Development Of High Performance Piezoelectric Alscn For Microelectromechanical Systems Towards A Ferroelectric Wurtzite Structure

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Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure

Author : Simon Fichtner
Publisher : BoD – Books on Demand
ISBN 13 : 3750431426
Total Pages : 180 pages
Book Rating : 4.7/5 (54 download)

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Book Synopsis Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure by : Simon Fichtner

Download or read book Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure written by Simon Fichtner and published by BoD – Books on Demand. This book was released on 2020-02-18 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (MEMS) as well as of microelectronics in general. Since the device performance thus becomes directly connected to the properties of the functional film, new as well as improved piezoelectric and ferroelectric materials can allow substantial technological innovation. This dissertation focused on enhancing the piezoelectric properties of AlN by forming solid solutions with ScN and includes the first experimental observation of ferroelectricity in AlScN, and thus the first discovery of ferroelectricity in a III-V semiconductor based material in general. Compared to AlN, piezoelectric coefficients that are up to 450% higher were realized in AlScN, with d33f reaching a maximum of 17.2 pm/V and e31f reaching 3.2 C/m2. In this context, the identification and subsequent rectification of a major morphological instability in AlScN that becomes more pronounced with increasing Sc content was reported. Thus, films free of morphological inhomogeneities with close to ideal piezoelectric properties could be deposited up to 0.43% ScN. Control of the intrinsic film stress was demonstrated over a wide range from strongly tensile to strongly compressive for all the investigated Sc contents. The improved piezoelectric coefficients together with the possibility of stress control allowed the fabrication of suspended MEMS structures with electromechanical coupling coefficients improved by more than 320% relative to AlN. Ferroelectrictiy in AlScN was observed starting at ScN contents of 27%. Its emergence was connected to the same gradual evolution from the initial wurtzite structure to the layered hexagonal structure that also causes the enhanced piezoelectric coefficients while increasing the Sc content. Ferroelectric AlScN allowed the first experimental observation of the spontaneous polarization of the wurtzite structure and confirms that this polarization is more than one order of magnitude above most previous theoretical predictions. The large, tunable coercive fields and polarization constants together with the broad linear strain intervals, a paraelectric transition temperature above 600°C as well as the technological compatibility of the III-nitrides lead to a combination of exceptional properties that was previously inaccessible in ferroelectric thin films.

Handbook of Thin Film Deposition

Author : Dominic Schepis
Publisher : Elsevier
ISBN 13 : 044313524X
Total Pages : 428 pages
Book Rating : 4.4/5 (431 download)

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Book Synopsis Handbook of Thin Film Deposition by : Dominic Schepis

Download or read book Handbook of Thin Film Deposition written by Dominic Schepis and published by Elsevier. This book was released on 2024-10-08 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry. When pursuing patents, there is a phase called 'reduction to practice' where the idea for a technology transitions from a concept to actual use. The section 'Thin Film Reduction to Practice' includes chapters that review the most relevant methods to fabricate thin films towards practical applications. Then, the latest applications of thin film deposition technologies are discussed. Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists and engineers in academia and working in semiconductor R&D. - Offers a practical survey of thin film technologies including design, fabrication, and reliability - Covers core processes and applications in the semiconductor industry and discusses latest advances in new thin film development - Features new chapters that review methods on front-end and back-end thin films

Nanostructures in Ferroelectric Films for Energy Applications

Author : Jun Ouyang
Publisher : Elsevier
ISBN 13 : 0128138572
Total Pages : 388 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Nanostructures in Ferroelectric Films for Energy Applications by : Jun Ouyang

Download or read book Nanostructures in Ferroelectric Films for Energy Applications written by Jun Ouyang and published by Elsevier. This book was released on 2019-06-06 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanostructures in Ferroelectric Films for Energy Applications: Grains, Domains, Interfaces and Engineering Methods presents methods of engineering nanostructures in ferroelectric films to improve their performance in energy harvesting and conversion and storage. Ferroelectric films, which have broad applications, including the emerging energy technology, usually consist of nanoscale inhomogeneities. For polycrystalline films, the size and distribution of nano-grains determines the macroscopic properties, especially the field-induced polarization response. For epitaxial films, the energy of internal long-range electric and elastic fields during their growth are minimized by formation of self-assembled nano-domains. This book is an accessible reference for both instructors in academia and R&D professionals. - Provides the necessary components for the systematic study of the structure-property relationship in ferroelectric thin film materials using case studies in energy applications - Written by leading experts in the research areas of piezoelectrics, electrocalorics, ferroelectric dielectrics (especially in capacitive energy storage), ferroelectric domains, and ferroelectric-Si technology - Includes a well balanced mix of theoretical design and simulation, materials processing and integration, and dedicated characterization methods of the involved nanostructures

Piezoelectric Energy Harvesting

Author : Alper Erturk
Publisher : John Wiley & Sons
ISBN 13 : 1119991358
Total Pages : 377 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Piezoelectric Energy Harvesting by : Alper Erturk

Download or read book Piezoelectric Energy Harvesting written by Alper Erturk and published by John Wiley & Sons. This book was released on 2011-04-04 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.

Piezoelectric MEMS Resonators

Author : Harmeet Bhugra
Publisher : Springer
ISBN 13 : 3319286889
Total Pages : 423 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Ferroelectrics

Author : Mickaël Lallart
Publisher : BoD – Books on Demand
ISBN 13 : 9533074566
Total Pages : 266 pages
Book Rating : 4.5/5 (33 download)

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Book Synopsis Ferroelectrics by : Mickaël Lallart

Download or read book Ferroelectrics written by Mickaël Lallart and published by BoD – Books on Demand. This book was released on 2011-08-23 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectric materials have been and still are widely used in many applications, that have moved from sonar towards breakthrough technologies such as memories or optical devices. This book is a part of a four volume collection (covering material aspects, physical effects, characterization and modeling, and applications) and focuses on the application of ferroelectric devices to innovative systems. In particular, the use of these materials as varying capacitors, gyroscope, acoustics sensors and actuators, microgenerators and memory devices will be exposed, providing an up-to-date review of recent scientific findings and recent advances in the field of ferroelectric devices.

Advanced Piezoelectric Materials

Author : Kenji Uchino
Publisher :
ISBN 13 : 9781613443811
Total Pages : pages
Book Rating : 4.4/5 (438 download)

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Book Synopsis Advanced Piezoelectric Materials by : Kenji Uchino

Download or read book Advanced Piezoelectric Materials written by Kenji Uchino and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Thin Film Analysis by X-Ray Scattering

Author : Mario Birkholz
Publisher : John Wiley & Sons
ISBN 13 : 3527607048
Total Pages : 378 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Thin Film Analysis by X-Ray Scattering by : Mario Birkholz

Download or read book Thin Film Analysis by X-Ray Scattering written by Mario Birkholz and published by John Wiley & Sons. This book was released on 2006-05-12 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films. Very much an interdisciplinary field, chemists, biochemists, materials scientists, physicists and engineers all have a common interest in thin films and their manifold uses and applications. Grain size, porosity, density, preferred orientation and other properties are important to know: whether thin films fulfill their intended function depends crucially on their structure and morphology once a chemical composition has been chosen. Although their backgrounds differ greatly, all the involved specialists a profound understanding of how structural properties may be determined in order to perform their respective tasks in search of new and modern materials, coatings and functions. The author undertakes this in-depth introduction to the field of thin film X-ray characterization in a clear and precise manner.

Characterisation of Ferroelectric Bulk Materials and Thin Films

Author : Markys G. Cain
Publisher : Springer
ISBN 13 : 140209311X
Total Pages : 283 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Characterisation of Ferroelectric Bulk Materials and Thin Films by : Markys G. Cain

Download or read book Characterisation of Ferroelectric Bulk Materials and Thin Films written by Markys G. Cain and published by Springer. This book was released on 2014-06-02 with total page 283 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a comprehensive review of the most important methods used in the characterisation of piezoelectric, ferroelectric and pyroelectric materials. It covers techniques for the analysis of bulk materials and thick and thin film materials and devices. There is a growing demand by industry to adapt and integrate piezoelectric materials into ever smaller devices and structures. Such applications development requires the joint development of reliable, robust, accurate and – most importantly – relevant and applicable measurement and characterisation methods and models. In the past few years there has been a rapid development of new techniques to model and measure the variety of properties that are deemed important for applications development engineers and scientists. The book has been written by the leaders in the field and many chapters represent established measurement best practice, with a strong emphasis on application of the methods via worked examples and detailed experimental procedural descriptions. Each chapter contains numerous diagrams, images, and measurement data, all of which are fully referenced and indexed. The book is intended to occupy space in the research or technical lab, and will be a valuable and practical resource for students, materials scientists, engineers, and lab technicians.

Waste Energy Harvesting

Author : Ling Bing Kong
Publisher : Springer Science & Business Media
ISBN 13 : 364254634X
Total Pages : 603 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis Waste Energy Harvesting by : Ling Bing Kong

Download or read book Waste Energy Harvesting written by Ling Bing Kong and published by Springer Science & Business Media. This book was released on 2014-03-25 with total page 603 pages. Available in PDF, EPUB and Kindle. Book excerpt: Waste Energy Harvesting overviews the latest progress in waste energy harvesting technologies, with specific focusing on waste thermal mechanical energies. Thermal energy harvesting technologies include thermoelectric effect, storage through phase change materials and pyroelectric effect. Waste mechanical energy harvesting technologies include piezoelectric (ferroelectric) effect with ferroelectric materials and nanogenerators. The book aims to strengthen the syllabus in energy, materials and physics and is well suitable for students and professionals in the fields.

Piezoelectricity

Author : Walter Heywang
Publisher : Springer Science & Business Media
ISBN 13 : 3540686835
Total Pages : 576 pages
Book Rating : 4.5/5 (46 download)

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Book Synopsis Piezoelectricity by : Walter Heywang

Download or read book Piezoelectricity written by Walter Heywang and published by Springer Science & Business Media. This book was released on 2008-11-14 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: Discovered in 1880, piezoelectric materials play a key role in an innovative market of several billions of dollars. Recent advances in applications derive from new materials and their development, as well as to new market requirements. With the exception of quartz, ferroelectric materials are used for they offer both high efficiency and sufficient versatility to meet adequately the multidimensional requirements for application. Consequently, strong emphasis is placed on tailoring materials and technology, whether one deals with single crystals, ceramics or plastic materials. Tailoring requires a basic understanding of both physical principles and technical possibilities and limitations. This report elucidates these developments by a broad spectrum of examples, comprising ultrasound in medicine and defence industry, frequency control, signal processing by SAW-devices, sensors, actuators, including novel valves for modern motor management. It delivers a mutual fertilization of technology push and market pull that should be of interest not only to materials scientists or engineers but also to managers who dedicate themselves to a sound future-oriented R&D policy.

Integration of Functional Oxides with Semiconductors

Author : Alexander A. Demkov
Publisher : Springer Science & Business Media
ISBN 13 : 146149320X
Total Pages : 284 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Integration of Functional Oxides with Semiconductors by : Alexander A. Demkov

Download or read book Integration of Functional Oxides with Semiconductors written by Alexander A. Demkov and published by Springer Science & Business Media. This book was released on 2014-02-20 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.

Dielectric Polymer Nanocomposites

Author : J. Keith Nelson
Publisher : Springer Science & Business Media
ISBN 13 : 1441915915
Total Pages : 374 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Dielectric Polymer Nanocomposites by : J. Keith Nelson

Download or read book Dielectric Polymer Nanocomposites written by J. Keith Nelson and published by Springer Science & Business Media. This book was released on 2009-12-17 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dielectric Polymer Nanocomposites provides the first in-depth discussion of nano-dielectrics, an emerging and fast moving topic in electrical insulation. The text begins with an overview of the background, principles and promise of nanodielectrics, followed by a discussion of the processing of nanocomposites and then proceeds with special considerations of clay based processes, mechanical, thermal and electric properties and surface properties as well as erosion resistance. Carbon nanotubes are discussed as a means of creation of non linear conductivity, the text concludes with a industrial applications perspective.

Piezoelectric Sensors and Actuators

Author : Stefan Johann Rupitsch
Publisher : Springer
ISBN 13 : 3662575345
Total Pages : 566 pages
Book Rating : 4.6/5 (625 download)

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Book Synopsis Piezoelectric Sensors and Actuators by : Stefan Johann Rupitsch

Download or read book Piezoelectric Sensors and Actuators written by Stefan Johann Rupitsch and published by Springer. This book was released on 2018-07-26 with total page 566 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces physical effects and fundamentals of piezoelectric sensors and actuators. It gives a comprehensive overview of piezoelectric materials such as quartz crystals and polycrystalline ceramic materials. Different modeling approaches and methods to precisely predict the behavior of piezoelectric devices are described. Furthermore, a simulation-based approach is detailed which enables the reliable characterization of sensor and actuator materials. One focus of the book lies on piezoelectric ultrasonic transducers. An optical approach is presented that allows the quantitative determination of the resulting sound fields. The book also deals with various applications of piezoelectric sensors and actuators. In particular, the studied application areas are · process measurement technology, · ultrasonic imaging, · piezoelectric positioning systems and · piezoelectric motors. The book addresses students, academic as well as industrial reseachers and development engineers who are concerned with piezoelectric sensors and actuators.

Piezoelectric Nanomaterials for Biomedical Applications

Author : Gianni Ciofani
Publisher : Springer Science & Business Media
ISBN 13 : 3642280447
Total Pages : 250 pages
Book Rating : 4.6/5 (422 download)

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Book Synopsis Piezoelectric Nanomaterials for Biomedical Applications by : Gianni Ciofani

Download or read book Piezoelectric Nanomaterials for Biomedical Applications written by Gianni Ciofani and published by Springer Science & Business Media. This book was released on 2012-03-31 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoscale structures and materials have been explored in many biological applications because of their novel and impressive physical and chemical properties. Such properties allow remarkable opportunities to study and interact with complex biological processes. This book analyses the state of the art of piezoelectric nanomaterials and introduces their applications in the biomedical field. Despite their impressive potentials, piezoelectric materials have not yet received significant attention for bio-applications. This book shows that the exploitation of piezoelectric nanoparticles in nanomedicine is possible and realistic, and their impressive physical properties can be useful for several applications, ranging from sensors and transducers for the detection of biomolecules to “sensible” substrates for tissue engineering or cell stimulation.

Robotic Tactile Sensing

Author : Ravinder S. Dahiya
Publisher : Springer Science & Business Media
ISBN 13 : 9400705794
Total Pages : 258 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Robotic Tactile Sensing by : Ravinder S. Dahiya

Download or read book Robotic Tactile Sensing written by Ravinder S. Dahiya and published by Springer Science & Business Media. This book was released on 2012-07-29 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt: Future robots are expected to work closely and interact safely with real-world objects and humans alike. Sense of touch is important in this context, as it helps estimate properties such as shape, texture, hardness, material type and many more; provides action related information, such as slip detection; and helps carrying out actions such as rolling an object between fingers without dropping it. This book presents an in-depth description of the solutions available for gathering tactile data, obtaining aforementioned tactile information from the data and effectively using the same in various robotic tasks. The efforts during last four decades or so have yielded a wide spectrum of tactile sensing technologies and engineered solutions for both intrinsic and extrinsic touch sensors. Nowadays, new materials and structures are being explored for obtaining robotic skin with physical features like bendable, conformable, and stretchable. Such features are important for covering various body parts of robots or 3D surfaces. Nonetheless, there exist many more hardware, software and application related issues that must be considered to make tactile sensing an effective component of future robotic platforms. This book presents an in-depth analysis of various system related issues and presents the trade-offs one may face while developing an effective tactile sensing system. For this purpose, human touch sensing has also been explored. The design hints coming out of the investigations into human sense of touch can be useful in improving the effectiveness of tactile sensory modality in robotics and other machines. Better integration of tactile sensors on a robot’s body is prerequisite for the effective utilization of tactile data. The concept of semiconductor devices based sensors is an interesting one, as it allows compact and fast tactile sensing systems with capabilities such as human-like spatio-temporal resolution. This book presents a comprehensive description of semiconductor devices based tactile sensing. In particular, novel Piezo Oxide Semiconductor Field Effect Transistor (POSFET) based approach for high resolution tactile sensing has been discussed in detail. Finally, the extension of semiconductors devices based sensors concept to large and flexile areas has been discussed for obtaining robotic or electronic skin. With its multidisciplinary scope, this book is suitable for graduate students and researchers coming from diverse areas such robotics (bio-robots, humanoids, rehabilitation etc.), applied materials, humans touch sensing, electronics, microsystems, and instrumentation. To better explain the concepts the text is supported by large number of figures.

Wafer Bonding

Author : Marin Alexe
Publisher : Springer Science & Business Media
ISBN 13 : 9783540210498
Total Pages : 524 pages
Book Rating : 4.2/5 (14 download)

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Book Synopsis Wafer Bonding by : Marin Alexe

Download or read book Wafer Bonding written by Marin Alexe and published by Springer Science & Business Media. This book was released on 2004-05-14 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.