Analysis of Metal/insulator/semiconductor Structure Fabricated by Remote Plasma-enhanced Chemical Vapor Deposition System

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Total Pages : 344 pages
Book Rating : 4.:/5 (18 download)

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Book Synopsis Analysis of Metal/insulator/semiconductor Structure Fabricated by Remote Plasma-enhanced Chemical Vapor Deposition System by : Zhe Zhang

Download or read book Analysis of Metal/insulator/semiconductor Structure Fabricated by Remote Plasma-enhanced Chemical Vapor Deposition System written by Zhe Zhang and published by . This book was released on 1991 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Masters Theses in the Pure and Applied Sciences

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Publisher : Springer Science & Business Media
ISBN 13 : 1461524539
Total Pages : 391 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Masters Theses in the Pure and Applied Sciences by : Wade H. Shafer

Download or read book Masters Theses in the Pure and Applied Sciences written by Wade H. Shafer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 391 pages. Available in PDF, EPUB and Kindle. Book excerpt: Masters Theses in the Pure and Applied Sciences was first conceived, published, and disseminated by the Center for Information and Numerical Data Analysis and Synthesis (CINDAS)* at Purdue University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dis semination phases of the activity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the though that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all concerned if the printing and distribution of the volumes were handled by an international publishing house to assure improved service and broader dissemi nation. Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Corporation of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 37 (thesis year 1992) a total of 12,549 thesis titles from 25 Canadian and 153 United States universities. We are sure that this broader base for these titles reported will greatly enhance the value of this impor tant annual reference work. While Volume 37 reports theses submitted in 1992, on occasion, certain uni versities do report theses submitted in previous years but not reported at the time.

Metal-insulator-semiconductor Structures and AlGaN/GaN Hetero-junctions Based on Cubic Group-III Nitrides

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Book Synopsis Metal-insulator-semiconductor Structures and AlGaN/GaN Hetero-junctions Based on Cubic Group-III Nitrides by : Alexander Zado

Download or read book Metal-insulator-semiconductor Structures and AlGaN/GaN Hetero-junctions Based on Cubic Group-III Nitrides written by Alexander Zado and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Masters Theses in the Pure and Applied Sciences

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Publisher : Springer Science & Business Media
ISBN 13 : 9780306447112
Total Pages : 410 pages
Book Rating : 4.4/5 (471 download)

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Book Synopsis Masters Theses in the Pure and Applied Sciences by : W. H. Shafer

Download or read book Masters Theses in the Pure and Applied Sciences written by W. H. Shafer and published by Springer Science & Business Media. This book was released on 1994 with total page 410 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume 37 (thesis year 1992) reports a total of 12,549 thesis titles from 25 Canadian and 153 US universities (theses submitted in previous years but only now reported are indicated by the thesis year shown in parenthesis). The organization, like that of past years, consists of thesis titles arrange

Metal-insulator-semiconductor Structures and AlGaN/GaN Hetero-junctions Based on Cubic Group-III Nitrides

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Total Pages : 0 pages
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Book Synopsis Metal-insulator-semiconductor Structures and AlGaN/GaN Hetero-junctions Based on Cubic Group-III Nitrides by : Alexander Zado

Download or read book Metal-insulator-semiconductor Structures and AlGaN/GaN Hetero-junctions Based on Cubic Group-III Nitrides written by Alexander Zado and published by . This book was released on 2015 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Cubic AlGaN/GaN hetero-junction field effect transistor structures were fabricated by plasma assisted molecular beam epitaxy on 3C-SiC (001) substrates. The structural quality of the layers was controlled in-situ by reflection high energy electron diffraction and ex-situ by high resolution x-ray diffraction, atomic force microscopy and time of flight secondary ion mass spectroscopy. Metal-Insulator-Semiconductor structures were realized using plasma assisted molecular beam epitaxy and plasma enhanced chemical vapour deposition. The characterization of the structures was performed using electrical techniques like capacitance-voltage-, current-voltage-, Hall effect-measurements and admittance spectroscopy.To improve the gate characteristics an insulating layer is required. Insulating SiO2 and Si3N4 layers were produced using plasma enhanced chemical vapour deposition. An in-situ method of deposition of Si3N4 directly inside the molecular beam epitaxy chamber is discussed. The metal-insulator-hetero-junction-semiconductor-structures were characterized by capacitance-voltage- and admittance-spectroscopy-measurements.Several techniques were analysed to electrically isolate the conductive substrate from the active transistor device. For the free standing high conductive 3C-SiC substrate to drop the conductivity of the cubic GaN buffer layer carbon doping was used. Due to a large conduction band offset between cubic GaN and cubic AlN asymmetric multi quantum well structures were grown to prohibit current flow towards the substrate. Using several assembly techniques transistor devices were fabricated. A cubic GaN field effect transistor operation is presented. Metal-insulator-semiconductor-hetero-junction field effect transistors with normally-on and normally-off characteristic were realized. ; eng

Atomic Layer Deposition for Semiconductors

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Publisher : Springer Science & Business Media
ISBN 13 : 146148054X
Total Pages : 266 pages
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Book Synopsis Atomic Layer Deposition for Semiconductors by : Cheol Seong Hwang

Download or read book Atomic Layer Deposition for Semiconductors written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Scientific and Technical Aerospace Reports

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ISBN 13 :
Total Pages : 892 pages
Book Rating : 4.:/5 (31 download)

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Physics Briefs

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ISBN 13 :
Total Pages : 1058 pages
Book Rating : 4.3/5 (91 download)

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Electrical & Electronics Abstracts

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ISBN 13 :
Total Pages : 2240 pages
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Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1997 with total page 2240 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Chemical Vapor Deposition

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Publisher : BoD – Books on Demand
ISBN 13 : 9535125729
Total Pages : 292 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Chemical Vapor Deposition by : S Neralla

Download or read book Chemical Vapor Deposition written by S Neralla and published by BoD – Books on Demand. This book was released on 2016-08-31 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have emerged in the past, and thus the scope of this book goes beyond providing fundamentals of the CVD process. Some of the chapters included highlight current limitations in the CVD methods and offer alternatives in developing coatings through overcoming these limitations.

Ceramic Abstracts

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Total Pages : 250 pages
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Download or read book Ceramic Abstracts written by and published by . This book was released on 1998 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Amorphous Insulating Thin Films: Volume 284

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ISBN 13 :
Total Pages : 670 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Amorphous Insulating Thin Films: Volume 284 by : Jerzy Kanicki

Download or read book Amorphous Insulating Thin Films: Volume 284 written by Jerzy Kanicki and published by . This book was released on 1993-09-27 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Amorphous Insulating Thin Films

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Total Pages : 660 pages
Book Rating : 4.3/5 (91 download)

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Download or read book Amorphous Insulating Thin Films written by and published by . This book was released on 1993 with total page 660 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Dissertation Abstracts International

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Total Pages : 846 pages
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Proceedings of the 15th Annual Conference on the Physics and Chemistry of Semiconductor Interfaces

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ISBN 13 :
Total Pages : 380 pages
Book Rating : 4.:/5 (318 download)

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Chemical Abstracts

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ISBN 13 :
Total Pages : 2692 pages
Book Rating : 4.3/5 (91 download)

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Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2692 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Journal of the Physical Society of Japan

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ISBN 13 :
Total Pages : 1058 pages
Book Rating : 4.3/5 (243 download)

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Download or read book Journal of the Physical Society of Japan written by and published by . This book was released on 2003 with total page 1058 pages. Available in PDF, EPUB and Kindle. Book excerpt: