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Author : Nelson Tam
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (216 download)
Download or read book Characterization of Electron-beam-exposed Negative Resist written by Nelson Tam and published by . This book was released on 1988 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Nelson Ngai-Sang Tam
Publisher :
ISBN 13 :
Total Pages : 16 pages
Book Rating : 4.:/5 (439 download)
Download or read book Characterization of Electron-beam-exposed Negative Resists written by Nelson Ngai-Sang Tam and published by . This book was released on 1988 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Randall C. Pyles
Publisher :
ISBN 13 :
Total Pages : 232 pages
Book Rating : 4.:/5 (269 download)
Download or read book A Procedure to Characterize Electron-beam Resist Using a Scanning Electron Microscope and Study of Process Optimization of an Electron Beam Imaging System Using Experimental Design Methods written by Randall C. Pyles and published by . This book was released on 1992 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: "A procedure is established which will enable the study of contrast and sensitivity characteristics of electron-beam resist materials. The imaging system includes an electron beam-sensitive resist coating on an oxidized silicon substrate exposed with a scanning electron microscope (SEM) and developed in a suitable solvent. The results correlate with published data. A chemically amplified electron-beam resist imaging system is studied using a three level, three factor Box-Behnken design. The effects of postbake temperature, postbake time, and development time on contrast and sensitivity are presented."--Abstract.
Author : Michelle Brown
Publisher :
ISBN 13 :
Total Pages : 128 pages
Book Rating : 4.:/5 (89 download)
Download or read book Study of Resist Chemistry with Electron Beam Exposure written by Michelle Brown and published by . This book was released on 1996 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ankur Agrawal
Publisher :
ISBN 13 :
Total Pages : 534 pages
Book Rating : 4.:/5 (489 download)
Download or read book Development and Characterization of Advanced Electron Beam Resists written by Ankur Agrawal and published by . This book was released on 2001 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Palmyra Evangeline Catravas
Publisher :
ISBN 13 :
Total Pages : 286 pages
Book Rating : 4.:/5 (391 download)
Download or read book Non-perturbative Electron Beam Characterization with a Microwiggler written by Palmyra Evangeline Catravas and published by . This book was released on 1997 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : S.J. Spells
Publisher : Springer Science & Business Media
ISBN 13 : 9401112622
Total Pages : 380 pages
Book Rating : 4.4/5 (11 download)
Download or read book Characterization of Solid Polymers written by S.J. Spells and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt: The last decade or so has seen a dramatic increase in the amount of detailed structural information available from a range of experimental techniques. Exciting new techniques such as atomic force microscopy have become widely available, while the potential of established methods like X-ray diffraction and electron microscopy has been greatly enhanced by powerful new sources and analytical methods. Progress in computing has also had a widespread impact: in areas such as neutron scattering, large data sets can now be manipulated more readily. The software supplied with commercial instruments generally provides more sophisti cated analytical facilities, while time-resolved X-ray studies rely on rapid data handling capabilities. The polymer scientist is faced with an expanding array of experimental tools for addressing both fundamental science and industrial problems. This work reviews some recent developments in structural techniques, with the aim of presenting the current 'state of the art' in a selection of areas.
Author : R. J. Rieder
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (346 download)
Download or read book Characterization of the Energy Deposition Produced by the Primary Electron Beam on the EXCEDE III Program written by R. J. Rieder and published by . This book was released on 1993 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Okan Ersoy
Publisher :
ISBN 13 :
Total Pages : 12 pages
Book Rating : 4.:/5 (318 download)
Download or read book A Study of Electron Beam Exposure of Positive Resists written by Okan Ersoy and published by . This book was released on 1975 with total page 12 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Maria Stepanova
Publisher : Springer Science & Business Media
ISBN 13 : 3709104246
Total Pages : 344 pages
Book Rating : 4.7/5 (91 download)
Download or read book Nanofabrication written by Maria Stepanova and published by Springer Science & Business Media. This book was released on 2011-11-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Author : Joseph Grant
Publisher :
ISBN 13 :
Total Pages : 122 pages
Book Rating : 4.:/5 (226 download)
Download or read book Characterization of E-Beam Resists for the Fabrication of Micro-optic Devices written by Joseph Grant and published by . This book was released on 1998 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Rahul Sud
Publisher :
ISBN 13 :
Total Pages : 316 pages
Book Rating : 4.:/5 (35 download)
Download or read book X-ray and E-beam Resists Models and Performance Evaluation, Spear Synchrotron Radiation Exposures, and a Thin Mask Microtome Technique for Resist Characterization written by Rahul Sud and published by . This book was released on 1977 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Wendy Wong
Publisher :
ISBN 13 :
Total Pages : 252 pages
Book Rating : 4.:/5 (216 download)
Download or read book Positive Resist Exposure Characterization written by Wendy Wong and published by . This book was released on 1983 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : M. H. Loretto
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (984 download)
Download or read book Electron Beam Analysis of Materials written by M. H. Loretto and published by . This book was released on 1984 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Norman G. Einspruch
Publisher : Academic Press
ISBN 13 : 1483217736
Total Pages : 614 pages
Book Rating : 4.4/5 (832 download)
Download or read book Materials and Process Characterization written by Norman G. Einspruch and published by Academic Press. This book was released on 2014-12-01 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: VLSI Electronics: Microstructure Science, Volume 6: Materials and Process Characterization addresses the problem of how to apply a broad range of sophisticated materials characterization tools to materials and processes used for development and production of very large scale integration (VLSI) electronics. This book discusses the various characterization techniques, such as Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic approach to the technologies of VLSI electronic materials and device manufacture are also considered. This volume is beneficial to materials scientists, chemists, and engineers who are commissioned with the responsibility of developing and implementing the production of materials and devices to support the VLSI era.
Author : M. Aindow
Publisher : CRC Press
ISBN 13 : 1482289512
Total Pages : 548 pages
Book Rating : 4.4/5 (822 download)
Download or read book Electron Microscopy and Analysis 2001 written by M. Aindow and published by CRC Press. This book was released on 2001-12-01 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron microscopy is now a mainstay characterization tool for solid state physicists and chemists as well as materials scientists. Electron Microscopy and Analysis 2001 presents a useful snapshot of the latest developments in instrumentation, analysis techniques, and applications of electron and scanning probe microscopies. The book is ideal for
Author : Christopher Frank Codella
Publisher :
ISBN 13 :
Total Pages : 342 pages
Book Rating : 4.E/5 ( download)
Download or read book Characterization and Numerical Analysis of the Modulation Doped Heterojunction MESFET written by Christopher Frank Codella and published by . This book was released on 1984 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt:
