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Author : Shiang-Bau Wang
Publisher :
ISBN 13 :
Total Pages : 212 pages
Book Rating : 4.:/5 (89 download)
Download or read book Control of Ion Energy at the Substrates During Plasma Processing written by Shiang-Bau Wang and published by . This book was released on 1999 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 680 pages
Book Rating : 4.3/5 (91 download)
Download or read book Proceedings of the ... Symposium on Plasma Processing written by and published by . This book was released on 1992 with total page 680 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : P.F. Williams
Publisher : Springer Science & Business Media
ISBN 13 : 9401158843
Total Pages : 610 pages
Book Rating : 4.4/5 (11 download)
Download or read book Plasma Processing of Semiconductors written by P.F. Williams and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Author : Ricardo d'Agostino
Publisher : Springer Science & Business Media
ISBN 13 : 9780792348597
Total Pages : 554 pages
Book Rating : 4.3/5 (485 download)
Download or read book Plasma Processing of Polymers written by Ricardo d'Agostino and published by Springer Science & Business Media. This book was released on 1997-11-30 with total page 554 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the NATO Advanced Study Institute on Plasma Treatments and Deposition of Polymers, Acquafredda di Maratea, Italy, May 19-June 2, 1996
Author : Pascal Chabert
Publisher : Cambridge University Press
ISBN 13 : 9780521763004
Total Pages : 392 pages
Book Rating : 4.7/5 (63 download)
Download or read book Physics of Radio-Frequency Plasmas written by Pascal Chabert and published by Cambridge University Press. This book was released on 2011-02-24 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Author : Marlann Marinho Patterson
Publisher :
ISBN 13 :
Total Pages : 130 pages
Book Rating : 4.:/5 (89 download)
Download or read book Control and Measurement of Ion Bombardment Energies at Substrates Biased with Tailored Voltage Waveforms written by Marlann Marinho Patterson and published by . This book was released on 2005 with total page 130 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Thorsten Lill
Publisher : John Wiley & Sons
ISBN 13 : 3527824200
Total Pages : 304 pages
Book Rating : 4.5/5 (278 download)
Download or read book Atomic Layer Processing written by Thorsten Lill and published by John Wiley & Sons. This book was released on 2021-04-21 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: Learn about fundamental and advanced topics in etching with this practical guide Atomic Layer Processing: Semiconductor Dry Etching Technology delivers a hands-on, one-stop resource for understanding etching technologies and their applications. The distinguished scientist, executive, and author offers readers in-depth information on the various etching technologies used in the semiconductor industry, including thermal, isotropic atomic layer, radical, ion-assisted, and reactive ion etching. The book begins with a brief history of etching technology and the role it has played in the information technology revolution, along with a collection of commonly used terminology in the industry. It then moves on to discuss a variety of different etching techniques, before concluding with discussions of the fundamentals of etching reactor design and newly emerging topics in the field such as the role played by artificial intelligence in the technology. Atomic Layer Processing includes a wide variety of other topics as well, all of which contribute to the author's goal of providing the reader with an atomic-level understanding of dry etching technology sufficient to develop specific solutions for existing and emerging semiconductor technologies. Readers will benefit from: A complete discussion of the fundamentals of how to remove atoms from various surfaces An examination of emerging etching technologies, including laser and electron beam assisted etching A treatment of process control in etching technology and the role played by artificial intelligence Analyses of a wide variety of etching methods, including thermal or vapor etching, isotropic atomic layer etching, radical etching, directional atomic layer etching, and more Perfect for materials scientists, semiconductor physicists, and surface chemists, Atomic Layer Processing will also earn a place in the libraries of engineering scientists in industry and academia, as well as anyone involved with the manufacture of semiconductor technology. The author's close involvement with corporate research & development and academic research allows the book to offer a uniquely multifaceted approach to the subject.
Author : R. Mohan Sankaran
Publisher : CRC Press
ISBN 13 : 1439866775
Total Pages : 417 pages
Book Rating : 4.4/5 (398 download)
Download or read book Plasma Processing of Nanomaterials written by R. Mohan Sankaran and published by CRC Press. This book was released on 2017-12-19 with total page 417 pages. Available in PDF, EPUB and Kindle. Book excerpt: We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processing vital nanoscale materials. More and more industries are increasingly dependent on plasma technology to develop integrated small-scale devices, but physical limits to growth, and other challenges, threaten progress. Plasma Processing of Nanomaterials is an in-depth guide to the art and science of plasma-based chemical processes used to synthesize, process, and modify various classes of nanoscale materials such as nanoparticles, carbon nanotubes, and semiconductor nanowires. Plasma technology enables a wide range of academic and industrial applications in fields including electronics, textiles, automotives, aerospace, and biomedical. A prime example is the semiconductor industry, in which engineers revolutionized microelectronics by using plasmas to deposit and etch thin films and fabricate integrated circuits. An overview of progress and future potential in plasma processing, this reference illustrates key experimental and theoretical aspects by presenting practical examples of: Nanoscale etching/deposition of thin films Catalytic growth of carbon nanotubes and semiconductor nanowires Silicon nanoparticle synthesis Functionalization of carbon nanotubes Self-organized nanostructures Significant advances are expected in nanoelectronics, photovoltaics, and other emerging fields as plasma technology is further optimized to improve the implementation of nanomaterials with well-defined size, shape, and composition. Moving away from the usual focus on wet techniques embraced in chemistry and physics, the author sheds light on pivotal breakthroughs being made by the smaller plasma community. Written for a diverse audience working in fields ranging from nanoelectronics and energy sensors to catalysis and nanomedicine, this resource will help readers improve development and application of nanomaterials in their own work. About the Author: R. Mohan Sankaran received the American Vacuum Society’s 2011 Peter Mark Memorial Award for his outstanding contributions to tandem plasma synthesis.
Author : Philip Garrou
Publisher : John Wiley & Sons
ISBN 13 : 352762306X
Total Pages : 798 pages
Book Rating : 4.5/5 (276 download)
Download or read book Handbook of 3D Integration, Volume 1 written by Philip Garrou and published by John Wiley & Sons. This book was released on 2011-09-22 with total page 798 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first encompassing treatise of this new, but very important field puts the known physical limitations for classic 2D electronics into perspective with the requirements for further electronics developments and market necessities. This two-volume handbook presents 3D solutions to the feature density problem, addressing all important issues, such as wafer processing, die bonding, packaging technology, and thermal aspects. It begins with an introductory part, which defines necessary goals, existing issues and relates 3D integration to the semiconductor roadmap of the industry. Before going on to cover processing technology and 3D structure fabrication strategies in detail. This is followed by fields of application and a look at the future of 3D integration. The contributions come from key players in the field, from both academia and industry, including such companies as Lincoln Labs, Fraunhofer, RPI, ASET, IMEC, CEA-LETI, IBM, and Renesas.
Author : Karen K. Gleason
Publisher : John Wiley & Sons
ISBN 13 : 3527337997
Total Pages : 484 pages
Book Rating : 4.5/5 (273 download)
Download or read book CVD Polymers written by Karen K. Gleason and published by John Wiley & Sons. This book was released on 2015-06-08 with total page 484 pages. Available in PDF, EPUB and Kindle. Book excerpt: The method of CVD (chemical vapor deposition) is a versatile technique to fabricate high-quality thin films and structured surfaces in the nanometer regime from the vapor phase. Already widely used for the deposition of inorganic materials in the semiconductor industry, CVD has become the method of choice in many applications to process polymers as well. This highly scalable technique allows for synthesizing high-purity, defect-free films and for systematically tuning their chemical, mechanical and physical properties. In addition, vapor phase processing is critical for the deposition of insoluble materials including fluoropolymers, electrically conductive polymers, and highly crosslinked organic networks. Furthermore, CVD enables the coating of substrates which would otherwise dissolve or swell upon exposure to solvents. The scope of the book encompasses CVD polymerization processes which directly translate the chemical mechanisms of traditional polymer synthesis and organic synthesis in homogeneous liquids into heterogeneous processes for the modification of solid surfaces. The book is structured into four parts, complemented by an introductory overview of the diverse process strategies for CVD of polymeric materials. The first part on the fundamentals of CVD polymers is followed by a detailed coverage of the materials chemistry of CVD polymers, including the main synthesis mechanisms and the resultant classes of materials. The third part focuses on the applications of these materials such as membrane modification and device fabrication. The final part discusses the potential for scale-up and commercialization of CVD polymers.
Author : Milton Ohring
Publisher : Academic Press
ISBN 13 : 9780125249904
Total Pages : 744 pages
Book Rating : 4.2/5 (499 download)
Download or read book The Materials Science of Thin Films written by Milton Ohring and published by Academic Press. This book was released on 1992 with total page 744 pages. Available in PDF, EPUB and Kindle. Book excerpt: Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.
Author :
Publisher : Newnes
ISBN 13 : 0080965334
Total Pages : 5485 pages
Book Rating : 4.0/5 (89 download)
Download or read book Comprehensive Materials Processing written by and published by Newnes. This book was released on 2014-04-07 with total page 5485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive Materials Processing, Thirteen Volume Set provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources
Author : B. D. Sartwell
Publisher : Elsevier
ISBN 13 : 1483274640
Total Pages : 665 pages
Book Rating : 4.4/5 (832 download)
Download or read book Surface & Coatings Technology written by B. D. Sartwell and published by Elsevier. This book was released on 2016-06-03 with total page 665 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface & Coatings Technology, Volumes 59–60 presents the proceedings of the Third International Conference on Plasma Surface Engineering, held in Garmisch-Partenkirchen, Germany, on October 26–29, 1992. This book discusses the widespread applications of plasma and particle beam assisted methods in surface and thin film technology. Volume 59 is organized into 11 parts encompassing 69 chapters while Volume 60 is comprised of eight parts encompassing 49 chapters. This compilation of papers begins with an overview of the kinetic modelling of low pressure high frequency discharges. This text then examines the effect of various deposition parameters on the growth of chamber wall deposits. Other chapters consider the physiochemical behavior of ceramic materials for space applications. This book discusses as well the economic aspects of the application of plasma surface technologies. The reader is also introduced to the environmental aspects of physical vapor deposition coating technology. This book is a valuable resource for plasma surface engineers, technologists, and researchers.
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Author :
Publisher : Allied Publishers
ISBN 13 : 9788170239987
Total Pages : 800 pages
Book Rating : 4.2/5 (399 download)
Download or read book Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices : (December 14 - 18, 1999) [New Delhi]. 2(2000) written by and published by Allied Publishers. This book was released on 2000 with total page 800 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 810 pages
Book Rating : 4.:/5 (7 download)
Download or read book Journal of Research of the National Institute of Standards and Technology written by and published by . This book was released on 2002 with total page 810 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reports NIST research and development in the physical and engineering sciences in which the Institute is active. These include physics, chemistry, engineering, mathematics, and computer sciences. Emphasis on measurement methodology and the basic technology underlying standardization.
Author : Y. Pauleau
Publisher : Springer Science & Business Media
ISBN 13 : 9780792343806
Total Pages : 694 pages
Book Rating : 4.3/5 (438 download)
Download or read book Protective Coatings and Thin Films written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 1996-12-31 with total page 694 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume entitled "Protective Coatings and Thin Films : Synthesis, Characterization and Applications" contains the Proceedings of the NATO Advanced Research Workshop (ARW) held in Alvor, Portugal from May 30 to June 5, 1996. This NATO-ARW was an expert meeting on the surface protection and modification of solid materials subjected to interactions with the environment. The meeting attracted 10 key speakers, 40 contributing speakers and 3 observers from various countries. The existing knowledge and current status of the science and technology related to protective coatings and thin films were assessed through a series of oral presentations, key notes (titles underlined in the volume content) and contributed papers distributed over various sessions dealing with: (a) plasma-assisted physical and chemical vapor deposition processes to enhance wear and corrosion protection of materials, (b) low friction coatings operating in hostile environment (vacuum, space, extreme temperatures, . . . ), (c) polymer films for protection against mechanical damage and chemical attack, (d) characterization of the structure of films and correlations with mechanical properties, (e) wear and corrosion resistant thermal spray coatings, (f) functional gradient ceramic/metallic coatings produced by high energy laser beam and energetic deposition processes for high temperature applications, (g) protective coatings for optical systems, and (h) ion beam assisted deposition of coatings for protection of materials against aqueous corrosion.
Author : I. Shiota
Publisher : Elsevier
ISBN 13 : 0080532098
Total Pages : 803 pages
Book Rating : 4.0/5 (85 download)
Download or read book Functionally Graded Materials 1996 written by I. Shiota and published by Elsevier. This book was released on 1997-09-02 with total page 803 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since a formulated concept of functionally graded materials (FGMs) was proposed in 1984 as a means of preparing thermal barrier materials, a coordinated research has been developed since 1986. The 125 papers presented here present state of the art research results and developments on FGM from the past decade.A wide spectra of topics are covered including design and modeling, fracture analysis, powder metallurgical processes, deposition and spray processes, reaction forming processes, novel processes, material evaluation for structural applications, organic and intelligent materials. Three reviews associated with national research programs on FGMs promoted in Japan and Germany, and the historical perspective of FGM research in Europe are presented as well.The resulting work is recommended to researchers, engineers and graduate school students in the fields of materials science and engineering, mechanical and medical engineering.
