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Download or read book DEVELOPMENT OF ION IMPLANTATION TECHNIQUES FOR MICROELECTRONICS. [microform] /BY H.L. DUNLAP, R.G. HUNSPERGER, O.J. MARSH. written by and published by . This book was released on 1969 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : O. J. Marsh
Publisher :
ISBN 13 :
Total Pages : 139 pages
Book Rating : 4.:/5 (951 download)
Download or read book Development of Ion Implantation Techniques for Microelectronics written by O. J. Marsh and published by . This book was released on 1970 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : S. Coffa
Publisher : Newnes
ISBN 13 : 044459972X
Total Pages : 1031 pages
Book Rating : 4.4/5 (445 download)
Download or read book Ion Implantation Technology - 94 written by S. Coffa and published by Newnes. This book was released on 1995-05-16 with total page 1031 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters. The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
Author : Emanuele Rimini
Publisher : Springer Science & Business Media
ISBN 13 : 9780792395201
Total Pages : 418 pages
Book Rating : 4.3/5 (952 download)
Download or read book Ion Implantation: Basics to Device Fabrication written by Emanuele Rimini and published by Springer Science & Business Media. This book was released on 1994-12-31 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As the major or the unique procedure to selectively dope semiconductor materials for device fabrication, ion implantation takes advantage of the tremendous development of microelectronics and it evolves in a multidisciplinary frame. Physicists, chemists, materials sci entists, processing, device production, device design and ion beam engineers are all involved in this subject. The present monography deals with several aspects of ion implantation. The first chapter covers basic information on the physics of devices together with a brief description of the main trends in the field. The second chapter is devoted to ion im planters, including also high energy apparatus and a description of wafer charging and contaminants. Yield is a quite relevant is sue in the industrial surrounding and must be also discussed in the academic ambient. The slowing down of ions is treated in the third chapter both analytically and by numerical simulation meth ods. Channeling implants are described in some details in view of their relevance at the zero degree implants and of the available industrial parallel beam systems. Damage and its annealing are the key processes in ion implantation. Chapter four and five are dedicated to this extremely important subject.
Author : A. H. Agajanian
Publisher : Springer
ISBN 13 :
Total Pages : 282 pages
Book Rating : 4.E/5 ( download)
Download or read book Ion Implantation in Microelectronics written by A. H. Agajanian and published by Springer. This book was released on 1981-09-30 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the past ten years the use of ion implantation for doping semiconductors has become an active area of research and new device development. This doping technique has recently reached a level of maturity such that it is an integral step in the manu facturing of discrete semiconductor devices and integrated circuits. Ion implantation has significant advantages over diffusion such as: precision, purity, versatility, and automation; all of which are important for VLSI purposes. Ion implantation has also found new applications in magnetic bubble domain materials, superconductors, and materials synthesis. This book is a comprehensive bibliography of 2467 references of the world's literature on ion implantation as applied to micro electronics. This compilation will easily enable researchers to compare their work with that of others. For easy access to the needed references, the contents are divided into fifty-two subject headings. The main categories are: bibliographies, books and symposia, review articles, theory, materials, device applications, and equipment. An author index and a subject index are also given to provide easy access to the references. The literature from January 1976 to December 1980 is covered. The literature prior to 1976 is the subject, in part, of a previous book by the author (1). The main sources searched were: Physics Abstracts (PA) , Electrical and Electronics Abstracts (EEA) , Chemical Abstracts (CA) , Nuclear Science Abstracts (NSA) , and Engineering Index. The volumes and numbers of the abstracts are given to pro vide access to the abstracts.
Author : Billy Crowder
Publisher : Springer
ISBN 13 : 9781468420661
Total Pages : 658 pages
Book Rating : 4.4/5 (26 download)
Download or read book Ion Implantation in Semiconductors and Other Materials written by Billy Crowder and published by Springer. This book was released on 2012-03-26 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the years since the first conference in this series was held at Thousand Oaks, California, in 1970, ion implantation has been an expanding and exciting research area. The advances in this field were so rapid that a second conference convened at Garmisch Partenkirchen, Germany, in 1971. At the present time, our under standing of the ion implantation process in semiconductors such as Si and Ge has reached a stage of maturity and ion implantation techniques are firmly established in semiconductor device technology. The advances in compound semiconductors have not been as rapid. There has also been a shift in emphasis in ion implanta tion research from semiconductors to other materials such as metals and insulators. It was appropriate to increase the scope of the conference and the IIIrd International Conference on Ion Implanta tion in Semiconductors and Other Materials was held at Yorktown Heights, New York, December 11 to 14, 1972. A significant number of the papers presented at this conference dealt with ion implanta tion in metals, insulators, and compound semiconductors. The International Committee responsible for organizing this conference consisted of B. L. Crowder, J. A. Davies, F. H. Eisen, Ph. Glotin, T. Itoh, A. U. MacRae, J. W. Mayer, G. Dearnaley, and I. Ruge. The Conference attracted 180 participants from twelve countries. The success of the Conference was due in large measure to the financial support of our sponsors, Air Force Cambridge Research Laboratories and the Office of Naval Research.
Author : A. H. Agajanian
Publisher : Springer
ISBN 13 : 9781468461329
Total Pages : 0 pages
Book Rating : 4.4/5 (613 download)
Download or read book Ion Implantation in Microelectronics written by A. H. Agajanian and published by Springer. This book was released on 2013-05-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the past ten years the use of ion implantation for doping semiconductors has become an active area of research and new device development. This doping technique has recently reached a level of maturity such that it is an integral step in the manu facturing of discrete semiconductor devices and integrated circuits. Ion implantation has significant advantages over diffusion such as: precision, purity, versatility, and automation; all of which are important for VLSI purposes. Ion implantation has also found new applications in magnetic bubble domain materials, superconductors, and materials synthesis. This book is a comprehensive bibliography of 2467 references of the world's literature on ion implantation as applied to micro electronics. This compilation will easily enable researchers to compare their work with that of others. For easy access to the needed references, the contents are divided into fifty-two subject headings. The main categories are: bibliographies, books and symposia, review articles, theory, materials, device applications, and equipment. An author index and a subject index are also given to provide easy access to the references. The literature from January 1976 to December 1980 is covered. The literature prior to 1976 is the subject, in part, of a previous book by the author (1). The main sources searched were: Physics Abstracts (PA) , Electrical and Electronics Abstracts (EEA) , Chemical Abstracts (CA) , Nuclear Science Abstracts (NSA) , and Engineering Index. The volumes and numbers of the abstracts are given to pro vide access to the abstracts.
Author : Steven J. Dick
Publisher : Government Printing Office
ISBN 13 : 9780160867170
Total Pages : 704 pages
Book Rating : 4.8/5 (671 download)
Download or read book Societal Impact of Spaceflight written by Steven J. Dick and published by Government Printing Office. This book was released on 2007 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : W. Henry Lambright
Publisher : DIANE Publishing
ISBN 13 : 1428994351
Total Pages : 74 pages
Book Rating : 4.4/5 (289 download)
Download or read book NASA and the environment the case of ozone depletion written by W. Henry Lambright and published by DIANE Publishing. This book was released on 2005 with total page 74 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Harold Leland Goodwin
Publisher : Holt McDougal
ISBN 13 :
Total Pages : 200 pages
Book Rating : 4.:/5 (36 download)
Download or read book The Images of Space written by Harold Leland Goodwin and published by Holt McDougal. This book was released on 1965 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : James E. Strick
Publisher : Harvard University Press
ISBN 13 : 0674044088
Total Pages : 297 pages
Book Rating : 4.6/5 (74 download)
Download or read book Sparks of Life written by James E. Strick and published by Harvard University Press. This book was released on 2009-06-01 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: How, asks James E. Strick, could spontaneous generation--the idea that living things can suddenly arise from nonliving materials--come to take root for a time (even a brief one) in so thoroughly unsuitable a field as British natural theology? No less an authority than Aristotle claimed that cases of spontaneous generation were to be observed in nature, and the idea held sway for centuries. Beginning around the time of the Scientific Revolution, however, the doctrine was increasingly challenged; attempts to prove or disprove it led to important breakthroughs in experimental design and laboratory techniques, most notably sterilization methods, that became the cornerstones of modern microbiology and sped the ascendancy of the germ theory of disease. The Victorian debates, Strick shows, were entwined with the public controversy over Darwin's theory of evolution. While other histories of the debates between 1860 and 1880 have focused largely on the experiments of John Tyndall, Henry Charlton Bastian, and others, Sparks of Life emphasizes previously understudied changes in the theories that underlay the debates. Strick argues that the disputes cannot be understood without full knowledge of the factional infighting among Darwinians themselves, as they struggled to create a socially and scientifically viable form of Darwinian science. He shows that even the terms of the debate, such as biogenesis, usually but incorrectly attributed to Huxley, were intensely contested.
Author : Steven J. Dick
Publisher : Templeton Foundation Press
ISBN 13 : 1890151424
Total Pages : 229 pages
Book Rating : 4.8/5 (91 download)
Download or read book Many Worlds written by Steven J. Dick and published by Templeton Foundation Press. This book was released on 2000 with total page 229 pages. Available in PDF, EPUB and Kindle. Book excerpt: In Many Worlds, renowned scientists in fields from physics to astronomy discuss the possibility of a cosmic evolutionary process that guides not only our universe, but other planets and universes as well. Physicist and author Paul Davies observes that “if it turns out to be the case that the universe is inherently bio-friendly, then the scientific, theological, and philosophical implications will be extremely significant.” Many Worlds first focuses on what lessons might be learned from the latest knowledge of the origin and evolution of life. After establishing a well-grounded relationship between science and religion, authors such as Arthur Peacocke and John Leslie evaluate the intricate configuration of events that must occur to create a dynamic and chemically enriched environment capable of not only supporting life, but evolutionary processes as well. The final section addresses the provocative question of extraterrestrial life. What we may find could drastically change our relation to the universe and our creator. As we reflect on the possibilities that the universe presents, author and contributor Christian de Duve aptly states, “Many myths have had to be abandoned. But mystery remains, more profound and beautiful than ever before, a reality almost inaccessible to our feeble human means.” Is our existence part of a divine scheme ingenuously designed to support life, or is it an extraordinary chain of accidents that culminate in a life-permitting environment? The scientific advancements of the past century cannot help but capture the imagination and inspire renewed hope for the future. This volume will add dimension and insight to these yet unanswered questions.
Author : J. B. Wachtman
Publisher :
ISBN 13 :
Total Pages : 228 pages
Book Rating : 4.3/5 (91 download)
Download or read book Mass Transport in Oxides written by J. B. Wachtman and published by . This book was released on 1968 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : T. F. Connolly
Publisher : Springer Science & Business Media
ISBN 13 : 1468462075
Total Pages : 115 pages
Book Rating : 4.4/5 (684 download)
Download or read book Electrical Properties of Solids written by T. F. Connolly and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 115 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since 1963 the Research Materials Information Center has been answering inquiries on the availability, preparation, and properties of ultrapure inorganic research specimens. It has been possible to do this with reasonable efficiency by searching an automated coded microfilm collection of the report and open literature and of data sheets and question naires provided by commercial and research producers of pure materials. With the growth of the collection to over 70,000 documents and the increase in the demand for more general background information, it has been necessary to compile bibliographies on an increasing variety of subjects. These have been used as indexes to the microfilmed documents for more efficient searching, and in the past distributed in response to individual requests. However, their size and number no longer permit so casual and uneconomic a method of distribution. The "ORNL Solid State Physics Literature Guides" is a practical alternative. Organization The subject organization of the bibliography is given by the Table of Contents. Each section is preceded by a collection of reviews, bibliographies, and "general" papers (i.e., those dealing with methods or equipment rather than single materials, or with such a wide variety of materials that no subsection was appropriate). Coverage is generally from 1960 to mid-1970. Emphasis is on inorganic materials.
Author : George Gallup
Publisher :
ISBN 13 :
Total Pages : 256 pages
Book Rating : 4.F/5 ( download)
Download or read book The Sophisticated Poll Watcher's Guide written by George Gallup and published by . This book was released on 1972 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Heinz K. Henisch
Publisher : Courier Corporation
ISBN 13 : 9780486689159
Total Pages : 132 pages
Book Rating : 4.6/5 (891 download)
Download or read book Crystal Growth in Gels written by Heinz K. Henisch and published by Courier Corporation. This book was released on 1996-01-01 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: First book ever printed on growing crystals in a gel medium provides thorough descriptions of the procedure, its history and future potential. "Concise and readable."—Science. 42 illus. 1970 edition.
Author : Viktor Alekseevich Miamlin
Publisher : Springer
ISBN 13 : 9781489962485
Total Pages : 430 pages
Book Rating : 4.9/5 (624 download)
Download or read book Electrochemistry of Semiconductors written by Viktor Alekseevich Miamlin and published by Springer. This book was released on 1967-01-01 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt:
