Development Of A Capacitive Mems Force Sensor For Touchscreen Applications

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Development of a Capacitive MEMS Force Sensor for Touchscreen Applications

Author : ALI OMAR NASSER. BANSS
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (133 download)

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Book Synopsis Development of a Capacitive MEMS Force Sensor for Touchscreen Applications by : ALI OMAR NASSER. BANSS

Download or read book Development of a Capacitive MEMS Force Sensor for Touchscreen Applications written by ALI OMAR NASSER. BANSS and published by . This book was released on 2018 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis presents the design and development of a capacitive MEMS force sensor to overcome the limitations associated with current force sensors used in touchscreens. The sensor uses two elastic materials that provide a dual-range of force sensitivity ensuring the sensor is able to sense light touch forces and able to withstand heavy ones. The fabrication process of the sensor was developed at the Toronto Nano Fabrication Centre at the University of Toronto. The fabricated sensor was experimentally tested to measure forces ranging from 50 mN to 5 N, with a force threshold of 625 mN that defines the boundary between the high sensitive region for light touches and the moderate sensitivity region. Sensor sensitivity was found to be 3.728pF/N (19.12 %∆C/N) in the first force region with maximum nonlinearity of 0.118 pF. In the second region, the sensitivity was 0.3194 pF (3.2 %∆C/N) with maximum nonlinearity of 0.3194 pF.

Development of a Closed-loop MEMS Capacitive Force Sensor

Author : Changhong Guan
Publisher :
ISBN 13 :
Total Pages : 78 pages
Book Rating : 4.:/5 (429 download)

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Book Synopsis Development of a Closed-loop MEMS Capacitive Force Sensor by : Changhong Guan

Download or read book Development of a Closed-loop MEMS Capacitive Force Sensor written by Changhong Guan and published by . This book was released on 2009 with total page 78 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: force-balanced, feedback, capacitive sensor, MEMS.

Development of a Closed-loop MEMS Capacitive Force Sensor

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (656 download)

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Book Synopsis Development of a Closed-loop MEMS Capacitive Force Sensor by :

Download or read book Development of a Closed-loop MEMS Capacitive Force Sensor written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis describes a closed-loop microelectromechanical system (MEMS) based on lumped-parameter modeling. Analytical models are derived for electrostatic comb drive actuator (CDA) under force-controlled actuation, electrothermal actuator (ETA) under displacement-controlled actuation, capacitive position sensor, including parallel plate capacitive sensor (PPCS) and torsional plate capacitive sensor (TPCS), mechanical equation of motion of a suspended shuttle, viscous air damping, folded exure. These models are implemented and simulated in finite element analysis softwares (ANSYS and FEMM). System level simulation, implementing PID difierential feedback loop, is simulated in a numerical simulation program (MATLAB). The MEMS die is fabricated by following the standard PolyMUMPs process by MEMSCAP. A series of MEMS packaging process and storage are done in the lab. All peripheral circuitries are self-made. A commercial capacitive readout IC (MS3110) is first used for open-loop capacitive sensing, which achieves the resolution of 0.05fF, equivalent to 1nm in displacement. Due to the disadvantage of MS3110 in closed-loop, AC bridge capacitance measurement method is then implemented for closed-loop integration. The resolution of AC bridge sensor reaches 0.02fF, equivalent to 0.4nm in displacement. An additional function of AC bridge sensing is accomplished which is simultaneously sensing and actuation of CDA. In the feedback loop, the traditional analog PID controller is designed to transfer the voltage signal of capacitance measurement to the voltage-force transducer which converts feedback voltages to differential feedback force. Since the differential feedback force is limited by clamped voltage, a force-balanced mode is observed under 5V actuation of CDA.

Capacitive Sensors

Author : Larry K. Baxter
Publisher : Institute of Electrical & Electronics Engineers(IEEE)
ISBN 13 :
Total Pages : 328 pages
Book Rating : 4.3/5 (97 download)

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Book Synopsis Capacitive Sensors by : Larry K. Baxter

Download or read book Capacitive Sensors written by Larry K. Baxter and published by Institute of Electrical & Electronics Engineers(IEEE). This book was released on 1997 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: Capacitive sensors produce spectacular resolution of movement to one part in 10-10 meters and maintain exceptional long-term stability in hostile environments. They are increasingly used for a variety of jobs in consumer and industrial equipment, including wall stud sensors, keypads, lamp dimmers, micrometers, calipers, rotation encoders, and more. The most focused, authoritative book available in the field, "Capacitive Sensors" brings you complete information on the research, design, and production of capacitive sensors. This all-in-one source provides detailed, comprehensive coverage of key topics, including underlying theory, electrode configuration, and practical circuits. In addition, you'll find reviews of a number of tested systems never before published. "Capacitive Sensors" is a must-have for product designers and mechanical and electrical engineers interested in using this fast-developing technology to get top price and performance advantages.

Three Dimensional Capacitive Force Sensor for Tactile Applications

Author : Jose Gerardo Rocha
Publisher :
ISBN 13 : 9789537619312
Total Pages : pages
Book Rating : 4.6/5 (193 download)

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Book Synopsis Three Dimensional Capacitive Force Sensor for Tactile Applications by : Jose Gerardo Rocha

Download or read book Three Dimensional Capacitive Force Sensor for Tactile Applications written by Jose Gerardo Rocha and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A three dimensional capacitive force sensor for tactile applications has been presented. In order to better understand its capabilities, the different technologies developed in order to achieve tactile sensors have been reviewed. In this way, electromagnetic, piezoelectric, resistive and piezoresistive based tactile sensors have been discussed. Finally, the three dimensional capacitive force sensor has been presented. In a first stage, the theoretical description of the sensor has been developed through the simulation of the sensor response to forces applied along different directions. Finally, the readout electronics for capacitive sensors in general and for the three dimensional capacitive sensor has been shown. As a conclusion, capacitive sensors allow an easy and low-cost fabrication of a flexible and precise three-dimensional force sensor suitable for tactile applications.

Modeling and simulation of the capacitive accelerometer

Author : Tan Tran Duc
Publisher : GRIN Verlag
ISBN 13 : 3640249593
Total Pages : 83 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Modeling and simulation of the capacitive accelerometer by : Tan Tran Duc

Download or read book Modeling and simulation of the capacitive accelerometer written by Tan Tran Duc and published by GRIN Verlag. This book was released on 2009-01-19 with total page 83 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diploma Thesis from the year 2005 in the subject Electrotechnology, grade: Master 9.8/10, , language: English, abstract: Microelectromechanical systems (MEMS) are collection of microsensors and actuators that have the ability to sense its environment and react to changes in that environment with the use of a microcircuit control. They also include the conventional microelectronics packaging, integrating antenna structures for command signals into microelectromechanical structures for desired sensing and actuating functions. The system may also need micropower supply, microrelay, and microsignal processing units. Microcomponents make the system faster, more reliable, cheaper, and capable of incorporating more complex functions. In the beginning of 1990s, MEMS appeared with the aid of the development of integrated circuit fabrication processes, in which sensors, actuators, and control functions are co-fabricated in silicon [1]. Since then, remarkable research progresses have been achieved in MEMS under the strong promotions from both government and industries. In addition to the commercialization of some less integrated MEMS devices, such as microaccelerometers, inkjet printer head, micromirrors for projection, etc., the concepts and feasibility of more complex MEMS devices have been proposed and demonstrated for the applications in such varied fields as microfluidics, aerospace, biomedical, chemical analysis, wireless communications, data storage, display, optics, etc. Some branches of MEMS, appearing as microoptoelectromechanical systems (MOEMS), micro total analysis systems, etc., have attracted a great research since their potential applications’ market.

Mems Silicon Oscillating Accelerometers and Readout Circuits

Author : Yong Ping Xu
Publisher : River Publishers
ISBN 13 : 9788770229661
Total Pages : 0 pages
Book Rating : 4.2/5 (296 download)

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Book Synopsis Mems Silicon Oscillating Accelerometers and Readout Circuits by : Yong Ping Xu

Download or read book Mems Silicon Oscillating Accelerometers and Readout Circuits written by Yong Ping Xu and published by River Publishers. This book was released on 2023-05-31 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Design and Fabrication of a 3-Dimensional Capacitive-based Force Sensor

Author : Md Shafiqur Rahman
Publisher :
ISBN 13 :
Total Pages : 238 pages
Book Rating : 4.:/5 (127 download)

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Book Synopsis Design and Fabrication of a 3-Dimensional Capacitive-based Force Sensor by : Md Shafiqur Rahman

Download or read book Design and Fabrication of a 3-Dimensional Capacitive-based Force Sensor written by Md Shafiqur Rahman and published by . This book was released on 2020 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Design of a Three-component Force Sensor for Meso-milling Applications

Author : Fu Shao
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (13 download)

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Book Synopsis Design of a Three-component Force Sensor for Meso-milling Applications by : Fu Shao

Download or read book Design of a Three-component Force Sensor for Meso-milling Applications written by Fu Shao and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Springer Handbook of Robotics

Author : Bruno Siciliano
Publisher : Springer Science & Business Media
ISBN 13 : 354023957X
Total Pages : 1626 pages
Book Rating : 4.5/5 (42 download)

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Book Synopsis Springer Handbook of Robotics by : Bruno Siciliano

Download or read book Springer Handbook of Robotics written by Bruno Siciliano and published by Springer Science & Business Media. This book was released on 2008-05-20 with total page 1626 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the science of robotics undergoing a major transformation just now, Springer’s new, authoritative handbook on the subject couldn’t have come at a better time. Having broken free from its origins in industry, robotics has been rapidly expanding into the challenging terrain of unstructured environments. Unlike other handbooks that focus on industrial applications, the Springer Handbook of Robotics incorporates these new developments. Just like all Springer Handbooks, it is utterly comprehensive, edited by internationally renowned experts, and replete with contributions from leading researchers from around the world. The handbook is an ideal resource for robotics experts but also for people new to this expanding field.

Printed Flexible Sensors

Author : Anindya Nag
Publisher : Springer
ISBN 13 : 3030137651
Total Pages : 198 pages
Book Rating : 4.0/5 (31 download)

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Book Synopsis Printed Flexible Sensors by : Anindya Nag

Download or read book Printed Flexible Sensors written by Anindya Nag and published by Springer. This book was released on 2019-03-11 with total page 198 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents recent advances in the design, fabrication and implementation of flexible printed sensors. It explores a range of materials for developing the electrode and substrate parts of the sensors, on the basis of their electrical and mechanical characteristics. The sensors were processed using laser cutting and 3D printing techniques, and the sensors developed were employed in a number of healthcare, environmental and industrial applications, including: monitoring of physiological movements, respiration, salinity and nitrate measurement, and tactile sensing. The type of sensor selected for each application depended on its dimensions, robustness and sensitivity. The sensors fabricated were also embedded in an IoT-based system, allowing them to be integrated into real-time applications.

Robotic Tactile Sensing

Author : Ravinder S. Dahiya
Publisher : Springer Science & Business Media
ISBN 13 : 9400705794
Total Pages : 258 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Robotic Tactile Sensing by : Ravinder S. Dahiya

Download or read book Robotic Tactile Sensing written by Ravinder S. Dahiya and published by Springer Science & Business Media. This book was released on 2012-07-29 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt: Future robots are expected to work closely and interact safely with real-world objects and humans alike. Sense of touch is important in this context, as it helps estimate properties such as shape, texture, hardness, material type and many more; provides action related information, such as slip detection; and helps carrying out actions such as rolling an object between fingers without dropping it. This book presents an in-depth description of the solutions available for gathering tactile data, obtaining aforementioned tactile information from the data and effectively using the same in various robotic tasks. The efforts during last four decades or so have yielded a wide spectrum of tactile sensing technologies and engineered solutions for both intrinsic and extrinsic touch sensors. Nowadays, new materials and structures are being explored for obtaining robotic skin with physical features like bendable, conformable, and stretchable. Such features are important for covering various body parts of robots or 3D surfaces. Nonetheless, there exist many more hardware, software and application related issues that must be considered to make tactile sensing an effective component of future robotic platforms. This book presents an in-depth analysis of various system related issues and presents the trade-offs one may face while developing an effective tactile sensing system. For this purpose, human touch sensing has also been explored. The design hints coming out of the investigations into human sense of touch can be useful in improving the effectiveness of tactile sensory modality in robotics and other machines. Better integration of tactile sensors on a robot’s body is prerequisite for the effective utilization of tactile data. The concept of semiconductor devices based sensors is an interesting one, as it allows compact and fast tactile sensing systems with capabilities such as human-like spatio-temporal resolution. This book presents a comprehensive description of semiconductor devices based tactile sensing. In particular, novel Piezo Oxide Semiconductor Field Effect Transistor (POSFET) based approach for high resolution tactile sensing has been discussed in detail. Finally, the extension of semiconductors devices based sensors concept to large and flexile areas has been discussed for obtaining robotic or electronic skin. With its multidisciplinary scope, this book is suitable for graduate students and researchers coming from diverse areas such robotics (bio-robots, humanoids, rehabilitation etc.), applied materials, humans touch sensing, electronics, microsystems, and instrumentation. To better explain the concepts the text is supported by large number of figures.

Data Analytics and Applications of the Wearable Sensors in Healthcare

Author : Shabbir Syed-Abdul
Publisher : MDPI
ISBN 13 : 3039363506
Total Pages : 498 pages
Book Rating : 4.0/5 (393 download)

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Book Synopsis Data Analytics and Applications of the Wearable Sensors in Healthcare by : Shabbir Syed-Abdul

Download or read book Data Analytics and Applications of the Wearable Sensors in Healthcare written by Shabbir Syed-Abdul and published by MDPI. This book was released on 2020-06-17 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a collection of comprehensive research articles on data analytics and applications of wearable devices in healthcare. This Special Issue presents 28 research studies from 137 authors representing 37 institutions from 19 countries. To facilitate the understanding of the research articles, we have organized the book to show various aspects covered in this field, such as eHealth, technology-integrated research, prediction models, rehabilitation studies, prototype systems, community health studies, ergonomics design systems, technology acceptance model evaluation studies, telemonitoring systems, warning systems, application of sensors in sports studies, clinical systems, feasibility studies, geographical location based systems, tracking systems, observational studies, risk assessment studies, human activity recognition systems, impact measurement systems, and a systematic review. We would like to take this opportunity to invite high quality research articles for our next Special Issue entitled “Digital Health and Smart Sensors for Better Management of Cancer and Chronic Diseases” as a part of Sensors journal.

Augmented Reality in Educational Settings

Author :
Publisher : BRILL
ISBN 13 : 9004408843
Total Pages : 475 pages
Book Rating : 4.0/5 (44 download)

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Book Synopsis Augmented Reality in Educational Settings by :

Download or read book Augmented Reality in Educational Settings written by and published by BRILL. This book was released on 2019-11-11 with total page 475 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is intended to provide teachers and researchers with a wide range of ideas from researchers working to integrate the new technology of Augmented Reality into educational settings and processes.

Capacitively-Coupled Chopper Amplifiers

Author : Qinwen Fan
Publisher : Springer
ISBN 13 : 3319473913
Total Pages : 129 pages
Book Rating : 4.3/5 (194 download)

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Book Synopsis Capacitively-Coupled Chopper Amplifiers by : Qinwen Fan

Download or read book Capacitively-Coupled Chopper Amplifiers written by Qinwen Fan and published by Springer. This book was released on 2016-11-21 with total page 129 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the concept and design of the capacitively-coupled chopper technique, which can be used in precision analog amplifiers. Readers will learn to design power-efficient amplifiers employing this technique, which can be powered by regular low supply voltage such as 2V and possibly having a +/-100V input common-mode voltage input. The authors provide both basic design concepts and detailed design examples, which cover the area of both operational and instrumentation amplifiers for multiple applications, particularly in power management and biomedical circuit designs.

Micro Mechanical Transducers

Author : Min-hang Bao
Publisher : Elsevier
ISBN 13 : 0080524036
Total Pages : 393 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Micro Mechanical Transducers by : Min-hang Bao

Download or read book Micro Mechanical Transducers written by Min-hang Bao and published by Elsevier. This book was released on 2000-10-16 with total page 393 pages. Available in PDF, EPUB and Kindle. Book excerpt: Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.

A Flexible Multi-Functional Touch Panel for Multi-Dimensional Sensing in Interactive Displays

Author : Shuo Gao
Publisher : Cambridge University Press
ISBN 13 : 1108735312
Total Pages : 85 pages
Book Rating : 4.1/5 (87 download)

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Book Synopsis A Flexible Multi-Functional Touch Panel for Multi-Dimensional Sensing in Interactive Displays by : Shuo Gao

Download or read book A Flexible Multi-Functional Touch Panel for Multi-Dimensional Sensing in Interactive Displays written by Shuo Gao and published by Cambridge University Press. This book was released on 2019-05-30 with total page 85 pages. Available in PDF, EPUB and Kindle. Book excerpt: Touch screen panels (TSPs) have become an integral part of modern-day lifestyle. To enhance user experience, attributes such as form-factor flexibility, multi-dimensional sensing, low power consumption and low cost have become highly desirable. This Element addresses the design of multi-functional TSPs with integrated concurrent capture of ubiquitous capacitive touch signals and force information. It compares and contrasts interactive technologies and presents design considerations for multi-dimensional touch screens with high detection sensitivity, accuracy and resolution.