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Aluminum Nitride Piezoelectric Thin Films Reactively Deposited In Closed Field Unbalanced Magnetron Sputtering For Elevated Temperature Smart Tribological Applications
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Book Synopsis Reactive Sputter Deposition by : Diederik Depla
Download or read book Reactive Sputter Deposition written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.
Download or read book Labs on Chip written by Eugenio Iannone and published by CRC Press. This book was released on 2018-09-03 with total page 1178 pages. Available in PDF, EPUB and Kindle. Book excerpt: Labs on Chip: Principles, Design and Technology provides a complete reference for the complex field of labs on chip in biotechnology. Merging three main areas— fluid dynamics, monolithic micro- and nanotechnology, and out-of-equilibrium biochemistry—this text integrates coverage of technology issues with strong theoretical explanations of design techniques. Analyzing each subject from basic principles to relevant applications, this book: Describes the biochemical elements required to work on labs on chip Discusses fabrication, microfluidic, and electronic and optical detection techniques Addresses planar technologies, polymer microfabrication, and process scalability to huge volumes Presents a global view of current lab-on-chip research and development Devotes an entire chapter to labs on chip for genetics Summarizing in one source the different technical competencies required, Labs on Chip: Principles, Design and Technology offers valuable guidance for the lab-on-chip design decision-making process, while exploring essential elements of labs on chip useful both to the professional who wants to approach a new field and to the specialist who wants to gain a broader perspective.
Book Synopsis Sputtered Thin Films by : Frederick Madaraka Mwema
Download or read book Sputtered Thin Films written by Frederick Madaraka Mwema and published by CRC Press. This book was released on 2021-04-12 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sputtered Thin Films: Theory and Fractal Descriptions provides an overview of sputtered thin films and demystifies the concept of fractal theory in analysis of sputtered thin films. It simplifies the use of fractal tools in studying the growth and properties of thin films during sputtering processes. Part 1 of the book describes the basics and theory of thin film sputtering and fractals. Part 2 consists of examples illustrating specific descriptions of thin films using fractal methods. Discusses thin film growth, structure, and properties Covers fractal theory Presents methods of fractal measurements Offers typical examples of fractal descriptions of thin films grown via magnetron sputtering processes Describes application of fractal theory in prediction of thin film growth and properties This reference book is aimed at engineers and scientists working across a variety of disciplines including materials science and metallurgy as well as mechanical, manufacturing, electrical, and biomedical engineering.
Book Synopsis Thin Film Analysis by X-Ray Scattering by : Mario Birkholz
Download or read book Thin Film Analysis by X-Ray Scattering written by Mario Birkholz and published by John Wiley & Sons. This book was released on 2006-05-12 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films. Very much an interdisciplinary field, chemists, biochemists, materials scientists, physicists and engineers all have a common interest in thin films and their manifold uses and applications. Grain size, porosity, density, preferred orientation and other properties are important to know: whether thin films fulfill their intended function depends crucially on their structure and morphology once a chemical composition has been chosen. Although their backgrounds differ greatly, all the involved specialists a profound understanding of how structural properties may be determined in order to perform their respective tasks in search of new and modern materials, coatings and functions. The author undertakes this in-depth introduction to the field of thin film X-ray characterization in a clear and precise manner.
Book Synopsis Nano-Antimicrobials by : Nicola Cioffi
Download or read book Nano-Antimicrobials written by Nicola Cioffi and published by Springer Science & Business Media. This book was released on 2012-02-26 with total page 563 pages. Available in PDF, EPUB and Kindle. Book excerpt: There is a high demand for antimicrobials for the treatment of new and emerging microbial diseases. In particular, microbes developing multidrug resistance have created a pressing need to search for a new generation of antimicrobial agents, which are effective, safe and can be used for the cure of multidrug-resistant microbial infections. Nano-antimicrobials offer effective solutions for these challenges; the details of these new technologies are presented here. The book includes chapters by an international team of experts. Chemical, physical, electrochemical, photochemical and mechanical methods of synthesis are covered. Moreover, biological synthesis using microbes, an option that is both eco-friendly and economically viable, is presented. The antimicrobial potential of different nanoparticles is also covered, bioactivity mechanisms are elaborated on, and several applications are reviewed in separate sections. Lastly, the toxicology of nano-antimicrobials is briefly assessed.
Book Synopsis Ionized Physical Vapor Deposition by :
Download or read book Ionized Physical Vapor Deposition written by and published by Academic Press. This book was released on 1999-10-14 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume provides the first comprehensive look at a pivotal new technology in integrated circuit fabrication. For some time researchers have sought alternate processes for interconnecting the millions of transistors on each chip because conventional physical vapor deposition can no longer meet the specifications of today's complex integrated circuits. Out of this research, ionized physical vapor deposition has emerged as a premier technology for the deposition of thin metal films that form the dense interconnect wiring on state-of-the-art microprocessors and memory chips.For the first time, the most recent developments in thin film deposition using ionized physical vapor deposition (I-PVD) are presented in a single coherent source. Readers will find detailed descriptions of relevant plasma source technology, specific deposition systems, and process recipes. The tools and processes covered include DC hollow cathode magnetrons, RF inductively coupled plasmas, and microwave plasmas that are used for depositing technologically important materials such as copper, tantalum, titanium, TiN, and aluminum. In addition, this volume describes the important physical processes that occur in I-PVD in a simple and concise way. The physical descriptions are followed by experimentally-verified numerical models that provide in-depth insight into the design and operation I-PVD tools.Practicing process engineers, research and development scientists, and students will find that this book's integration of tool design, process development, and fundamental physical models make it an indispensable reference.Key Features:The first comprehensive volume on ionized physical vapor depositionCombines tool design, process development, and fundamental physical understanding to form a complete picture of I-PVDEmphasizes practical applications in the area of IC fabrication and interconnect technologyServes as a guide to select the most appropriate technology for any deposition application*This single source saves time and effort by including comprehensive information at one's finger tips*The integration of tool design, process development, and fundamental physics allows the reader to quickly understand all of the issues important to I-PVD*The numerous practical applications assist the working engineer to select and refine thin film processes
Book Synopsis Proceedings of International Conference on Advances in Tribology and Engineering Systems by : Himanshu C. Patel
Download or read book Proceedings of International Conference on Advances in Tribology and Engineering Systems written by Himanshu C. Patel and published by Springer Science & Business Media. This book was released on 2013-10-17 with total page 490 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains advanced-level research material in the area of lubrication theory and related aspects, presented by eminent researchers during the International Conference on Advances in Tribology and Engineering Systems (ICATES 2013) held at Gujarat Technological University, Ahmedabad, India during October 15–17, 2013. The material in this book represents the advanced field of tribology and reflects the work of many eminent researchers from both India and abroad. The treatment of the presentations is the result of the contributions of several professionals working in the industry and academia. This book will be useful for students, researchers, academicians, and professionals working in the area of tribology, in general, and bearing performance characteristics, in particular, especially from the point-of-view of design. This book will also appeal to researchers and professionals working in fluid-film lubrication and other practical applications of tribology. A wide range of topics has been included despite space and time constraints. Basic concepts and fundamentals techniques have been emphasized upon, while also including highly specialized topics and methods (such as nanotribology, bio-nanotribology). Care has been taken to generate interest for a wide range of readers, considering the interdisciplinary nature of the subject.
Download or read book Cathodic Arcs written by André Anders and published by Springer Science & Business Media. This book was released on 2009-07-30 with total page 555 pages. Available in PDF, EPUB and Kindle. Book excerpt: Cathodic arcs are among the longest studied yet least understood objects in science. Plasma-generating, tiny spots appear on the cathode; they are highly dynamic and hard to control. With an approach emphasizing the fractal character of cathode spots, strongly fluctuating plasma properties are described such as the presence of multiply charged ions that move with supersonic velocity. Richly illustrated, the book also deals with practical issues, such as arc source construction, macroparticle removal, and the synthesis of dense, well adherent coatings. The book spans a bridge from plasma physics to coatings technology based on energetic condensation, appealing to scientists, practitioners and graduate students alike.
Book Synopsis Sensors for Automotive and Aerospace Applications by : Shantanu Bhattacharya
Download or read book Sensors for Automotive and Aerospace Applications written by Shantanu Bhattacharya and published by Springer. This book was released on 2018-11-01 with total page 273 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers the various sensors related to automotive and aerospace sectors, discussing their properties as well as how they are realized, calibrated and deployed. Written by experts in the field, it provides a ready reference to product developers, researchers and students working on sensor design and fabrication, and provides perspective on both current and future research.
Book Synopsis Fundamentals of Ceramic Powder Processing and Synthesis by : Terry A. Ring
Download or read book Fundamentals of Ceramic Powder Processing and Synthesis written by Terry A. Ring and published by Elsevier. This book was released on 1996-04-30 with total page 985 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ceramic powder synthesis and processing are two of the most important technologies in chemical engineering and the ceramics-related area of materials science. This book covers both the processing and the synthesis ofceramic powders in great depth and is indeed the only up-to-date, comprehensive source on the subject available.The application of modern scientific and engineering methods to the field of ceramic powder synthesis has resulted in much greater control of properties. Fundamentals of Ceramic Powder Processing and Synthesis presents examples of these modern methods as they apply to ceramic powders. The book is organized to describe the natural and synthetic raw materials that comprise contemporary ceramics. It covers the three reactant processes used in synthetic ceramic powder synthesis: solid, liquid, andgas.Ceramic powder processing, as a field of materials processing, is undergoing rapid expansion. The present volume is intended as a complete and useful source on this subject of great current interest. It provides comprehensive coverage from a strong chemistry and chemical engineering perspective and is especially applicable to materials scientists, chemical engineers, and applied chemists.Key Features* The most complete and updated reference source on the subject* Comprehensive coverage from a stron chemical engineering and chemistry perspective* Emphasis on both natural and synthetic raw materials in ceramic powder synthesis* Information on reaction kinetics* Superior, more comprehensive coverage than that in existing texts* Sample problems and exercises* Problems at the end of each chapter which supplement the material
Book Synopsis Innovative Design, Analysis and Development Practices in Aerospace and Automotive Engineering (I-DAD 2018) by : U. Chandrasekhar
Download or read book Innovative Design, Analysis and Development Practices in Aerospace and Automotive Engineering (I-DAD 2018) written by U. Chandrasekhar and published by Springer. This book was released on 2019-01-01 with total page 553 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers the best articles presented by researchers and industrial experts at the International Conference on “Innovative Design and Development Practices in Aerospace and Automotive Engineering (I-DAD 2018)”. The papers discuss new design concepts, analysis and manufacturing technologies, with an emphasis on achieving improved performance by downsizing; improving the weight-to-strength ratio, fuel efficiency, and operational capability at room and elevated temperatures; reducing wear and tear; and addressing NVH aspects, while balancing the challenges of Euro IV/Barat Stage IV emission norms and beyond, greenhouse effects, and recyclable materials. The innovative methods discussed here offer valuable reference material for educational and research organizations, as well as industry, encouraging them to pursue challenging projects of mutual interest.
Book Synopsis Smart Structures and Materials by : B. Culshaw
Download or read book Smart Structures and Materials written by B. Culshaw and published by Artech House Publishers. This book was released on 1996 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the enabling concepts that make up the so-called smart structure and presents a number of brief case studies to illustrate the applications of these concepts. It examines the domains of the individual technologies and defines the challenges faced by the integrator. The book is particularly effective for the potential system user who needs a good technical general background on the subject and is also useful for students and researchers in contributory technologies who want to better understand the context of their work. Consultants in civil and structural engineering will also find it of interest.
Book Synopsis Sensors and Microsystems by : Piero Malcovati
Download or read book Sensors and Microsystems written by Piero Malcovati and published by Springer Science & Business Media. This book was released on 2010-03-14 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and Microsystems contains a selection of papers presented at the 14th Italian conference on sensors and microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. The scientific values of the papers also offers an invaluable source to analyists intending to survey the Italian situation about sensors and microsystems. In an interdisciplinary approachm many aspects of the disciplines are covered, ranging from materials science, chemistry, applied physics, electronic engineering and biotechnologies. Further details of the conference and its full program at the website http://www.microelectronicsevents.com/AISEM
Book Synopsis High Power Impulse Magnetron Sputtering by : Daniel Lundin
Download or read book High Power Impulse Magnetron Sputtering written by Daniel Lundin and published by Elsevier. This book was released on 2019-08-30 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution.
Book Synopsis Transition Metal Carbides and Nitrides by : Louis Toth
Download or read book Transition Metal Carbides and Nitrides written by Louis Toth and published by Elsevier. This book was released on 2014-04-11 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: Refractory Materials, Volume 7: Transition Metal Carbides and Nitrides discusses the developments in transition metal carbide and nitride research. This volume is organized into nine chapters that emphasize the mechanical and superconducting properties of these compounds. The introductory chapters deal with the general properties, preparation techniques, characterization, crystal chemistry, phase relationships, and thermodynamics of transition metal carbides and nitrides. The following chapter highlights the mechanical properties of these compounds, such as elastic and plastic deformation, fracture, strengthening mechanisms, and hardness. The discussion then shifts to specific electrical and magnetic properties, including electrical resistivity, Hall coefficient, and magnetic susceptibility. A separate chapter is devoted to carbides and nitrides as superconductors. The concluding chapters explore certain theories that explain the mechanisms of band structure and bonding in carbides and nitrides. This volume is of great value to research workers in metallurgy, ceramics, physics, chemistry, and related fields, as well as to advanced students investigating problems concerning high temperature materials or interstitial compounds.
Book Synopsis Environmental Barrier Coatings by : Kang N. Lee
Download or read book Environmental Barrier Coatings written by Kang N. Lee and published by MDPI. This book was released on 2020-12-29 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: The global increase in air travel will require commercial vehicles to be more efficient than ever before. Advanced engine hot section materials are a key technology required to keep fuel consumption and emission to a minimum in next-generation gas turbines. Ceramic matrix composites (CMCs) are the most promising material to revolutionize gas turbine hot section materials technology because of their excellent high‐temperature properties. Rapid surface recession due to volatilization by water vapor is the Achilles heel of CMCs. Environmental barrier coatings (EBCs) is an enabling technology for CMCs, since it protects CMCs from water vapor. The first CMC component entered into service in 2016 in a commercial engine, and more CMC components are scheduled to follow within the next few years. One of the most difficult challenges to CMC components is EBC durability, because failure of EBC leads to a rapid reduction in CMC component life. Key contributors to EBC failure include recession, oxidation, degradation by calcium‐aluminum‐magnesium silicates (CMAS) deposits, thermal and thermo‐mechanical strains, particle erosion, and foreign object damage (FOD). Novel EBC chemistries, creative EBC designs, and robust processes are required to meet EBC durability challenges. Engine-relevant testing, characterization, and lifing methods need to be developed to improve EBC reliability. The aim of this Special Issue is to present recent advances in EBC technology to address these issues. In particular, topics of interest include but are not limited to the following: • Novel EBC chemistries and designs; • Processing including plasma spray, suspension plasma spray, solution precursor plasma spray, slurry process, PS-PVD, EB-PVD, and CVD; • Testing, characterization, and modeling; • Lifing.
Book Synopsis Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering by : Tuomas Hänninen
Download or read book Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering written by Tuomas Hänninen and published by Linköping University Electronic Press. This book was released on 2018-02-13 with total page 73 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. The films were characterized based on their chemical composition, chemical bonding structure, and mechanical properties to link the growth conditions to the film properties. Silicon nitride films were synthesized by reactive high power impulse magnetron sputtering (HiPIMS) from a Si target in Ar/N2 atmospheres, whereas silicon oxynitride films were grown by using nitrous oxide as the reactive gas. Silicon carbonitride was synthesized by two different methods. The first method was using acetylene (C2H2) in addition to N2 in a Si HiPIMS process and the other was co-sputtering of Si and C, using HiPIMS for Si and direct current magnetron sputtering (DCMS) for graphite targets in an Ar/N2 atmosphere. Langmuir probe measurements were carried out for the silicon nitride and silicon oxynitride processes and positive ion mass spectrometry for the silicon nitride processes to gain further understanding on the plasma conditions during film growth. The target current and voltage waveforms of the reactive HiPIMS processes were evaluated. The main deposition parameter affecting the nitrogen concentration of silicon nitride films was found to be the nitrogen content in the plasma. Films with nitrogen contents of 50 at.% were deposited at N2/Ar flow ratios of 0.3 and above. These films showed Si-N as the dominating component in Si 2p X-ray photoelectron spectroscopy (XPS) core level spectra and Si–Si bonds were absent. The substrate temperature and target power were found to affect the nitrogen content to a lower extent. The residual stress and hardness of the films were found to increase with the film nitrogen content. Another factors influencing the coating stress were the process pressure, negative substrate bias, substrate temperature, and HiPIMS pulse energy. Silicon nitride coatings with good adhesion and low levels of compressive residual stress were grown by using a pressure of 600 mPa, a substrate temperature below 200 °C, pulse energies below 2.5 Ws, and negative bias voltages up to 100 V. The elemental composition of silicon oxynitride films was shown to depend on the target power settings as well as on the nitrous oxide flow rate. Silicon oxide-like films were synthesized under poisoned target surface conditions, whereas films deposited in the transition regime between poisoned and metallic conditions showed higher nitrogen concentrations. The nitrogen content of the films deposited in the transition region was controlled by the applied gas flow rate. The applied target power did not affect the nitrogen concentration in the transition regime, while the oxygen content increased at decreasing target powers. The chemical composition of the films was shown to range from silicon-rich to effectively stoichiometric silicon oxynitrides, where no Si–Si contributions were found in the XPS Si 2p core level spectra. The film optical properties, namely the refractive index and extinction coefficient, were shown to depend on the film chemical bonding, with the stoichiometric films displaying optical properties falling between those of silicon oxide and silicon nitride. The properties of silicon carbonitride films were greatly influenced by the synthesis method. The films deposited by HiPIMS using acetylene as the carbon source showed silicon nitride-like mechanical properties, such as a hardness of ~ 20 GPa and compressive residual stresses of 1.7 – 1.9 GPa, up to film carbon contents of 30 at.%. At larger film carbon contents the films had increasingly amorphous carbon-like properties, such as densities below 2 g/cm3 and hardnesses below 10 GPa. The films with more than 30 at.% carbon also showed columnar morphologies in cross-sectional scanning electron microscopy, whereas films with lower carbon content showed dense morphologies. Due to the use of acetylene the carbonitride films contained hydrogen, up to ~ 15 at.%. The co-sputtered silicon carbonitride films showed a layered SiNx/CNx structure. The hardness of these films increased with the film carbon content, reaching a maximum of 18 GPa at a film carbon content of 12 at.%. Comparatively hard and low stressed films were grown by co-sputtering using a C target power of 1200 W for a C content around 12 at.%, a negative substrate bias less than 100 V, and a substrate temperature up to 340 °C.
