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Design Fabrication And Characterization Of A Compact Magnetron Sputtering System For Micro Nano Fabrication
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Book Synopsis Design, Fabrication, and Characterization of a Compact Magnetron Sputtering System for Micro/nano Fabrication by : Mitchell David Hsing
Download or read book Design, Fabrication, and Characterization of a Compact Magnetron Sputtering System for Micro/nano Fabrication written by Mitchell David Hsing and published by . This book was released on 2019 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt: A general rule of thumb for new semiconductor fabrication facilities (fabs) is that revenues from the first year of production must match the capital cost of building the fab itself. With modem fabs routinely exceeding $1 billion to build, this rule serves as a significant barrier to entry for groups seeking to commercialize new semiconductor devices aimed at smaller market segments which require a dedicated process. To address this gap in the industry, we are developing a I" Fab line of dedicated tools which processes small 1-2" wafers and feature the same functionality as large-scale commercial micro/nano fabrication tools, but with a significant reduction in cost and footprint. To enable the envisioned 1" Fab a reality, this thesis describes the design, development and testing of a sputtering physical vapor deposition tool, a critical tool in the 1" Fab line of tools. The tool is designed to be compatible with the 1" Fab's four-module, modular tool infrastructure, and also to allow for sharing of its peripheral equipment with other components of the 1" Fab. The modularity feature allows for multiple tools be created using an interchangeable tool platform while the shared backend equipment feature allows for a sizable cost-saving benefit, as the cost of peripheral equipment for any given tool is up to 70% of the tool's total cost. Our developed sputtering tool features the successful implementation of these two design components with a final build cost of around $25k - roughly one-seventh of the cost of a commercial tool. The sputtering tool's performance was fully characterized for both reactive and nonreactive sputtering processes. The tool's non-reactive metal depositions were examined in detail using a design of experiment response surface model. Deposition rates of up to 5.5 A/s were observed while maintaining a uniformity of ~3% across the wafer. Utilizing a direct sputter technique, this represents a deposition rate that is 4x faster than state of the practice tools while also attaining the same level of uniformity. Alongside the development of metal depositions processes, the reactive sputtering capabilities of the tool were also demonstrated through successful process development for the deposition of Aluminum Nitride (AlN). Three unique operation regions, for AlN reactive sputtering were discovered with the highest quality AlN depositions observed in transition region. Stable and repeatable depositions were achieved via the development of two control methods - voltage control and flow control. Using this optimized process, highly c-axis aligned films with columnar growth structures were observed indicating the production of high quality AlN films. This successfully developed tool alongside its optimized processes is well suited for integration into the 1" Fab, further enabling the realization of our envisioned low-cost micro/nano fabrication platform.
Book Synopsis Design, Fabrication, and Characterization of Magnetic Nanostructures by : David Claudio Gonzalez
Download or read book Design, Fabrication, and Characterization of Magnetic Nanostructures written by David Claudio Gonzalez and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fabrication and Characterization of Aluminum Nitride Thin Films Deposited by RF Magnetron Sputtering by : William A. Carrington
Download or read book Fabrication and Characterization of Aluminum Nitride Thin Films Deposited by RF Magnetron Sputtering written by William A. Carrington and published by . This book was released on 1991 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Nano-Energetic Materials by : Shantanu Bhattacharya
Download or read book Nano-Energetic Materials written by Shantanu Bhattacharya and published by Springer. This book was released on 2018-11-09 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the latest research on the area of nano-energetic materials, their synthesis, fabrication, patterning, application and integration with various MEMS systems and platforms. Keeping in mind the applications for this field in aerospace and defense sectors, the articles in this volume contain contributions by leading researchers in the field, who discuss the current challenges and future perspectives. This volume will be of use to researchers working on various applications of high-energy research.
Book Synopsis Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting by : Xiao-Sheng Zhang
Download or read book Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting written by Xiao-Sheng Zhang and published by Springer. This book was released on 2019-03-27 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
Book Synopsis Fabrication and Characterization of Silicon Nitride Thin Film Planar Waveguides Produced by RF Magnetron Sputtering Technique by : Uzair Majeed
Download or read book Fabrication and Characterization of Silicon Nitride Thin Film Planar Waveguides Produced by RF Magnetron Sputtering Technique written by Uzair Majeed and published by . This book was released on 2016 with total page 125 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi
Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Book Synopsis Manufacturing Techniques for Microfabrication and Nanotechnology by : Marc J. Madou
Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Book Synopsis Micro/Nano Manufacturing by : André Zimmermann
Download or read book Micro/Nano Manufacturing written by André Zimmermann and published by MDPI. This book was released on 2019-09-03 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro manufacturing involves dealing with the fabrication of structures in the size range of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales—below 100 nm. A strict borderline between micro and nano manufacturing can hardly be drawn, such that both domains are treated as complementary and mutually beneficial within a closely interconnected scientific community. Both micro and nano manufacturing can be considered as important enablers for high-end products. This Special Issue of Applied Sciences is dedicated to recent advances in research and development within the field of micro and nano manufacturing. The included papers report recent findings and advances in manufacturing technologies for producing products with micro and nano scale features and structures as well as applications underpinned by the advances in these technologies.
Book Synopsis Thin Film Solar Cells by : Jef Poortmans
Download or read book Thin Film Solar Cells written by Jef Poortmans and published by John Wiley & Sons. This book was released on 2006-10-16 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin-film solar cells are either emerging or about to emerge from the research laboratory to become commercially available devices finding practical various applications. Currently no textbook outlining the basic theoretical background, methods of fabrication and applications currently exist. Thus, this book aims to present for the first time an in-depth overview of this topic covering a broad range of thin-film solar cell technologies including both organic and inorganic materials, presented in a systematic fashion, by the scientific leaders in the respective domains. It covers a broad range of related topics, from physical principles to design, fabrication, characterization, and applications of novel photovoltaic devices.
Book Synopsis Transducers and Arrays for Underwater Sound by : Charles Sherman
Download or read book Transducers and Arrays for Underwater Sound written by Charles Sherman and published by Springer Science & Business Media. This book was released on 2007-01-05 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most comprehensive book on electroacoustic transducers and arrays for underwater sound Includes transducer modeling techniques and transducer designs that are currently in use Includes discussion and analysis of array interaction and nonlinear effects in transducers Contains extensive data in figures and tables needed in transducer and array design Written at a level that will be useful to students as well as to practicing engineers and scientists
Book Synopsis Electrical & Electronics Abstracts by :
Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1997 with total page 1904 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2540 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microfabrication and Nanomanufacturing by : Mark J. Jackson
Download or read book Microfabrication and Nanomanufacturing written by Mark J. Jackson and published by CRC Press. This book was released on 2005-11-10 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Book Synopsis Integrated Ring Resonators by : Dominik G. Rabus
Download or read book Integrated Ring Resonators written by Dominik G. Rabus and published by Springer. This book was released on 2007-04-26 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt: The optical filter is resonator based. The required passband shape of ring resonator-filters can be custom designed by the use of configurations of various ring coupled resonators. This book describes the current state-of-the-art on these devices. It provides an in-depth knowledge of the simulation, fabrication and characterization of ring resonators for use as example filters, lasers, sensors.
Book Synopsis Silicon-Based Hybrid Nanoparticles by : Sabu Thomas
Download or read book Silicon-Based Hybrid Nanoparticles written by Sabu Thomas and published by Elsevier. This book was released on 2021-09-24 with total page 391 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon-Based Hybrid Nanoparticles: Fundamentals, Properties, and Applications focuses on the fundamental principles and promising applications of silicon-based hybrid nanoparticles in nanoelectronics, energy storage/conversion, catalysis, sensors, biomedicine, environment and imaging. This book is an important reference source for materials scientists and engineers who are seeking to understand more about the major properties and applications of silicon-based hybrid nanoparticles. As the hybridization of silicon nanoparticles with other semiconductors or metal oxides nanoparticles may exhibit superior features, when compared to lone, individual nanoparticles, this book provides the latest insights. In addition, the silicon/iron oxide hybrid nanoparticles also possess excellent fluorescence, super-paramagnetism, and biocompatibility that can be effectively used for the diagnostic imaging system in vivo. Similarly, gold-silicon nanohybrids could be used as highly efficient near-infrared hyperthermia agents for cancer cell destruction. Outlines the major thermal, electrical, optical, magnetic and toxic properties of silicon-based hybrid nanoparticles Describes major applications in energy, environmental science and catalysis Assesses the major challenges to manufacturing silicon-based nanostructured materials on an industrial scale
Book Synopsis Microfluidic Devices for Biomedical Applications by : Xiujun James Li
Download or read book Microfluidic Devices for Biomedical Applications written by Xiujun James Li and published by Woodhead Publishing. This book was released on 2013-10-31 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfluidics or lab-on-a-chip (LOC) is an important technology suitable for numerous applications from drug delivery to tissue engineering. Microfluidic devices for biomedical applications discusses the fundamentals of microfluidics and explores in detail a wide range of medical applications. The first part of the book reviews the fundamentals of microfluidic technologies for biomedical applications with chapters focussing on the materials and methods for microfabrication, microfluidic actuation mechanisms and digital microfluidic technologies. Chapters in part two examine applications in drug discovery and controlled-delivery including micro needles. Part three considers applications of microfluidic devices in cellular analysis and manipulation, tissue engineering and their role in developing tissue scaffolds and stem cell engineering. The final part of the book covers the applications of microfluidic devices in diagnostic sensing, including genetic analysis, low-cost bioassays, viral detection, and radio chemical synthesis. Microfluidic devices for biomedical applications is an essential reference for medical device manufacturers, scientists and researchers concerned with microfluidics in the field of biomedical applications and life-science industries.
