermal response of silicon during virtual laser micromachining based on finite element method. Predictable models were developed using ALGOR FE code to simulate laser micromachining and to predict temperature distribution in silicon due to laser material interaction. Two FE models, linear and circular cutting were developed. Thermal properties of silicon were taken from literature. Time dependent heat flux was defined at each node along cutting line, laser velocity was designed by model distance and time interval. Transient heat transfer analysis was used to simulate laser micromachining. Process parameters considered were laser power, velocity and plasma gas effect. Total of 28 simulations were done. The FE model was validated from published report. Results qualitatively were found to be agreeable. Crucial factors are found to be pulse energy and moving velocity in reducing thermal cracks and thermal debris. This virtual work can significantly reduce the cost and time for process development in industry, and improve product reliability.
Book Synopsis Physical Properties of Polymers by : James E. Mark
Download or read book Physical Properties of Polymers written by James E. Mark and published by . This book was released on 1993 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: The contents have been divided into sections on physical states of polymers and characterization techniques. Chapters on physical states include discussions of the rubber elastic state, the glassy state, melts and concentrated solutions, the crystalline state, and the mesomorphic state. Characterization techniques described are molecular spectroscopy and scattering techniques.
Book Synopsis Laser Material Processing by : William M. Steen
Download or read book Laser Material Processing written by William M. Steen and published by Springer Science & Business Media. This book was released on 2013-04-18 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: New chapters on bending and cleaning reflect the changes in the field since the last edition, completing the range of practical knowledge about the processes possible with lasers already familiar to users of this well-known text. Professor Steen's lively presentation is supported by a number of original cartoons by Patrick Wright and Noel Ford, which will bring a smile to your face and ease the learning process. From the reviews: "...well organized, and the text is very practical...The engineering community will find this book informative and useful." (OPTICS AND PHOTONICS NEWS, July/August 2005)
Book Synopsis Modern Machining Technology by : Bijoy Bhattacharyya
Download or read book Modern Machining Technology written by Bijoy Bhattacharyya and published by Academic Press. This book was released on 2019-09-17 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern Machining Technology: Advanced, Hybrid, Micro Machining and Super Finishing Technology explores complex and precise components with challenging shapes that are increasing in demand in industry. As the first book to cover all major technologies in this field, readers will find the latest technical developments and research in one place, allowing for easy comparison of specifications. Technologies covered include mechanical, thermal, chemical, micro and hybrid machining processes, as well as the latest advanced finishing technologies. Each topic is accompanied by a basic overview, examples of typical applications and studies of performance criteria. In addition, readers will find comparative advantages, model questions and solutions. Addresses a broad range of modern machining techniques, providing specifications for easy comparison Includes descriptions of the main applications for each method, along with the materials or products needed Provides the very latest research in processes, including hybrid machining
Book Synopsis Printed Flexible Sensors by : Anindya Nag
Download or read book Printed Flexible Sensors written by Anindya Nag and published by Springer. This book was released on 2019-03-11 with total page 198 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents recent advances in the design, fabrication and implementation of flexible printed sensors. It explores a range of materials for developing the electrode and substrate parts of the sensors, on the basis of their electrical and mechanical characteristics. The sensors were processed using laser cutting and 3D printing techniques, and the sensors developed were employed in a number of healthcare, environmental and industrial applications, including: monitoring of physiological movements, respiration, salinity and nitrate measurement, and tactile sensing. The type of sensor selected for each application depended on its dimensions, robustness and sensitivity. The sensors fabricated were also embedded in an IoT-based system, allowing them to be integrated into real-time applications.
Book Synopsis Al-Si Alloys by : Francisco C. Robles Hernandez
Download or read book Al-Si Alloys written by Francisco C. Robles Hernandez and published by Springer. This book was released on 2017-07-02 with total page 253 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book details aluminum alloys with special focus on the aluminum silicon (Al‐Si) systems – that are the most abundant alloys second only to steel. The authors include a description of the manufacturing principles, thermodynamics, and other main characteristics of Al‐Si alloys. Principles of processing, testing, and in particular applications in the Automotive, Aeronautical and Aerospace fields are addressed.
