Aluminum Nitride Aln Film Based Acoustic Devices Material Synthesis And Device Fabrication

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Acoustic Waves

Author : Marco G. Beghi
Publisher : IntechOpen
ISBN 13 : 9789533075723
Total Pages : 668 pages
Book Rating : 4.0/5 (757 download)

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Book Synopsis Acoustic Waves by : Marco G. Beghi

Download or read book Acoustic Waves written by Marco G. Beghi and published by IntechOpen. This book was released on 2011-11-14 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt: The concept of acoustic wave is a pervasive one, which emerges in any type of medium, from solids to plasmas, at length and time scales ranging from sub-micrometric layers in microdevices to seismic waves in the Sun's interior. This book presents several aspects of the active research ongoing in this field. Theoretical efforts are leading to a deeper understanding of phenomena, also in complicated environments like the solar surface boundary. Acoustic waves are a flexible probe to investigate the properties of very different systems, from thin inorganic layers to ripening cheese to biological systems. Acoustic waves are also a tool to manipulate matter, from the delicate evaporation of biomolecules to be analysed, to the phase transitions induced by intense shock waves. And a whole class of widespread microdevices, including filters and sensors, is based on the behaviour of acoustic waves propagating in thin layers. The search for better performances is driving to new materials for these devices, and to more refined tools for their analysis.

Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication

Author : Jyoti Prakash Kar
Publisher :
ISBN 13 : 9789533075723
Total Pages : pages
Book Rating : 4.0/5 (757 download)

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Book Synopsis Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication by : Jyoti Prakash Kar

Download or read book Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication written by Jyoti Prakash Kar and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices

Author : Charlee Fansler
Publisher :
ISBN 13 : 9783836469722
Total Pages : 124 pages
Book Rating : 4.4/5 (697 download)

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Book Synopsis Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices by : Charlee Fansler

Download or read book Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices written by Charlee Fansler and published by . This book was released on 2008 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt: Aluminum Nitride (AlN) thin films can be used for many device applications; for example, Surface Acoustic Wave (SAW) devices, microelectromechanical systems (MEMS) applications, and packaging applications. In this work, AlN is the critical layer in the fabrication process. One challenge is reliable deposition over wafer size substrates. The method of interest for deposition is pulsed DC sputtering. The (002) plane is the desired plane for its piezoelectric properties. The surface roughness of the deposited AlN is low and adheres well to the substrate. An AlN layer was deposited on a UNCD/Si substrate. Al was deposited on the AlN layer to form the IDTs (interdigital transducers) for SAW devices. SAW devices were fabricated on quartz - ST substrate. To verify the SAW devices work, they were tested using a network analyzer. This book discusses these results and parameters for AlN film deposition, film properties and implications for devices. This book would be beneficial for professionals, scientists, engineers, and graduate students in science and engineering working in the areas of wide bandgap semi-conductors, nitrides and piezoelectric materials and various acoustic wave devices.

Acoustic Waves

Author : Marco G. Beghi
Publisher : BoD – Books on Demand
ISBN 13 : 9533075724
Total Pages : 670 pages
Book Rating : 4.5/5 (33 download)

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Book Synopsis Acoustic Waves by : Marco G. Beghi

Download or read book Acoustic Waves written by Marco G. Beghi and published by BoD – Books on Demand. This book was released on 2011-11-14 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: The concept of acoustic wave is a pervasive one, which emerges in any type of medium, from solids to plasmas, at length and time scales ranging from sub-micrometric layers in microdevices to seismic waves in the Sun's interior. This book presents several aspects of the active research ongoing in this field. Theoretical efforts are leading to a deeper understanding of phenomena, also in complicated environments like the solar surface boundary. Acoustic waves are a flexible probe to investigate the properties of very different systems, from thin inorganic layers to ripening cheese to biological systems. Acoustic waves are also a tool to manipulate matter, from the delicate evaporation of biomolecules to be analysed, to the phase transitions induced by intense shock waves. And a whole class of widespread microdevices, including filters and sensors, is based on the behaviour of acoustic waves propagating in thin layers. The search for better performances is driving to new materials for these devices, and to more refined tools for their analysis.

The Single Crystal Synthesis and Some Properties of Aluminum Nitride

Author : Cortland O. Dugger
Publisher :
ISBN 13 :
Total Pages : 76 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis The Single Crystal Synthesis and Some Properties of Aluminum Nitride by : Cortland O. Dugger

Download or read book The Single Crystal Synthesis and Some Properties of Aluminum Nitride written by Cortland O. Dugger and published by . This book was released on 1975 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: This final report, which covers the period from March 1972 to 30 June 1975, discusses some conditions for the synthesis of aluminum nitride (AIN) single crystals from solution. The solvent systems used are unique and novel. The average sized, water-white, bipyramidal AIN single crystals reproducibly grown from solution only were 1.1 mm long X 0.3 mm wide. The average sized, AIN single crystals grown from a combined solution-vapor reaction technique were 4mm long X 3 mm wide X 2mm thick. The in-house quantitative evaluation of the crystals was restricted to Laue patterns and emission spectrometry only. In Appendices A, B, C, and D, general discussions of solution growth, other AIN growth methods, some properties of AIN, and a very brief discussion of the newly emerging surface acoustic wave (SAW) device technology and why the use of AIN is considered a good electro-acoutic material in SAW devices are presented. (Author).

Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films

Author : Agne Zukauskaite
Publisher : Mdpi AG
ISBN 13 : 9783036563671
Total Pages : 0 pages
Book Rating : 4.5/5 (636 download)

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Book Synopsis Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films by : Agne Zukauskaite

Download or read book Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films written by Agne Zukauskaite and published by Mdpi AG. This book was released on 2023-06-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to overcome the limitations of AlN thin films in various piezoelectric applications while still enabling us to benefit from all of the advantages of the parent material system, such as a high temperature stability, CMOS compatibility, and good mechanical properties. Potential applications include RF filters (bulk acoustic wave (BAW) or surface acoustic wave (SAW) resonators), energy harvesting, sensing applications, and infra-red detectors. The recent progress in MOCVD- and MBE-grown AlScN has led to high-frequency and -power electronics, (high-electron-mobility transistors (HEMTs)). AlScN is the first wurtzite III-nitride where ferroelectric switching was observed, allowing for many new possible applications in semiconductor memories additionally, it enables the additional functionality of switching to applications where piezoelectric materials are already in use. This Special Issue was very successful in covering all of the main aspects of AlScN research, including its growth, the fundamental and application-relevant properties, and device fabrication and characterization. We can see that AlScN technology is mature enough to be utilized in wafer-level material development and complicated devices, but there is still much to discover in terms of deposition process control, anisotropy, and, in particular, ferroelectric behavior.

Fabrication of AlN Thin Film Substrates by 'Van Der Waals Lift-Off Technique'

Author :
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (946 download)

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Book Synopsis Fabrication of AlN Thin Film Substrates by 'Van Der Waals Lift-Off Technique' by :

Download or read book Fabrication of AlN Thin Film Substrates by 'Van Der Waals Lift-Off Technique' written by and published by . This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The goal of the project was to develop a method to fabricate a free aluminum nitride (AlN) thin films. This was developed by growing AlN thin films on top of layered tungsten sulfide (WS2) thin films which were deposited on a mechanically rigid substrate material such as Si and Al2O3, followed by mechanical separation of AlN thin films thorough the inter-layers of WS2. This project involved the design and construction of a cold wall metal organic chemical vapor deposition (MOCVD) for WS2 thin films, and the AlN thin film deposition by atomic layer growth (ALG) process. WS2 thin films were deposited using the reaction of H2S with W(CO)6. Microstructure for WS2 thin films is generally characterized by the formation of crystallites with basal planes parallel to the interface for the first few tens of nanometers, followed by the formation of crystallites with their basal planes non-parallel to the substrate. Process conditions to grow AlN thin films via ALG using dimethylamine-alane (DMEAA) and ammonia (NH3) were investigated. Close proximity of the lattice constant of WS2 to those of AlN lead to a potential application of this materials as a substrate for subsequent growth of AlN, however, the lift-off process was severely dependent on the microstructure of WS2 interlayers.

Synthesis and Characterization of Hydrogenated Aluminum Nitride (AlN:H) Thin Films for Photovoltaic Applications

Author : Sandro Renato Espinoza Monsalve
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (1 download)

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Book Synopsis Synthesis and Characterization of Hydrogenated Aluminum Nitride (AlN:H) Thin Films for Photovoltaic Applications by : Sandro Renato Espinoza Monsalve

Download or read book Synthesis and Characterization of Hydrogenated Aluminum Nitride (AlN:H) Thin Films for Photovoltaic Applications written by Sandro Renato Espinoza Monsalve and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: AlN:H ist ein vielversprechendes Material unter anderem für die Oberflächenpassivierung in Silizium-Sonnenzellen, um höhere Effizienzen zu erreichen. Oberflächenpassivierung ist die Verminderung der Oberflächenrekombinationsrate von Ladungsträgern (Elektronen und Löcher). Um ein besseres Verständnis des AlN:H als Passivierungsschicht zu erhalten, ist es entscheidend, zuvor die strukturellen und morphologischen Eigenschaften von verschiedenen dünnen AlN:H Filmen zu kennen. Diese Masterarbeit untersucht den Einfluss von Wasserstoff auf die strukturellen und morphologischen Eigenschaften von hydrierten dünnen Aluminiumnitrid Filmen (AlN:H) mit einer Dicke von ~ 100 nm. Um dieses Ziel zu erreichen, wurden Proben durch reaktives Sputtering auf p-Typ c-Si (CZ, 100, Boron) unter Zugabe von drei verschiedenen Wasserstoffflüssen und bei unterschiedlichen Substrattemperaturen während der Deposition erzeugt. Die Charakterisierung und Analyse der dünnen Filme wurde mittels EDX, FTIR und GDOES Messungen für die Analyse der chemischen Zusammensetzung und mittels XRD und XRR Messungen für die strukturelle und morphologische Analyse durchgeführt. In dieser Arbeit wurde schließlich herausgefunden, dass der Wasserstoffgehalt in den dünnen Filmen einige morphologische und strukturelle Änderungen in dünnen AlN Filmen erzeugt. Alle abgelegten dünnen Filme haben die sechseckige wurtzite Kristallstruktur. Die XRD Messungen zeigen eine Abnahme des (002) Peaks und eine Erhöhung der (100) und (110) Peaks, mit Zunahmen des H2-Flusses. Diese Variation impliziert, dass sich die c-Achse des Films von senkrecht (002) zu parallel (100, 110) bezüglich der Substratoberfläche ändert. Die XRR Messwerte offenbaren, dass eine Zunahme des H2-Flusses die Oberflächenrauheit reduziert und die Grenzflächenrauheit (Rauigkeit zwischen zwei Flächen) unwesentliche Änderungen aufweist. Mittels GDOES Messungen wurde die Gegenwart von Wasserstoff im kompletten Dünnschichtvolumen bestätigt.

Fabrication of Sputtered Aluminum Nitride on Sapphire for Application in UHF SAW Frequency Filters

Author : Edouard L. Paradis
Publisher :
ISBN 13 :
Total Pages : 58 pages
Book Rating : 4.:/5 (227 download)

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Book Synopsis Fabrication of Sputtered Aluminum Nitride on Sapphire for Application in UHF SAW Frequency Filters by : Edouard L. Paradis

Download or read book Fabrication of Sputtered Aluminum Nitride on Sapphire for Application in UHF SAW Frequency Filters written by Edouard L. Paradis and published by . This book was released on 1978 with total page 58 pages. Available in PDF, EPUB and Kindle. Book excerpt: Single crystal AlN films were grown by sputtering on single crystal (0001) oriented sapphire substrates. The substrate size was 25.4 x 9.0 x 2.0 mm. This size was chosen as a convenient size for the fabrication of UHF SAW frequency filters. The AlN was synthesized by reactive rf diode sputtering of a pure aluminum target in an ammonia atmosphere. Growth conditions were established which yielded clear, uniform, single crystal AlN films. Films were evaluated through microscopic examinations, interference spectrophotometric thickness measurement and electron channeling and X-ray diffractometer crystallographic analysis. Films ranged from 2 micrometers to 2.3 micrometers in thickness and were uniform to less than 0.1 micrometers across the long dimension of the substrate. Films were single crystal with the (0001) A1N direction parallel to the (0001) Al2O3 direction. Films were clear and smooth replicating the surface of the substrate. Twelve samples were delivered in accordance with the requirements of this program. Surface acoustic wave interdigital electrode transducers and delay lines were fabricated on samples identical to those delivered. Measurements of delay line performance at 201, 477, and 848 MHz were made to provide an estimate of the basic constants for surface acoustic wave excitation and wave propagation. Relatively low acoustic propagation loss was observed for all AlN on sapphire delay lines studied. (Author).

Optoelectronic Devices

Author : M Razeghi
Publisher : Elsevier
ISBN 13 : 9780080444260
Total Pages : 602 pages
Book Rating : 4.4/5 (442 download)

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Book Synopsis Optoelectronic Devices by : M Razeghi

Download or read book Optoelectronic Devices written by M Razeghi and published by Elsevier. This book was released on 2004 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: Tremendous progress has been made in the last few years in the growth, doping and processing technologies of the wide bandgap semiconductors. As a result, this class of materials now holds significant promis for semiconductor electronics in a broad range of applications. The principal driver for the current revival of interest in III-V Nitrides is their potential use in high power, high temperature, high frequency and optical devices resistant to radiation damage. This book provides a wide number of optoelectronic applications of III-V nitrides and covers the entire process from growth to devices and applications making it essential reading for those working in the semiconductors or microelectronics. Broad review of optoelectronic applications of III-V nitrides

Development and Applications of Aluminum Nitride Thin Film Technology

Author : C√≠cero Cunha
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (139 download)

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Book Synopsis Development and Applications of Aluminum Nitride Thin Film Technology by : C√≠cero Cunha

Download or read book Development and Applications of Aluminum Nitride Thin Film Technology written by C√≠cero Cunha and published by . This book was released on 2019 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Aluminum nitride (AlN) thin films have aroused the interest of researchers due to their unique physicochemical properties. However, further studies on these semiconductor materials are still necessary to establish the manufacturing of high-performance devices for applications in various areas, such as telecommunications, microelectronics, and biomedicine. This chapter introduces AlN thin film technology that has made a wide range of applications possible. First, the main physicochemical properties of AlN, its wurtzite crystalline structure, and the incorporation of oxygen during the thin film deposition process are presented. Furthermore, the growth of AlN films by different techniques and their applications as a buffer layer and sensing layer are summarized. Special attention was given to the sputtering deposition process and the use of sputtered AlN films in SAW sensors.

Current Research in Pulsed Laser Deposition

Author : Liviu Duta
Publisher : MDPI
ISBN 13 : 3036510443
Total Pages : 224 pages
Book Rating : 4.0/5 (365 download)

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Book Synopsis Current Research in Pulsed Laser Deposition by : Liviu Duta

Download or read book Current Research in Pulsed Laser Deposition written by Liviu Duta and published by MDPI. This book was released on 2021-08-30 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: Despite its limitation in terms of surface covered area, the PLD technique still gathers interest among researchers by offering endless possibilities for tuning thin film composition and enhancing their properties of interest due to: (i) the easiness of a stoichiometric transfer even for very complex target materials, (ii) high adherence of the deposited structures to the substrate, (iii) controlled degree of phase, crystallinity, and thickness of deposited coatings, (iv) versatility of the experimental set-up which allows for simultaneous ablation of multiple targets resulting in combinatorial maps or consecutive ablation of multiple targets producing multi-layered structures, and (v) adjustment of the number of laser pulses, resulting in either a spread of nanoparticles, islands of materials or a complete covering of a surface. Moreover, a variation of PLD, known as Matrix Assisted Pulsed Laser Evaporation, allows for deposition of organic materials, ranging from polymers to proteins and even living cells, otherwise difficult to transfer unaltered in the form of thin films by other techniques. Furthermore, the use of laser light as transfer agent ensures purity of films and pulse-to-pulse deposition allows for an unprecedented control of film thickness at the nm level. This Special Issue is a collection of state-of-the art research papers and reviews in which the topics of interest are devoted to thin film synthesis by PLD and MAPLE, for numerous research and industry field applications, such as bio-active coatings for medical implants and hard, protective coatings for cutting and drilling tools withstanding high friction and elevated temperatures, sensors, solar cells, lithography, magnetic devices, energy-storage and conversion devices, controlled drug delivery and in situ microstructuring for boosting of surface properties.

Integrated Electronics on Aluminum Nitride

Author : Reet Chaudhuri
Publisher :
ISBN 13 : 9783031172007
Total Pages : 0 pages
Book Rating : 4.1/5 (72 download)

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Book Synopsis Integrated Electronics on Aluminum Nitride by : Reet Chaudhuri

Download or read book Integrated Electronics on Aluminum Nitride written by Reet Chaudhuri and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis outlines the principles, device physics, and technological applications of electronics based on the ultra-wide bandgap semiconductor aluminum nitride. It discusses the basic principles of electrostatics and transport properties of polarization-induced two-dimensional electron and hole channels in semiconductor heterostructures based on aluminum nitride. It explains the discovery of high-density two-dimensional hole gases in undoped heterojunctions, and shows how these high conductivity n- and p-type channels are used for high performance nFETs and pFETs, along with wide bandgap RF, mm-wave, and CMOS applications. The thesis goes on to discuss how the several material advantages of aluminum nitride, such as its high thermal conductivity and piezoelectric coefficient, enable not just high performance of transistors, but also monolithic integration of passive elements such as high frequency filters, enabling a new form factor for integrated RF electronics.

1981 Ultrasonics Symposium

Author :
Publisher :
ISBN 13 :
Total Pages : 1050 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis 1981 Ultrasonics Symposium by :

Download or read book 1981 Ultrasonics Symposium written by and published by . This book was released on 1981 with total page 1050 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advanced Measurement and Test III

Author : Andy Wu
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038260975
Total Pages : 2702 pages
Book Rating : 4.0/5 (382 download)

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Book Synopsis Advanced Measurement and Test III by : Andy Wu

Download or read book Advanced Measurement and Test III written by Andy Wu and published by Trans Tech Publications Ltd. This book was released on 2013-07-31 with total page 2702 pages. Available in PDF, EPUB and Kindle. Book excerpt: The primary aim of the proceeding is the combined coverage of the electronic test of devices, boards and systemscovering the complete cycle from design verification, design-for-test, design-for-manufacturing, silicon debug, manufacturing test, system test, diagnosis, failure analysis and back to process and design improvement at the advanced level. Such an approach enables the engineer to take into account the essential mechanical properties of the material itself and special features of practical implementation, including manufacturing technology, experimental results, and design characteristics.

Piezoelectric Energy Harvesting

Author : Alper Erturk
Publisher : John Wiley & Sons
ISBN 13 : 1119991358
Total Pages : 377 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Piezoelectric Energy Harvesting by : Alper Erturk

Download or read book Piezoelectric Energy Harvesting written by Alper Erturk and published by John Wiley & Sons. This book was released on 2011-04-04 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.

Chemical and Biochemical Applications

Author : Pierre Laszlo
Publisher : Elsevier
ISBN 13 : 0323156347
Total Pages : 317 pages
Book Rating : 4.3/5 (231 download)

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Book Synopsis Chemical and Biochemical Applications by : Pierre Laszlo

Download or read book Chemical and Biochemical Applications written by Pierre Laszlo and published by Elsevier. This book was released on 2012-12-02 with total page 317 pages. Available in PDF, EPUB and Kindle. Book excerpt: NMR of Newly Accessible Nuclei, Volume 1: Chemical and Biochemical Applications is a 10-chapter text that explores the properties, advantages, developments, and chemical and biochemical applications of NMR technique. This book describes first the operation of an NMR spectrometer under its two aspects, namely, the instrumental and the computational aspects. The next chapters are devoted to some of the most important pulse sequences. The discussion then shifts to the various factors determining the position of the observed absorption and those responsible for the various relaxation processes. The last chapters deal with the specific applications of NMR, including in cation salvation, calcium-binding proteins, polyelectrolyte systems, halogens, and antibiotic ionophores. This book is of value to inorganic and analytical chemists, and biophysicists.