Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure

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Publisher : BoD – Books on Demand
ISBN 13 : 3750431426
Total Pages : 180 pages
Book Rating : 4.7/5 (54 download)

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Book Synopsis Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure by : Simon Fichtner

Download or read book Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure written by Simon Fichtner and published by BoD – Books on Demand. This book was released on 2020-02-18 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (MEMS) as well as of microelectronics in general. Since the device performance thus becomes directly connected to the properties of the functional film, new as well as improved piezoelectric and ferroelectric materials can allow substantial technological innovation. This dissertation focused on enhancing the piezoelectric properties of AlN by forming solid solutions with ScN and includes the first experimental observation of ferroelectricity in AlScN, and thus the first discovery of ferroelectricity in a III-V semiconductor based material in general. Compared to AlN, piezoelectric coefficients that are up to 450% higher were realized in AlScN, with d33f reaching a maximum of 17.2 pm/V and e31f reaching 3.2 C/m2. In this context, the identification and subsequent rectification of a major morphological instability in AlScN that becomes more pronounced with increasing Sc content was reported. Thus, films free of morphological inhomogeneities with close to ideal piezoelectric properties could be deposited up to 0.43% ScN. Control of the intrinsic film stress was demonstrated over a wide range from strongly tensile to strongly compressive for all the investigated Sc contents. The improved piezoelectric coefficients together with the possibility of stress control allowed the fabrication of suspended MEMS structures with electromechanical coupling coefficients improved by more than 320% relative to AlN. Ferroelectrictiy in AlScN was observed starting at ScN contents of 27%. Its emergence was connected to the same gradual evolution from the initial wurtzite structure to the layered hexagonal structure that also causes the enhanced piezoelectric coefficients while increasing the Sc content. Ferroelectric AlScN allowed the first experimental observation of the spontaneous polarization of the wurtzite structure and confirms that this polarization is more than one order of magnitude above most previous theoretical predictions. The large, tunable coercive fields and polarization constants together with the broad linear strain intervals, a paraelectric transition temperature above 600°C as well as the technological compatibility of the III-nitrides lead to a combination of exceptional properties that was previously inaccessible in ferroelectric thin films.

Piezoelectric Energy Harvesting

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Publisher : John Wiley & Sons
ISBN 13 : 1119991358
Total Pages : 377 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Piezoelectric Energy Harvesting by : Alper Erturk

Download or read book Piezoelectric Energy Harvesting written by Alper Erturk and published by John Wiley & Sons. This book was released on 2011-04-04 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.

Piezoelectric MEMS Resonators

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Publisher : Springer
ISBN 13 : 3319286889
Total Pages : 424 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Ferroelectrics

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Publisher : BoD – Books on Demand
ISBN 13 : 9533074566
Total Pages : 266 pages
Book Rating : 4.5/5 (33 download)

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Book Synopsis Ferroelectrics by : Mickaël Lallart

Download or read book Ferroelectrics written by Mickaël Lallart and published by BoD – Books on Demand. This book was released on 2011-08-23 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectric materials have been and still are widely used in many applications, that have moved from sonar towards breakthrough technologies such as memories or optical devices. This book is a part of a four volume collection (covering material aspects, physical effects, characterization and modeling, and applications) and focuses on the application of ferroelectric devices to innovative systems. In particular, the use of these materials as varying capacitors, gyroscope, acoustics sensors and actuators, microgenerators and memory devices will be exposed, providing an up-to-date review of recent scientific findings and recent advances in the field of ferroelectric devices.

Thin Film Analysis by X-Ray Scattering

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Publisher : John Wiley & Sons
ISBN 13 : 3527607048
Total Pages : 378 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Thin Film Analysis by X-Ray Scattering by : Mario Birkholz

Download or read book Thin Film Analysis by X-Ray Scattering written by Mario Birkholz and published by John Wiley & Sons. This book was released on 2006-05-12 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films. Very much an interdisciplinary field, chemists, biochemists, materials scientists, physicists and engineers all have a common interest in thin films and their manifold uses and applications. Grain size, porosity, density, preferred orientation and other properties are important to know: whether thin films fulfill their intended function depends crucially on their structure and morphology once a chemical composition has been chosen. Although their backgrounds differ greatly, all the involved specialists a profound understanding of how structural properties may be determined in order to perform their respective tasks in search of new and modern materials, coatings and functions. The author undertakes this in-depth introduction to the field of thin film X-ray characterization in a clear and precise manner.

Advanced Piezoelectric Materials

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Publisher :
ISBN 13 : 9781613443811
Total Pages : pages
Book Rating : 4.4/5 (438 download)

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Book Synopsis Advanced Piezoelectric Materials by : Kenji Uchino

Download or read book Advanced Piezoelectric Materials written by Kenji Uchino and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Ferroelectric Thin Films

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Publisher : Springer Science & Business Media
ISBN 13 : 9783540241638
Total Pages : 272 pages
Book Rating : 4.2/5 (416 download)

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Book Synopsis Ferroelectric Thin Films by : Masanori Okuyama

Download or read book Ferroelectric Thin Films written by Masanori Okuyama and published by Springer Science & Business Media. This book was released on 2005-02-22 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectric thin films continue to attract much attention due to their developing applications in memory devices, FeRAM, infrared sensors, piezoelectric sensors and actuators. This book, aimed at students, researchers and developers, gives detailed information about the basic properties of these materials and the associated device physics. The contributing authors are acknowledged experts in the field.

Wafer Bonding

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Publisher : Springer Science & Business Media
ISBN 13 : 3662108275
Total Pages : 510 pages
Book Rating : 4.6/5 (621 download)

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Book Synopsis Wafer Bonding by : Marin Alexe

Download or read book Wafer Bonding written by Marin Alexe and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 510 pages. Available in PDF, EPUB and Kindle. Book excerpt: The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

Energy Scavenging for Wireless Sensor Networks

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Publisher : Springer Science & Business Media
ISBN 13 : 1461504856
Total Pages : 219 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Energy Scavenging for Wireless Sensor Networks by : Shad Roundy

Download or read book Energy Scavenging for Wireless Sensor Networks written by Shad Roundy and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 219 pages. Available in PDF, EPUB and Kindle. Book excerpt: The vast reduction in size and power consumption of CMOS circuitry has led to a large research effort based around the vision of wireless sensor networks. The proposed networks will be comprised of thousands of small wireless nodes that operate in a multi-hop fashion, replacing long transmission distances with many low power, low cost wireless devices. The result will be the creation of an intelligent environment responding to its inhabitants and ambient conditions. Wireless devices currently being designed and built for use in such environments typically run on batteries. However, as the networks increase in number and the devices decrease in size, the replacement of depleted batteries will not be practical. The cost of replacing batteries in a few devices that make up a small network about once per year is modest. However, the cost of replacing thousands of devices in a single building annually, some of which are in areas difficult to access, is simply not practical. Another approach would be to use a battery that is large enough to last the entire lifetime of the wireless sensor device. However, a battery large enough to last the lifetime of the device would dominate the overall system size and cost, and thus is not very attractive. Alternative methods of powering the devices that will make up the wireless networks are desperately needed.

Characterisation of Ferroelectric Bulk Materials and Thin Films

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Publisher : Springer
ISBN 13 : 140209311X
Total Pages : 283 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Characterisation of Ferroelectric Bulk Materials and Thin Films by : Markys G. Cain

Download or read book Characterisation of Ferroelectric Bulk Materials and Thin Films written by Markys G. Cain and published by Springer. This book was released on 2014-06-02 with total page 283 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a comprehensive review of the most important methods used in the characterisation of piezoelectric, ferroelectric and pyroelectric materials. It covers techniques for the analysis of bulk materials and thick and thin film materials and devices. There is a growing demand by industry to adapt and integrate piezoelectric materials into ever smaller devices and structures. Such applications development requires the joint development of reliable, robust, accurate and – most importantly – relevant and applicable measurement and characterisation methods and models. In the past few years there has been a rapid development of new techniques to model and measure the variety of properties that are deemed important for applications development engineers and scientists. The book has been written by the leaders in the field and many chapters represent established measurement best practice, with a strong emphasis on application of the methods via worked examples and detailed experimental procedural descriptions. Each chapter contains numerous diagrams, images, and measurement data, all of which are fully referenced and indexed. The book is intended to occupy space in the research or technical lab, and will be a valuable and practical resource for students, materials scientists, engineers, and lab technicians.

Waste Energy Harvesting

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Publisher : Springer Science & Business Media
ISBN 13 : 364254634X
Total Pages : 603 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis Waste Energy Harvesting by : Ling Bing Kong

Download or read book Waste Energy Harvesting written by Ling Bing Kong and published by Springer Science & Business Media. This book was released on 2014-03-25 with total page 603 pages. Available in PDF, EPUB and Kindle. Book excerpt: Waste Energy Harvesting overviews the latest progress in waste energy harvesting technologies, with specific focusing on waste thermal mechanical energies. Thermal energy harvesting technologies include thermoelectric effect, storage through phase change materials and pyroelectric effect. Waste mechanical energy harvesting technologies include piezoelectric (ferroelectric) effect with ferroelectric materials and nanogenerators. The book aims to strengthen the syllabus in energy, materials and physics and is well suitable for students and professionals in the fields.

Lead-Free Piezoelectric Materials

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Publisher : John Wiley & Sons
ISBN 13 : 3527345124
Total Pages : 240 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Lead-Free Piezoelectric Materials by : Jing-Feng Li

Download or read book Lead-Free Piezoelectric Materials written by Jing-Feng Li and published by John Wiley & Sons. This book was released on 2021-07-06 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides in-depth knowledge on lead-free piezoelectrics - for state-of-the-art, environmentally friendly electrical and electronic devices! Lead zirconate titanate ceramics have been market-dominating due to their excellent properties and flexibility in terms of compositional modifications. Driven by the Restriction of Hazardous Substances Directive, there is a growing concern on the toxicity of lead. Therefore, numerous research efforts were devoted to lead-free piezoelectrics from the beginning of this century. Great progress has been made in the development of high-performance lead-free piezoelectric ceramics which are already used, e.g., for power electronics applications. Lead-Free Piezoelectric Materials provides an in-depth overview of principles, material systems, and applications of lead-free piezoelectric materials. It starts with the fundamentals of piezoelectricity and lead-free piezoelectrics. Then it discusses four representative lead-free piezoelectric material systems from background introduction to crystal structures and properties. Finally, it presents several applications of lead-free piezoelectrics including piezoelectric actuators, and transducers. The challenges for promoting applications will also be discussed. Highly attractive: Lead-free piezoelectrics address the growing concerns on exclusion of hazardous substances used in electrical and electronic devices in order to protect human health and the environment Thorough overview: Covers fundamentals, different classes of materials, processing and applications Unique: discusses fundamentals and recent advancements in the field of lead-free piezoelectrics Lead-Free Piezoelectric Materials is of high interest for material scientists, electrical and chemical engineers, solid state chemists and physicists in academia and industry.

Structural Health Monitoring with Piezoelectric Wafer Active Sensors

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Publisher : Academic Press
ISBN 13 : 0124201024
Total Pages : 1025 pages
Book Rating : 4.1/5 (242 download)

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Book Synopsis Structural Health Monitoring with Piezoelectric Wafer Active Sensors by : Victor Giurgiutiu

Download or read book Structural Health Monitoring with Piezoelectric Wafer Active Sensors written by Victor Giurgiutiu and published by Academic Press. This book was released on 2014-06-20 with total page 1025 pages. Available in PDF, EPUB and Kindle. Book excerpt: Structural Health Monitoring with Piezoelectric Wafer Active Sensors, Second Edition provides an authoritative theoretical and experimental guide to this fast-paced, interdisciplinary area with exciting applications across a range of industries. The book begins with a detailed yet digestible consolidation of the fundamental theory relating to structural health monitoring (SHM). Coverage of fracture and failure basics, relevant piezoelectric material properties, vibration modes in different structures, and different wave types provide all the background needed to understand SHM and apply it to real-world structural challenges. Moving from theory to experimental practice, the book then provides the most comprehensive coverage available on using piezoelectric wafer active sensors (PWAS) to detect and quantify damage in structures. Updates to this edition include circular and straight-crested Lamb waves from first principle, and the interaction between PWAS and Lamb waves in 1-D and 2-D geometries. Effective shear stress is described, and tuning expressions between PWAS and Lamb waves has been extended to cover axisymmetric geometries with a complete Hankel-transform-based derivation. New chapters have been added including hands-on SHM case studies of PWAS stress, strain, vibration, and wave sensing applications, along with new sections covering essential aspects of vibration and wave propagation in axisymmetric geometries. Comprehensive coverage of underlying theory such as piezoelectricity, vibration, and wave propagation alongside experimental techniques Includes step-by-step guidance on the use of piezoelectric wafer active sensors (PWAS) to detect and quantify damage in structures, including clear information on how to interpret sensor signal patterns Updates to this edition include a new chapter on composites and new sections on advances in vibration and wave theory, bringing this established reference in line with the cutting edge in this emerging area

III-V Nitrides

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Publisher :
ISBN 13 :
Total Pages : 1290 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis III-V Nitrides by : Fernando A. Ponce

Download or read book III-V Nitrides written by Fernando A. Ponce and published by . This book was released on 1997 with total page 1290 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Integration of Functional Oxides with Semiconductors

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Publisher : Springer Science & Business Media
ISBN 13 : 146149320X
Total Pages : 284 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Integration of Functional Oxides with Semiconductors by : Alexander A. Demkov

Download or read book Integration of Functional Oxides with Semiconductors written by Alexander A. Demkov and published by Springer Science & Business Media. This book was released on 2014-02-20 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.

Piezoelectric Sensors and Actuators

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Publisher : Springer
ISBN 13 : 3662575345
Total Pages : 559 pages
Book Rating : 4.6/5 (625 download)

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Book Synopsis Piezoelectric Sensors and Actuators by : Stefan Johann Rupitsch

Download or read book Piezoelectric Sensors and Actuators written by Stefan Johann Rupitsch and published by Springer. This book was released on 2018-07-26 with total page 559 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces physical effects and fundamentals of piezoelectric sensors and actuators. It gives a comprehensive overview of piezoelectric materials such as quartz crystals and polycrystalline ceramic materials. Different modeling approaches and methods to precisely predict the behavior of piezoelectric devices are described. Furthermore, a simulation-based approach is detailed which enables the reliable characterization of sensor and actuator materials. One focus of the book lies on piezoelectric ultrasonic transducers. An optical approach is presented that allows the quantitative determination of the resulting sound fields. The book also deals with various applications of piezoelectric sensors and actuators. In particular, the studied application areas are · process measurement technology, · ultrasonic imaging, · piezoelectric positioning systems and · piezoelectric motors. The book addresses students, academic as well as industrial reseachers and development engineers who are concerned with piezoelectric sensors and actuators.

Dielectric Polymer Nanocomposites

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Publisher : Springer Science & Business Media
ISBN 13 : 1441915915
Total Pages : 374 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Dielectric Polymer Nanocomposites by : J. Keith Nelson

Download or read book Dielectric Polymer Nanocomposites written by J. Keith Nelson and published by Springer Science & Business Media. This book was released on 2009-12-17 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dielectric Polymer Nanocomposites provides the first in-depth discussion of nano-dielectrics, an emerging and fast moving topic in electrical insulation. The text begins with an overview of the background, principles and promise of nanodielectrics, followed by a discussion of the processing of nanocomposites and then proceeds with special considerations of clay based processes, mechanical, thermal and electric properties and surface properties as well as erosion resistance. Carbon nanotubes are discussed as a means of creation of non linear conductivity, the text concludes with a industrial applications perspective.