Deposition Techniques

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Film Deposition by Plasma Techniques

Author : Mitsuharu Konuma
Publisher : Springer Science & Business Media
ISBN 13 : 3642845118
Total Pages : 234 pages
Book Rating : 4.6/5 (428 download)

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Book Synopsis Film Deposition by Plasma Techniques by : Mitsuharu Konuma

Download or read book Film Deposition by Plasma Techniques written by Mitsuharu Konuma and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: Properties of thin films depend strongly upon the deposition technique and conditions chosen. In order to achieve the desired film, optimum deposition conditions have to be found by carrying out experiments in a trial-and error fashion with varying parameters. The data obtained on one growth apparatus are often not transferable to another. This is especially true for film deposition processes using a cold plasma because of our poor under standing of the mechanisms. Relatively precise studies have been carried out on the role that physical effects play in film formation such as sputter deposition. However, there are many open questions regarding processes that involve chemical reactions, for example, reactive sputter deposition or plasma enhanced chemical vapor deposition. Much further research is re quired in order to understand the fundamental deposition processes. A sys tematic collection of basic data, some of which may be readily available in other branches of science, for example, reaction cross sections for gases with energetic electrons, is also required. The need for pfasma deposition techniques is felt strongly in industrial applications because these techniques are superior to traditional thin-film deposition techniques in many ways. In fact, plasma deposition techniques have developed rapidly in the semiconductor and electronics industries. Fields of possible application are still expanding. A reliable plasma reactor with an adequate in situ system for monitoring the deposition conditions and film properties must be developed to improve reproducibility and pro ductivity at the industrial level.

Effective Deposition

Author : David M. Malone
Publisher : Ntl Inst for Trial Advocacy
ISBN 13 : 9781601560476
Total Pages : 450 pages
Book Rating : 4.5/5 (64 download)

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Book Synopsis Effective Deposition by : David M. Malone

Download or read book Effective Deposition written by David M. Malone and published by Ntl Inst for Trial Advocacy. This book was released on 2007 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Physical Vapor Deposition (PVD) Processing

Author : D. M. Mattox
Publisher : Cambridge University Press
ISBN 13 : 0080946585
Total Pages : 947 pages
Book Rating : 4.0/5 (89 download)

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Book Synopsis Handbook of Physical Vapor Deposition (PVD) Processing by : D. M. Mattox

Download or read book Handbook of Physical Vapor Deposition (PVD) Processing written by D. M. Mattox and published by Cambridge University Press. This book was released on 2014-09-19 with total page 947 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Handbook of Thin-film Deposition Processes and Techniques

Author : Krishna Seshan
Publisher :
ISBN 13 : 9786612253195
Total Pages : 629 pages
Book Rating : 4.2/5 (531 download)

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Book Synopsis Handbook of Thin-film Deposition Processes and Techniques by : Krishna Seshan

Download or read book Handbook of Thin-film Deposition Processes and Techniques written by Krishna Seshan and published by . This book was released on 2002 with total page 629 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

Author : Krishna Seshan
Publisher : CRC Press
ISBN 13 : 1482269686
Total Pages : 72 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by : Krishna Seshan

Download or read book Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon written by Krishna Seshan and published by CRC Press. This book was released on 2002-02-01 with total page 72 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

Handbook of Deposition Technologies for Films and Coatings

Author : Peter M. Martin
Publisher : William Andrew
ISBN 13 : 0815520328
Total Pages : 932 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Handbook of Deposition Technologies for Films and Coatings by : Peter M. Martin

Download or read book Handbook of Deposition Technologies for Films and Coatings written by Peter M. Martin and published by William Andrew. This book was released on 2009-12-01 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.

Advanced Nano Deposition Methods

Author : Yuan Lin
Publisher : John Wiley & Sons
ISBN 13 : 3527696458
Total Pages : 328 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Advanced Nano Deposition Methods by : Yuan Lin

Download or read book Advanced Nano Deposition Methods written by Yuan Lin and published by John Wiley & Sons. This book was released on 2016-08-29 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in detail. Following an introduction to this rapidly developing field, the authors present a variety of organic and inorganic materials along with new deposition techniques, and conclude with an overview of applications and considerations for their technology deployment.

Handbook of Sputter Deposition Technology

Author : Kiyotaka Wasa
Publisher : William Andrew
ISBN 13 : 1437734847
Total Pages : 657 pages
Book Rating : 4.4/5 (377 download)

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Book Synopsis Handbook of Sputter Deposition Technology by : Kiyotaka Wasa

Download or read book Handbook of Sputter Deposition Technology written by Kiyotaka Wasa and published by William Andrew. This book was released on 2012-12-31 with total page 657 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

Tribology and Characterization of Surface Coatings

Author : Sarfraj Ahmed
Publisher : John Wiley & Sons
ISBN 13 : 1119818850
Total Pages : 300 pages
Book Rating : 4.1/5 (198 download)

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Book Synopsis Tribology and Characterization of Surface Coatings by : Sarfraj Ahmed

Download or read book Tribology and Characterization of Surface Coatings written by Sarfraj Ahmed and published by John Wiley & Sons. This book was released on 2022-01-07 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: TRIBOLOGY AND CHARACTERIZATION OF SURFACE COATINGS The book provides updated information on the friction and wear behavior of coatings used in various industrial applications. Surface modification is a cost-effective process of increasing the life of components so that the whole device need not be changed if the surface is worn out. The tribological behavior of biological implants is currently an active topic and a thorough discussion is one of the book’s features. Tribology and Characterization of Surface Coatings explores key issues which are important in the research and development of surface coatings by providing updated information on friction and wear behavior of coatings used in different industrial applications. It covers the various coating deposition techniques, tribological response of nanocomposite coatings, multilayer hardfacing, and wear testing methods for coatings at nanoscale. The use of nanostructures may alter the tribological, characterization, and mechanical properties of the materials. Thermal spraying is the most widely used technique in industry for the deposition of coatings and their tribological properties need to be determined. This book also includes the recent trends in biotribology and the materials used in implants to counter the abrasive wear. Audience The book will serve as a reference to researchers, scientists, academicians, industrial engineers, and students who work in the fields of materials/polymer science and mechanical engineering. Apart from their applications to aerospace and electronics industries, the coatings are also used in the field of biomedical engineering.

Deposition Questioning Strategies and Techniques

Author : David A. Binder
Publisher : West Academic Publishing
ISBN 13 :
Total Pages : 416 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Deposition Questioning Strategies and Techniques by : David A. Binder

Download or read book Deposition Questioning Strategies and Techniques written by David A. Binder and published by West Academic Publishing. This book was released on 2001 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides descriptions and illustrations of effective strategies and techniques for taking and defending depositions. Designed to serve as a text for a 2-4 unit stand-alone depositions course or as a supplement to a civil pre-trial lawyering course. Devotes separate chapters to such fundamental skills as obtaining helpful answers to critical questions, undercutting harmful testimony, obtaining a deponent's version of significant events, and obtaining information from evasive deponents. Other chapters include topics such as responding to inconsistent or implausible testimony, overcoming opposing counsel's objections and obstructionist tactics, and preparing a client to be deposed.

Chemical Solution Deposition of Functional Oxide Thin Films

Author : Theodor Schneller
Publisher : Springer Science & Business Media
ISBN 13 : 3211993118
Total Pages : 801 pages
Book Rating : 4.2/5 (119 download)

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Book Synopsis Chemical Solution Deposition of Functional Oxide Thin Films by : Theodor Schneller

Download or read book Chemical Solution Deposition of Functional Oxide Thin Films written by Theodor Schneller and published by Springer Science & Business Media. This book was released on 2014-01-24 with total page 801 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered.

The Effective Deposition

Author : Carl W. Chamberlin
Publisher : Aspen Publishing
ISBN 13 : 1601569750
Total Pages : 622 pages
Book Rating : 4.6/5 (15 download)

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Book Synopsis The Effective Deposition by : Carl W. Chamberlin

Download or read book The Effective Deposition written by Carl W. Chamberlin and published by Aspen Publishing. This book was released on 2023-12-06 with total page 622 pages. Available in PDF, EPUB and Kindle. Book excerpt: In an era when most cases settle before trial, taking depositions is a crucial skill that every attorney must master. The Effective Deposition will prepare you to successfully take, defend, and use the deposition to its greatest advantage. Advocates and law students have long relied on The Effective Deposition to get essential know-how for the most critical step in discovery. Now in its sixth edition, The Effective Deposition is completely rewritten to reflect the latest deposition strategies, technological advances, changes in the laws of evidence and procedure, and the evolving nature of deposition-taking itself. This updated classic is a must for students and practitioners alike. New to the Sixth Edition: Remote depositions: advantages and disadvantages; a protocol for using them; tips for preparing, taking, and defending them; and the emerging law Options for integrating the latest technology before and during the deposition Latest legal trends and updates to the Federal Rules of Civil Procedure and Federal Rules of Evidence End-of-chapter checklists summarizing the essential techniques and strategies of the chapter New chapter on dealing with common witness behaviors (forgetful, know-nothing, evasive, vague, lying, or combative witnesses) New chapter on preliminary matters to cover with the witness Streamlined approach and options for using the Funnel Method to obtain information from the witness Updated examples of deposition questions that implement the techniques and skills Succinct discussion of ethics and privilege in witness preparation Professors and students will benefit from: Step-by-step coverage of the deposition process, including case analysis, substantive preparation and logistics, taking and defending the deposition, and using the deposition testimony in motions or at trial Coverage of deposition basics for those who have taken few if any depositions, as well as advanced techniques and strategy options Examples of questions that illustrate the skills and techniques of each chapter Checklists that summarize the key points of the chapters dealing with skills and strategy Access to videos demonstrating the most critical techniques and skills The Funnel Method and other techniques for obtaining information in a deposition The “one-concept, three rules” approach to witness preparation Latest laws and practices for post-pandemic depositions Real-world application of the legal rules in using exhibits, evidentiary foundations, objections and instructions, and dealing with opposing counsel Extended coverage of Rule 30(b)(6), expert witnesses, and video and remote depositions

Handbook of Thin Film Deposition Processes and Techniques

Author : Krishna Seshan
Publisher : William Andrew
ISBN 13 : 0815517785
Total Pages : 430 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Handbook of Thin Film Deposition Processes and Techniques by : Krishna Seshan

Download or read book Handbook of Thin Film Deposition Processes and Techniques written by Krishna Seshan and published by William Andrew. This book was released on 2001-02-01 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Thin Film Deposition

Author : Krishna Seshan
Publisher : William Andrew
ISBN 13 : 0128123125
Total Pages : 472 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Handbook of Thin Film Deposition by : Krishna Seshan

Download or read book Handbook of Thin Film Deposition written by Krishna Seshan and published by William Andrew. This book was released on 2018-02-23 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries Features a new chapter discussing Gates Dielectrics

Nanophotonic Fabrication

Author : Takashi Yatsui
Publisher : Springer Science & Business Media
ISBN 13 : 3642241727
Total Pages : 130 pages
Book Rating : 4.6/5 (422 download)

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Book Synopsis Nanophotonic Fabrication by : Takashi Yatsui

Download or read book Nanophotonic Fabrication written by Takashi Yatsui and published by Springer Science & Business Media. This book was released on 2012-04-12 with total page 130 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanophotonics, a novel optical technology, utilizes the local interaction between nanometric particles via optical near fields. The optical near fields are the elementary surface excitations on nanometric particles, i.e. dressed photons that carry material energy. Of the variety of qualitative innovations in optical technology realized by nanophotonics, this books focuses on fabrication. To fabricate nano-scale photonic devices with nanometer-scale controllability in size and position, we developed a self-assembly method for size- and position-controlled ultra-long nanodot chains using a novel effect of near-field optical desorption. A novel deposition and etching scheme under nonresonant conditions is also demonstrated and its origin is reviewed.

Effective Deposition

Author : Peter T. Hoffman
Publisher : Aspen Publishing
ISBN 13 : 1601567758
Total Pages : 690 pages
Book Rating : 4.6/5 (15 download)

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Book Synopsis Effective Deposition by : Peter T. Hoffman

Download or read book Effective Deposition written by Peter T. Hoffman and published by Aspen Publishing. This book was released on 2018-10-05 with total page 690 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Effective Deposition will prepare you to successfully take, defend, and use the deposition to its greatest advantage. Advocates and law students have long relied on The Effective Deposition to get essential know-how for the most critical step in discovery. In this updated fifth edition, Peter Hoffman carries on the tradition he and his co-author, the late David Malone, established of using their expertise as attorneys and educators to bring you critical information and insight. Hoffman explains new discovery rules in evidence and civil procedure, and discusses the impact of continuing technological developments, including e-discovery and digital transcription, on your practice. This edition cites to the Federal Rules of Civil Procedure, as amended to December 2017. Depositions remain a critical element of your practice, regardless of whether you face trial or alternative dispute resolution. With the increasing trend toward non-trial resolutions, depositions are being used more and more in motions, negotiated settlements, mediations, arbitrations, and dismissals. Be prepared for it all with The Effective Deposition.

The Effective Deposition

Author : David M. Malone
Publisher : Aspen Publishing
ISBN 13 : 160156774X
Total Pages : 602 pages
Book Rating : 4.6/5 (15 download)

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Book Synopsis The Effective Deposition by : David M. Malone

Download or read book The Effective Deposition written by David M. Malone and published by Aspen Publishing. This book was released on 2018-10-05 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: "[This book] explains new discovery rules in evidence and civil procedure, and discusses the impact of continuing technological developments, including e-discovery and digital transcription, on your practice. This edition cites to the Federal Rules of Civil Procedure, as amended to December 2017. Depositions remain a critical element of your practice, regardless of whether you face trial or alternative dispute resolution. With the increasing trend toward non-trial resolutions, depositions are being used more and more in motions, negotiated settlements, mediations, arbitrations, and dismissals."--